B2 - Schoonover, Inc.

INSTRUMENTATION 

CATALOG 2 0 0 0 - 2 0 0 1 

Including revised 

FUNDAMENTALS OF VACUUM TECHNOLOGY REFERENCE BOOK

Contents 

Instrumentation Catalog 2000-2001 

Product Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B 

In Situ Analysis. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B.1 

Sensor Integration and Analysis Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B1.2 

Residual Gas and Process Gas Analyzers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.2 

Thin Film Metrology Sensor Systems. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B3.2 

Thin Film Deposition Controllers and Monitors . . . . . . . . . . . . . . . . . . . . . . . . . . B4.2 

Leak Detectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.2 

Vacuum Gauges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.2 

Vacuum Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.2 

Vacuum Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.2 

Vacuum Fitting and Ultra-high Vacuum Components. . . . . . . . . . . . . . . . . . . . . . . . . . B9.2 

Oil Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.2 

Product Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D 

How to order . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. . . . . . . . . . . . . . . . .Appendix 

Fax Inquiry Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Appendix 

Sales and Service Offices . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Appendix 

A 

A.3

B1 

FABGUARDTM 

Sensor Integration and Analysis System

Sensor Integration and Analysis System 

Contents 

General 

Fabguard Sensor Integration and Analysis System ................................. B1.3 

B1.2

FabGuard TM 


FabGuard TM 

Sensor Integration 

and Analysis System 

B1 

FabGuard Features at a Glance 

♦ Run-by-run and real-time analysis for process control and fault finding 

reduces scrap and improves process control 

♦ Automated data collection and storage of historical files to enhance SPC 

♦ Data combined from multiple sensors reduces hardware redundancy 

while allowing all data from an entire tool, process or fab to be integrated 

for convenient access and analysis 

♦ Single user interface for all tool data reduces learning curve 

♦ Classification of faults for quicker response to problems, 

minimizing downtime 

FabGuard’s sophisticated data analyses yield new insights into tool and process performance. 

Powerful Data Management 

for Enhanced Productivity 

Theshifttolarger, more expensive wafers and smaller geometries makes 

precise process control more vital to profitability than ever before. These 

cost pressures make it critical to maximize fab productivity, both by reducing 

the number of ruined wafers and by maximizing equipment utilization. 

FabGuard Sensor Integration and Analysis System helps semiconductor 

manufacturers meet these challenges by enhancing tool productivity, 

providing process control, and reducing losses from process drift, 

contamination, tool malfunction, or unnecessary test wafers. It accomplishes 

this by tapping into a rich, underutilized resource—the vast amount of data 

generated by tools and process sensors—and using that data in more 

innovative and comprehensive ways than previously possible. 

FabGuard Continuously Monitors 

and Controls Your Process 

FabGuard starts by automatically collecting all available data, both from 

INFICON sensors and the built-in sensors the tool uses for proper operation. 

Data is archived and analysis results are stored in an SQL-searchable 

database. Operators can view all information through a single, easy-to-use 

interface. Presenting data from all types of sensors in a consistent format 

improves the learning curve, while reducing hardware redundancy by doing 

the work of multiple equipment from multiple vendors. Remote monitoring is 

also possible, either from a central location in the fab or from off-site. 

FabGuard then analyzes the data using sophisticated physical models and 

statistical techniques, looking for correlations across multiple parameters 

and comparing the process second-by-second to models known to be good 

from previous runs. These robust techniques allow FabGuard to reliably 

detect process events that can then be used for process control and to 

quickly detect process excursions with far fewer false alarms. 

♦ Overall impression of tool/process health to aid preventive 

maintenance personnel 

How FabGuard Works 

FabGuard Sensor Integration and Analysis System’s architecture is 

organized into several sections: 

Communication Engine 

Receives information related to tool events (e.g., wafer ID) and sends 

information to the tool controller.Also interfaces through drivers with 

INFICON sensors and the tool’s own sensors. 

Analysis Engine 

Complex statistical analyses are performed using a variety of techniques. In 

essence, “good” data is used to create a model to which data from 

successive runs can be compared. Historical data is used to re-train the 

engine to correct for sensor drift, thereby improving the robustness of the 

analysis and reducing the likelihood of false positives. 

Decision/Control Engine 

Determines which commands should be sent to the tool to control 

wafer processing. 

Fault Engine 

Determines the source of out-of-spec conditions, whether in the wafer,the 

process or the tool. It classifies faults, tracks process trends and creates a 

library of faults for each tool or process. 

User Interface 

Consistent for all sensors and processes, simplifying the learning process. 

Screens can be viewed at the local workstation or a remote site. 

Results Database 

All data, both current and historical, can be easily located through 

SQL searches. 

B1.3


FabGuard TM 

Manage a Process, a Tool, or Your Entire Fab 

FabGuard Sensor Integration and Analysis System’s advanced data analysis 

creates reliable information that can be used to advance process controls 

from event-based (e.g., endpoint detection), go/no go and statistical process 

control (SPC) techniques to run-by-run control and even real-time fault 

detection. As a result, processes become more stable and problems are 

detected sooner without the need for extensive test wafer usage or process 

setup time, so yields increase. 

By simultaneously looking at all the data, FabGuard is able to provide new 

insights—an advantage for fine-tuning or troubleshooting tools or processes. 

Its information and integration capabilities can also be extended to the entire 

fab. By combining analysis results from multiple FabGuard systems, the 

status of every tool can be shown on a single screen. More sophisticated 

applications could include comparing tools to assist in tool matching and 

promoting consistent processing, and tracking process performance across 

multiple tools. Transferring recipes and models between fabs is also 

possible, insuring better control on similar processes. 

Unmatched Experience and Support 

Make INFICON the Right Choice 

INFICON residual gas analyzers, optical sensors, thin film monitors/ 

controllers, vacuum gauges and helium leak detectors are used in fabs 

throughout the world to make processes more precise, productive and 

reliable. Our experience in developing both leading-edge sensors and 

software puts us in a strong position to integrate various data sources and 

use the data in much more powerful ways than can be achieved by handling 

the data from each source separately. 

The highly trained people in our global network of sales and service offices 

will be with you at each step, from helping you determine how the FabGuard 

system can best meet your needs, through installation, to providing 

responsive, ongoing support. 

Pinpointing Problems to Minimize 

Wafer Waste and Tool Downtime 

If a process excursion does occur, FabGuard can immediately activate an 

alarm or alert the appropriate person, then shut down the tool before 

additional wafers are spoiled. FabGuard also classifies the fault by labeling 

the analysis, thereby creating a tool- or process-specific library of faults. 

This minimizes downtime by helping maintenance personnel locate and 

correct the problem faster. FabGuard System’s comprehensive database 

also provides an overview of the health of the tool and the process, keeping 

preventive maintenance personnel in tune with tool performance and 

reducing unscheduled tool downtime. 

Fabguard Can Monitor Production at the Process, Tool and Fab Level 

PVD 

CVD 

ETCH 

1 

14 

26 

8 

FabGuard Remote 

Status Viewer 

1 

8 

14 

26 

Operating within normal parameters. 

Regen Cryo Pump soon on Chamber A. 

Particle Count reaching maximum tolerance (chamber clean required). 

Endpoint outside of specification. Check flow rate MFC2. 

B1.4

Residual Gas and 

Process Gas Analyzers 

B2

Residual Gas and Process Gas Analyzers 

Contents 

General 

Applications and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.3 

Products 

Transpector¨ 2 Gas Analysis System. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.4 

TranspectorWare TM Software. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.10 

Transpector¨ 2 Gas Analysis System Upgrade Package . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.12 

Transpector¨ XPR 2 Gas Analysis System. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.14 

Preclude TM Photoresist Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.17 

Transpector¨ CIS2 Gas Analysis System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.20 

Fabstar TM Gas Analysis System. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.26 

PPM 422 Plasma Process Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.27 

Composer¨ Gas Composition Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.28 

TWare32 TM for Windows¨ 95/98/NT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.31 

Pressure Converters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.36 

IPC400 Pumping Packages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.37 

B2.2

Applications and Accessories 



Transpector 2 

Transpector XPR 2 

Preclude 

Transpector CIS 2 

FabStar 

PPM 422 

Composer 

B2 

Applications 

Production of semiconductors 

Vacuum measurement systems 

Research and development 

Multi-chamber systems 

Calibration systems 

Lamps and tubes manufacture 

Cluster systems 

Particle accelerators 

Gas analysis 

Sputtering 

Vacuum furnaces 

Leak testing 

CVD 

Process monitoring 

Process control 

Process troubleshooting 

Accessories 

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Compact sensor 

◆ 

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High-performance sensor 

Pressure converters 

Software (TranspectorWare or TWare 32) 

Atmospheric sampler 

Heating jackets 

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. 



Transpector® 2 Gas Analysis System 

Transpector ® 2 Gas Analysis System 

INFICON, the leader in RGA technology, has upgraded the 

Transpector gas analysis family of instruments to meet the demands 

of todayÕs processes and applications. Transpector 2 offers improved 

hydrogen detection, faster scanning, an expanded dynamic range, 

improved abundance sensitivity, and superior peak position and 

amplitude stability. It is the smartest choice for process monitoring, 

process diagnostics, and leak detection. 


Transpector 2 is a quadrupole-based smart sensor that has all of the 

sensor drive electronics plus a microprocessor in a single, compact 

enclosure that attaches to the sensor. Because it is a smart sensor, it gives 

you the flexibility of using your existing computer or choosing a PC and 

software package from INFICON. Two communications links, RS232 for 

single-sensor and RS485 for multiple-sensor configurations, connect 

Transpector to the control computer. Simple command protocols direct 

all Transpector functions. 

Combining Transpector 2 with TranspectorWare TM or TWare 32 software 

provides an ideal system for meeting todayÕs needs for research, production 

process monitoring, data collection, and statistical process control (SPC). 

Available for Windows¨ 3.1, 95, 98 or NT, these software packages contain 

a full array of basic RGA features, including trend analysis, spectrum 

scanning, leak check, analog, and selected peak modes. They also contain 

process monitoring features that include recipe generation, automated data 

collection, and process deviation monitoring. 

Improvements Bring Better 

Hydrogen Detection 

Transpector 2 offers more accurate and reliable data due to advanced 

RF and preamplifier measurement circuitry. These electronic advances 

translate to improved hydrogen detection and a lower minimum detectable 

partial pressure for all gases for better contamination control, as well as 

faster and more stable scanning to keep up with todayÕs faster processes. 

The Transpector 2 advanced RF circuitry employs a higher RF frequency 

while maintaining acceptable power levels, resulting in hydrogen detection 

to the ppm level. Additionally, because the RF frequency is digitally 

synthesized, it automatically adjusts to and locks in the appropriate 

frequency for your sensor. The improved RF circuitry reduces warm-up time 

and provides superior peak amplitude and position stability, virtually 

eliminating the need for routine mass scale tuning. 

Better Data Faster 

A new preamplifier measurement algorithm allows the user to scan faster 

over low-level signals to keep up with process changes. Because the noise 

is reduced, the data is more stable and timely. When sampling with the 

electron multiplier, the signal-to-noise ratio is up to seven times better than 

the original TranspectorÕs (up to 10 times better in Faraday cup mode). The 

electronics offer nine-decades of dynamic range (from 1 x 10 -6 to 1 x 10 -15 

amps). 

This scan of argon was sampled at three milliTorr using TranspectorWare TM for Windows with 

Transpector 2 electronics on a closed-ion-source system. In this example, Transpector 2 

advanced RF circuitry allows detection of hydrogen down to seven parts per million. 





TranspectorWare TM leak mode requires only single-button operation and includes a 

full-range thermometer-type display, trend chart, and audible tone output. 

Custom Tool Integration 

For more advanced applications, INFICON offers FabGuard TM , a custom tool 

integration software package. FabGuard provides sophisticated alarming 

based on the tool state, tool data or Transpector data, organizes data on a 

wafer-by-wafer basis, performs wafer-based statistical calculations, via a 

SECS II interface for factory automation and wafer tracking. 

Only Pay for the 

Performance You 

Need 

The Transpector Gas Analysis System 

offers a multitude of choices to fit your 

application requirements. For base 

pressure applications, we offer several 

open-source Transpector models ranging from one to 300 

amu with Faraday Cup (FC) or combination Electron Multiplier/Faraday Cup 

(EM/FC) detectors, depending on the exact level of performance required. 

For process monitoring applications, the Transpector XPR 2 offers the 

simplest form of gas contamination monitoring and process verification 

available. It operates at process pressures up to 20 millitorr without pumps, 

detecting contaminants during the process down to 10 ppm. 

For applications requiring ppm or sub-ppm 

contamination monitoring, INFICON offers the 

Transpector Closed Ion Source (CIS2). It features a 

completely interlocked pumping system that allows 

process sampling from atmosphere to high vacuum. 

In Transpector CIS2, this Closed Ion Source 

operates at a relatively high pressure, reducing the 

masking effects of background residuals to enable 

detection of contaminants at sub-ppm levels. 

TranspectorWare for Windows using Transpector 2 performs all standard gas analysis functions, 

including analog, bar, and selected peak monitoring. It has pre-configured screens for automated 

data archiving, tuning, and leak detection. 

Simplify Multichamber Configurations 

Transpector 2Õs multiplexing capabilities make multichamber installations 

simpler and more economical to operate. A single computer can operate 

multiple Transpectors in any combination of compact, high-performance, 

CIS, and XPR models on an RS485 network. Each Transpector 2 is easily 

assigned an address through its configuration DIP switches. For troubleshooting 

or service functions, local control of any sensor on the network is 

accomplished simply by connecting the RS232C port to a computer and 

operating via TranspectorWare or TWare32 TM or performing diagnostics via 

HyperTerminal. While on the network, each unit operates independent of 

and simultaneously with the other sensors on the network, so all relays and 

controls within each Transpector 2 are continuously operational. The power 

supply port connects Transpector 2 to 24 volts, supplied by the tool or an 

external power supply. 

It Protects Your Process and Itself 

Transpector 2 stores your calibration and setpoint data independent of the 

control computer. (The computer acts as a peripheral device, storing and 

displaying your process data and allowing you to communicate with the 

sensor.) So if you disconnect the computer from the sensor, or if 

communications are lost for any other reason, the sensor continues to 

monitor and control the vacuum system as programmed. In addition, 

Transpector 2 automatically shuts off its emission when the total pressure 

exceeds the limits of the sensor in use, or if the electronics exceeds its 

normal operating temperature. 

Transpector 2 can monitor and control up to three setpoint status relays, 

providing an external signal for alarm indication or process interruption 

when a gas exceeds its specified level. Two differential 10-volt analog input 

channels are provided for incorporating analog data with RGA data 

(e.g., total pressure, optical emission, temperature gauge data). 

Two LEDsÑone that shows whether the emission is on or off and one that 

shows when Transpector 2 has power and is ready to communicate Ð 

provide a local indication of TranspectorÕs status, eliminating the need to 

refer to the PC and software in a remote location. 




Semiconductor Applications 

The Transpector 2 H100M, mounted on the front end of a cluster tool, is 

used to establish the background/baseline of the front end (handler) while 

the loadlocks go through a pumpdown. When wafers are ready for 

processing, the Transpector 2 monitors the wafer-in state and provides 

detailed information on the degas process, with alarm limits set for specific 

contaminants. The Transpector 2 operates continuously and reliably while 

experiencing extreme Argon bursts from the cool module. The information it 

provides has a direct correlation to vacuum integrity, pump performance, 

contamination, leaks, and tool state. 

Transpector 2 

Gas Analysis 

System 

PVD 

ETCH CVD IMPLANT 

Tool State Process State* Tool State* Process State* Tool State* Process State* Tool State Process State 

Residual Gas 

Analyzers 

(Transpector 

Open Ion 

Source): 

C100F/M, 

H100F/M 

H200F/M, 

H300F/M 

Leak Detection 

Chamber 

Outgassing 

Rate of Rise 

Cryopump 

Loading 

MFC Leaks 

Gas Line Leaks 

Argon Flow 

Reactive Gas 

Flow (N 2 O 2 ) 

Detection Limit 

100 ppm 

Gas Supply 

Contamination 

MFC Instability 

Photoresist 

Contamination 2 


Chamber 

Outgassing 

Rate of Rise 

Cryopump 

Loading 

MFC Leaks 


Carrier Gas Flow 

Reactive 

Gas Flow 


100 ppm 

Gas Supply 

Contamination 


Monitor 

Selectivity 

Monitor 

Endpoint 


Chamber 

Outgassing 

Rate of Rise 

MFC Leaks 


Carrier Gas Flow 

Precursor 

Gas Flow 

Delivery System 

Stability 


100 ppm 

Gas Supply Contamination 

Monitor Chamber 

Clean Endpoint 

Photoresist 

Contamination 


Chamber 

Outgassing 

Cryopump 

Loading 

MFC Leaks 


Argon Flow 

Leaks on Rotary 

Feedthroughs 


Monitoring 

Arcing 

Monitor Process 

Gases (AsH 3 , 

PH 3 and BF 3 ) 

Photoresist 

Contamination 

Process Gas 

Analyzer 

(Transpector 

XPR 1 ): 

XPR2 


Chamber 

Outgassing 

Rate of Rise 

Cryopump 

Loading 

MFC Leaks 


Argon Flow 

Reactive Gas 

Flow (N 2 O 2 ) 


10 ppm 

Gas Supply 

Contamination 


N/A 

N/A 

N/A 

N/A 


Chamber 

Outgassing 

Cryopump 

Loading 

MFC Leaks 


Argon Flow 

Leaks on Rotary 

Feedthroughs 


Monitoring 

Arcing 

Process Gas 

Analyzers 

(Transpector 

Closed Ion 

Source 

[CIS]): 

H100CIS2, 

H200CIS2, 

H300CIS2 


Chamber 

Outgassing 

Rate of Rise 

Cryopump 

Loading 

MFC Leaks 


Argon Flow 

Reactive Gas 

Flow (N 2 O 2 ) 


_



Variety of Software Options 

If one of our standard software packages (TranspectorWare or TWare32 for 

Windows) does not meet your application needs, we offer custom 

programming packages. A Dynamic Data Exchange (DDE) driver can 

automatically set up the Transpector 2 for communication, allowing the user 

to specify the data to be collected and reading it directly into a 

DDE-compatible program such as Excelª or WonderWare ª . 

We have a 32 bit driver for Windows 95, 98 and Windows NT. 

Transpector® 2 Features at a Glance: 

♦ 100, 200, and 300 amu systems with Faraday cup or combination 

electron multiplier/Faraday Cup 

♦ Compact or high performance sensor designs 

♦ Improved hydrogen detection 

♦ Superior peak amplitude and position stability 

♦ Up to 10 times improvement in signal-to-noise ratio compared to 

original Transpector 

♦ Faster scanning over low-level signals 

♦ Nine-decade electronic dynamic range 

♦ Software options for single- and multichamber systems 

♦ Partial pressure measurement from 1x10 -4 Torr to 5x10 -15 Torr 

Applications 

Leak detection, vacuum troubleshooting and outgassing studies in: 

♦ Optical coating 

♦ Surface science 

♦ Desorption studies 

♦ MBE 

♦ High-energy physics 

♦ Accelerators/storage rings 

♦ Aerospace 

Process characterization and monitoring in: 

♦ Vacuum heat treatment 

♦ Disk manufacture 

♦ Semiconductor IC manufacturing 

♦ Flat panel manufacturing 


4.87" [12.4 cm] 

4.87" [12.4 cm] 

5.62" [14.3 cm] 

5.62" [14.3 cm] 

7.75" [19.7 cm] C series 

8.17" [20.8 cm] H series 

6.65" [16.9 cm] 

C100F, C100M 

8.6" [21.9 cm] 

H100F, H200F, H300F 

12.1" [30.7 cm] 

H100M, H200M, H300M 

. 



TranspectorWare TM Software 

Technical Data 

C100F C100M H100F H100M H200F H200M H300F H300M 

Sensor length (vacuum side) 4.6" 7" 10.4" 7" 10.4" 7" 10.4" 

(11.7 cm) (17.8 cm) (26.4 cm) (17.8 cm) (26.4 cm) (17.8 cm) (26.4 cm) 

Mass range 1 to 100 amu 1 to 100 amu 1 to 200 amu 1 to 300 amu 

Detector type FC Microchannel FC Channeltron¨ FC Channeltron¨ FC Channeltron¨ 

Plate EM/FC EM/FC EM/FC EM/FC 

Resolution 

< 1amu wide @ 10% peak height over the entire mass range 

(per 1993 AVS recommended practice) 

Temperature coefficient (during an 8-hour 

< 1% of peak height per degree C (for FC Only) 

period, after a half hour warm-up) 

SensitivityÑ 

amps/Torr (amps/mbar): FC 2x10 -4 2x10 -4 2x10 -4 1x10 -4 2x10 -4 1x10 -4 1x10 -4 5x10 -5 

(1.5x10 -4 ) (1.5x10 -4 ) (1.5x10 -4 ) (7.6x10 -5 ) (1.5x10 -4 ) (7.6x10 -5 ) (7.6x10 -5 ) (3.8x10 -5 ) 

EM N/A 0.25 (0.2) N/A 500 (380) N/A 500 (380) N/A 250 (190) 

Min. detectable partial 

Pressure 1 ÑTorr (mbar): FC 3x10 -13 N/A 3x10 -13 N/A 3x10 -13 N/A 6x10 -13 N/A 

(4x10 -13 ) (4x10 -13 ) (4x10 -13 ) (8x10 -13 ) 

EM N/A 3x10 -14 N/A 5x10 -15 N/A 5x10 -15 N/A 1x10 -14 

N/A=not applicable 

* Electronics and sensors may be purchased separately. Multiplexing operation requires optional software. 

