Tutorial "Ion Implantation and Irradiation" - SPIRIT
Tutorial "Ion Implantation and Irradiation" - SPIRIT
Tutorial "Ion Implantation and Irradiation" - SPIRIT
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TRIM BCA Computer Simulation<br />
Amorphous Substance<br />
Position of target atoms <strong>and</strong><br />
thereby impact parameter are<br />
r<strong>and</strong>omly chosen<br />
Path is r<strong>and</strong>om<br />
R<strong>and</strong>om Generator r 0<br />
, 1<br />
p <br />
Impact Parameter p<br />
Azimuthal Angle<br />
p<br />
max r<br />
2r<br />
Conservation of atomic density,<br />
one collision per target atom<br />
Constant free pathlength<br />
equal to mean atomic distance<br />
<br />
<br />
Fast algorithm for classical scattering<br />
integral (p) (“Magic Formula”)<br />
Multiatomic target materials<br />
Static target: No modification<br />
s<br />
p<br />
Institute of <strong>Ion</strong> Beam Physics <strong>and</strong> Materials Research Prof. Wolfhard Möller<br />
p<br />
2<br />
max<br />
<br />
n<br />
s<br />
<br />
1<br />
/<br />
3<br />
n<br />
1<br />
<br />
p<br />
p max<br />
Biersack <strong>and</strong> Haggmark<br />
1978<br />
Eckstein <strong>and</strong> Biersack<br />
1982 (Sputter Version)<br />
Ziegler ~1980 ... 2010<br />
http://www.srim.org<br />
s
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