Comparison of Thin-Film Aluminum Deposition - Berkeley Microlab
Comparison of Thin-Film Aluminum Deposition - Berkeley Microlab
Comparison of Thin-Film Aluminum Deposition - Berkeley Microlab
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Evaporating<br />
Sputtering<br />
COMPARISON OF SPUTTERING AND EVAPORATING<br />
Advantages Disadvantages<br />
•consumes an efficient amount <strong>of</strong><br />
aluminum<br />
•more cost efficient (little Al per<br />
use)<br />
•versitile in ability to change<br />
metals<br />
•time comsuming<br />
•quick aluminum deposition •large machine (space is necessary)<br />
•expensive aluminum sheet for large<br />
target<br />
•difficult to change metal
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