1 Minimum detectable partial pressure is calculated as the standard deviation of the noise 

(minimum detectable signal) divided by the sensitivity of the sensor (FC or EM) measured at a four-second dwell time. 

(4x10 -14 ) (6.6x10 -15 ) (6.6x10 -15 ) (1.3x10 -14 ) 

Zero blast interference at mass 2 

< 100 ppm 

Max. operating pressureÑ 

Torr (mbar): FC 5x10 -4 5x10 -4 5x10 -4 5x10 -4 5x10 -4 5x10 -4 5x10 -4 5x10 -4 

(6.6x10 -4 ) (6.6x10 -4 ) (6.6x10 -4 ) (6.6x10 -4 ) (6.6x10 -4 ) (6.6x10 -4 ) (6.6x10 -4 ) (6.6x10 -4 ) 

EM N/A 1x10 -5 N/A 1x10 -5 N/A 1x10 -5 N/A 1x10 -5 

(1.3x10 -5 ) (1.3x10 -5 ) (1.3x10 -5 ) (1.3x10 -5 ) 

Max. sensor operating temp. FC 200¡C 200¡C 250¡C 250¡C 250¡C 250¡C 250¡C 250¡C 

EM N/A 100¡C N/A 125¡C N/A 125¡C N/A 125¡C 

Max. bakeout temperature 

(electronics removed) 200¡C 350¡C 400¡C 350¡C 400¡C 350¡C 400¡C 

Operating temperature 

20¡C to 50¡C ambient 

Power input 

20 to 30 V DC, 9-pin male ÒDÓ connector, internally isolated from system ground 

RS232 serial communications 

Nonisolated, baud selection 1200 through 9600, 9-pin female ÒDÓ connector, TxD, RxD, CTS, DTR 

RS485 addressable Isolated, 4 wire, baud fixed, half duplex, global address @ 0, 

communications interface 

fixed address 1 of 31, 9-pin female ÒDÓ connector, +TxD, -TxD, +RxD, -RxD 

Relay outputs 

4 relays, 24 V at 0.5 amps (1 for operational status, 3 for setpoint limits) 

Inputs 

2 nonisolated TTL inputs, contact closure (1 for remote emission on, 1 for remote emission off); 

2 differential analog inputs, 0 to 10 V DC 

Electronics enclosure 

Drip-resistant 

User-configured switches 

5 positions: device address (1 of 31); Primary Link Select (RS232/485); 2 positions: baud rate 

(8-position DIP switch) 

LED indicators (green) 

1 for CPU status, 1 for emission status 




Ordering Information Code-No. TSP2 - ___ ___ ___ ___ ___ ___ ___ ___ ___ 

TRANSPECTOR 2 package Ð Iridium filament 

Electronics unit and sensor 

100 AMU, FC, compact sensor (C100F) 01 

100 AMU, EM/FC, compact sensor (C100M) 02 

100 AMU, FC, high performance sensor (H100F) 03 

100 AMU, EM/FC, high performance sensor (H100M) 04 





Power supply package 

None 0 

80-250 VAC/4 ft. (1.2m) standard cable (standard plug) 1 

80-250 VAC/4 ft. (1.2m) standard cable (German plug) 2 

Power supply cable 

None 0 

15 ft. (4.5m) cable 1 

30 ft. (9m) cable 2 

RS232 communications cable - for single sensor operation 

None 0 

15 ft. (4.5m) cable 1 


RS485 communications cable kit Ð for multiple sensor operation 

None 0 

15 ft. (4.5m) cable 1 


Computer communications module 

None 0 

RS485C communications kit (used with TranspectorWare or TWare Lite) 1 

TCA485 communications kit - US version (used with TWare 32) 2 

TCA485 communications kit - German version (used with TWare 32) 3 

TCA485 communications kit - Japan version (used with TWare 32) 4 

TCA485 communications kit - UK version (used with TWare 32) 5 

Software 

None 0 

TWare 32 single sensor version 1 

TWare 32 multi-sensor version 2 

TWare Lite single sensor version 3 

TWare Lite multi-sensor version 4 

TranspectorWare single sensor 5 

TranspectorWare multi-sensor 6 

Heating jacket system 

None 0 

Compact sensor heating jacket (120 VAC) 1 

High performance Faraday cup heating jacket (120 VAC) 2 

High performance electron multiplier heating jacket (120 VAC) 3 

Compact sensor heating jacket, (230 VAC) 4 

High performance Faraday cup heating jacket, (230 VAC) 5 

High performance electron multiplier heating jacket, (230 VAC) 6 

Analog Outputs 

None 0 

4 channel analog outputs (0-10V) 1 


. 

Each TRANSPECTOR 2 package contains the sensor, 

the electronics unit and a matching DN 40 CF extension 

Consult factory for longer cable lengths. 

B2.9 

B2



TranspectorWare TM 

Software 

TranspectorWare process gas characterization software provides statistical 

process control on a wafer-by-wafer or process-step basis. Designed for 

use with the Transpector TM Gas Analysis System, it is compatible with 

Windows TM 3.1, 95 and 98. 

Data Collection Synchronized for 

Wafer-by-Wafer Control 

Through the use of a digital I/O board installed in the PC, TranspectorWare 

will start and stop RGA data collection recipes based on an external signal. 

This allows users to more closely synchronize data acquisition with the 

process for more precise statistical process control. Data collection may be 

isolated to specific process steps by programming one recipe to run during 

wafer processing, another during the interwafer period, and another during 

pumpdown or base pressure. 

Tuning Routine Improves 

Measurement Consistency 

The user enters a mass (usually argon) and value in either amps or partial 

pressure. TranspectorWare then automatically adjusts the electron multiplier 

voltage and/or sensitivity until the desired value is displayed, providing 

process data consistency from run to run. Users may enter up to 10 tune 

points for precise adjustment of peak position and resolution across the 

instrumentÕs mass range. 

True Statistical Process Control 

TranspectorWare provides the capability to average process runs and set a 

bandwidth around the norm or average. In TranspectorWare, true statistical 

process control is applied using the central limit theorem. This allows the 

adjustment of bandwidths to three sigma and calculation of a one-point 

norm (an average of all the data for a specific mass) to be used as a trigger 

set point. After establishing norms for specific masses, the user may 

compare future runs to those norms with visual, audible and digital output 

signals for any mass that exceeds its bandwidth. 

Additional Features Add Convenience 

TranspectorWare allows a library file to be NIST formatted. For easier 

spectrum identification, the user imports the file to the NIST database and 

uses the NIST search routine to identify spectrum compounds. 

TranspectorWare also includes enhanced networking through an improved 

RS485 communications card with 64 bytes of data buffering. 

Advantages 

♦ Displays process deviations in a form similar to that of a conventional 

Statistical Process Control (SPC) chart, so that data can be interpreted 

without a knowledge of mass spectrometry 

♦ Basic functions like analog, bar, leak, partial pressure, table, trend and 

library of spectra are included with the software package 

♦ Easy post processing of data since these are stored in the ASCII format 

♦ Real-time TREND display 

♦ The spectra are stored in a Òsea of data fileÓ (SOD) from which the data 

for the current TREND display (or past displays) can be extracted 

♦ Early detection of system deviations 

♦ Automatic data acquisition 

♦ Two partial pressure displays, automatic calculation of sensitivity 

♦ Presentation of both large and small peaks through a logarithmic display 

♦ Expandable spectra library 

Automatically adjusts the multiplier voltage and sensor 

sensitivity to achieve a desired partial pressure value, providing 

process measurement consistency, reliability and repeatability. 





TranspectorWare TM 

Transpector models supported 

Communications interface 

Communications baud rate 

Maximum communications cable length 

Transpector, Transpector 2 (all models) 

RS232, RS485 

RS232 - User Selectable (1200, 2400, 9600) 

RS485 - 57.6k 

RS232 - 50 ft (15m) 

RS485 - 1000 ft (305m) 


Computer system requirements 

Processor (minimum) 

Minimum system for communication 

with up to 2 Transpectors 

Pentium 133 MHz 

Recommended for communication with up to 

8 Transpectors (more than 8, consult factory) 

PentiumII 200 MHz 

RAM (minimum) 

Available hard disk space required to 

load TranspectorWare 

Available hard disk space required for data storage 

Monitor 

Resolution 

Serial Ports 

Transpector requirements 

Communications cable 

32MB 

5MB 

500MB 

14 inch, SVGA 15 inch, SVGA 

640 x 480 800 x 600 

One free serial port for RS232 

one free ISA expansion slot for RS485 card 

Version 1.09 firmware or higher 

(serial number Series 28 or higher) 

One cable is required for each Transpector 

RS232 for single-sensor configurations 

RS485 for multi-sensor configurations (order with Transpector) 

Ordering Information 

Part Number 

TranspectorWare for Windows Ð 

Single sensor version 

TranspectorWare for Windows Ð 

Multi-sensor version 

TWare Lite for Windows Ð 

Single sensor version 

TWare Lite for Windows Ð 

Multi-sensor version 

911-058-G1 

911-059-G1 

911-630-G1 

911-631-G1 

. 



Transpector® 2 Gas Analysis System Upgrade Package 

Transpector ® 2 Gas Analysis System 

Upgrade Package 

Upgrade your Quadrex or QX2000 

to Transpector 2 

The Transpector 2 upgrade package allows you to retain your existing 

Quadrex or QX2000 sensor while substituting the electronics for the 

Transpector 2 Smart Sensor technology. The Transpector 2 design lets 

you choose the computer (desktop or notebook), and software package. 

The Transpector 2 sensor communicates with your chosen computer 

via RS232 (for single-sensor configurations) or RS485 (for multiple 

sensor applications.) 

The Transpector 2 upgrade package includes an electronics unit, a power 

supply, a power supply cable, a communications cable, software center 

contact, and manuals (electronics and software). 

Upgrade your Transpector 

to Transpector 2 

You can upgrade your existing Transpector sensor by simply substituting 

the new Transpector 2 electronics. The new electronics extends the 

dynamic range of the Transpector to 1 X 10 -15 amps due to an improved 

signal-to-noise ratio and offers better peak stability through a redesigned 

crystal controlled RF circuit. A new power supply, power supply cable and 

communications cable is recommended with your upgrade to comply with 

radiated and conducted emission standards. 

Benefits 

The following chart shows the benefits of upgrading your system to the 

Transpector 2 technology. 

Quadrex QX2000 Transpector 

Increased sensitivity ◆ ◆ ◆ 

Increased speed 

(depending on computer used) ◆ ◆ ◆ 

Software enhancements ◆ ◆ 

Unlimited data storage 

Increased data storage 

Additional options available ◆ ◆ 

(such as multiplexing) 

Additional features 

(such as trend analysis, 

log scale, spectral library, 

Microsoft Windows software) 

Larger display (computer dependent) ◆ ◆ 

Less hardware ◆ ◆ 

More software options ◆ ◆ 

Increased signal to noise ratio ◆ ◆ ◆ 

Lower detection limits ◆ ◆ ◆ 

◆ 

◆ 

◆ 


Transpector® 2 Gas Analysis System Upgrade Package 


Ordering Information Code-No. TSP2QU- ___ ___ ___ ___ ___ ___ ___ ___ ___ 

Transpector upgrade packages 

H200M, H200F, Quadrex and QX upgrade package 03 

H100M, H100F, Quadrex and QX upgrade package 04 


None 0 




None 0 

15 ft. (4.5m) cable 1 



None 0 

15 ft. (4.5m) cable 1 



None 0 

15 ft. (4.5m) cable 1 



None 0 






Software 

None 0 








None 0 



Sensor Refurbishment 

None 0 

Sensor with no EM replacement (includes new ion source and tuning) 1 

Sensor with EM replacement (includes new ion source, new EM and tuning) 2 


. 



Transpector® XPR Gas Analysis System 

Transpector ® XPR 2 Gas Analysis System 

Transpector XPR 2 is a technological breakthrough in quadrupole-based 

process gas analysis, moving well beyond conventional leak detection 

application in a production environment. ItÕs the first gas analyzer with an 

extended pressure range to operate from 20 mTorr down to ultrahigh 

vacuum without the need for complex pressure conversion systems. 

Innovative Sensor Design 

Because the mean free path (the average distance that an ion travels 

before interacting with a gas molecule) becomes much smaller at higher 

gas pressures, Transpector XPR 2 employs a unique miniature sensor 

design to permit operation at gas pressures as high as 20 mTorr without 

compromising high-quality performance. This new sensor, 10 times smaller 

than the sensor in a conventional RGA, provides a short path for signal ions 

to travel to reach the detector, eliminating the effect of collisional losses. 

The remarkable engineering and proprietary manufacturing of Transpector 

XPR 2 operates at extended pressure ranges and establishes new limits of 

precision and tolerance critical to accurate, reliable performance on a 

repeatable basis. 

Miniature Quadrupole 

Precise dimensions and alignment of the four rods (quadrupoles) of a mass 

filter are critical to achieve accurate and reliable performance specifications. 

Assembly techniques used to manufacture quadrupole sensors do not scale 

down with the exacting precision required of an extended pressure range 

sensor. Transpector XPR 2 takes advantage of revolutionary manufacturing 

methods (patented and patent pending) to produce a sensor with 

uncompromised performance. 

Exact alignment of the filter rods in Transpector XPR 2 delivers excellent 

mass resolution and overall performance. Without it, peaks begin to blend, 

and, in designs employing multiple quadrupole arrays, performance 

problems increase proportionally. While arrays may transmit signals 

generated in the ion source, they can result in smaller peaks being 

obscured by larger peaks lacking good definition, or the appearance of 

false peaks due to inaccurate mass filtering. The INFICON proprietary 

manufacturing process eliminates the mechanical assembly of the filter rods 

and produces an exceptionally accurate quadrupole. This innovative design 

allows Transpector XPR to scan a mass range from 0 to 100 amu with less 

than 1 amu resolution at 10% of the peak height (per AVS standard 2.3) 

and operate up to 20 mTorr. 

Dual lon Source 

In the past, total pressure measurement in quadrupole systems has always 

been compromised by conventional ion source designs. Now, the 

Transpector XPR 2 patented dual ion source supplies one ion stream to the 

quadrupole filter for partial pressure measurement and a second ion stream 

to a total pressure collector. The Transpector XPR 2 dual-ion source allows 

continuous total pressure measurement comparable to the accuracy 

expected of an ion gauge. 

This innovative dual ion source approach aids in measurement accuracy 

in the millitorr range by correcting for high-pressure sensitivity loss. 

The unique interplay between each of the ion sources eliminates the 

problems of conventional single ion source sensors Ð nonlinear response 

and degradation of data quality at higher pressures. 

Transpector XPR 2 ion source has dual-electron energy capability, 

software-switchable between 40 and 70 eV. This eliminates spectral 

interference due to peaks from doubly charged ions. For example, the 

doubly ionized argon 36 isotope peak (m/z = 36 amu/2 + = 18) will mask 

low levels of H 2 O (m/z = 18 amu/1 + = 18). Transpector XPR 2 lower 

electron energy provides a significant advantage when extreme sensitivity 

for monitoring water vapor in the presence of argon is required. 

The filament material is yttrium-coated iridium. It provides long lifetime and 

resistance to burnout due to accidental overpressure. Filament assemblies 

are easily replaced in the field to meet the requirements of your production 

uptime. 

EM/FC Detector 

Transpector XPR 2 employs a combination electron multiplier/Faraday Cup 

detector for acute sensitivity for leak detection and residual gas analysis in 

high vacuum systems. The Faraday Cup is used when sampling at higher 

pressures (typically above 1 x 10 -5 Torr), providing a minimum detectable 

partial pressure (MDPP) of 1 x 10 -9 Torr, or better than 10 parts per million 

(ppm). Turning on the electron multiplier at lower pressures increases the 

MDPP to 3 x 10 -12 Torr. This dual-detector system in Transpector XPR 2 

provides excellent performance for wide-ranging vacuum pressures 

and applications. 

Crystal-Controlled RF Prevents Peak Drift 

Significant electronic advances have been made in RF and preamplifier 

circuitry. With the introduction of Transpector XPR 2, there is no need for 

routine tuning of peak position and resolution, because Transpector XPR 2 

RF circuitry is crystal-controlled. It provides superior system stability by 

virtually eliminating peak drift, providing accurate and reliable data. 

In addition, the Transpector XPR 2 new preamplifier measurement 

algorithm improves the signal to noise ratio, allowing detection of currents 

to 1 x 10 -15 amps. 




Interlock Protection 

Interlock protection for the Transpector XPR 2 allows the XPR filament 

emission to operate at safe pressures (



Ordering Information Code-No. XPR2/120- ___ ___ ___ ___ ___ ___ ___ ___ ___ 

TRANSPECTOR XPR Package Ð with yttria coated iridium filaments 

100 amu, EM/FC, XPR2 Sensor PK, with interlocks 02 


None 0 




None 0 

15 ft. (4.5m) cable 1 



None 0 

15 ft. (4.5m) cable 1 



None 0 

15 ft. (4.5m) cable 1 



None 0 






Software 

None 0 







Right angle valve 

None 0 

Manual right angle valve with heating jacket 1 

Electropneumatic right angle valve 24vdc 2 

solenoids and heating jacket 


None 0 



Note: for 230VAC option, change from ÒXPR2/120Ó to ÒXPR2/230.Ó The 230VAC version includes a German style plug for the power supply and the appropriate parts for 230VAC heater operation. 

Transpector is a registered trademark and TranspectorWare is a trademark of INFICON Inc. All other products and trademarks are the property of their respective owners 


Preclude TM Photoresist Detector 


Preclude TM 

Photoresist Detector 

In Situ Photoresist Detection to 

Reduce Downtime 

TodayÕs physical vapor deposition (PVD) cluster tools demand the utmost in 

cleanliness. Even contamination in the range of a few parts per million (ppm) 

can cause problems. So when a wafer with residual photoresist is heated 

under vacuum in the degas chamber, causing the photoresist to vaporize 

and spread throughout the tool, the result can be a disaster. Your highthroughput 

PVD tool is brought to a halt and can be offline for days. ThatÕs 

extremely costly in terms of lost production and man-hours for clean-up. 


The INFICON Preclude ª Photoresist Detector prevents this expensive 

downtime by continuously monitoring the degas chambers for the 

signatures of photoresist compounds. Once Preclude detects photoresist, 

it triggers an alarm and/or provides an output that can be used to 

automatically stop the degas cycle, mitigating the contamination of the tool. 

Stop Small Problems 

from Becoming Big Ones 

Ideally, the ashing and stripping steps that precede degassing should leave 

the wafers completely free of photoresist. But that doesnÕt always happen. 

Photoresist removal can be incomplete or inadvertently missed altogether. 

Even trace levels of photoresist that are too small to contaminate the tool 

can cause problems with the deposition processes that follow wafer 

degassing, reducing your yields. 

Preclude monitors every wafer degas cycle for photoresist contamination. 

Once installed, it needs no operator involvement. In fact, unless it detects 

a contamination problem, youÕll hardly know itÕs there. 

To ensure reliability, we tested the Preclude system in the real world. 

It continuously monitored production PVD tools for well over a year, 

providing trouble-free contamination detection. A major source of this 

reliability is the INFICON Transpector¨ 2 Residual Gas Analyzer (RGA) 

thatÕs at the heart of every Preclude system. Because of its proven record 

of unrivaled durability, the Transpector is found on more tools than any 

other RGA. When the PVD tool is down for maintenance, the Preclude 

Photoresist Detector can be operated as a full-featured RGA,complete 

with high-sensitivity helium leak detection. 

Advanced Technology 

Eliminates False Alarms 

Preclude is designed to prevent PVD tool downtime and increase wafer 

yields. Any false alarms would have the opposite effect, so we were careful 

to ensure that PrecludeÕs extreme sensitivity didnÕt come at the expense 

of reliability. 

Two wafers run through degas cycles.The first (scans 4 through 29) shows a typical wafer 

where small amounts of water vapor outgas. The second wafer is contaminated and 

demonstrates the mechanisms of photoresist outgassing. An initial burst of low-vapor-pressure 

gases is released as the wafer temperature ramps up. At sufficiently high temperatures, 

photoresist compounds experience pyrolysis, which can result in large portions of a PVD 

cluster tool becoming contaminated. 

PVD tool degas chambers are typically mounted on vacuum buffer 

chambers, which are a hub for loadlocks, process chambers, passthroughs 

and cool-down stations. All this activity creates numerous pressure 

transients that could easily trigger false alarms in a less sophisticated 

photoresist detector. 

To ensure that doesnÕt happen, INFICON worked in cooperation with several 

semiconductor fabs to develop patent-pending technology that 

simultaneously looks at many factors during a suspected contamination 

event. This intelligent system gives Preclude its combination of unsurpassed 

sensitivity and reliability. 

Preclude Photoresist Detector 

Features at a Glance 

♦ Detects photoresist in PVD tool degas chambers, mitigating 

contamination that can cause costly downtime and extensive clean-up 

♦ Sensitive enough to detect trace photoresist contamination that, 

while not harmful to the tool, can cause problems with later 

deposition processes 

♦ Patent-pending technology prevents false alarms 

♦ Runs continuously and automatically without user intervention 

♦ Can share a PC with Transpector ¨ gas analyzers 




How Preclude Photoresist Detector Works 

Preclude uses quadrupole mass spectrometer technology to continuously 

monitor the degas chamber. During the degas cycle, the wafer temperature 

is typically ramped up under vacuum to 250¡C. When no photoresist is 

present, only small amounts of water vapor will outgas from the wafer 

surface. But when there is photoresist contamination, the water vapor will 

be accompanied by a rapid rise in the volatile compounds that were used to 

suspend the photoresist in a liquid state when it was applied to the wafer. 

