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The Generic Foundry Model in Europe - JePPIX

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<strong>The</strong> <strong>Generic</strong> <strong>Foundry</strong> <strong>Model</strong> <strong>in</strong> <strong>Europe</strong><br />

Prof. Michael J. Wale<br />

Director Active Products Research, Oclaro Technology Ltd., Caswell, UK<br />

ECOC Workshop on Low-Cost Open Access to Photonic Integration<br />

Technology, Amsterdam, 16 th September 2012<br />

1 © 2012 Oclaro Inc.


Agenda<br />

• Motivation<br />

• <strong>Generic</strong> Platform Concepts and Methodology<br />

• Current platform developments <strong>in</strong> <strong>Europe</strong><br />

– InP (<strong>JePPIX</strong>)<br />

– Silicon Photonics (ePIXfab)<br />

– Dielectric planar lightwave circuits (TriPleX)<br />

• Conclusions<br />

2 © 2012 Oclaro Inc.<br />

2


Photonic Integration: Motivation<br />

• Greatly reduced component cost<br />

• Monolithic <strong>in</strong>terconnection of device elements<br />

• Simpler packag<strong>in</strong>g and assembly, standard processes<br />

• High reliability<br />

• Less <strong>in</strong>terfaces<br />

• High functionality<br />

• Many more functional elements per chip, higher creativity <strong>in</strong> design<br />

• High phase stability, excellent device match<strong>in</strong>g<br />

• Permits <strong>in</strong>terferometric structures<br />

• Robust<br />

• S<strong>in</strong>gle chip designs with m<strong>in</strong>imal optical <strong>in</strong>terfaces are ideal for demand<strong>in</strong>g<br />

environments<br />

• Better power efficiency<br />

• M<strong>in</strong>imize optical power loss at <strong>in</strong>terfaces between device elements<br />

PIC Technologies have high value<br />

3 © 2012 Oclaro Inc.


Photonic Integration <strong>in</strong> Oclaro<br />

• Photonic <strong>in</strong>tegration is central to Oclaro’s<br />

bus<strong>in</strong>ess<br />

• Highly flexible active-passive <strong>in</strong>tegration<br />

scheme based on selective area epitaxy<br />

on InP<br />

– Butt-jo<strong>in</strong>s between active and passive<br />

sections<br />

• Multiple stages of epitaxy us<strong>in</strong>g MOVPE<br />

– 3-6 growth stages<br />

– High yields<br />

• Fabrication at Caswell, UK<br />

– Major <strong>in</strong>vestment <strong>in</strong> equipment, facilities<br />

and R&D<br />

– 3” process<strong>in</strong>g, stepper and e-beam<br />

lithography, extensive automation<br />

• Builds on work done over >20 years with<br />

significant support of EC<br />

Example: Monolithic<br />

Laser + Modulator chip<br />

for Tunable XFP module<br />

• ~1000 chips per wafer<br />

• Batch processed<br />

• 3” InP wafers<br />

• On-wafer tested<br />

• Scalable<br />

4 © 2012 Oclaro Inc.


Economics of Integration<br />

• Range of applications for <strong>in</strong>tegrated photonics is extremely wide<br />

• Many applications can only be addressed us<strong>in</strong>g photonic <strong>in</strong>tegration<br />

– Cost, performance, stability<br />

• PIC real-estate is potentially cheap<br />

– Even with complex functionality, ~ 1000 die sites on 3” InP wafer<br />

– Automated fabs with high level of process control provide good yields<br />

• Cost of entry is very high: photonic <strong>in</strong>tegration is available only to a very<br />

few companies today (fab, design costs, …)<br />

• Need to <strong>in</strong>crease market size and reduce the cost of entry for new<br />

applications for the <strong>in</strong>dustry to flourish<br />

– PICs can be a major enabler for new markets<br />

– Increased return on <strong>in</strong>vestment for next-generation wafer fabs<br />

• An alternative approach:<br />

– “<strong>Generic</strong>” foundry approach for arbitrary applications on a common,<br />

qualified process base<br />

– Design systems that allow user-specified designs to be right first time<br />

– Very like ASICs <strong>in</strong> silicon microelectronics<br />

5 © 2012 Oclaro Inc.


<strong>The</strong> ePIXnet proposition<br />

6 © 2012 Oclaro Inc.


<strong>The</strong> ePIXnet vision<br />

• Convergence of technologies<br />

• develop a limited number of generic wafer-scale <strong>in</strong>tegration<br />

technologies that can support a broad range of applications<br />

• Convergence of design approaches<br />

• decouple design (IP) from technology (IP)<br />

• set up libraries<br />

• standardize <strong>in</strong>terfaces of design tools<br />

• Tra<strong>in</strong><strong>in</strong>g<br />

• organize tra<strong>in</strong><strong>in</strong>g and design support for researchers and SMEs, <strong>in</strong><br />

particular fabless companies<br />

• F<strong>in</strong>d the ePIXnet vision paper at www.epixnet.org<br />

7 © 2012 Oclaro Inc.


