ASML PAS5500/1100B - JePPIX
ASML PAS5500/1100B - JePPIX
ASML PAS5500/1100B - JePPIX
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<strong>ASML</strong> <strong>PAS5500</strong>/<strong>1100B</strong><br />
COBRA-<strong>ASML</strong> Symposium / Eindhoven 9 November 2011 1/7
Optical Waveguide<br />
2 InP m<br />
InGaAsP (1.3)<br />
0.6 m<br />
InP<br />
Simulated mode distribution<br />
Scanning Electron Microscope<br />
(SEM)<br />
photograph<br />
COBRA-<strong>ASML</strong> Symposium / Eindhoven 9 November 2011 2/7
Waveguide fabrication process<br />
InP<br />
InGaAsP<br />
InP-substrate<br />
COBRA-<strong>ASML</strong> Symposium / Eindhoven 9 November 2011 3/7
Example: WDM-demultiplexer<br />
Multiwavelength<br />
Transmitter<br />
Multiwavelength<br />
Receiver<br />
MUX<br />
DMX<br />
COBRA-<strong>ASML</strong> Symposium / Eindhoven 9 November 2011 4/7
AWG-demux, COBRA, 1988<br />
COBRA-<strong>ASML</strong> Symposium / Eindhoven 9 November 2011 5/7
AWG Loss vs. lithographic resolution<br />
Old Ideal <strong>ASML</strong> tool<br />
100 400 nm res.<br />
50% 5% loss<br />
COBRA-<strong>ASML</strong> Symposium / Eindhoven 9 November 2011 6/7
COBRA-<strong>ASML</strong> Symposium / Eindhoven 9 November 2011 7/7<br />
Test structures
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