SOS project Image Manipulation for W f Pl C f i i O i l Wafer ... - JePPIX
SOS project Image Manipulation for W f Pl C f i i O i l Wafer ... - JePPIX
SOS project Image Manipulation for W f Pl C f i i O i l Wafer ... - JePPIX
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<strong>SOS</strong> <strong>project</strong> <strong>Image</strong> <strong>Manipulation</strong> <strong>for</strong><br />
<strong>Wafer</strong> <strong>Pl</strong>ane Con<strong>for</strong>mity in Optical<br />
Lithography systems.<br />
Rob Munnig Schmidt<br />
Mechatronic System Design TU Delft<br />
Delft<br />
University of<br />
Technology<br />
1
Smart Optics Systems (<strong>SOS</strong>)<br />
develo opment<br />
Appli ication<br />
After 2007 the focus will be on system optimisation<br />
For enhanced functionality in different applications<br />
Growth path Smart<br />
Optics Systems<br />
Integration and<br />
Optimization<br />
Health and<br />
life sciences<br />
Industrial<br />
Imaging<br />
Consumer<br />
Optics<br />
Dynamic<br />
manipulation<br />
Quasistatic<br />
ti<br />
Optics<br />
Delft<br />
University of<br />
Technology<br />
2
Different subjects in <strong>SOS</strong><br />
• 10433Smart Microscopy of Biological Tissues<br />
• 10442Waveguide-based ECSL arrays.(ECSL : External-Cavity<br />
Semiconductor Laser)<br />
• 10443Integrated Smart Microscopy<br />
• 10447Integrated High-Resolution Observing through Turbulence<br />
• 10448Smart Multilayer Interactive Optics <strong>for</strong> Lithography at<br />
Extreme UV wavelengths<br />
• 10449<strong>Image</strong> <strong>Manipulation</strong> <strong>for</strong> <strong>Wafer</strong> <strong>Pl</strong>ane Con<strong>for</strong>mity in Optical<br />
Lithography Systems<br />
Delft<br />
University of<br />
Technology<br />
3
<strong>Image</strong> <strong>Manipulation</strong> <strong>for</strong> wafer plane<br />
con<strong>for</strong>mity in Optical<br />
Lithography Systems.<br />
• Geert-Jan Naaijkens, Nick Rosielle, Maarten Steinbuch (TU<br />
Eindhoven): Deterministic Reticle clamping<br />
• Johan Vogel, Jo Spronck, Rob Munnig Schmidt (TU Delft): Real<br />
time de<strong>for</strong>mation metrology<br />
• Ruxandra Mustata, t Rufus Fraanje, Michel Verhaegen: Distributed<br />
ib t Control of <strong>Wafer</strong> De<strong>for</strong>mations in<br />
Photolithography Systems<br />
Delft<br />
University of<br />
Technology<br />
4
What’s the problem<br />
Delft<br />
University of<br />
Technology<br />
5
The wafer surface is not flat<br />
Delft<br />
University of<br />
Technology<br />
6
Bending an optical element in the<br />
nm range is very critical<br />
( )<br />
Vacuum<br />
area<br />
Horizontal<br />
leaf spring<br />
Optical element<br />
y<br />
z<br />
x<br />
Piezoelectric<br />
actuator<br />
t<br />
array<br />
Optical<br />
element<br />
Electronic<br />
interfaces <strong>for</strong><br />
actuators and<br />
sensors<br />
Interface rods<br />
Compliance<br />
Piezoelectric<br />
actuator<br />
Intermediate<br />
body<br />
z<br />
y<br />
x<br />
(b)<br />
(c)<br />
Delft<br />
University of<br />
Technology<br />
7
Delft<br />
University of<br />
Technology<br />
8
Measurement outside the optical<br />
area<br />
Delft<br />
University of<br />
Technology<br />
9
Distributed control of multiple<br />
actuators<br />
Delft<br />
University of<br />
Technology<br />
10
Acknowledgements<br />
Delft<br />
University of<br />
Technology<br />
11
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