<strong>Generic</strong> Integration Philosophy<br />

Electronic <strong>in</strong>tegration<br />

3 basic build<strong>in</strong>g blocks<br />

Photonic <strong>in</strong>tegration<br />

4 basic build<strong>in</strong>g blocks<br />

PWD<br />

Waveguide<br />

PHM<br />

ϕ<br />

Phase<br />

SOA<br />

Α<br />

Amplitude<br />

P<br />

Polarization<br />

8 © 2012 Oclaro Inc.


Build<strong>in</strong>g with basic functional blocks<br />

Passive Phase Amplitude<br />

Polarisation<br />

waveguide<br />

phase modulator<br />

optical amplifier<br />

polarisation converter<br />

curve<br />

amplitude modulator<br />

λ converter, ultrafast switch<br />

pol. splitter / comb<strong>in</strong>er<br />

MMI-coupler<br />

2x2 switch<br />

picosecond pulse laser<br />

pol. <strong>in</strong>dep. 2x2 switch<br />

AWG-demux<br />

WDM OXC<br />

multiwavelength laser<br />

pol. <strong>in</strong>dep. diff. delay l<strong>in</strong>e<br />

9 © 2012 Oclaro Inc.


<strong>Generic</strong> <strong>Foundry</strong> Platform <strong>Model</strong><br />

• <strong>Generic</strong> design and manufactur<strong>in</strong>g platforms are based on standard process flows<br />

and structures<br />

• <strong>The</strong> foundry can<br />

accord<strong>in</strong>gly turn wafers <strong>in</strong><br />

high volume on stable<br />

processes, support<strong>in</strong>g<br />

many different designs<br />

• We can establish a<br />

separation of function<br />

between specification,<br />

design and fab<br />

• We can develop dedicated<br />

software tools and a<br />

component library for<br />

rapid and accurate chip<br />

design<br />

• This model is used to great effect <strong>in</strong> microelectronics, but until now has never been<br />

applied <strong>in</strong> photonics<br />

10 © 2012 Oclaro Inc.


<strong>Generic</strong> PIC <strong>Foundry</strong> - Potential Impact<br />

• Photonic ICs come with<strong>in</strong> reach for a much wider range<br />

of users and applications<br />

• Design capability and design productivity greatly<br />

<strong>in</strong>creased<br />

– Move from photonic device development to photonic<br />

circuit design<br />

– New skills, new <strong>in</strong>dustries <strong>in</strong> PIC design will emerge<br />

• High manufactur<strong>in</strong>g volumes on standard processes<br />

• Designs that pass design rule checks are automatically<br />

qualified for reliability, so elim<strong>in</strong>at<strong>in</strong>g an expensive and<br />

time-consum<strong>in</strong>g part of product development<br />

• PIC development and manufactur<strong>in</strong>g cost is no longer<br />

the bottle neck<br />

11 © 2012 Oclaro Inc.


Chip cost trends <strong>in</strong> different fab models<br />

Entry costs<br />

Cleanroom<br />

Process<br />

Design<br />

1B<br />

1M<br />

Chip cost / mm 2<br />

Vertical Custom <strong>Generic</strong><br />

1995 2005 2015<br />

1k<br />

Values are <strong>in</strong>dicative only<br />

1<br />

1 10 100 1k 10k 100k 1M 10M<br />

1 10 100 1,000 10,000 100,000 1,000,000 10,000,000<br />

Chip volume (mm 2 )<br />

12 © 2012 Oclaro Inc.


<strong>Generic</strong> technology landscape <strong>in</strong> <strong>Europe</strong><br />

TripleX<br />

2005<br />

ePIXfab<br />

ePIX net<br />

2007<br />

<strong>JePPIX</strong><br />

STW<br />

GTIP<br />

EuroPIC<br />

Network<br />

Platform<br />

IoP<br />

PD<br />

Memphis<br />

Paradigm<br />

EU Project<br />

NL Project<br />

13 © 2012 Oclaro Inc.


<strong>JePPIX</strong>: <strong>The</strong> <strong>Europe</strong>an InP PIC Platform<br />

• <strong>JePPIX</strong> is the Jo<strong>in</strong>t <strong>Europe</strong>an<br />

Platform for Photonic Integration of<br />

InP-based Components and Circuits<br />

• Provides a framework for research,<br />

development, dissem<strong>in</strong>ation and<br />

exploitation of generic InP PIC<br />

technology<br />

• Supports design-rule, library-based<br />

generic platforms for InP PICs<br />

• Current and recent projects:<br />

EuroPIC, PARADIGM (FP7),<br />

MEMPHIS (NL)<br />

• Contact: Coord<strong>in</strong>ator@<strong>JePPIX</strong>.eu<br />

• Download the <strong>JePPIX</strong> roadmap at<br />

www.<strong>JePPIX</strong>.eu<br />

14 © 2012 Oclaro Inc.


