Heat Transfer in Vacuum - Owens Design
Heat Transfer in Vacuum - Owens Design
Heat Transfer in Vacuum - Owens Design
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1D Model - Results<br />
base plate<br />
heater<br />
susc. bottom<br />
susceptor 2<br />
susceptor 3<br />
susceptor 4<br />
susc. top<br />
shower head<br />
wafer<br />
temperature, °C<br />
850<br />
840<br />
830<br />
820<br />
810<br />
800<br />
790<br />
780<br />
770<br />
760<br />
750<br />
740<br />
730<br />
720<br />
710<br />
700<br />
690<br />
680<br />
670<br />
660<br />
650<br />
640<br />
630<br />
620<br />
610<br />
600<br />
590<br />
580<br />
570<br />
560<br />
550<br />
5000 5100 5200 5300 5400 5500 5600<br />
time, sec