Metrology Tools as Basis for Photo Mask Repair and Mask ...
Metrology Tools as Basis for Photo Mask Repair and Mask ...
Metrology Tools as Basis for Photo Mask Repair and Mask ...
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Electron beam induced deposition <strong>and</strong> etching<br />
Deposition<br />
Etching<br />
Adsorption of precursor molecules:<br />
• Exposure with electron beam<br />
• Reaction <strong>and</strong> immobilization of precursor Deposition<br />
• Reaction with substrate <strong>and</strong> volatilization Etching<br />
Carl Zeiss SMS GmbH, Klaus Edinger<br />
03/27/2013 14
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