InP Application-Specific PICs from the EuroPIC project<br />

WDM receiver for FTTH Filtered Feedback MW laser hybrid TDM-WDM transmitters FBG-readout<br />

(user Genexis, fab HHI) (user ASTRON, fab Oclaro) (user Genexis, fab Oclaro) (user Fibresens<strong>in</strong>g, fab HHI)<br />

Fast optical switch matrix Pulse serialiser Pulse regenerator Pulse shaper<br />

(user UCamb, fab Oclaro) for KM3NeT neutr<strong>in</strong>o detector (user U Pisa, fab COBRA) for bio-imag<strong>in</strong>g<br />

(user NIKHEF, fab Oclaro)<br />

(user UTwente, fab Oclaro)<br />

non-telecom<br />

15 © 2012 Oclaro Inc.


Silicon Photonics: ePIXfab<br />

Objective: Establish access to silicon photonics technology<br />

for small scale users and support emergence of a fab-less<br />

ecosystem<br />

• IC technology (Multi Project Wafers)<br />

• Packag<strong>in</strong>g & Integration<br />

• Tra<strong>in</strong><strong>in</strong>g & Support<br />

ePIXfab is a collaboration between research <strong>in</strong>stitutes, coord<strong>in</strong>ated by IMEC<br />

2006 2011<br />

Supported by the EU (FP6, FP7)<br />

16 © 2012 Oclaro Inc.


ePIXfab achievements<br />

Industry<br />

Research Institute<br />

University<br />

17 © 2012 Oclaro Inc.


Elements realized <strong>in</strong> the ePIXfab process at IMEC<br />

High conf<strong>in</strong>ement<br />

waveguide, 450nm width x<br />

220nm height<br />

R<strong>in</strong>g resonator<br />

Waveguide<br />

cross<strong>in</strong>g<br />

Spiral waveguide<br />

AWG multiplexer with channel spac<strong>in</strong>g 200GHz, size 250µmx200µm<br />

18 © 2012 Oclaro Inc.


TriPleX Platform<br />

19 © 2012 Oclaro Inc.


TriPleX Platform - MPW<br />

http://www.lionixbv.nl/<br />

20 © 2012 Oclaro Inc.


A message from a pioneer <strong>in</strong> silicon VLSI<br />

“When new design methods are<br />

<strong>in</strong>troduced <strong>in</strong> any technology, especially <strong>in</strong><br />

a new technology, a large-scale<br />

exploratory application of the methods by<br />

many designers is necessary <strong>in</strong> order to<br />

test and validate the methods …<br />

A lot of usage is necessary to enable<br />

sufficient viewpo<strong>in</strong>t shifts and social<br />

organization shifts to occur to effect the<br />

cultural <strong>in</strong>tegration of the methods.”<br />

Lynn Conway, coauthor ‘Introduction to<br />

VLSI systems’ (1979), from PARC report<br />

‘<strong>The</strong> MPC Adventures” (1981)<br />

<strong>Europe</strong>an platform projects are start<strong>in</strong>g this process for PICs<br />

21 © 2012 Oclaro Inc.


Conclusions<br />

• Photonic <strong>in</strong>tegration is a breakthrough technology<br />

• Need to <strong>in</strong>crease market size and reduce the cost of entry for<br />

new applications for the <strong>in</strong>dustry to flourish<br />

– PICs can be a major enabler for new markets<br />

– Increased return on <strong>in</strong>vestment for next-generation wafer fabs<br />

• <strong>Generic</strong> foundry approach looks promis<strong>in</strong>g<br />

– Establish generic methodology, standard platforms, design tools, packag<strong>in</strong>g<br />

approaches ...<br />

– Potential for dramatic reduction of entry costs for new applications<br />

– <strong>The</strong>re are uncerta<strong>in</strong>ties but also major creative opportunities – just as <strong>in</strong><br />

VLSI<br />

• <strong>The</strong> <strong>Europe</strong>an Photonics Community is tak<strong>in</strong>g important steps<br />

towards the validation of the generic foundry model <strong>in</strong> PIC R&D<br />

and Manufactur<strong>in</strong>g<br />

• <strong>The</strong> dom<strong>in</strong>ant model <strong>in</strong> 5-10 years?<br />

22 © 2012 Oclaro Inc.


Acknowledgments<br />

• <strong>The</strong> author would to thank the many people who have contributed<br />

to the development of <strong>Generic</strong> PIC platforms <strong>in</strong> <strong>Europe</strong><br />

• This work has been supported <strong>in</strong> part by the <strong>Europe</strong>an<br />

Commission through the ePIXnet, EuroPIC, PARADIGM,<br />

PhotonFab, ESSenTIAL and HELIOS projects and by the Dutch<br />

SmartMix MEMPHIS project<br />

23 © 2012 Oclaro Inc.


Mike.Wale@oclaro.com<br />

Thank You!<br />

24 © 2012 Oclaro Inc.

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