Tutorial "Ion Implantation and Irradiation" - SPIRIT
Tutorial "Ion Implantation and Irradiation" - SPIRIT
Tutorial "Ion Implantation and Irradiation" - SPIRIT
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TRIDYN Applications<br />
<strong>Ion</strong>-Beam Assisted Deposition<br />
of Boron Nitride<br />
0<br />
0 0.4 0.8 1.2 1.6 20<br />
Institute of <strong>Ion</strong> Beam Physics <strong>and</strong> Materials Research Prof. Wolfhard Möller<br />
N/B Bulk Ratio<br />
3.0<br />
2.4<br />
1.8<br />
1.2<br />
0.6<br />
500 eV N +<br />
N +<br />
Expt.<br />
w/o<br />
N/B Flux Ratio<br />
Ag<br />
TRIDYN<br />
with<br />
molecular<br />
reemissio<br />
n<br />
W. Möller <strong>and</strong> D. Bouchier, SCT 45(1991)73<br />
B
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