These volatile compounds, while generally not harmful, are a precursor 

of the problems to follow. Next come the smoke-like byproducts of the 

hardened photoresist as it breaks down or burns. These can spread 

throughout the tool, leaving residues on chamber surfaces. Preclude detects 

and analyzes all these events to provide reliable photoresist detection while 

eliminating false alarms. 

1 x 10 -9 

Detection Time for Preclude vs. Competition 

Competitor’s MDPP 

Partial Pressure 

1 x 10 -2 

1 x 10 -3 

1 x 10 -4 

1 x 10 -5 

1 

Detecting Photoresist in Unclamped Degas Chambers 

Water Vapor 

Argon 

Photoresist 

21 

41 

61 

101 

121 

141 

161 

181 

201 

221 

241 

261 

281 

301 

321 

341 

361 

381 

401 

Scan Number 

Detecting photoresist is complicated by large pressure excursions typical of systems 

employing unclamped degas processes.The degas chamber is often not isolated 

from events taking place in the buffer chamber. As wafers are cycled in and out of the 

PVD cluster tool, large spikes of water vapor are observed as loadlocks are opened 

to the buffer chamber. Argon bursts associated with cooldown chambers being 

vented into the buffer chamber account for more severe effects. Outgassing from a 

wafer contaminated with photoresist and subject to degas heat is seen at scan 

number 221. A photoresist detection system must be able to distinguish harmless tool 

behavior from true photoresist events. 

Photoresist 

Signal 

3 x 10 -12 

Preclude’s MDPP 

Time 

Detection Time for Preclude vs. Competition 

Because Preclude detects photoresist at lower levels than other 

instruments, photoresist can be detected earlier. (Data based 

on published specifications. Preclude at 32 ms dwell and EM off.) 





Operation 

Maximum continuous operating pressure 1 

Maximum permissible pressure bursts 2 

Emission interlock 3 

Mass position stability 4 

Peak amplitude stability 4 

Achievable instrument reproducibility 5 

Temperature stability 4 

Detection time for one photoresist channel 6 

Detection time for six photoresist channels 7 

Activation time (time to alarm) 

Recommended preventative maintenance 

Minimum detectable partial pressure (MDPP) 8 

Minimum detectable helium partial pressure 9 

Electronics dimensions 

Overall dimensions (without interlocks) 

Detector type 

Software 

Photoresist set-up 

Alarm output 

Hardware output 

Connection to tool 


Fully automatic once photoresist recipe is initialized 

< 1 mTorr 

20 mTorr at the Preclude sensor 

Pirani thermoconductivity gauge 

< 0.1 AMU over 24 hours (after 30-minute warm-up) 

< 2% over 24 hours (after 30-minute warm-up) 

< 2% deviation 

< 1% of peak height per ¡C (with EM off) 

28 ms 

< 1 second (typical application) 

Programmable timer after detection time: 0-25 seconds 

Ion source replacement after 4,000 hours (typical application) 

3 x 10 -12 Torr (4 x 10 -12 mbar) FC operation for photoresist detection 

3 x 10 -14 Torr (4 x 10 -14 mbar) EM operation for leak detection 

4.87" (12.4 cm) x 5.62" (14.3 cm) x 7.75" (19.7 cm) 

6.65" (16.9 cm) 

Microchannel Plate EM/FC 

TranspectorWare¨ 3.1 or higher, or TWare 32 version 2.0 or higher 

Programmable masses, recipe driven 

Boolean logic for AND/OR of photoresist channels 

Relay output, 24 V at 0.5 amps 

Prewired cable on Preclude end with terminating wires on tool end, 30' (9 meter) length 


1 Recommended pressure range


Transpector® CIS2 Gas Analysis System 

Transpector ® CIS2 Gas Analysis System 

New Vacuum System Controller Saves Space 

All control functions have been consolidated into a single device that is 

mounted to the Transpector 2 RGA, freeing up rack space and simplifying 

installation. Although instructions are received from the controlling computer 

via an RS485 network, the Transpector CIS2 Gas Analysis System 

independently stores all calibration and setpoint data. This ensures that if 

communications are lost, the sensor continues to monitor and control the 

vacuum system as programmed. In addition, all functions are fully 

interlocked to protect Transpector CIS2 and your tool from component 

failure, system overpressure, or operator errors. For further protection, the 

system automatically shuts down and isolates the sensor head in case of 

power interruption, accidental pressure bursts, or component failure. 

New pumping system is smaller, lighter, and more efficient. The pumps 

can handle lighter, aggressive gases, allowing process sampling from 

atmosphere to high vacuum. 

As wafer sizes increase and chip geometries decrease, getting detailed 

and accurate information on your process becomes more vital than ever. 

The Transpector CIS2 system provides that information, using a closed ion 

source (CIS) to detect contaminants at sub-ppm levels. Optional 

TranspectorWare¨ and TWare 32 TM software works with the Transpector 

CIS2 to provide automatic or manual control as well as status information, 

while a new Vacuum System Controller (VSC) frees up expensive fab 

space by eliminating the need for rack-mounted electronics. 

Improvements Bring Unprecedented 

Functionality and Control 

New TranspectorWare or TWare 32 Software Adds VersatilityÑThese 

software packages provide automatic valve control through recipes, manual 

control of all components, and status information on all components. It 

includes a full array of basic residual gas analysis (RGA) features, including 

trend analysis, bar graph, leak check, analog, and selected peak modes. It 

also contains process monitoring features that include recipe generation, 

automated data collection, norm generation, and process deviation 

monitoring. A single PC can control multiple Transpectors in any 

combination of CIS, XPR, or open-ion-source models through an RS485 

network. 

Software Designed for Flexibility and Operating EaseÑAll Transpector 

CIS2 components are software controlled. Automatic pumpdown and 

shutdown sequences provide user-friendly operation while protecting the 

sensor if a problem develops. Opening and closing of all valves is based 

on recipes that can be started and stopped manually or via tool inputs. 

Bakeout recipes are user-programmable through a simple dialog. 

The status of all system components is available at a glance through 

an on-screen display, and all components can be controlled manually. 

In case of subsequent questions, all component activity is recorded in 

a chronological event log. 

Improvements Produce Better Data 

The Transpector CIS2 Gas Analysis System incorporates all the 

improvements of the new Transpector 2, including better zero blast 

suppression, increased abundance sensitivity (less interference between 

adjacent masses), and a signal-to-noise ratio thatÕs up to 10 times better 

than previous Transpectors and other gas analyzers. 

New Inlets Have Less Surface Area 

This minimizes surface reactions and shortens response times. 

New Smart Sensor Gauges Provide Accurate 

and Reliable Interlocks 

An ion gauge on the ultrahigh-vacuum manifold protects the RGA filament 

by preventing operation if overpressure occurs, while a Pirani sensor on the 

foreline provides additional protection. These smart sensor gauges donÕt 

require rack-mounted electronics. 

New Cleanroom-Compatible Heaters 

They reduce particulates generated in the fab. 

New Calibration Standards Allow for Qualitative 

and Quantitative References 

RGA stability data can be gathered from process gases. In addition, the 

Transpector CIS2 sampling system permits the introduction of calibration 

gases as references while keeping them isolated from the process. This 

provides an alternative for monitoring RGA stability and absolute 

sensitivities for a range of masses in the calibration gas. 

Multiple Valve Options Let You Customize 

Transpector CIS2 to your Process 

Sampling and isolation valves are available for various processes, in 

different geometries, with KF or ConFlat¨ connectors, for manual or 

automatic operation, and for a wide range of operating pressures. 




Configurations for Physical Vapor 

Deposition (PVD) Applications 

Transpector CIS2 helps reduce film defects by detecting ppm-level 

contaminants during the sputtering process. 

New PVD Ion Source 

Linear operation allows direct sampling up to 10 mTorr (1.3 x 10 -2 mbar). 

New PVD Inlet Valve 

With its small footprint, it allows full conductance for sampling base 

pressure and full ultrahigh vacuum isolation. 

Optional Calibration Gas Inlet 

Allows introduction of ppm references directly into the ion source. 

Configurations for Chemical Vapor 

Deposition (CVD)/Etch Applications 

Transpector CIS2 provides dependable process monitoring in aggressive 

gas environments. 

New CVD/Etch Ion Source 

Special shielding enhances reliability by preventing deposits that can cause 

premature failure. 

New Heated Dual Inlet 

Provides optimized sampling at base and process pressures. 

Ultrahigh Vacuum Compound Pump 

Besides being corrosionproof, it includes a nitrogen purge for longer 

pump life. 

Special Gauges 

Designed to withstand long exposures to aggressive gases. 

New Special High-Pressure Inlet 

Improves sampling response time for high-pressure applications. 

Custom Tool Integration 

For more advanced applications, INFICON offers a custom tool integration 

software package called FabGuard. This software provides sophisticated 

alarming based on the tool state and Transpector data, organizes data on a 

wafer-by-wafer basis, performs wafer-based statistic calculations, and has a 

SECS II interface for factory automation, including wafer tracking. 

How Transpector CIS2 Works 

To prevent the background residuals in the sensor and pumping package 

from masking the residuals in the sample, INFICONÕs Transpector CIS2 

uses a closed ion source with a tungsten filament. In addition to contributing 

negligible background, this filament has longer life in aggressive gas 

processes, resisting many corrosive gases (such as WF6) and reactive 

gases (such as silane). 

The closed ion source operates at relatively high pressure while the rest of 

the sensor (the quadrupole rods and detector) stays at a higher vacuum. 

This high pressure inside the ion chamber allows for relatively concentrated 

samples of process gases, enhancing the sample signal relative to the 

sensor background signals, thereby allowing for very sensitive ppm analysis. 

In CVD applications, process gas molecules flow through the sampling 

orifice; in PVD applications they go directly to the ion chamber. Electrons 

from the tungsten filament enter the ion chamber through a separate 

opening to bombard the gas molecules, converting some into charged ions. 

Varying electric fields then selectively pass these ions through the sensor 

for analysis. 

Transpector CIS2 Features at a Glance: 

♦ Detects residual process gases down to less than one ppm 

♦ New Vacuum System Controller eliminates the need for 

rack-mounted electronic 

♦ TranspectorWare or TWare 32 software allows automatic or manual 

control of all components while providing complete status information 

♦ New features improve performance in PVD and CVD applications 

Applications 

♦ Process contamination identification 

♦ Base pressure analysis 

♦ Gas purity analysis 

♦ Chemical reaction verification 

♦ Photoresist detection 

♦ Process gas verification 

♦ Vacuum system leak detection 

♦ Tool diagnostics 

♦ Preventative maintenance 

♦ Tool characterization 


The closed ion source uses a tungsten 

filament that contributes negligible 

background while resisting many 

corrosive and reactive gases. 




8 

VSC 

TRANSPECTOR 2 

1 

XXXX 

3 

14 

2 

4 

10 

XXXX 

RS485 

PIRANI 

6 

POWER MODULE 

7 

ITR 100 

13 

5 

N 2 

16 

15 

INLET OPTIONS 

9 

12 

18 

CIS 

11 

17 

Transpector CIS2 software showing the compound pump status window. Full information about 

each of the components used within the system is available through these status windows. 

Software showing a typical PVD configuration with calibration standard. 




Transpector ® CIS2 Configuration Key: 

1. Transpector 2 Electronics Unit 

2. CIS 2 Vacuum System Controller (VSC)Ð 

♦ 

♦ 

♦ 

♦ 

♦ 

♦ 

♦ 

♦ 

Control and display of vacuum system status is by 

TranspectorWareª software via the VSC. 

Sampling valve control is integrated into analysis recipes or 

by manual control. 

Manual control of all components through password access. 

Automatic pumpdown and shutdown sequences. 

Separate temperature control for manifold and sample valves up 

to 200¡C; constant temperature or timed bakeout sequences. 

Automatic protection for sensor emission and electron multiplier 

by sensing high-vacuum overpressure, foreline overpressure, 

power interruption or failure. 

Status information on all components, including operation time 

and preventative maintenance times. 

Safety and interlock control of all components, regardless of 

computer status. 

3. Transpector SensorÐ100, 200 or 300 amu with PVD or CVD/etch 

closed ion source and EM/FC mounted in a UHV manifold. 

4. UHV Compound PumpÐATH 30+ or ATH 30C (corrosive service); 

grease-lubricated ceramic bearings. 

5. Vacuum System Ionization GaugeÐITR-100 measures and protects 

analyzer vacuum. Nude sensor with dual yttria-coated iridium 

filaments (PVD) or dual tungsten filaments (CVD/etch). 

6. Foreline Pressure GaugeÐPirani sensor measures and protects 

analyzer vacuum, using tungsten element for PVD and platinum 

element for CVD/etch. 

7. Miniature Foreline Isolation Valve 

8. Independent Heaters for manifold and sampling valves 

(40¡C to 200¡C). 

9. CIS Power ModuleÐProvides 24 VDC to all components; houses 

the compound pump controller board and controls power for 

the heaters. 

10. Fan/Solenoid Valve AssemblyÐProvides cooling for the compound 

pump and solenoid activation of all valves. 

11. Diaphragm PumpÑMVP 015 dry, leak-tight diaphragm pump for 

backing the compound pump. 

12. Vent ValveÐnormally closed; opened before start of 

diaphragm pump. 

13. Purge ValveÐfor purging the compound pump bearings in 

aggressive gas applications. 

Inlet Valves ÐÐ normally closed, electropneumatic, 70-110 psig air. 

14. PVDÐ90¡ Isolation ValveÐfully open or closed for use with PVD 

closed ion source. 

15. Dual-Pressure In-Line Inlet ValveÐwith two replaceable orifices to 

sample process and background pressures of< 100 Torr with 

CVD/etch closed ion source. 

16. Dual-Pressure 90¡ Inlet ValveÐ90¡ version of 15. 

17. Dual-Pressure Inlet Valve with High-Pressure SamplingÐBypass 

to compound pump will draw a sample of 10 sccm to the orifice 

for high-pressure applications requiring fast response time. 

18. ComputerÐfor controlling and displaying TranspectorWareª or 

TWare 32ª software. 


Not shown: Optional Calibration Gas Flow StandardÐfor RGA tuning and quantifiable references. 





Transpector ® CIS2 Gas Analysis System 

1 to 100, 1 to 200 or 1 to 300 amu 

Mass range 

5 Depends on orifice size selected in the inlet system. 

Detector type 

Resolution (per 1993 AVS Recommended Practice) 

Base pressure performance 

(UHV system after 8-hour bake @ 200¡C) 

Ambient temperature 

Relative humidity 

Utility requirements 

high-performance combination electron multiplier/Faraday cup (EM/FC) 

< 1 amu wide @ 10% peak height over entire mass range 

< 5 x 10 -9 Torr ( 6.6 x 10 -9 mbar) 

(UHV system after 8-hour bake @ 200¡C) 

20¡C to 50¡C 

² 80% 

No rack space required. 

110/120 VAC, 4-amp or 220/240 VAC, 2-amp outlet located at the power module 

110/120 VAC, 1.5-amp or 220/240 VAC, 0.75-amp outlet located at the foreline pump 

70-110 psig (5.8-8.6 bar) of compressed air located near the compound pump 

15 psig (1.3 bar) of dry nitrogen located at the compound pump for CVD/etch applications (10 sccms consumption) 

Sensitivity 

35 eV @ 200 mA 70 eV @ 2000 mA 

EM/FC (as FC) 

measured @ 3 x 10 -3 Torr (4 x 10 -3 mbar) 

measured @ 1 x 10 -7 Torr (1.3 x 10 -7 mbar) 

EM/FC (as EM) 1 

Process Monitoring 

Background Monitoring 

³ 1 x 10 -6 amps/Torr (7.6 x 10 -7 amps/mbar) ³ 1 x 10 -5 amps/Torr (7.6 x 10 -6 amps/mbar) 

³ 1 amps/Torr (0.76 amps/mbar) ³ 10 amps/Torr (7.6 amps/mbar) 

Zero blast 

< 1 ppm contribution of zero blast @ mass 2 with 3 mTorr of Ar 

PVD ION SOURCE 

Ion source conductance 

Process pressure range 2 

Minimum detectable composition change 3 

0.1 l/s (1 x 10 -4 m3/s) 

1 to 10 mTorr (1.3 x 10 -3 to 1.3 x 10 -2 mbar) 

0.2 ppm 

Minimum detectable partial pressure 

35 eV @ 200 mA 70 eV @ 2000 mA 

EM/FC (as EM) 

CVD/ETCH ION SOURCE 

Ion source conductance 

² 5 x 10 -13 Torr (6.6 x 10 -13 mbar) ² 5 x 10 -14 Torr (6.6 x 10 -14 mbar) 

0.7 l/s (7 x 10-4 m3/s) 

Process pressure range 

(defined by orifice diameter in inlet system) 

Orifice Size (Optimum Pressure) 

0.01, 0.1, 1, 10, 100 Torr 

(0.013, 0.13, 1.3, 13, 133 mbar) 

Minimum detectable composition change 3 

< 1 ppm 

1, 4, 5 

Minimum detectable partial pressure 

Maximum pressure EM/FC (as EM) 35 eV @ 200 m 

35 eV @ 200 mA 70 eV @ 2000 mA 

0.01 Torr (0.013 mbar) 


0.1 Torr (0.13 mbar) 


1 Torr (1.3 mbar) 


10 Torr (13 mbar) 


100 Torr (133 mbar) 


1 Values were measured with an electron multiplier gain of 7.5 x 10 5 . 

2 Higher operating pressures (up to 30 mtorr) are possible with reduced performance. 

3 Value is measured as minimum detectable change of CO 2, N 2, O 2 or He ion current in the presence of 100% argon. 

4 Minimum Detectable Partial Pressure (MDPP) is calculated as the standard deviation of the noise (minimum detectable signal) divided by the sensitivity of the sensor (EM or FC) 

with a dwell of one second. 




Ordering Information *Code-No. CIS2 -____ ____ ____ ____ ____ ____ ____ ____ ____ ____ 

AMU range Transpector CIS 2 

100 AMU 

200 AMU 

300 AMU 

Sensor type 

PVD/LG electron multiplier 

CVD/LG electron multiplier 

IMP/LG electron multiplier 

Pumping system 

Alcatel ATH 20/40, thoria-coated iridium 

Alcatel ATH 20/40C, w/purge, W 

Alcatel ATH 20/40C, w/purge, for atmosphere 

Inlet valve 

PVD valve and heater 

CVD dual 90¡ valve, w/CF35 

CVD dual in-line valve, w/CF35 

CVD dual in-line valve, w/sample draw, w/CF35 

CVD dual 90¡ valve, w/sample draw, w/CF35 

Single capillary atmospheric inlet 

CVD dual 90¡ valve, w/sample draw, w/KF40 

CVD dual 90¡ valve, w/KF40 

CVD dual in-line valve, w/sample draw, w/KF40 

CVD dual in-line valve, w/KF40 

V1 orifice 

None 

Gasket (Ni VCR) 

10 mTorr 

100 mTorr 

1 Torr 

10 Torr 

100 Torr 

1.5m capillary 

3.0m capillary 

V2 orifice 

None 

Gasket (Ni VCR) 

10 mTorr 

100 mTorr 

1 Torr 

10 Torr 

100 Torr 

PM control cables 

1m 

3m 

5m 

9m 

Foreline pump 

None 

Standard pump, 120 VAC 

Standard pump, 230 VAC 

Foreline hose control 

None 

1m 

3m 

5m 

9m 

Calibration 

None 

Gasket and 4-VCR plug (for PVD inlet) 

PVD gas valve, hardware 

CVD gas valve, hardware 

1 

2 

3 

2 

4 

6 

1 

3 

4 

01 

02 

03 

04 

05 

07 

11 

12 

13 

14 

00 

01 

02 

03 

04 

05 

06 

20 

21 

00 

01 

02 

03 

04 

05 

06 

1 

3 

5 

9 

0 

1 

2 

0 

1 

3 

5 

9 

0 

1 

2 

3 

* Consult factory before ordering a CIS2 for proper application assistance. 




FabStar TM Gas Analysis System 

FabStar TM 

Gas Analysis System 

Exhaust Abatement and 

Process Optimization 

Reliable Identification of Gases at 

Atmospheric Pressure 

FabStar is a corrosive-resistant, benchtop gas analysis system that provides 

quantitative and qualitative analysis of gases in semiconductor fabrication 

facilities. Its user interface provides maximum flexibility for correlation of 

FabStar data with process conditions. 

Semiconductor Applications 

♦ Exhaust Abatement 

♦ Process Optimization 

♦ Process Research 

♦ Alternative Chemistries 

♦ Scrubber Efficiency 

♦ PFC Research 

♦ Gas Optimization 

FabStar Features at a Glance 

♦ Simple operation and fast response time 

♦ Qualitative and quantitative analysis 

♦ Monitors up to 64 components 

♦ Detection limits down to ppm level 

♦ No memory effects 

FabStar Offers 

♦ Valve control and system operation via software 

Specifications 

Mass Range 

1 - 100 amu 

1 - 200 amu 

1 - 300 amu 

Gas Connection Stainless steel capillary 

1/16" O.D. (1.6 mm O.D.) 

3.28' (1 meter length) 

Gas Inlet 

Valve control via software with two stage pressure reduction 

Sampling Pressure 1 atmosphere (760 torr) (1 bar) 

Capillary Temperature Up to 200û C 

Dimensions (WxHxL) 11" x 16" x 28" (280x420x710 mm) 

Weight 

99 lbs. (45 kg) 

Configuration 

♦ Qualitative analysis of all gases using spectrum libraries 

♦ Quantitative analysis with concentration algorithm and 

statistical functions 

4 

1 

2 

♦ Gas concentrations plotted over user-defined times to identify trends 

3 

Note: Contact the sales office nearest you for ordering information. 

