Tutorial "Ion Implantation and Irradiation" - SPIRIT

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Inverse Ostwald Ripening by LKMC Simulation

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Conventional OR Inverse OR

Institute of Ion Beam Physics and Materials Research Prof. Wolfhard Möller

Ion Implantation Demonstration Session - SPIRIT

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Inverse Ostwald Ripening by LKMC Simulation Start Conventional OR Inverse OR Institute of Ion Beam Physics and Materials Research Prof. Wolfhard Möller

Page 1 and 2: Tutorial "Ion Implantation and Irra
Page 3 and 4: TRIM BCA Computer Simulation Trajec
Page 5 and 6: TRIM BCA Computer Simulation Classi
Page 7 and 8: TRIM: Ion Trajectories Ions only Io
Page 9 and 10: TRIM Results: Doping Profiles Insti
Page 11 and 12: TRIDYN Dynamic Relaxation After ter
Page 13 and 14: TRIDYN Applications Implant Concent
Page 15 and 16: TRIDYN Applications Target Poisonin
Page 17: Ostwald Ripening by LKMC Simulation

Tutorial "Ion Implantation and Irradiation" - SPIRIT

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