Tutorial "Ion Implantation and Irradiation" - SPIRIT
Tutorial "Ion Implantation and Irradiation" - SPIRIT
Tutorial "Ion Implantation and Irradiation" - SPIRIT
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TRIM Energy Parameters<br />
Sputtering<br />
BCA Parameters<br />
Radiation<br />
Damage<br />
<strong>Ion</strong><br />
Slowing<br />
Down<br />
Cutoff energy at which particle histories<br />
are terminated (~ 3 eV)<br />
Institute of <strong>Ion</strong> Beam Physics <strong>and</strong> Materials Research Prof. Wolfhard Möller<br />
Eco<br />
Bulk binding energy subtracted from<br />
nuclear energy transfer (often set to 0) Eb<br />
Surface binding energy for sputtering<br />
(enthalpy of sublimation for monoatomic<br />
materials: 2...8 eV; from thermodynamic<br />
data for multicomponent materials)<br />
Threshold energy of Frenkel pair<br />
formation for damage calculation<br />
(25...80 eV)<br />
Electronic stopping model (nonlocal,<br />
local) <strong>and</strong> data<br />
Es<br />
Ed<br />
Se
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