Key: 

1 Heating conditioning of the analysis chamber 

2 Heated gas inlet chamber 

3 Temperature controlled gas transfer line (capillary) 

4 Quadrupole mass spectrometer 


PPM 422 Plasma Process Monitor 


PPM 422 Plasma Process Monitor 

User Advantages 

♦ Detection of neutral particles and of positive and negative ions from 

the plasma 

♦ Energy analysis of neutral particles and of positive and negative ions 


♦ Measurement of radicals 

♦ End point detection of plasma processes 

♦ Large dynamic range 

♦ High measuring speed 

The PPM 422 is a differentially pumped mass spectrometer unit with 

integrated energy analyzer for measuring neutral particles, positive and 

negative ions, as well as for energy analysis of ions and neutral particles 

in plasma processes. 

The extraction orifice is located near the plasma. It can be floating or 

biased. Directly behind the extraction orifice, there is a lens and the ion 

source with 2 filaments, followed by a lens and the energy analyzer. An 

additional lens focuses the ions into the mass filter. The mass filter, the ion 

source, the lens system, the energy analyzer, and the deflection unit are 

isolated to ground and may be biased up to 500 V. 

The PPM is operated with the Balzers Quadstar TM software package 

specially optimized for this application. 

1 Turbo pump 

2 Secondary electron 

multiplier SEM 

3 Deflection unit 

4 Quadrupole 

mass filter 

5 Extraction orifice 

6 Safety shield 

against arcing 

7 Entrance lens 

8 Ion source 

9 Transfer lens 

10 Energy analyzer 

Mass spectrum of positive ions 

Mass spectra of positive ions from a plasma reveal detailed information of the various species 

contained in a plasma, and therefore allow an insight into plasma chemistry. The basis for 

reactive ion etching is the conversion of the material to be removed into volatile reaction products 

which can be pumped away. An example is the etching of tungsten in SF6 plasma where metallic 

tungsten is converted into WF6. This reaction product can be recognized in the mass spectrum 

by means of the various dissociation products (WF5+, WF4+, WF3+, WF2+). 

Mass spectrum of negative ions 

Negative ions are a major component in a plasma with electro-negative species like fluorine, 

chlorine, oxygen or hydrogen. In certain plasma processes like plasma polymerization, the 

negative ions play a key role, which is partly due to the very long residence time of negative ions 

in the glow region. Therefore, detection of negative ions is highly desirable. The figure shows 

a mass spectrum of negative ions from a SF6 plasma in the mass range 100-200 amu. 

Besides the peaks due to the etch gas SF6, one can recognize various peak groups related 

to the etched molybdenum. 




Composer® Gas Composition Controller 

Composer ® Gas Composition Controller 

Composer ¨ Gas Composition Controller offers a simple and reliable way to 

measure and control the composition of binary gas combinations to a level 

of precision unavailable before now. 

How do you verify that precursor / dopant delivery 

is stable throughout your structure growth? 

Composer can measure and control the ratio of a variety of binary gasses. 

Its wide pressure range (70 to 1000 Torr) and high sensitivity (for example, 

its ability to measure 0.00011% of TMIn in H2), make Composer an 

indispensable tool for semiconductor applications, in both R & D and 

production environments, as well as for many industrial processes using 

binary gas mixtures. 

Accurately Determines Precursor / 

Carrier Gas Ratios 

Composer consists of two main components: an acoustic cell transducer 

and a controller. Based on the principle that sound velocity varies with gas 

composition, Composer determines the composition of a binary gas mixture 

inside the transducerÕs acoustic chamber by measuring the speed of sound 

waves through the chamber. 

Unprecedented Sensitivity and Reliability 

Our resonance measurement technique enables a frequency resolution of 

0.1 Hz, equivalent to 0.00011% of TMIn (TriMethylIndium) in H2. This is 

about 10 times better than the resolution of acoustic time-of-flight techniques. 

The resonance measurement technique also allows operation to pressures 

as low as 70 Torr. Again much better than acoustic time-of-flight techniques. 

Composer may allow your old reactor to build the latest devices. 

Easy to Calibrate 

The transducer has no consumable parts, is easy to calibrate, and is 

highly stable. 

Composer is calibrated by simply purging the transducer cell with pure 

carrier gas and pressing the Reference Zero button. 

Monitors and Controls the Gas Mixture 

Composer can be set up simply to monitor gas composition, allowing the 

operator to alter the flow of gas through the bubbler to correct the 

concentration as needed. The system can also be configured to maintain or 

vary the concentration automatically. For applications with very high flow 

rates, a portion of the gas can be sampled. 

Provides Control of Precursor Fluence 

When set up for automatic control, Composer can control either concentration 

or bulk flow by feeding precision analog signals to the bubbler and/or 

carrier gas flow controllers. A PID or fuzzy logic control loop adjusts the 

precision analog signals to keep concentration or bulk flow at the desired 

set-point. Relays can also be made to open and close in accordance with 

user defined setpoints. 

Composer can be integrated into a reactorÕs control system using either 

digital or analog signals. 

Uses Source Material Efficiently 

As the amount of precursor in the bubbler decreases, Composer detects 

this change in precursor pick-up efficiency and increases the flow rate of 

carrier gas through the bubbler accordinglyÐminimizing transientsÐand 

using expensive source materials efficiently. 

Monitors Carrier Gas Flow Stability 

Composer can be used to verify that carrier gas flow is stable throughout 

and between process runs. The transducer is inherently stable and can 

be relied on to reproduce results day after dayÐfor the long haul. 

Bulk Flow or Concentration Control? 

Composer can control either bulk flow or concentration control. Composer 

may be configured to emulate the measurement and control features of 

existing instruments. This allows the easiest possible retrofit of the 

ComposerÕs superior performance into your overworked reactor. 

Or, choosing the concentration control configuration still provides dynamic 

flux control of precursors into your reactor, but with the additional benefit of 

total flow conservation. This advanced control scheme insures the sum of 

the bubbler and dilution (push) flow is absolutely constant.. Either way 

Composer is an easy choice. 




Verifies That Lines are Completely Purged 

Composer can be used to verify that gas lines are completely purged 

ensuring the integrity of gas delivered to your process. 

It’s not just for MOCVD 

Composer is versatile enough to be used in many applications requiring 

precise measurement of binary gases. 

Choose What’s Right for Your Process 

The console comes in either an LCD or LED version. All parametric values 

can be entered through the front panel with the LCD console, while a 

computer interface is required for the LED model. 

The transducer can be ordered with elastomer seals, either Viton¨ or 

Kalrez¨; or with metal seals for use with hygroscopic materials. 



Operating Pressure Range 

Routine Overpressure Rating 

Maximum Transducer Pressure 

Temperature Range 

Gas Flow Range 

Temperature Stability 

Frequency Stability 

Sensitivity 

Reproducibility 

Sensor Body and Pipes 

Isolation Diaphragms 

Inlet / Outlet 

Leak Rate 

Measurement Rate 

Swept Volume 

Power 

Required: 

Optional: 


70 to 1000 Torr; 9.3 to 133.3 kPa 

up to 1520 Torr, 202.7 kPa 

6200 Torr (826.6 kPa) Absolute; pressure over 6200 Torr may damage Transducer diaphragms 

Up to 65¡C (Transducer) 

Up to 1800 sccm 

Controlled within 0.1¡C 

Stable within 0.0045% 

0.00011% of TMIn in H 2 



Ordering Information Code-No. CP- ____ ____ ____ ____ ____ ____ ____ ____ 

Base Unit 

Composer console with LED indicators 

Composer console with LCD display 

Composer console with LED and analog I/O option 

Composer console with LCD and analog I/O option 

1 

2 

3 

4 

Transducer 

Transducer system VITON ¨ seals 

Transducer system KALREZ¨ seals 

Transducer system Ni plated Inconel¨ seals 

1 

2 

3 

Power Supply Package 

None 

80-250 VAC/4 ft. (1.2m) standard cable (standard plug) 

80-250 VAC/4 ft. (1.2m) standard cable (German plug) 

0 

1 

2 

Power Supply Cable Extension 

None 

15 ft. (4.5m) cable 

30 ft. (9m) cable 

Special length cable (10 ft. increments up to 100 ft.) 

0 

1 

2 

RS232 Communications Cable 

None 


30 ft. (9m) cable 

Special length cable (10 ft. increments up to 100 ft.) 

0 

1 

2 

Composer / Transducer Interconnection Cable 




Software Option 

None 

Monitor Software 

Rack Mount Kits 

None 

1 unit rack mount kit 


1 

2 

3 

0 

1 

0 

1 

2 


TWare32 TM for Windows ® 95/98/NT/2000 


TWare32 TM 

for Windows ® 95/98/NT/2000 

Collect and Display RGA Data With 

Unmatched Convenience 

Not all RGA applications require all the latest features (and the complex 

software screens needed to control them). TWare32ª gives you all the 

popular RGA functionsÐmonitoring, leak detection, recipe-controlled 

operation and tuning/calibrationÐin a simplified system thatÕs easier and 

faster to use. 


Right from the start, youÕll notice how well thought out TWare32 is. ItÕs 

preconfigured for typical process monitoring, immediately ready to show 

a bar graph and trend display of commonly monitored gases such as 

hydrogen, water vapor, nitrogen, oxygen, argon and carbon dioxide. 

You can also easily customize TWare32 using the wizard-guided 

recipe editor. 

TWare32 is easy and fast to use. We kept it simple by focusing on the RGA 

functions people use most. The intelligent user interface lets you access 

data with fewer keystrokes and mouse clicks. Behind this elegant simplicity, 

youÕll find state-of-the-art software that runs on Windows¨ NT platforms, as 

well as Windows 95, 98 and 2000. 

TWare32 helps you get the most out of your Transpector RGAs, including 

the original Transpector, XPR, XPR2 and Transpector 2 models, as well as 

the CIS2 and Preclude. 

If you only need to operate one Transpector, the single-sensor version of 

TWare32 is a cost-effective solution. With the multisensor version, youÕll be 

able to control a network of various types of Transpectors from a single 

computer. You wonÕt need to find a slot for an RS485 board either, since the 

new TCA485 Transpector Communications Adapter plugs right onto the 

back of your PC using an available RS232 port. 


♦ New simple design makes it easy to do basic gas analysis functions 

♦ Works with Windows 95/98/NT/2000 

♦ Use with all Transpector RGAs 

♦ Single sensor and multisensor versions 

♦ New TCA485 Transpector Communications Adapter plugs onto back 

of computer, eliminates need for internal RS485 board 


Residual Gas and Process Gas Analyzers TWare32 TM for Windows ® 95/98/NT/2000 

Monitor Mode 

TWare32 can be configured to capture all data, all the time, while 

simultaneously displaying it in the optimum format for viewing. Displays 

may be analog, bar, trend, partial pressure and up to 30 selected peaks 

over any mass range. The File Open function lets you scroll through all data 

to quickly find what youÕre looking for. Data can also be exported to a 

spreadsheet program, greatly enhancing post-process analysis. 

D 

E 

A 

Three graphs permit simultaneous viewing 

of total pressure (top), user-selected masses 

over time (middle) and full scan capabilities 

(bottom). Masses and lines are color 

coordinated. 

A 

C 

F 

B 

B 

While all data from the selected scan range 

is stored at all times, the display remains 

uncluttered since only the masses youÕve 

selected are displayed. 

C 

Moving the cursor to a specific time 

automatically freezes the scan and displays 

the appropriate data. 

D 

This pull-down menu makes it easy to switch 

between sensors. 

E 

Frequently used keys such as filament 

emission, EM, start/stop, freeze, change 

mode, and increment/decrement stored 

data files are always available. 

F 

Checking the Selected Peaks box 

immediately changes the bottom display 

from full spectrum scanning to only the 

masses youÕve selected. This provides 

data faster. 

I 

H 

G 

This pull-down menu makes it easy to run a 

recent recipe. 

H 

You can quickly switch between the major 

modes (monitor, run, leak and tune) with these 

buttons or the right-hand mouse button. 

I 

A standard Windows-style toolbar lets you 

quickly close, open, create a recipe, take a 

snapshot of data, print files, and get complete 

online help. 

G 


TWare32 TM for Windows® 95/98/NT/2000 


Leak Check Mode 

D 

The full-range thermometer-type display, 

trend chart and audible tone output help 

you pinpoint leaks quickly and easily. 

B 

A 

B 

All modes show ÒrealÓ time. 

Warning and alarm levels can be set 

automatically and modified manually. 


C 

C 

D 

Simultaneously view time-trend, 

thermometer-type and total 

pressure displays. 

Leak Check features include 

programmable mass, scan time (dwell), 

start/stop, sound and full-screen display. 

A 

A 

B 

Tune Mode 

ÒCalibrateÓ automatically adjusts the 

multiplier voltage and sensor sensitivity 

to achieve a desired value, ensuring 

measurement consistency, reliability and 

repeatability. ÒTuneÓ allows the user to 

adjust mass resolution or mass position. 

D 

A 

B 

These buttons make it easy to store and 

recall tuning parameters and display 

markers that aid in positioning peaks and 

adjusting resolutions. 

Tune using up to 10 masses 

(two shown). 

C 

C 

C 

Mass position and resolution can be 

tuned automatically or adjusted manually 

with these buttons. 

D 

Parameters for each sensor can be 

adjusted to optimize performance. 




Easily Create Custom Recipes 

Recipe Editor 

This wizard makes it easy to create or edit a customized recipe for your 

particular application. It guides you step by step, asking for only the 

necessary information. For advanced users, a tab-style recipe editor lets 

you quickly jump to the parameters of interest. 

A 

B 

C 

D 

E 

F 

Description Screen: 

Sensor State Screen: 

Spectrum Screen: 

Collection Parameters Screen: 

Scheduler Screen: 

Finish Screen: 

Here you can name the recipe, add a description, and specify whether data should be collected for the 

full spectrum or selected peaks. 

Select the emission and EM initial and end states. 

Select scanning parameters and trend display masses. TWare32 will estimate the scan duration. 

Select the scanning interval and the way you want the data to be saved. 

Set the start and stop conditions, and number of scans. 

View a summary of your recipe information, and save it as a recipe file. If there are any errors, the ÒbackÓ button 

makes it easy to go back and make changes. 

F 

D 

E 

C 

B 

A 





TWare 32 for Windows® 95/98/NT/2000 

SPECIFICATIONS 

Transpector Models Supported 

Communications Interface 

Communications Baud Rate 

Maximum Communications Cable Length 

All Transpectors, including Transpector, Transpector 2, Transpector AGM, Transpector CIS, 

Transpector XPR, Transpector XPR2, CIS2 and Preclude 

RS232 or RS485 via TCA485 

RS232 Ñ User Selectable (4800 or 9600 (default)) 

RS485 Ñ 57,600 

RS232 Ñ 30.5 meters (100 feet) 

RS485 Ñ 305 meters (1000 feet) 


COMPUTER SYSTEM REQUIREMENTS 

Minimum specifications for 

operating 1 or 2 Transpectors 

Minimum specifications for 

operating 3 or more Transpectors 

Processor Pentium I Pentium II 

Processor Speed 166 MHz or greater 233 MHz or greater 

RAM 32 MB or greater 64 MB or greater 

Hard Disk Space for Loading TWare32 5 MB or greater 5 MB or greater 

Hard Disk Space for Data Storage 500 MB or greater 500 MB or greater 

Monitor (Desktop) 14" SVGA or greater 14" SVGA or greater 

Monitor Resolution 800 x 600 or greater 800 x 600 or greater 

Serial Port One RS232 port for single or One RS232 port for single or 

multi with TCA485 

multi with TCA485 

Operating System Windows NT 4.0 or greater, Windows NT 4.0 or greater, 

Windows 95, or Windows 98, or Windows 2000 Windows 95, or Windows 98, or Windows 2000 


TWare32 Ñ Single (Diskette) 

TWare32 Ñ Multi (Diskette) 

TCA485 (U.S. Version) 

TCA485 (German Version) 

TCA485 (Japanese Version) 

TCA485 (U.K. Version) 

Code No. 

911-339-G1 

911-339-G2 

911-600-G2 

911-600-G3 

911-600-G4 

911-600-G5 

TWare32 User Guide 074-334 

TWare32 Cleanroom User Guide 

074-334CR 



Pressure Converters 

Pressure Converters 

General 

Gas analysis applications involving gas pressures too high for direct 

exposure to the quadrupole sensor (pressures greater than 1 x 10 -4 mbar) 

require a pressure converter to reduce the pressure and keep the sensor 

at high vacuum. With a pressure converter, the quadrupole sensor may be 

used for such high-pressure applications as sputtering, vacuum furnace 

analysis, and analysis of laser gas. 

Pressure converters use orifices and/or capillaries to reduce the partial 

pressure of each gas-mixture component by a fixed proportion without 

mass discrimination. 

An orifice, a small disk with a defined hole, acts as a conductance limitation. 

When both the volume and the high vacuum pump speed are constant, the 

orifice hole size determines the pressure at the quadrupole sensor. Orifices 

are available in various sizes to cover various pressure ranges. 

High vacuum 

10 -5 Torr (mbar) 

1 10 100 760 1500 Torr 

1.3 13.3 133 1000 2000 mbar 

10 Torr 

Single Inlet or Dual Inlets allow sampling via 

orifice(s) with approximately one decade of 

sampling range per orifice. Standard orifices are 

10mT, 100mT, 1T, 10T and 100T. 

Single Inlet 

10 Torr 

Dual Inlet 

For high pressure sampling, a high pressure 

by-pass can be used for pulling the sample to 

the RGA to improve the response time. 

Dual Inlet with High Pressure By-pass 

100 Torr 

IPC-2A has the full conductance of a wide open 

valve for UHV sampling and a single orifice for 

high pressure sampling. 

IPC 2A 

10 Torr 

The atmospheric capillary sampler uses two 

stages (a capillary and an orifice) to reduce the 

pressure from atmosphere to high vacuum 

where the RGA can analyze the sample. 

100 Torr 

Atmospheric sampler 

2 atmospheres 


IPC400 Pumping Packages 



The IPC400 pumping packages extend the sampling range of the 

Transpector Gas Analysis System. These dry pumping packages are small, 

lightweight and portable. Combined with any standard open ion source 

Transpector, they can sample any process from two atmospheres to high 

vacuum. 

Typical Applications 

The IPC400 pumping system has the flexibility to work with most high 

pressure applications such as: 

♦ RTP, typically at atmosphere 

♦ LP CVD 

♦ CVD 

♦ Some Etch applications 

♦ High pressure PVD such as IMP 

♦ 300 mm applications such as Degas modules 

♦ Industrial applications 

Flexibility 

The IPC400 is available in corrosive or non-corrosive pumping packages 

and various inlet designs for installation in any orientation. The inlet options 

are: 

♦ The proven IPC-2A Pressure Converter (manual) 

♦ New manual single orifice inlet, manual or electropneumatic versions, for 

applications with one pressure range 

♦ Dual inlets from the high end CIS2 design Ð These include various 

process connections (CF40, KF40 and KF25) in an in-line orientation 

♦ Dual inlets with a high pressure by-pass for process pressures greater 

than 5 Torr (improves response time) 

♦ Multi-capillary inlet Ð for applications from 100 Torr to two atmospheres 

Features 

The IPC400 Pumping System has an integrated compound pump which 

allows interlocking the RGA simple. The 24 v DC diaphragm pump is small 

and lightweight and can be used worldwide. The IPC400 controller provides 

for valve operation and a single start / stop button. A new line of cleanroom 

compatible heaters is also controlled via the controller. These single 

temperature 150 o C heaters provide uniform heating for cleaning the vacuum 

surfaces as well as the RGA. 

Design Your Own System 

The IPC400 combined with the reliable Compact FC or FC/EM Transpector 

2 provides the smallest package. Yet, the IPC400 can be matched with any 

High Performance Transpector 2 to cover a mass range up to 300 AMU. 

By simply choosing the appropriate RGA for your budget or application, you 

will have a powerful sampling system designed for monitoring contaminants 

down to the 100 ppm level. 







Ultimate pressure 

Inlet pressure 

Available Inlets: 

IPC-2A Manual version w/heater 

IPC-2A Orifices Available: 

Torr (mbar) 

mbar 

Torr (mbar) 

< 2 x 10 -8 

Inlet Dependent 

10 mTorr (1.3 x 10 -2 mbar), 150 mTorr (2 x 10 -1 mbar), 

1 Torr (1.3 mbar), 10 Torr (13 mbar) 

Single Orifice Inlet (Manual or Electropneumatic versions) 

Dual Inlet, In line, KF25 process connection with heater 

Dual Inlet, In line, KF25 process connection 

with high pressure by-pass with heater 

Dual Inlet, In line, KF40 process connection with heater 

Dual Inlet, In line, KF 40 process connection 


Dual Inlet, In line, CF40 process connection with heater 

Dual Inlet, In line, CF 40 process connection 


Single and Dual Inlet Orifices Available: 

Atmospheric Inlet - Multi-capillary with inlet heater 

(no capillary heater) 

Atmospheric Inlet Capillaries Available: 

Process connection flange 

Inlet valve control 

Pumping system: (standard) 

(corrosive) 

IPC400 controller 

IPC400 remote capabilities 

IPC400 power 

IPC400 operating temperature 

Relative humidity 

Heating jackets 

Compressed air (valve operation) 

Nitrogen (compound pump purge) 

No orifice (for pressures less than 1 mTorr) 

10 mTorr (1.3 x 10 -2 mbar), 100 mTorr (1.3 x 10 -1 mbar), 

1 Torr (1.3 mbar), 10 Torr (13 mbar) and 100 Torr (133 mbar) 

1.5 meters and 3 meters 

Inlet Dependent - KF25, KF40, CF40 (dual inlet), 

1/4Ó MVCR (single inlet) and 1/16Ó OD capillary (atm inlet) 

Manual using IPC400 controller 

ATH 30+ with leak tight dry diaphragm pump 

ATH 30C with leak tight dry diaphragm pump 

Interlocks RGA filament and pumping system, single start / stop button, 

manual control of inlet valves, 24V power for complete system 

Remote Start / Stop TTL signal 

Remote Inlet Valve TTL signals (3) 

Switchable: 100/120 VAC or 220/240 VAC 

20 o C to 50 o C 

< 80% 

Fixed single temperature Ð 150 o C 

Required Ð 70-110 psig (5.8 - 8.6 bar) 

Required for corrosive pumping system - 

15 psig (1.3 bar) of dry nitrogen 

Note: Corrosive version comes with a regulator to allow 70-110 psig of dry nitrogen to be used for both the valve control and nitrogen purge. 



