Metrology Tools as Basis for Photo Mask Repair and Mask ...
Metrology Tools as Basis for Photo Mask Repair and Mask ...
Metrology Tools as Basis for Photo Mask Repair and Mask ...
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State-of-the-art achievements with the MeRiT<br />
Statistics over 2 months at a<br />
customer‘s site:<br />
• 74% yield on 1 st attempt;<br />
• 24% incre<strong>as</strong>e on further<br />
attempts<br />
MoSi<br />
100 nm<br />
Qz<br />
A. Garetto et al., Proc. SPIE (2009)<br />
Carl Zeiss SMS GmbH, Klaus Edinger<br />
03/27/2013 15
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