Metrology Tools as Basis for Photo Mask Repair and Mask ...
Metrology Tools as Basis for Photo Mask Repair and Mask ...
Metrology Tools as Basis for Photo Mask Repair and Mask ...
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Carl Zeiss „Perfect M<strong>as</strong>k Solutions“<br />
Design<br />
Patterning<br />
<strong>Metrology</strong><br />
Tuning<br />
Inspection<br />
<strong>Repair</strong><br />
Verification<br />
Cleaning<br />
In-die <strong>Metrology</strong><br />
Perfect image placement,<br />
CD & ph<strong>as</strong>e me<strong>as</strong>urement<br />
M<strong>as</strong>k Tuning<br />
Improve registration, overlay<br />
<strong>and</strong> CD per<strong>for</strong>mance<br />
Zero Defect Solutions<br />
High precision repair <strong>and</strong><br />
actinic repair verification<br />
PROVE ® RegC ®<br />
MeRiT ®<br />
AIMS<br />
WLCD<br />
CDC<br />
Carl Zeiss SMS GmbH, Klaus Edinger<br />
03/27/2013<br />
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