B3 

Thin Film Metrology 

Sensor System

Thin Film Metrology Sensor System 

Contents 

Products 

LES1200 Thin Film Metrology Sensor System. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B3.3 

Technical Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B3.5 

Ordering Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B3.5 

Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B3.6 

OES 1200 Optical Emission Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B3.7 

Technical Data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B3.9 

B3.2

LES1200 


LES1200 Thin Film Metrology Sensor System 

Flexible Enough to Be Used Many Ways 

Whether developing a new process, decreasing the number of test wafers 

in the fab, or increasing yield on a small-volume production run, the LES1200 

easily adapts to your needs. 

Streamline Production 

The LES1200 monitors every product wafer, detecting process flaws as they occur. 

Enhance Overall Equipment Effectiveness 

Semiconductor manufacturing tools are only processing product wafers 30% 

to 40% of the time. As wafer size increases, feature size decreases, and the 

cost of production rises, minimizing unproductive time becomes more 

important than ever. One way to do this is through more comprehensive in 

situ monitoring from a wafer-state sensor that uses full wafer imaging, so 

your process can be better understood and controlled, and problems can 

be detected earlier. 

In Situ Process Monitoring and Control 

The LES1200 Thin Film Metrology Sensor combines the best of established 

sensor technology, including interferometry, reflectometry, and optical 

emission, with advanced analysis software. This results in unique capabilities 

that significantly impact the cost, quality, and economics of IC manufacturing. 

Rate, Uniformity and Endpoint 

for Every Wafer 

The LES1200 provides real-time determination of endpoint, as well as rate 

and uniformity, over the entire wafer surfaceÑon every product waferÑ 

reducing the number of monitor wafers required and the number of product 

wafers scrapped due to undetected problems. Used in both plasma etching 

and deposition processes to visualize wafer processing and directly 

measure rate and uniformity, the LES1200 Thin Film Metrology Sensor 

expedites process development, transfer to production, and enables rapid 

scaling up to larger diameter wafers and smaller feature sizes. 

The LES1200 pays for itself in a matter of months by significantly 

enhancing equipment productivity. It provides data for SPC, increases 

throughput, streamlines equipment maintenance, and saves time. And 

because one PC can control up to four independent sensor modules, 

per-chamber cost is minimized. 

This smart sensor monitors every product wafer, in situ. Process flaws are 

detected as they occurÑwith fewer expensive, time consuming test wafers, 

and before expensive additional processing steps. Because it uses signals 

from over 180,000 independent points on the wafer (current measurements 

are from 1 to 50 points), the LES1200 is very robust in production applications. 

Its measurements remain accurate and reliable regardless of wafer 

placement, underlying topography, patterns, etc. 

The LES1200 can be used to gather data for SPC or for advanced process 

control. Preventive maintenance can be scheduled based on actual 

equipment performance. Equipment requalification takes less time and 

consumes fewer wafers. 

Simplify Development 

The LES1200 provides immediate feedback, allowing rapid determination 

of the effect of process parameters on process performance. Quantitative 

measurements are available within seconds, instead of the minutes or 

hours previously required. This significantly decreases both the time and 

materials needed for process development. 

Speed Up Process Transfer 

The same sensor can be used for both development and production. 

This simplifies process transfer and allows accumulated knowledge to be 

used for improving productivity. 

A Fully Integrated System 

The LES1200 consists of up to four computer controlled CCD-based sensors, 

filters, optics, and software. Each sensor head is mounted directly onto a 

semiconductor etching or deposition tool (wherever there is a clear view of the 

wafer). The LES1200 also incorporates communication with the tool to receive 

recipe IDs and to provide a real time endpoint signal (thereby decreasing 

operator intervention), and with the factory defect management database to 

provide measurements for SPC. The software combines a field proven 

analysis engine with the advanced features of Windows NT 4.0. Fifteen signal 

processing algorithms, including optical emission, interferometry, and 

reflectometry analysis, yield a wealth of information about the process. 

Each sensor can be independently operated in either manual mode or recipe 

mode. In manual mode, the software allows complete control, useful when an 

in-depth analysis of each wafer is required, such as during process 

development or equipment troubleshooting. In recipe mode, wafers are 

monitored automaticallyÐÐ simplifying operation and reducing or eliminating 

operator intervention. 

B3 

B3.3


LES1200 

System Components 

♦ PC computer (minimum Pentium or equivalent processor) 

♦ PCI multi-sensor control board for up to four sensor heads 

♦ Software for data acquisition, control and analysis 

♦ Remote, pixel-memory-mapped CCD head(s) 

♦ Control daughter board(s) 

♦ Imaging optics 

Options 

♦ External light source 

♦ TR1200 Trench Metrology Sensor head 

♦ Tool communication interface and software 

Installation Requirements 

♦ Optical access to the wafer via a viewpoint at an angle of less than 60¡ 

from wafer normal (larger angles can usually be accommodated) 

♦ Clear view of the region of interest on the wafer during processing 

Sensor Platform System 

Sensor Platform: 

♦ FabGuard software 

♦ PCI sensor control board 

Add Ð one or more Thin Film or Trench Metrology sensor heads 

Add Ð one computer control system 

Add Ð communications package (optional) 

two days installation and training 

one year technical support and updates 

(software and documentation) 

LES1200 Thin Film Metrology 

Sensor Head 


♦ Remote, pixel-memory mapped CCD head 

♦ Control daughter board 

♦ Bi-directional digital cable 

♦ Single focal length lens 2 

♦ Two narrow bandpass filters 2 

♦ Mount for sensor head 

OR 

TR1200 Trench Metrology Sensor Head 1 


♦ Laser head 

♦ Beam expansion and re-focusing optics 

♦ Laser-line bandpass filter 

♦ Neutral density filter 

♦ Remote, pixel-memory mapped CCD head 

♦ Control daughter board 

♦ Bi-directional digital cable 

♦ Mount for sensor head 

1 632.8mn HeNe or 543.5nm HeNe laser standard; other lasers optional. 

2 Focal length/wavelength options; application dependent. 

B3.4

LES1200 


Ordering Information SPSC -____ ____ ____ ____ ____ ____ ____ 

Sensor platform 

1st sensor head: 

None 

LES1200 Thin Film Metrology Sensor Head 

TR1200 Trench Metrology Sensor Head 

2nd sensor head: 

None 



3rd sensor head: 

None 



4th sensor head: 

None 



Computer option: 

None (set-up fee for customer supplied computers) 

COMP-D desktop computer 

Standard configuration for system with one sensor 1 

300 Mhz Pentium II with 128MB RAM; PCI and ISA bus; 

SCSI fast controller, PCI bus; 4GB fast SCSI hard disk; 

SCSI CD-ROM; 4-8GB DAT SCSI tape drive & backup 

software; video card 1280x1024x256, 4MB memory, 

PCI bus; 17" monitor; trackball or mouse; 

Windows NT 4.0 workstation; screen capture software 

COMP-I industrial computer 

Typical configuration is similar to Desktop with 

the following additions: heavy duty, rack-mount 

industrial chassis; backplane with 6 ISA, 6 PCI, 

1 CPU slots; 300w power supply. 

Communications package: 

None 

Special 

Maximum rate 

Minimum rate 

Accuracy 

Maximum film thickness (typical) 

Minimum film thickness 


Maximum data acquisition rate 

Minimum open area (applies to etching only) 

CCD spectral range 

Cable length 

Sensor space requirement 

Sensor weight 

1 

0 

1 

2 

0 

1 

2 

0 

1 

2 

0 

1 

2 

0 

1 

2 

0 

1 1 Additional RAM and/or additional CPU(s) may be required for a system with more than one 

sensor; larger hard drives may also be recommended. 

LES1200 

polysilicon 130,000 /min 

oxide 300,000 /min 

20 /min 

1% - 2% 

polysilicon 15,000 

oxide 50,000 

polysilicon 700 

oxide 1200 

25 Hz 

5% 

400 -1100 nm (down to 220 nm with UV modifications) 

10M standard 

approximately 70 mm x 100 mm x 70 mm (including mounting bracket) 


LES1200 


Additional lens 

3.5 mm 

3.6 mm 

4.8 mm 

6.0 mm 

8.0 mm 

12 mm 

16 mm 

25 mm 

50 mm 

75 mm 

Additional bandwidth wavelength filters-short 

436 nm 

486 nm 

535 nm 

543.5 nm 

610 nm 

620 nm 

632.8 nm 

656 nm 

740 nm 

780 nm 

Additional bandwidth wavelength filters-long 

436 nm 

486 nm 

535 nm 

543.5 nm 

610 nm 

620 nm 

632.8 nm 

656 nm 

740 nm 

780 nm 

Neutral density filters for TR1200 sensors 

1% 

3% 

10% 

30% 

Beam steering mirror for TR1200 sensors 

Polarizer kit 

Computer options 

Ethernet¨ network card 

Token ring network card 

System options 

IO-1200-B standalone basic i/o 

FabGuard analysis software 

Options and Accessories 

Part Number 

763-410 

763-411 

763-412 

763-413 

763-414 

763-415 

763-416 

763-417 

763-418 

763-419 

763-420 

763-421 

763-422 

763-423 

763-424 

763-425 

763-426 

763-427 

763-428 

763-429 

763-440 

763-441 

763-442 

763-443 

763-444 

763-445 

763-446 

763-447 

763-448 

763-449 

763-460 

763-461 

763-462 

763-463 

763-465 

763-710-G1 

763-470 

763-471 

763-480 

921-030-G2 

B3.6

OES1200 Optical Emission Sensor 



Reliably Detect Endpoint in 

Low Open Area Etch Processing 

As device densities continue to increase, etched area continues to 

decrease, especially in critical contact and via processes. Endpoint 

detection is therefore becoming more difficult just as reliably detecting 

endpoint becomes more critical to process yield. 

Stopping the etch process based on time works only if the etch rate is 

absolutely stable and all incoming wafers are the same. Unfortunately, 

this is often not the case. 

The OES1200 Optical Emission Sensor brings precise endpoint detection 

to contact and via oxide etching, even for open areas less than one percent. 

B3 

Advanced Hardware and Software Permit 

Detection of Very Subtle Changes 

How the OES1200 

Optical Emission Sensor Works 

The OES1200 is an ultraviolet/visible light spectrometer. It is linked to an 

etch chamber with a fiberoptic cable. 

A grating disperses all wavelengths of light from the plasma between 200 

nm and 700 nm to different positions along a detector consisting of 512 

light-sensitive pixels in a linear array. Each pixel corresponds to a different 

wavelength of light. 

Multiple Applications 

While the OES1200Õs major strength is for low open area applications, it is 

flexible enough to be used for: 

♦ High open area endpoint detection 

♦ Chamber clean endpoint detection 

♦ Process development 

Endpoint is reached as material on a wafer surface is completely removed 

and a different, underlying material is exposed. Transition from one layer to 

the next can be identified by changes in plasma emission characteristics 

resulting from changes in process gas consumption and product generation. 

These plasma emission changes can be very subtle, sometimes 

indistinguishable from background noise, since they are caused only by 

reactions occurring in the unmasked portion of the waferÑless than one 

percent in some applications. The OES1200 reliably detects these changes 

by examining optical emission over many wavelengths. 

Correlated Analysis Techniques 

Enhance Signal-to-Noise Ratio 

Recording the full spectrum of optical emission during the etching process is 

only the first step in determining endpoint. The OES1200 software performs 

a variety of advanced multivariate statistical analyses on the detectorÕs 

output. These analyses effectively amplify the signal without amplifying 

noise. The result is reliable endpoint detection. 

♦ Plasma diagnostics 

B3.7



B3.8





♦ Reliably determines endpoint in low open area etch applications, thereby 

improving yields 

♦ Operates under the FabGuardª sensor system, which can operate a 

variety of sensors and control the production tool using a single PC 

♦ Runs continuously and automatically without user intervention 

Components 

FabGuardª software for data acquisition, control, analysis, and 

database management: 

♦ OES1200 sensor 

♦ Fiberoptic cable 

♦ System installation 

♦ Electronic and hard copies of User Guide 

♦ User training 

Minimum computer control system for data acquisition and analysis: 

♦ PC-compatible Pentium II 300 MHz CPU 

♦ 128 MB memory 

♦ 4 GB SCSI hard drive 

♦ 1280 x 1024, 256-color graphics and 17" monitor 

♦ PCI and ISA bus 

♦ Windows NT 4.0 

Options 

♦ Tool and/or host communication interface and software 

♦ Multistation software license 

♦ Extended service contract 

Installation Requirements 

Optical access to the plasma via a viewport; an angle of 90¡ to the 

wafer surface is usually best. 

B3 

Spectral range 

Resolution 


OES1200 

200 Ð700 nm 

2 nm 

Number of pixels 512 

Maximum data acquisition rate 

Exposure time 

20 Hz 

10 ms to 10 sec. 

Maximum # of sensors per computer 4 

Minimum % open area detectable 

> 0.1% (depending on process chemistry and other related process factors) 

B3.9

Thin Film Deposition 

Controllers and Monitors 

B4

Thin Film Deposition Controllers and Monitors 

Contents 

General 

Thin Film Deposition Controllers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.3 

Products 

XTC/2, XTC/C Thin Film Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.4 

XTM/2 Thin Film Deposition Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.6 

IC/5 Thin Film Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.8 

Sentinel¨ III Thin Film Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.18 

Accessories 

Oscillators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.12 

Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.12 

Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.13 

Quartz Crystals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.17 


Controller 

XTC/2 

XTC/C 

XTM/2 

IC/5 

Sentinel¨ III 

Application 

Ion beam method 

◆ 

Thermal evaporation method 

Sputtering method 

Accessories 

Oscillators 

Oscillator packages 

Connection cables 

Feedthroughs 

◆ ◆ ◆ ◆ ◆ 

◆ ◆ ◆ ◆ 

◆ ◆ ◆ ◆ 

◆ ◆ ◆ ◆ 

◆ ◆ ◆ ◆ ◆ 

◆ ◆ ◆ ◆ ◆ 

Sensors 

Standard 

Sputter 

Compact 

UHV(bakeable) 

Dual 

CrystalSix 

EIES 

Sentinel¨ III 

Application 

Microwave sputtering processes 

◆ 

Thermal thin film systems 

High vacuum systems 

◆ ◆ ◆ ◆ ◆ 

◆ ◆ ◆ ◆ ◆ ◆ 

UHV systems 

Diode sputtering processes 

Accessories 

Shutter assemblies 

Control valves 

◆ 

◆ 

◆ ◆ ◆ ◆ ◆ 

◆ ◆ ◆ ◆ ◆ ◆ 

◆ 

B4.2

General 


Thin Film Deposition Controllers 

Controller 

Vacuum Feedthrough 

Oscillator 

Water 

and air 

Components for the production of thin films 

Introduction 

Crystal sensor 

Vacuum system 

Quartz 

monitor 

crystal 

However simple or complex your process, INFICON has a thin film 

deposition controller to meet your needs. All models use ModeLock, our 

revolutionary, patented measurement system, making them the most 

precise, most advanced controllers available. 

A controller, oscillator assembly, vacuum feedthrough, crystal sensor 

and crystals are necessary to produce thin films in new installations. 

Fewer components are required when upgrading existing systems. 

Unsurpassed Performance 

ModeLock provides crystal frequency information with precision 

unobtainable from conventional active oscillator systems. This precision, 

combined with control algorithms tailored to your deposition process, 

provides unsurpassed performance for long crystal life, low-rate 

depositions, and overall rate control. 

ModeLockÕs extension of crystal life is especially impressive. For some 

materials this system increases crystal life by nearly 100%. 

We call our system ModeLock because it virtually eliminates Òmode 

hopping,Ó a failure to maintain crystal oscillation at the fundamental 

frequency. ModeLock offers a single-measurement resolution of 0.005 Ð 

even while measuring at ten times per second. This kind of precision means 

smoother rate control Ð especially important at low rates of deposition. 

How ModeLock Works 

Conventional measurement uses the quartz monitor crystal to control the 

oscillator circuit. As the electrical characteristics of the crystal change 

during deposition, the oscillator circuit becomes less stable, eventually 

ÒhoppingÓ to another resonant frequency or failing completely. 

ModeLock is faster, more powerful and more precise. It continually tests 

and analyzes the phase/frequency relationship of the monitor crystal. 

ModeLock generates a precise frequency and applies it to the crystal. 

It then analyzes the returned phase and frequency information, makes 

comparisons, and computes the new resonant frequency. The entire 

process occurs thousands of times per second, yet distinguishes resonant 

frequencies 0.0055 Hz apart. 

ModeLockÕs intelligent link between monitor crystal and instrument 

enhances crystal performance. ItÕs the fastest available measurement 

system, providing the highest precision and freedom from mode hopping. 

You enjoy improved yield, throughput, and quality. 

Extending Crystal Life in 

Sputtering Processes 

All controllers come with INFICONÕs RateWatcher ¨ feature, which provides 

long-term rate control for in-line or load-locked sputtering processes. 

RateWatcher ¨ takes advantage of a sputtering sourceÕs short-term stability 

by sampling the deposition rate periodically. In a cycle that may repeat 

indefinitely, RateWatcher ¨ opens a shutter on the sensor, exposes it to 

the deposition source, adjusts the power to achieve the desired deposition 

rate, recloses the shutter, then holds power at the adjusted level. 

This sampling approach greatly extends the life of the crystal, allowing 

automatic correction of rate changes due to cathode wear. 

Security Times Six 

All INFICON deposition controllers can be equipped with the optional, 

patented CrystalSix TM sensor, which holds six crystals. Whenever one crystal 

becomes unstable or fails, the deposition controller signals the CrystalSix to 

automatically sequence to the next crystal for uninterrupted control. 

Because ModeLock nearly doubles the life of each crystal, the CrystalSix 

sensor lets you deposit without interruptions up to twelve times as long as a 

conventional single-crystal system, significantly enhancing process security. 

B4 

B4.3


XTC/2, XTC/C Thin Film Deposition Controller 

XTC/2, XTC/C Thin Film Deposition Controller 

XTC/2 thin film deposition controller 

Advantages 

XTC/C thin film deposition controller 

♦ Exclusive ModeLock measurement for controlling the deposition rate of 

thin films Ð especially valuable in low deposition rate film production 

♦ Eliminates frequency mode hopping 

♦ Extends crystal life 

♦ Two control signals for the source 

♦ Operates two sensors 

♦ Economical alternative to more complex deposition controllers 

♦ Controllable via RS232C computer interface (standard) or via IEEE488 

interface (optional) 

♦ Saves rack space 

♦ Includes RateWatcher¨ for extended crystal life Ð provides long-term rate 

control for in-line and load-locked sputtering processes 

♦ Easy-to-read LCD display (XTC/2 only) 

♦ Light-saving mode (Bulb Save) extends the display life 

♦ 8 separate input functions 

♦ 12 relay output functions 

♦ Up to 8 controllable crucible positions 

♦ Chart recorder output signal selectable for power, deviation of deposition 

rate, and deposition rate or film thickness 

♦ Adaptable to different sources and power supplies 

♦ Base unit for measurement and control without additional display and 

keyboard (XTC/C) 


♦ Control of a one to three layer 

process with the ability to choose 

among 9 stored thin films 

♦ Economical deposition control 

for less complex processes 

Dimensional drawing for the XTC/2 and XTC/C 


Order through our feature/option part number ordering system for a control unit configured with all features and options installed. 

Contact INFICON for details. Base unit includes RS232C communication. Only one Òadditional computer communications moduleÓ can be added to the control unit. 

Note: A complete deposition control system requires 5 components: a controller, an oscillator package, a vacuum feedthrough, a crystal sensor, and crystals. 

Existing installations may only require individual components. 

B4.4 

Ordering Information Code-No. XTC/2 or XTC/C – _____ _____ _____ _____ _____ 

Base unit 

XTC/2, XTC/C, 115 V 

XTC/2, XTC/C, 230 V 

Additional computer communications module 

None (RS232C only) 

IEEE488 GPIB parallel 

Remote hand-held power controller 

None 

Hand-held power controller 

Rack mount kits 

None 

For 1 unit 

For 2 units 

Optional crystals (only available for the XTC/2) 

None 0 

One box gold crystals (10 crystals/box) 1 

Five boxes gold crystals (10 crystals/box) 2 

Ten boxes gold crystals (10 crystals/box) 3 

One box silver crystals (10 crystals/box) 4 

Five boxes silver crystals (10 crystals/box) 5 

Ten boxes silver crystals (10 crystals/box) 6 

1 

2 

1 

2 

0 

1 

0 

1 

2

XTC/2, XTC/C Thin Film Deposition Controller Thin Film Deposition Controllers and Monitors 


XTC/2 

Thin Film Deposition Controller 

XTC/C 

Crystal range and precision 

Resolution for film thickness and deposition rate* 

MHz 

6.0 to 5.0 ± .05 Hz (per 250 ms sample) 

0.0617 (per 250 ms sample) 

Thickness accuracy % 

0.5 

Measurement frequency 

Source control voltage 

Number of sources 

Output resolution 

Update rate, max. 

