Tutorial "Ion Implantation and Irradiation" - SPIRIT
Tutorial "Ion Implantation and Irradiation" - SPIRIT
Tutorial "Ion Implantation and Irradiation" - SPIRIT
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TRIM: Range, Energy Deposition, Damage Profiles<br />
Projected Range<br />
Distribution (nm-1 )<br />
Vacancy Distribution (nm -1 )<br />
0.2 1 keV<br />
Ar + Si<br />
0<br />
5<br />
0<br />
0<br />
Depth (nm)<br />
10<br />
0 10<br />
Depth (nm)<br />
Institute of <strong>Ion</strong> Beam Physics <strong>and</strong> Materials Research Prof. Wolfhard Möller<br />
Energy Deposition (eV/nm)<br />
200<br />
0<br />
50<br />
0<br />
nuclear<br />
electronic
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