Inputs 

Outputs 

Internal inputs/outputs 

Hz 

V 

Bit 

Hz 

4 

0 to ± 10 

2 

15 over the full range (10 V) 

4 

8 defined TTL/CMOS logic compatible or closure to ground 

12 single pole closing contacts (relays), 2.5 A at 120 V (100 VA) 

not applicable 

Display type ** 

Thickness resolution ** 

Rate resolution ** 

4x multiplexed LCD display 

8 x LED, no display 

1 

0.1 for 1 to 99.9 /s / 1 for 100 to 999 /s 

B4 

Operation 

Power requirements 

90 to 132 V AC or 180 to 264 V AC, 47 to 63 Hz, 25 VA 

Operating temperature ¡C 

0 to 50 

Max. frequency shift for the oscillator 

Process data memory 

Thin film programs 

Process layers 

Hardware interface 

Sensors 

Single 

Dual 

CrystalSix 

Crucible positions 

Weight 

Dimensions (H x W x D) 

MHz 

lbs. / kg 

in. / mm 

1.0 

9 

3 

2 

1 

2 

8 

5.95 / 2.7 

3.47 x 7.92 x 11.9 / 89 x 203 x 305 

* Material density = 1.0; Z ratio = 1.0; quartz frequency = 6 MHz ** Applies only to XTC/2; the XTC/C has LED displays /S/M = Angstrom/second/measurement 


Hand-held power controller 

Allows remote control of deposition power levels while the controller is in manual mode. 

Hand-held power control module plugs into the control unitÕs front panel. 

Unit rack mount kits 

Provides all required materials to mount the control unit in a standard rack. 

Control units are half-rack in width. Two units can be mounted side-by-side in one standard rack width. 

Choose the appropriate kit for the number and configuration of units to be mounted. 



IEEE488 computer communications module 

A plug-in module that provides complete computer interface capability utilizing the IEEE488 industry protocols. 

XTC/2 and XTC/C instruction manual (one is provided with each unit) 

Accessories and Spare Parts 

Part Number 

755-262-G1 

757-212-G1 

757-212-G2 

757-122-G2 

074-183 

B4.5


XTM/2 Thin Film Deposition Monitor 


♦ Operate in ÒdepositÓ or ÒetchÓ modes 

♦ Saves rack space 

♦ Simple operation 

♦ ÒOperateÓ and ÒProgrammingÓ modes 

♦ Select settings for etch mode, chart recorder output ranges and 

restricting access to parameters via rear-mounted configuration switches 

♦ Stores programmed data 

♦ Four fixed function relays (ON/OFF) 

Advantages 

♦ Exclusive ModeLock measurement for monitoring thin film deposition 

rate Ð especially valuable for low deposition rate film production 

♦ Eliminates frequency mode hopping 

♦ Extends crystal life 

♦ More cost-effective than conventional Òactive oscillatorÓ units 

♦ Improved resolution of 0.01 angstroms when multiple measurement 

averaging is selected 

♦ Select units of measurement (angstrom, gram, hertz) for a direct 

readout (when applied to non-traditional applications such as corrosion 

and contamination studies) 

♦ Control via the RS232C computer interface (standard) or via the 

IEEE488 interface (optional) 

♦ Five fixed input functions, selectable via TTL signals 

Typical 

Applications 

♦ Monitor any single-layer 

deposition process and 

select among 9 thin 

films stored in memory 

♦ Measure removal rate 

and film thickness in 

etch mode 

♦ Special applications, 

such as corrosion 

and contaminationcause 

investigation 

Displayed unit of measurement 

Type of measurement Rate Film thickness 

Thickness /s k 

Mass ng/s or µg/s µg or mg 

Frequency n.a. Hz 

Dimensional drawing for the XTM/2 

Ordering Information Code-No. XTM/2 – _____ _____ _____ _____ 

Base unit 

XTM/2, 115 V 

XTM/2, 230 V 


None (only RS232C) 

IEEE488 GPIB parallel 

Rack mount kits 

None 

For 1 unit 

For 2 units 

1 

2 

1 

2 

0 

1 

2 

Optional crystals (only available for the XTM/2) 

None 0 

One box gold crystals (10 crystals/box) 1 

Five boxes gold crystals (10 crystals/box) 2 

Ten boxes gold crystals (10 crystals/box) 3 

One box silver crystals (10 crystals/box) 4 

Five boxes silver crystals (10 crystals/box) 5 

Ten boxes silver crystals (10 crystals/box) 6 

Ordering Information Ð Order through our feature/option part number ordering system for a control unit configured with all features and options installed. 

Contact INFICON for details. Base unit includes RS232C communication. Only one Òadditional computer communications moduleÓ can be added to the control unit. 

Note: A complete deposition control system requires 5 components: a controller, an oscillator package, a vacuum feedthrough, a crystal sensor, and crystals. 

Existing installations may only require individual components. 

B4.6




Measurement data 


MHz 

Resolution for film thickness 

and deposition rate * 

Thickness accuracy % 

Measurements per second 

Averaging of the measurements 

Operating modes 

Display type 

Thickness resolution 

Rate resolution** 

Alternative units of measurement 

Update rate 

Process variables 

Memory 

Chart recorder output 

Voltage 

V 

Resolution 

Update rate 

Hz 

Functions 

Max. load 

kOhm 

Inputs 

TTL 

Outputs 

I/O Sample rate 

Hz 

Hardware interface 

Sensor 

Sub D 

Inputs 

Sub D 

Outputs 

Sub D 

Communication 

Chart recorder 

Power supply 

V 

Operating temperature ¡C 

Weight 

lbs. / kg 

Dimensions (W x H x D) 

in. / mm 

Hz 


6.0 to 5.0 ± 0.1 Hz (per 250 ms sample) 

0.123 (per 250 ms sample) 

0.5 

4 

selectable 1 /4, 1, 4 or 16 seconds 

deposition and etching 

2 x multiplexed LCD display 

1 

0.01, 0.02, 0.05 /s for 0 to 9.99 /s (dependent on averaging) 0.1 /s for 10 to 99.9 /s, 1 for 100 to 999 /s 

µg, mg (mass) Hz (frequency) 

1 

9 sets 6 variables per set 

0 to ± 10 

13 bit over the full range (one bit is reserved for the sign) 

4 

Rate or film thickness or mass 

2.0 

5 

4 single pole closing contacts (relays), 2.5 A at 120 V (100 VA) 

4 

15 pin 

25 pin 

9 pin 

RS232C as standard (IEEE488 optional) 

BNC 

90 to 132 or 180 to 264, 49 to 61 Hz 25 Hz, 25 VA 

0 to 50 

5.95 / 2.7 

3.47 x 7.92 x 11.9 / 89 x 203 x 305 

B4 

* Material density = 1.0; Z ratio = 1.0; quartz frequency = 6 MHz 

** Alternative units of measurement; these are scaled accordingly. Resolution can only be improved through averaging. 



Plug-in module that provides complete interface capability utilizing the IEEE488 industry standard protocols. 

Unit rack mount kits 

Provides all required materials to mount the control units into a standard rack. 

The control units are 1 /2 rack in width. Two units can be mounted side by side in one standard rack width. 

Choose the appropriate kit for the number and configuration of units to be mounted. 

Kit for 1 unit 

Kit for 2 units 

XTM/2 instruction manual (one is provided with each unit) 


Part Number 

757-122-G2 

757-212-G1 

757-212-G2 

074-186 

B4.7


IC/5 Thin Film Deposition Controller 



♦ Multi-source deposition 

♦ Flexible control 

♦ Coordination of processes between pump system, valves, substrate 

heater, substrate drive and selected deposition process 

Advantages 

♦ ModeLock measurement system for superior rate control, and longer 

crystal life 

♦ Extensive logic and process control capabilities, including 100 

programmable logic statements; 20 counters and 20 timers; 

I/O relay boards providing up to 24 relay outputs, 28 TTL inputs and 

14 TTL outputs 

♦ Dedicate the CrystalSix sensorÕs crystals to specific materials 

♦ Unique, multiple-sensor control 

♦ Six assignable analog outputs for source control or chart recorder 

outputs, including rate, thickness, and rate deviation 

♦ Optical and precision coating 

♦ Research, development, production 

♦ Precise measurement of film thickness in multi-layer systems 

Options 

♦ 3 1 / 2" disk drive 

♦ Off-line editing software 

♦ Microbalance measurement card to control low deposition rates of 

low-density materials 

♦ Extend input and output capacity with optional I/O cards 

♦ Generous on-board storage of process data and recipe files Ð up to 50 

processes and 250 total layers Ð with optional diskette drive for nearly 

unlimited storage 

♦ Data logging to remote communications port, printer port, or 

diskette drive 

♦ Codeposition 

♦ Auto Z function for accurate thickness measurement of layered or 

alloyed materials deposited onto a single crystal 

Dimensional drawing for the IC/5 

♦ RateWatcher feature provides long-term rate control for in-line or 

load-locked sputtering processes, or processes using a thermal 

resistive source 

♦ Standard RS232 computer interface or optional IEEE488 interface 

B4.8




Measurement data 


MHz 

Thickness & rate resolution * 

Thickness accuracy** % 

Measurement frequency 

Hz 

Display type 

Thickness resolution 

Rate resolution 

Source control outputs 

Voltage 

Resolution 

Max. update rate 

Chart recorder output*** 

Inputs and outputs 

14 TTL inputs standard 

8 relays @ 120v (2.5 amp max, 100 VA) standard 

14 TTL inputs 

8 relays @ 120v (2.5 amp max, 100 VA) optional with 

one additional I/O card 

8 relays @ 120v (2.5 amp max, 100 VA) standard 

14 TTL outputs optional with 2nd additional I/O 

Logic statements 

V 

Hz 


6.0 to 4.5 ± 0.047 Hz (per 100 ms sample) 

0.006 (per 100-msec sample) 

0.5 

10 

5"x9" (13 x 23 cm), CRT amber 

1 

0.1 /s for 0 to 99.9 /s / 1 /s for 100 to 999 /s 

up to 6 

0 to ± 10.0 / 0 to ± 5 / 0 to ± 2.5 

15 bit over the full range (10V) 

10 

0 to 10V 

760-162-G1 

760-162-G2 

100 fully programmable 

B4 

Power supply 

Weight 

Dimensions (W x H x D) 

V 

lbs. / kg 

in. / mm 

100 +10%, -15% VAC 50/60 Hz, 120 +10%, -10% VAC 50/60 Hz, 220 +15%, -10% VAC 50/60 Hz, 

240 +10%, -10% VAC 50/60 Hz 

29 / 13.2 

5.25 x 17.66 x 18.5 / 133 x 448 x 470 

* Material density = 1.0; Z ratio = 1.0; quartz frequency = 6 MHz 

** Varies according to process, value reflects typical accuracy. 

*** The IC/5 has 6 DAC outputs that can be selected as source control voltage outputs or chart recorder outputs. 

B4.9



Ordering Information Code-No. IC/5 – ____ ____ ____ ____ ____ ____ ____ ____ 

Base unit 

IC/5, 100 V, 50/60 Hz 

IC/5, 120 V, 50/60 Hz 

IC/5, 220 V, 50/60 Hz 

IC/5, 240 V, 50/60 Hz 

Sensor module (each module contains 2 sensor inputs) 

1 standard module (included with the base unit) 

2 standard modules 



1 microbalance module (replaces standard module) 

2 microbalance modules (replaces standard module) 




(RS232C is standard) 

None 

IEEE488 parallel 

I/O relay module (8 relay outputs, 14 TTL inputs) 

1 (included in the base unit) 

2 

Optional TTL relay module 

(8 relay outputs, 14 TTL outputs) 

None 

1 

Optional 3 1 /2" (1.44 Mb) disk drive 

None 

1 

Optional offline editor software 

None 

One 

Optional crystals 

None 

One box gold crystals (10 crystals/box) 

Five boxes gold crystals (10 crystals/box) 

Ten boxes gold crystals (10 crystals/box) 

One box silver crystals (10 crystals/box) 

Five boxes silver crystals (10 crystals/box) 

Ten boxes silver crystals (10 crystals/box) 

1 

2 

3 

4 

1 

2 

3 

4 

5 

6 

7 

8 

1 

2 

1 

2 

1 

2 

1 

2 

0 

1 

0 

1 

2 

3 

4 

5 

6 

Note: A complete deposition system needs 5 components: a base unit, an oscillator package, a vacuum feedthrough, a crystal sensor and crystals. 

In preexisting installations, only some of these components will be required. 

B4.10




Sensor module 

Plug-in module for simultaneous connection of two sensors via sockets on the rear of the unit. 

Up to four such modules (for 8 sensors) may be installed in the IC/5. 

Microbalance module 

Plug-in module for simultaneous connection of two sensors via sockets on the rear of the unit. Incorporates 

a highly stable reference oscillator. Up to four such modules (for 8 sensors) may be installed in the IC/5. 


Plug-in module for operation in connection with standard industry protocols. 

I/O relay module 

Plug-in module with 8 programmable relay outputs and 14 TTL inputs. The IC/5 supports the operation 

of two I/O relay modules. One is included as standard with the base unit. 

TTL relay module 

Plug-in module with 8 programmable relay outputs and 14 TTL outputs. 

The IC/5 supports the operation of one TTL relay module. 

Disk drive kit 

Kit with a 3 1 /2", 1.44 Mb disk drive for storing process data and other data. 

Complete with all required hardware, cables and installation instructions for the IC/5. 

The IC/5 supports the operation of one disk drive. 

Replacement disk drive 

3 1 /2", 1.44 Mb disk drive for the IC/5. Only intended as a replacement for a disk drive already 

installed in the IC/5. 

Adapter kits 

Signal converter and cable kit for retrofitting an IC/5 to an already existing system, replacing: 

IC 6000 or 

IC/4 or IC/4 PLUS 

Adapter cable 

Cable kit for retrofitting an IC/5 to an already existing system, replacing: 

STC-200 

Others 

IC/5 offline software editor 

A software package for generating and editing of processes, for defining materials and the entry of all 

parameters for an IC/5 on a PC (DOS program, Windows compatible). 

IC/5 manual (one provided with each unit) 


Part Number 

760-132-G1 

760-132-G2 

760-142-G2 

760-162-G1 

760-162-G2 

760-023-G2 

035-013 

600-1083-P1 

600-1084-P1 

600-1046-P1 

Contact Factory 

760-030-G1 

074-237 

B4 

B4.11


Oscillators and Feedthroughs 

Oscillators 


XTC/2, XTC/C, XTM/2 oscillator packages with connection cables 

15' oscillator package (4.5m) 



100' oscillator package (30m) 

IC/5 oscillator packages with connection cables 

15' oscillator package (4.5 m) 




Spare parts and accessories 

Oscillators (oscillator only, no connecting cables) 

XTC/2, XTC/C, XTM/2 oscillator 

IC/5 oscillator 

XTC/2, XTC/C, XTM/2 connection cables 

6" cable, oscillator - vacuum feedthrough (15cm) 

15' cable, controller - oscillator (4.5m) 




IC/5 connection cables 

6" cable, oscillator - vacuum feedthrough (15cm) 





Part Number 

757-305-G15 

757-305-G30 

757-305-G50 

757-305-G100 

760-025-G15 

760-025-G30 

760-025-G50 

760-025-G100 

757-302-G1 

760-600-G1 

755-257-G6 

757-303-G15 

757-303-G30 

757-303-G50 

757-303-G100 

755-257-G6 

600-1039-G15 

600-1039-G30 

600-1039-G50 

600-1039-G100 

All oscillator packages include cable between controller and oscillator, oscillator and cable between oscillator and vacuum feedthrough. 

One oscillator package is required for each crystal sensor assembly, which is connected to the controller. 

Feedthroughs 

Each crystal sensor, except the UHV bakeable types, requires a vacuum feedthrough. INFICON supplies a variety of 

feedthroughs to meet the needs of each system, including feedthroughs for the dual sensor and shuttered single sensors. 

All feedthroughs are built of 304 type stainless steel to rigid performance standards and factory tested by INFICON 

to assure electrical and vacuum integrity to better than 10 -9 std. cc/sec. (1x10 -9 mbar). Air and water lines 

are 3 /16 in. (.48 cm) O.D. 


Standard 1" bolt hole mounting with VITON O-ring seal 

For 1 coaxial cable and 2 water tubes 

For 1 coaxial cable, 2 water tubes and one air tube for shutter 

Standard 2 3 /4" ConFlat¨ flange with copper gasket or VITON quad-ring gasket 

For 1 coaxial cable and 2 water tubes 

For 2 coaxial cables, 2 water tubes and one air tube for shutter 

Gaskets 

1" VITON O-ring for 1" bolt hole feedthroughs 

2 3 /4" VITON quad-ring gasket 

2 3 /4" copper gasket 

Part Number 

002-042 

750-030-G1 

002-043 

002-080 

070-237 

002-064 

012-328 

2 3 /4" ConFlat¨ = DN 40 CF 

B4.12

Sensors 


Sensors 

Sensor Options 

INFICON offers a range of six sensor heads to meet the requirements of 

any process application. Each sensor is designed and built by INFICON 

to assure unmatched quality and thermal performance. 

Sputter sensor 007-031 

Sputter Sensor 

INFICONÕs patented design is optimized for diode and magnetron sputtering 

processes. The only head with a rear-accessible crystal. 

Standard sensor 750-211-G1 

Standard Sensor 

A durable, stainless steel sensor for most thermal deposition systems. 

Compatible with both HV and UHV processes. 

UHV Bakeable Sensor 

Bakeable sensor 007-219 

Ideal for UHV applications, bakeable to 450¡C. The assembly is available 

in three standard lengths and includes sensor and ConFlat¨ feedthrough. 

Also available with an optional shutter assembly. 

B4 

Compact sensor 750-213-G1 

Compact Sensor 

Identical to the standard sensor, but with water tubes and coax connected 

to the rear of the sensor body. 

Optional Shutter Assembly 

Pneumatically operated shutter sensor assembly, available for standard, 

compact and dual sensor heads. Required for RateWatcher ¨ features. 

UHV sensor shutter is used for the sputtering sensor. 

Shutter assembly 750-210-G1 

Dual sensor 750-212-G2 

Dual Sensor 

Designed specifically for use with the CrystalSwitch feature. Features 

two independent sensor heads and a pneumatic shutter to shield the 

unused crystal. 

CrystalSix TM Sensor 

Patented six-crystal design. 

Automatically sequences to the 

next crystal when the active 

crystal becomes unstable or fails, 

maintaining uninterrupted control. 

Works with the XTC/2, XTC/C, and CrystalSix Sensor 750-446-G1 

the IC/5. Requires no special 

vacuum port; all necessary connections are available on a single 1" or 2 3 /4" 

ConFlat ¨ flange vacuum feedthrough. 

B4.13


Sensors 


Temperature, max. ¡C 

(for bake only; water flow 

required for actual 

deposition monitoring) 

Standard Sputtering Compact 

Sensor Sensor Sensor 

130* 105* 130* 

Dimensions (maximum envelope) 

Dimensions with shutter assembly 

Water tube and coax length 

Body and holder 

in. / cm 

in. / mm 

1.063" x 1.33" x .69" high 1.36" dia. x .47" high 1.11" x 1.06" x 1.06" high 

(2.7cm dia. x 3.4cm x 1.75cm high) (3.45cm dia. x 1.18cm high) (2.8cm x 2.7cm x 2.7cm high) 

1.67" x 2.15" x 1.95" high 1.36"dia. x 1.28" high 2.08" x 1.62" x 1.83" high 

(4.2cm dia. x 5.5cm x 5.0cm high) (3.45cm dia. x 3.25cm high) (5.3cm x 4.1cm x 4.6cm high) 

Standard 30 / 762 Standard 30 / 762 Standard 30 / 762 

Stainless steel 304 Gold plated beryllium-copper Stainless steel 304 

Bakeable Dual Shutter CrystalSix 

UHV Sensor Sensor Assembly 

Temperature, max. * ¡C 

(for bake only; water flow 

required for actual 

deposition monitoring) 

450¡C 130* 400 130* 

Dimensions (maximum envelope) 

Dimensions with shutter assembly 

Water tube and coax length 

Body and holder 

in. / mm 

1.35" x 1.38" x .94" high 1.06" x 2.20" x 0.69" high Varies with sensor 3.5" dia x 2.0" high 

(3.4cm x 3.5cm x 2.4cm high) (2.7cm x 5.6cm x 1.75cm high) (8.9cm dia. x 5.1cm high) 

1.46" x 1.37" x 1.21" high 1.54" x 2.20" x 1.95" high _ _ 

(3.7cm x 3.5cm x 3.1cm high) (3.9cm x 5.6cm x 5.0cm high) 

Standard 29.7 / 750 Standard 29.7 / 762 Ð Standard 29.7 / 754 

Standard 19.81 / 503 

Standard 11.9 / 302 

Stainless steel 304 Stainless steel 304 Stainless steel 300 Stainless steel 304 

(plate, holders and 

material shield) 

aluminum body 

* A conservative maximum device temperature, limited by the properties of Teflon (PTFE) at higher temperatures in vacuum. 

In usage, the water cooling allows operation in significantly elevated environments without harmful effects. 

B4.14

Sensors 


Standard sensor Ð for use in thermal depositions. 

Standard sensor with shutter (requires 007-199 control valve). 


Sputtering sensor Ð for use in sputtering or thermal depositions. 

Compact sensor Ð for use in thermal depositions, with rear mounted water tubes 

and in-vacuum coaxial cable for vertical installation. 

Compact sensor with shutter (requires 007-199 control valve). 

UHV bakeable sensor - for ultra-high vacuum applications bakeable to 450¡C. Specified lengths are measured from the 

center of the crystal to the face of the feedthrough flange. Sensor includes an integral 2 3 /4" ConFlat¨ flange feedthrough. 

Consult factory for a special bakeable crystal holder for sputtering applications and special bakeable sensor lengths. 

11.7 in./30cm bakeable sensor 



11.7 in./30cm bakeable sensor with shutter (requires 007-199 control valve) 



Dual sensor Ð two independent crystals contained in one sensor. Specifically designed for use with CrystalSwitch, 

with self-contained pneumatic shutter. Requires two active sensor circuits (requires 007-199 control valve). 

CrystalSix multiple sensor Ð six crystals contained in one sensor. Specifically designed for use with 

CrystalSwitch, this sensor sequentially advances to the next available crystal (requires 007-199 control valve; 

the required flow restrictor is easily installed into this valve). 

Pneumatic shutter assembly Ð for Ònew styleÓ 750-211 standard, 750-213 compact or 750-212 dual. 

A complete shutter assembly that can be added to non-shuttered crystal sensors (requires 007-199 control valve). 

Pneumatic shutter assembly (sputtering) Ð a complete shutter assembly that can be added to non-shuttered 

sputtering sensors (requires 007-199 control valve). 

Pneumatic shutter actuator control valve Ð for use with all shutter assemblies. May be mounted to either 

2 3 /4" or 1" feedthrough. Bracket and tubing supplied. Requires 24 V, AC or DC. 

In-vacuum cable assembly - this cable connects the crystal sensor head to the vacuum feedthrough. 

These special lengths are replacements for our standard length 30.75 in. (78cm) cable. 

6 in./ 15.2cm 

12 in./ 30.5cm 

24 in./ 61.0cm 

36 in./ 91.4cm 

48 in./121.9cm 

60 in./152.4cm 

72 in./182.9cm 

Material director Ð used for codeposition processing. 

It reduces the influence of one material on the other during the measurements (crosstalk). 

The crystal holder is exchanged against this material director. * 

For 750-211 or 213 standard or compact sensors 

For bakeable sensor 

Sensor emulator 

A diagnostic tool with multiple connections for emulating all or part of the sensor-crystal circuit from the oscillator 

connection to the sensor head. (For use with standard, compact, and dual sensors, connects to any INFICON 

feedthrough or oscillator to verify electrical connection.) 

Sensors 

Part Number 

750-211-G1 

750-211-G2 

007-031 

750-213-G1 

750-213-G2 

007-219 

007-220 

007-221 

750-012-G1 

750-012-G2 

750-012-G3 

750-212-G2 

750-446-G1 

750-210-G1 

750-005-G1 

007-199 

321-039-G12 

007-252 

321-039-G11 

007-059 

007-061 

321-039-G13 

321-039-G14 

750-201-G1 

750-202-G1 

760-601-G1 

B4 

* Note: This material director can not be used with sensors while using the pneumatic shutter feature 

B4.15


Sensors 


Standard, compact and dual sensors 

Body assembly 

Standard 

Compact 

Dual 

Crystal holder 

For 750-211, 212 or 213 sensor assemblies 

For 007-205, 206, 216, 218, 237, and 750-040-G1 or G3 sensor assemblies 

Finger spring contact strip 

Pneumatic actuator kit 

Shutter 

Sputtering sensor 

Body assembly 

Front cover assembly 


CrystalSix sensor 

Cover, heat shield 



Crystal holder extraction tool 

For all sensors listed above: 

In-vacuum cable, 30.75 in. / 78cm long 

Crystal snatcher 

Ceramic retainer 

Bakeable sensor 

Ceramic retainer 


Pneumatic actuator 

12 in. / 30.5cm 

20 in. / 50.8cm 

30 in. / 76.2cm 


Shutter 

Accessories 

Part Number 

750-207-G1 

750-209-G1 

750-208-G1 

750-172-G1 

007-083 

750-171-P1 

750-128-G1 

750-216-G1 

007-048 

007-047 

007-049 

750-250-G1 

750-262-G1 

750-286-P2 

750-279-P1 

007-044 

008-007 

007-023 

007-064 

750-218-G1 

750-022-G5 

750-022-G6 

750-022-G7 

750-193-G1 

750-216-G1 

B4.16

Quartz Crystals 


Quartz Crystals 

The quality and longevity of the crystal used in the sensor head affect 

not only the accuracy of rate and thickness measurements, but also the 

successful completion of the process being controlled. INFICON quartz 

crystals offer proven quality and durability. 

Advantages 

♦ Plano-convex configuration suppresses unwanted modes for 

greater accuracy 

♦ AT-cut crystal orientation enhances stability over a wide range of 

operating temperatures 

♦ Adhesion underlayer improves electrode-to-crystal bonding for longer 

crystal reliability 

♦ Gold or silver electrode coating for maximum electrode life 

♦ 100% factory testing of each crystalÕs frequency and activity 

(series resistance) 

♦ Compatibility with all INFICON sensor heads and most other 

manufacturerÕs instruments 

♦ Clean room processing to avoid particulate contamination 

Technical Notes 

Silver-coated crystals are recommended for use with most dielectric 

coatings for better adhesion. Since silver tarnishes, gold should be 

used whenever practical. 

Discounts available for 50 or more packages. 

B4 


Frequency 

Diameter 

Electrode 

Configuration 

MHz 

in/mm 

6 (5 MHz available) 

.550/14 

Gold or silver 

AT-cut plano-convex 


Silver-coated quartz, 6 MHz, 10 per package 

Gold-coated quartz, 6 MHz 10 per package 

Silver-coated quartz, 5 MHz, 10 per package 

Gold-coated quartz, 5 MHz 10 per package 

Part Number 

008-009-G10 

008-010-G10 

750-226-G2 

750-225-G2 

B4.17


Sentinel ® III Thin Film Deposition Controller 


The system can independently control simultaneous evaporation of 

elements from two separate sources as well as sequential evaporation of 

two elements with interfacial alloying between layers. Operators can also 

measure evaporation rates of two elements from one source while 

controlling the source power. 

Sentinel ¨ III can measure and control single-element depositions in 

continuous or batch operations while monitoring the level of background 

gas. In addition, it can measure the evaporation rate of fractionated 

elements from certain compounds and can even reject cross-channel 

interference in binary-alloy depositions. 

Sentinel¨ III is designed to meet demanding vacuum-deposition 

requirements. Using advanced Electron Impact Emission Spectroscopy 

(EIES), a technology pioneered by INFICON, the system offers precise 

control over MBE, UHV and HV processes as well as flexibility to meet 

specialized needs in both production and development environments. 

The light intensity of any material Ð the number of photons it emits Ð is 

directly proportional to its number density in the sensor. The important 

conclusion here is that light intensity can be used to measure evaporation 

rate. And that's precisely what the Sentinel¨ III does. 

Rate Control of Thin Film 

Superconductive Materials 

For high-vacuum processes that require the simultaneous evaporation of 

materials such as Y, Ba and Cu in 1:2:3 atomic ratios, the Sentinel¨ III can 

control individual deposition rates with proven reliability. By monitoring 

each evaporant's optical emission line, the Sentinel¨ III combines material 

selectivity with a sensitivity for the elements most frequently used in making 

superconductive thin films. 

Real-Time Feedback 

During the process cycle, critical information is displayed in real time, 

including thickness, source power, evaporation rate and rate deviation. 

Sentinel¨ III measures evaporation rates and corrects source power 

hundreds of times per minute. 

Flexible System Integration 

Internal and external I/0 displays provide programming flexibility for 

complete system integration. The RS232 communications interface, in both 

SECS II and lnficon formats, is standard; IEEE488 is available as an option. 

EIES Sensor 

Precision 

The Sentinel¨ III is a remarkably precise instrument. Its sensor, with a life 

exceeding 1,000 hours, offers rate sensitivity from 0.1 to 10,000 /sec. 

Innovative Approach to 

Challenging Applications 

The Sentinel¨ can monitor and control the vapor flux, phasing and ratio 

for two materials in alloy deposition. It can also control the evaporation 

of Group IV materials in MBE applications. Even when deposition rates 

are low over an extended period of time, as in MBE, when rates are 

high with large material accumulations, as in terminal and backside 

metallizations or web coating on thin, flexible substrates, the Sentinel ¨ III 

meets the challenge. 

Control System Components 

B4.18




Optical measurement channels 

Control channels 

Crystal measurement (optional) 

Measurement/control interval 

Optical sensor 


msec 

msec 

Sentinel ® III Control Unit and Sensor Control Unit (SCU) 

3 

2 

1 

125 

250 

I/0 SCAN interval msec 

250 

Display update interval 

Control output (2 channels) 

sec 

V 

1 

0 to -10 or 0 to -5 

2 channel thickness display k 

3 channel rate display /sec 

2 channel power display % 

Rate control resolution 

Analog recorder outputs 

Full scale calibration 

Remote inputs 

Activation 

Relay outputs 

Ratings 

Computer interfaces 

Data logging 


/sec 

Operating temperature (non-vacuum comp) ¡C 

V 

0 to 999.9 Auto - ranged 

0.1 to 99.9 

1 to 999 Auto - ranged 

0 to 99 

0.1 

3 Channels showing rate 

0 to +10 

6 Fixed, 6 Programmable 

Contact Closure or 6 to 40 V AC/DC 

6 Fixed, 6 Programmable 

1amp/120 V Max. 

(Standard) RS232 

(Optional) IEEE488 

RS232 

100/120/220/240 Vac (+5, -10%), 50 - 60 Hz, 150 VA 

0-50 

B4 

Weight (shipping) 

lb/kg. 

75/34 



Usage 

Thickness accuracy 

Base frequency 

Optical filter changer filters (max) 

Operating voltages 

Fiber optics 

Feedthrough packages 

Optical discriminators 

Fixed wavelength filter 

GM200 monochromator 

Options 

1 

Calibration or Measurement 

±1% over useful life of crystal 

6 MHz 

4 

100/120 & 220/240 VAC 50/60 Hz 10 VA 

Standard Lengths, sensor to feedthrough 15", 30", & 45" 

2 3 /4" ConFlat¨, or 1" bolt 

See Price List for complete listing 

200 to 500nm wavelength manual adjustable 

. B4.19




Sentinel¨ III Single Material Controller 

Uses EIES sensor technology and provides complete automatic control of one material vacuum 

deposited processes 

Up to four materials may be controlled sequentially when used in conjunction with the automatic 

filter changer (IPN 753-002-G10) 

Input voltage factory set to 120 VAC, 50/60 Hz 

Includes: 

Input voltage selectable, 100/120/220/240 VAC (+5; -10%) 

Control unit with CRT display 

Sensor control unit (SCU) 

Photomultiplier detector assembly (PMT) 

Cables 30' (9.1m) from control unit to SCU, 5' (1.5m) from SCU to feedthrough 

12/12 Input/output relay interface 

Source control output 

Analog output (rate) 

RS232 computer interface 

Ship kit, includes rack mount 

Sentinel¨ III instruction manual 

Requires one feedthrough package and either one narrowband optical filter or monochromator 

Automatic calibration feature requires one crystal sensor package and associated sensor 

shutter assembly 

Sentinel¨ Single Material Controller 

Same as above, except input voltage factory set to 240 VAC 

Sentinel¨ Two Material Controller 

Uses EIES sensor technology and provides complete automatic control of two materials, 

either sequential or codeposited vacuum processes 

Up to five materials may be controlled when used in conjunction with the automatic filter changer 

(IPN 753-002-G10) 

Input voltage factory set to 120 VAC, 50/60 Hz 

Includes: 

Input voltage selectable, 100/120/220/240 VAC (+5, -10%) 

Control unit with CRT display 

Sensor control unit (SCU) 

2 Photomultiplier detector assemblies (PMT) 

Beam splitter 

Cables 30' (9.1m) from control unit to SCU, 5' (1.5m) from SCU to feedthrough 

12/12 Input/output relay interface 

Source control output 

Analog output (rate) 

RS232 computer interface 

Ship Kit, includes rack mount 


Requires one feedthrough package and either two narrowband optical filters or two monochromators 

Automatic calibration feature requires one crystal sensor package and associated sensor shutter assembly 

Sentinel¨ III Two Material Controller 

Same as above, except input voltage factory set to 240 VAC 

Options 

IEEE488 Computer Interface 

A plug-in module conforming to IEEE488 bus specifications, providing complete interface capability 

to system computer 

Filter Changer 

Will automatically select up to four filters for sequential processing of four different materials 

Narrowband filters must be ordered separately 

Includes SCU interface card and cable 

(NOTE: Use PMT supplied with system) 

Deposition Controller 

Part Number 

753-002-G1 

753-002-G17 

753-002-G2 

753-002-G18 

017-432-G4 

753-002-G10 

B4.20



EIES Sensor and Feedthrough Packages, 

Rigid or Fiber Optics 

System installations require a feedthrough package that conforms to specific 

customer requirements. INFICON offers both 1" bolt and 2 3 /4" ConFlat¨ 

flange mounting in either rigid or flexible optical transmission couplings. 

Each package has been designed for maximum customer flexibility. 


EIES Sensor 


Sensitivity ([S+N]/S = 2) 

/sec Cu 

0.0025 (Specified Test) 

Operating pressure 

Maximum 

Recommended 

Filament life (typical) 

TORR 

TORR 

hr 

5 x 10 -4 




1" (2.54cm) Bolt Feedthrough and Sensor Package 

Package includes all in-vacuum components necessary for system installation. 

Maximum length from sensor to feedthroughs is 24" (61.0cm) and may be field modified for 

installations requiringshorter lengths. Includes: 

EIES sensor 

20" (50.8cm) rigid optical coupling 

In-vacuum filament cable kit 

1" (2.54cm) bolt feedthrough 

2 3 /4" (NW35CF) Conflat¨ Feedthrough and Sensor Package 

Bakeable package (400¡C max) which includes all in-vacuum components necessary for system installation. 

Maximum length from feedthrough to sensor is 24" and may be field modified for installations requiring 

shorter lengths. Includes: 

EIES sensor 

20" (50.8cm) rigid optical coupling 


2 3 /4" (NW35CF) Conflat copper gasket feedthrough 

EIES Sensor and 

Rigid Feedthrough 

Part Number 

753-002-G4 

753-002-G5 

EIES Sensor and Fiber Optic Feedthrough Packages 

Available in two sizes, with three standard lengths each. These packages allow installation in 

applications wherea direct line between sensor and feedthrough is not possible. Also for installations 

requiring distances of greater than 12" (30.5cm) between sensor and feedthrough, these packages 

improve the performance of the Sentinel ¨ III by increasing the transmission efficiency of the optical signal. 

1" (2.54cm) Bolt Feedthrough and Sensor Package for Fiber Optics includes: 

EIES sensor 

Fiber optic coupling 

In-vacuum filament cable 

1" (2.54cm) bolt fiber optic 

Packages are available in the following lengths from sensor to feedthrough: 

15" (38.1cm) 

30" (76.2cm) 

45" (114.3cm) 

2 3 /4"(NW35CF) Conflat¨ Feedthrough and Sensor Package for Fiber Optics includes: 

EIES sensor 

Fiber optic coupling 


2 3 /4" (NW35CF) Conflat fiber optic feedthrough 

Packages are available in the following lengths from sensor to feedthrough: 

15" (38.1cm) 

30" (76.2cm) 

45" (114.3cm) 

753-002-G6 

753-002-G7 

753-002-G8 

753-002-G11 

753-002-G12 

753-002-G13 

B4.22



Narrowband Filters 

Specific material selection is accomplished by the use of narrowband filters. 

INFICON offers a selection of optical discriminators to meet the needs of 

your process. 


Part Number 


Part Number 

Wavelength 

Wavelength 

Aluminum Al 3961 

011-302 

Molybdenum Mo 3133 

011-309 

Argon / Strontium Ar / Sr 4596 

011-339 

Nickel Ni 3415 

011-310 

Barium (1) Ba (1) 3072 

011-346 

Nitrogen N 2 3914 

011-340 

Barium (2) Ba (2) 4554 

011-348 

Oxygen 0 2 2594 

011-341 

Boron B 2496 

Cadmium Cd 3261 

Calcium Ca 4226 

011-601 

011-324 

011-600 

Palladium Pd 2455 

Platinum Pt 2659 

Rhenium Re 2275 

011-332 

011-343 

011-349 

B4 

Carbon Dioxide CO 2 2890 

011-337 

Samarium / Lanthanum Sm / La 4422 

011-347 

Chromium Cr 3605 

011-317 

Scandium Sc 4020 

011-330 

Copper Cu 3247 

011-306 

Silicon Si 2520 

011-327 

Erbium Er 4008 

011-328 

Silver Ag 3281 

011-301 

Gallium Ga 4170 

011-308 

Tantalum / Germanium Ta/Ge 2650 

011-338 

Gold (1) Au (1) 2676 

011-304 

Tin Sn 3175 

011-314 

Gold (2)/Cobalt Au (2) / Co 2428 

011-305 

Titanium (2) Ti (2) 3982 

011-331 

Helium He 5016 

011-342 

Tungsten W 2551 

011-335 

Indium In 4511 

011-326 

Uranium / Niobium U238 / Nb 3582 

011-318 

Iron Fe 3720 

011-307 

Vanadium V 3184 

011-329 

Lead / Titanium Pb / Ti 3637 

011-311 

Water H 2 0 3100 

011-319 

Manganese Mn 2798 

011-336 

Yttrium Y 4077 

011-321 

Zirconium / Hafnium Zr/Hf 2983 

011-345 

B4.23




Filter changer 

Will automatically select up to four filters for sequential processing of four different materials. 

Narrow band filters must be ordered separately Includes SCU interface card and cable. 

(Note: Use PMT supplied with system.) 

GM-200 monochromator 

A compact 200mm f/4.0 double dispersion, grating instrument that is wavelength selectable from 180-750 nm. 

The gratings are blazed at 240nm and maintain high efficiency over the 200-500nm range of interest. 

The resolution is selectable to 1, 2, 3, 4 or 5nm for best performance for every process. 

The GM-200 is shipped complete with all optics for attachment between the feedthrough or beam splitter 

and photodetector. 

EIES sensor light shield kit 

The optical light shield is designed to fit over the EIES sensor to reduce extraneous light noise entering the sensor. 

It is used for some refractory metals and is customer installed. 

Scattered materials shield 

For applications in which substrates are RF etched prior to deposition. This field-installed retrofit kit provides 

an entrance and exit aperture that reduces the occurrence of secondary electron generation. 

Water cooled EIES sensor 

For high-vapor pressure materials (Cd, Zn, etc.) 

System Options 

Part Number 

753-002-G10 

011-219 

016-427-G1 

016-010-G1 

753-002-G15 

Spare Parts 

Part Number 

Sentinel¨ III control unit 

With video display RS232 interface, analog output and 12/12 I/0 relay interface. Input voltage factory set to 120 VAC 

Sensor control unit 

Will drive two EIES sensors and process three PMT output signals 

Photomultiplier detector assembly 

For Sentinel¨ III includes photomultiplier tube 

Photomultiplier detector assembly with cables 

Cable set includes photomultiplier tube, 5' (1.5m) signal cable and 5' (1.5m) high-voltage cable 

Replacement photomultiplier tube (for 016-350-G1 and 753-002-G9) 

I/0 Relay module 

Provides 12 input and 12 output interface capability 

Beam splitter 

EIES sensor assembly 

EIES sensor emitter adaptor 

Double ended sensor assembly 

1" (2.54cm) bolt feedthrough assembly 

2 3 /4" (NW35CF) conflat feedthrough assembly 

In-vacuum cable kit 

For EIES sensor 

High rate EIES sensor cover (Aperture opening: .43 x .18 in.) 

Standard EIES sensor cover (Aperture opening: .43 x .36 in.) 


753-003-G1 

753-200-G1 

016-350-G1 

753-002-G9 

009-139 

017-422-G2 

016-204-G1 

016-400-G2 

016-201-G1 

016-402-G1 

016-230-G2 

016-390-G1 

016-405-G1 

016-205-P1 

016-205-P2 

074-087 

B4.24

Leak Detectors 

Helium and Refrigerant 

B5


Contents 

General 

Applications and Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.3 

Leak Detection - Leak Testing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.4 

Leak Detection Methods. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.5 

Operating Principles of the INFICON Helium Leak Detectors . . . . . . . . . . . . . . . . . . . . . . . . . . B5.7 

Products 

ULTRATEST UL 200 Helium Leak Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.10 

ULTRATEST UL 200 dry Helium Leak Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.11 

Modul 200 Mobile and Flexible Helium Leak Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.12 

Mobile Leak Detection Systems Fitted to the CART 200 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.14 

LDS 1000 Modular Leak Detection System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.16 

ULTRATEST UL 500 Stationary Helium Leak Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.18 

ULTRATEST UL 500 dry Stationary Helium Leak Detector. . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.20 

Protec Helium Sniffer Leak Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.22 

Ecotec II Sniffer Leak Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.24 

HLD4000A Sniffer Leak Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.26 

Contura Z Helium Leak Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.28 

Product-Related Accessories 

Calibrated Leaks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.30 

Screw-in Calibrated Leaks. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.32 

Helium Sample Probes (Sniffers). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.34 

Accessories for the UL 500 and UL 500 dry . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.35 

Accessories for the UL 200, UL 200 dry and Modul 200. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.36 

General Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.37 

Other Accessories 

Connection Flanges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.38 

Connection Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.38 

B5.2

General 



Applications 

Semiconductor production 

Vacuum coating 

Research and development 

Chemistry/pharmaceutical 

Metallurgy/furnaces 

Lamps and tube manufacture 

Automotive industry 

Laser engineering 

Particle accelerators 

Analytical engineering 

Systems with cryo pumps 

Cooling and air conditioning 

Electrical engineering 

Mechanical engineering 

Flexible packaging 

Power plants 

Systems engineering 

UHV applications 

Test Instruments / 


Accessories 

Calibrated leaks 

Screw-in calibrated leaks 

Helium sniffers 

Helium sniffers 

Interfaces 

Gas ballast facilities 

Trigger relay boards 

Seal kits 

Transport Case 

Partial flow system 

Exhaust filter sets 

PC software LeakWare 

PC software LDS-WARE 

Monitor software 

Calibrated test leak 

UL 200 

UL 200 dry 

Modul 200, oil-free 

Modul 200, oil-sealed 

LDS 1000 

UL 500 

UL 500 dry 

Protec 

Ecotec II 

HLD4000A 

Contura Z 

◆ ◆ ◆ ◆ 

◆ 

◆ 

◆ ◆ ◆ ◆ ◆ 

◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ 

◆ 

◆ 

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Page 

B5.30 ◆ ◆ ◆ ◆ standard standard ◆ 

B5.32 ◆ ◆ 

B5.22/24 ◆ ◆ 

B5.34 ◆ ◆ ◆ ◆ standard ◆ ◆ standard ◆ 

B5.35 standard standard standard standard standard ◆ ◆ standard standard 

B5.35 standard standard ◆ ◆ 

B5.35 standard standard standard standard ◆ ◆ standard standard 

B5.35 ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ 

B5.36 ◆ ◆ ◆ ◆ 

B5.36 ◆ ◆ ◆ 

B5.36 standard standard ◆ ◆ ◆ 

B5.36 ◆ ◆ ◆ ◆ 

B5.16 ◆ 

B5.28 ◆ 

B5.28 standard 

B5 

B5.3


Leak Detection – Leak Testing 

Leak Detection – Leak Testing 

Whether a component or a system is leak-tight depends on the application 

it is to be used in and the leak rate that is acceptable. Absolutely leak-tight 

components and systems do not exist. A component is considered 

technically leak-tight if its leak rate remains below a value defined for this 

particular component. In order to provide a quantitative measure, the term 

Òleak rateÓ with the symbol Òq L 

Ó was introduced. In vacuum technology mbar 

x l x s -1 is used as the unit for leak rates. 

A leak rate of 1 mbar x l x s -1 exists in a closed vessel having a volume of 

1 liter when the pressure increases by 1 mbar within one second, or in case 

of an overpressure it decreases by 1 mbar within one second. 

q L = V x △p (mbar x l x s -1 ) 

△t 

The wide range of leak rates from several 100 mbar x l x s -1 to below 

10 -11 mbar x l x s -1 as they occur in practice necessitates the use of 

different leak detection principles and hence leak detectors (see figure). 

Besides the determination of the total leak tightness, it is usually important 

to locate the leak, quickly and precisely, in order to seal it. Instruments for 

local leak detection are called leak detectors. The leak detectors presented 

in this product section can be used for the localization of leaks, and in 

addition some are suitable for determining the total leak rate of test objects. 

Overview of the leak rate detection ranges 

Leak Rate 

atm x cm3 x s-1* kg x h-1 g/a 

mbar x l x s-1 cm3 x s-1 * Torr x l s-1* Pa x m3 x s-1 air C2H2F4 (R 134a) 

1 mbar x l x s -1 (He) 1 0.99 0.75 0.1 4.3 x 10 -3 2.28 x 10 5 

1 atm x cm 3 x s -1 * = cm 3 (STP) x s -1 1.01 1 0.76 0.101 4.3 x 10 -3 2.3x 10 5 

1 torr x l x s -1 * 1.33 1.33 1 0.133 5.7 x 10 -3 3.0 x 10 5 

Pa x m 3 x s -1 10 9.87 7.5 1 4.28 x 10 -2 2.28 x 10 6 

1 kg x h -1 air 234 234 175 23.4 1 Ð 

1 g/a C 2 H 2 F 4 (R 134a) 7.58 x 10 -6 6.3 x 10 -6 4.8 x 10 -6 6.41 x 10 -7 Ð 1 

* According to international system of units only Pa x m 3 x s -1 is permissible 

B5.4

Leak Detection Methods 



There are two main groups of leak detection methods; for both there are 

special instruments available: 

Vacuum Methods 

The equipment to be tested is evacuated. The pressure ratio between 

inside and outside is 0:1. 

Overpressure Methods 

The equipment to be tested is pressurized with a search gas or a search 

gas mixture. The pressure ratio between inside and outside is over 1:1. 

Between the two methods there exist many variations depending on the 

particular application. 

General Notes 

1. The lowest leak rates can only be measured by employing the vacuum 

method, whereby the following applies: The lower the leak rate, the higher 

the requirements are concerning cleanness and ultimate vacuum. 

The pressure will then rise as a function of time. Curve (a) shows the 

theoretical pressure rise if there is only a leak. Curve (b) shows the 

pressure rise due to outgassing from the surfaces of the test object. 

This pressure rise tends to tail off in the direction of a saturation level. If in 

such a case the time allowed for monitoring the pressure rise is too short, 

a leak will be indicated which in reality does not exist. If one waits long 

enough for the pressure to rise, i.e. after the bend of curve (b) the 

outgassing process can then be disregarded, so that the leak rate can be 

determined from the known volume of the test object and the measured 

pressure rise over a fixed rise time (see equation on page 4). Curve (c) 

shows the pressure rise as it occurs in practice, where outgassing and leak 

rate add. The detectable leak rate depends on the volume of the test object, 

the obtained ultimate pressure and the outgassing from the test object. In 

connection with very large test objects this method is time consuming if 

extremely low leak rates are to be determined in the fine and rough 

vacuum range. 

Local Leak Detection 

2. If possible the test objects should be tested under the same conditions 

that will be used in their final application, i.e. parts for vacuum operation 

should be tested according to the vacuum method and parts for 

overpressure operation should be tested using the overpressure method. 

5 

Fig 2 

1 

B5 

Leak Testing Based on Vacuum Methods 

LD 

HELIUM 

(Vacuum inside the test object) 

2 

Pressure Rise Method 

With this method it is only possible to determine the total leak rate. 

The test object is evacuated with a vacuum pump or a vacuum pump 

system. A valve is used to isolate the test object from the vacuum pump. 

Fig 1 

Local leak detection Ð Evacuated test object 

3 

4 

Key to the Figures 

1 Test object, 2 Leak detector, 3 Search gas cylinder , 4 Vacuum pump, 

5 Hood, 6 Spray gun for search gas , 7 Sniffer probe 

a) Pressure rise due to leakage 

b) Pressure rise due to outgassing from the chamber walls 

c) Both effects combined 

Pressure rise in a vacuum chamber after switching off the pump; double log. plot 

The test object is evacuated by a vacuum pump (auxiliary pump) until the 

pressure is low enough for the leak detector to operate. When using a 

helium leak detector, its own pump system will take care of further 

evacuation. Suspicious spots on the test object will then be sprayed with a 

fine jet of search gas. Search gas entering through leaks into the test object 

is pumped out by the vacuum pump and it is converted by the leak detector 

into an electrical signal which is then displayed. This permits rapid detection 

and determination of the size of even the smallest leaks. 

B5.5



Integral Method 

3 

Fig 3 

LD 

HELIUM 

5 

1 

2 

Local Leak Detection with 

Leak Detectors – Sniffing 

The test object is filled with the search gas or the search gas/air mixture to 

which the leak detector is sensitive. The leak detector is equipped with a 

sniffer probe, whereby there is a low pressure at the probe tip. If the sniffer 

tip passes suspicious points on the test object the search gas coming out of 

the leak is sucked in and transferred to the detection system of the leak 

detector. After conversion into electrical signals these are displayed 

optically and acoustically by the leak detector. 

Integral Method – Hood Test 

4 

Integral method Ð Evacuated test object 

5 

1 

Key to the Figures 

1 Test object, 2 Leak detector, 3 Search gas cylinder , 4 Vacuum pump, 

5 Hood, 6 Spray gun for search gas , 7 Sniffer probe 

3 

7 

Determination of the total leak rate of a test object. The testing arrangement 

is the same as for local leak detection, but in this case the test object is not 

sprayed with search gas on selected areas, but it is surrounded by a hood 

or a chamber which is filled with the search gas. Thus the entire outer 

surface of the test object comes into contact with the search gas. 

If the search gas enters the test object, the total leak rate is indicated 

independently of the number of existing leaks. With helium leak detectors it 

is possible to determine the helium content of the air. This is utilized in the 

detection of gross leaks. 

Leak Testing Based on 

Overpressure Methods 

(Overpressure within the test object) 

Pressure Drop Method 

The test object is filled with a gas (for example air or nitrogen) until the 

testing pressure is reached. Precision vacuum gauges are used to detect a 

possible pressure drop during the testing period. This method is simple to 

implement, it is suitable for the determination of gross leaks and can be 

improved upon by using differential pressure gauges. By applying soap 

solutions or similar, leaks can be located. 

2 

LD 

HELIUM 

Integral method (search gas accumulation) 

Search gas overpressure in the test object 

To determine the total leak rate of a test object subjected to a search gas 

overpressure, the test object is surrounded by a hood of a known volume. 

The search gas which escapes through the leaks collects in the hood. 

After a fixed accumulation period a sniffer probe is used to measure the 

concentration of the search gas which has collected in the hood. Before this 

the leak detector should be calibrated by a reference measurement using a 

known search gas concentration. 

The leak rate can then be determined by the equation for q L 

where V is the 

volume of the hood, ∆p is the partial pressure difference of the search gas 

(concentration change) and t is the accumulation period. 

Uncertainties in the determination of the volume, leaks in the hood and a 

wrong accumulation period make precise leak rate measurements based on 

this method very questionable. 

Integral Method – Vacuum Hood Test 

1 

3 

5 

1 

3 

7 

LD 

HELIUM 

2 

2 

LD 

HELIUM 

4 

Leak detection Ð Search gas overpressure in the test object 

Integral method Ð Search gas overpressure in the test object 

B5.6

Operating Principles of the INFICON Helium Leak Detectors 


This test is a variation of the hood test described above, which has 

considerable advantages. A vacuum chamber which is evacuated by an 

auxiliary pump and which is connected to a leak detector is used as the 

hood. The search gas escaping through the leaks is converted by the 

detection system of the leak detector into electrical signals which are 

immediately displayed. After calibration of the leak detector with a calibrated 

leak it is possible to quantitatively determine the total leak rate. This method 

permits the detection of very small leaks and is especially suited for 

automatic industrial leak detection. 

Integral Method – Bombing-Test 

This method is used for testing hermetically sealed components such as 

transistors, IC-packages or dry reed relays. It is basically a variation of the 

vacuum hood test. Here the test objects are placed in a vessel which is 

pressurized with the search gas Ð preferably helium. At a fairly high search 

gas pressure and after a period of up to several hours it is tried to enrich 

the search gas inside leaky test objects. This is the actual so called 

ÒbombingÓ process. 

After this, the test objects are transferred to a vacuum chamber and their 

total leak rate is determined in the same way as in the vacuum hood test. 

During evacuation of the vacuum chamber down to the required testing 

pressure, those test objects which have a gross leak already lost their 

accumulated search gas. These parts are not detected as leaking during 

the actual leak test. Therefore the test with the vacuum chamber is often 

preceded by a Òbubble testÓ. 

This method permits the detection of the lowest leak rates and is used 

mainly in automatic industrial leak testing especially when it is not possible 

to fill the parts with gas in any other way. 

Operating Principles of the 

INFICON Helium Leak Detectors 

Operating Principle 

A helium leak detector permits the localization of leaks and the quantitative 

determination of the leak rate, i.e. the gas flow through the leak. Such a 

leak detector is therefore a helium flow meter. 

In practice the leak detector performs this task by firstly evacuating the part 

which is to be tested, so that gas from the outside may enter through an 

existing leak due to the pressure difference present. If only helium is 

brought in front of the leak (for example by using a spray gun) this helium 

flows through the leak and is pumped out by the leak detector. The helium 

partial pressure present in the leak detector is measured by a sector mass 

spectrometer and is displayed as a leak rate. This is usually given in terms 

of volume flow of the helium (pV-flow). 

Important Specifications 

The two most important features of a leak detector are its measurement 

range (detection limits) and its response time. 

The measurement range is limited by the lowest and the highest detectable 

leak rate. The lowest detectable leak rate is defined by the sum of drift and 

noise in the most sensitive measurement range. Usually the sum of noise 

amplitude and zero drift per minute is made to be equivalent to the lowest 

detectable leak rate. With INFICON leak detectors the amount of drift is so 

low, that the noise amplitude alone determines the detection limit. 

The highest detectable leak rate depends strongly on the method 

employed. Especially the counterflow method and partial flow operation 

(see description below) permit the measurement of very high leak rates 

even with a sensitive helium leak detector. In addition the multi-stage 

switchable high impedance input amplifiers of the INFICON leak detectors 

also permit the measurement of high leak rates. 

In practical applications, especially in the localization of leaks the response 

time is of great significance. This is the time it takes from spraying the test 

object with helium until a measured value is displayed by the leak detector. 

The response time of the electronic signal conditioning circuitry is an 

important factor in the overall response time. In the case of INFICON leak 

detectors the response time of the electronic circuitry is well below 1 s. 

The volume flow rate for helium at the point of the test object is of decisive 

significance to leak detection on components which are pumped down 

solely by the leak detector. This volume flow rate provided by the leak 

detector takes care of the helium entering through a leak and it ensures 

quick detection by the leak detector. On the other hand, the volume of the 

test object delays the arrival of the helium signal. The response time can be 

calculated by using the following simple equation: 

V 

Response time for helium t A 

= 3 á ÑÑÑ 

S He 

(for 95% of the final value) 

with V = Volume of the test object 

S He 

= Volume flow rate for helium at the point of the test object 

(or at the inlet of the leak detector, if it alone pumps down 

the test object). 

Main Flow Method 

The classic operating principle of helium leak detectors is based on the 

main flow method. Here the entire helium flow passes through the high 

vacuum system of the leak detector, where the mass spectrometer 

measures the partial pressure of the helium. In this, the use of a liquid 

nitrogen cold trap is essential to remove water vapor or other condensible 

gases in the vacuum system which impair the operation. Moreover, the use 

B5 

B5.7



of a cold trap permits the low operating pressures for the mass 

spectrometer to be reached (below 10 -4 mbar) despite the directly 

connected (and possibly contaminated) test object. 

The helium which now enters the forevacuum can still be detected, as it is 

able to flow against the pumping direction of the turbomolecular pump into 

the mass spectrometer. This is due to the high particle velocity of the 

helium. The sensitivity of this counterflow arrangement is equal to that of 

the main flow principle, provided the right combination of volume flow rate 

of the backing pump and helium compression of the turbomolecular 

pump is used. 

The advantages of the counterflow method are: 

Ð No liquid nitrogen is required 

Ð High permissible inlet pressures (i.e. pressure within the test object) 

This makes the counterflow method especially suitable for mobile leak 

detection on systems. For leak detection on larger components where a 

short response time is essential (i.e. high volume flow rate) an additional 

turbomolecular pump stage is required at the inlet of the leak detector. 

The INFICON leak detector ULTRATEST UL 500 is the only instrument to 

offer this optimized counterflow method. 

Main flow method 

The advantages of the main flow method are: 

Ð Highest sensitivity, i.e. low detection limit 

Ð Short response time due to a high volume flow rate at the inlet. 

The main flow method is thus especially suitable for stationary leak 

detection on components. Leak detection on systems having their own 

pump sets and at higher pressures requires the use of an external throttling 

valve, i.e. a partial flow with subsequently reduced sensitivity is utilized. 

Counterflow Method 

With this method the test object is not connected to the high vacuum. 

Instead it is connected to the forevacuum (between turbomolecular pump 

and backing pump), so that the entire gas flow (especially water vapor) 

does not contribute to the pressure increase in the mass spectrometer. 

Thus a cold trap is no longer required! 

Partial Flow Method 

In order to expand the measurement range in the direction of higher leak 

rates and for operation at higher inlet pressures, helium leak detectors 

incorporate a partial flow or a gross leak system. This consists basically of 

a throttle and a rotary vane pump. At pressures above the normal inlet 

pressure (main flow: above 10 -2 mbar, counterflow: above 10 -1 mbar) or in 

the case of high helium leak rates, the inlet valve is closed and the main 

flow is allowed to enter the partial flow pump, whereas only a small part 

enters the leak detector via the partial flow throttle. Thus the total pressure 

and the helium pressure are dropped to values suitable for operation of the 

leak detector. 

Main flow or 

counterflow 

leak detector 

Partial flow method 

To obtain correct leak rate readings in the partial flow mode, the partial flow 

ratio, i.e. the ratio between the actually measured gas flow and the total 

gas flow must be known and stable. 

Counterflow method 

In all INFICON leak detectors this is achieved by a partial flow throttle 

made of ruby with a precisely machined hole. This ensures that the 

quantitatively determined leak rates are always correct without calibration, 

even for gross leaks. 

B5.8



Calibration of Helium Leak Detectors 

with Calibrated Leaks 

In the process of leak detection one expects that a test object which does 

not have a leak produces a zero reading on the leak detector. In this any 

malfunctions are excluded. Thus calibrated leaks, i.e. artificial leaks which 

produce a known helium leak rate are essential for reliable results. 

To obtain a quantitatively correct leak rate reading the sensitivity of the leak 

detector must also be adjusted. This requires the use of a calibrated leak. 

INFICON offers calibrated helium leaks of various designs covering the 

range between 10 -8 to 10 -4 mbar x l x s -1 as part of the standard range 

of products. All leak rates are traceable to the standards of the German 

Calibration Service controlled by the PTB (Federal Institution of Physics 

and Technology). If requested each helium calibrated leak can be supplied 

with a calibration certificate issued by the German Calibration Service. 

The calibration itself is performed by the German Calibration Service 

for Vacuum. 

B5 

B5.9


ULTRATEST UL 200 Helium Leak Detector 

ULTRATEST UL 200 Helium Leak Detector 

The UL 200 is a portable multi-purpose helium leak detector and is 

equally well suited to both service and series production testing. 

Its rugged design and its ease of use make the UL 200 the best 

selling leak detector in the world. 

Technical Data UL 200 

Advantages 

◆ Quick start-up 

◆ Extremely fast response time 

◆ Oil-free gas admission system 

◆ One of the smallest helium leak detectors in the world 

◆ High sensitivity 

◆ Ergonomically designed 

◆ Hand unit can be operated with one hand equally well by right 

and left-handers 


Leak tests in connection with: 

◆ Quality assurance 

◆ Automotive industry 

◆ Analytical instruments 

◆ Systems manufacture 

◆ Power station engineering 

◆ Research and development 

◆ Semiconductor industry 

◆ High vacuum and ultra-high vacuum engineering 

◆ Ideal tool for industrial series production testing Ð in the cooling 

and air conditioning industries, for example 

In connection with the sniffer lines which are available as accessories 

the UL 200 may also be used as a sniffer leak detector. 

In connection with a partial flow pump set the UL 200 may also be 

used for the detection of leaks on large vessels. 

Smallest detectable helium leak rate 

(Vacuum mode) mbar x l x s -1 < 5 x 10 -11 


(Sniffer mode) mbar x l x s -1 < 1 x 10 -7 

Max. detectable helium leak rate 

(Vacuum mode) mbar x l x s -1 1 x 10 -1 

Max. inlet pressure/with 

partial flow pump set mbar (Torr) 3 / 1000 / (2.25 / 760) 

Pumping speed during the m 3 x h -1 / cfm 2.5 (50 Hz) / 1.5 

evacuation process m 3 x h -1 / cfm 3.0 (60 Hz) / 1.8 

Pumping speed for helium at the inlet l/s 1 

Time constant of the leak signal 

(blanked off, 63% of final value) s < 1 

Leak rate measurement range mbar x l x s -1 1 x 10 -11 to 1 x 10 -1 

Units of measurement (selectable) mbar x l x s -1 , 

Atm x cc x sec -1 , 

Pa x m 3 x s -1 , ppm, 

Torr x l x s -1 * ) , g/a* ) , oz/y* ) 

Time until ready for operation min < 3 

Mass spectrometer 

180¡ magnetic 

sector field 

Ion source 

2 yttrium / iridium 

long-life cathodes 

Detectable masses amu 2, 3 and 4 

Test port DN 1 x 25 KF 

Length of the cable on the hand unit m 4 

Dimensions (W x H x D) mm (in.) 490 x 430 x 250 

(19.6 x 17.2 x 10 in.) 

Weight kg (lbs.) 37 (82) 


* ) Not for Japan version (Cat. No. 142 00) 

UL 200 

Part Number 

ULTRATEST UL 200, 220 V, mbar readout, with TL 7 140 00 

115 V, mbar readout, with TL 7 141 00 

100 V, Pa readout, with TL 7 142 00 

110 V, mbar readout without TL 7 141 01 

100 V, Pa readout without TL 7 142 01 

PC software LeakWare 140 90 

For further accessories see Section 

ÒAccessories for UL 200, UL 200 dry and 

Modul 200Ó Ð Page B5.36 

B5.10

ULTRATEST UL 200 dry Helium Leak Detector 


ULTRATEST UL 200 dry Helium Leak Detector 

The UL 200 dry is a compact portable helium leak detector capable 

of meeting the highest cleanliness requirements. 


UL 200 dry 

Based on the well-proven technology of the UL 200, but equipped with an 

oil-free pump system, the UL 200 dry meets the highest requirements 

concerning cleanness while at the same time being small in size. 

Advantages 

◆ Oil-free ÒdryÒ pump system 

◆ Small footprint 


◆ Extremely fast response 


Leak tests with stringent requirements concerning cleanliness, for example 


Ð After repairs or maintenance work 


Ð Production of semiconductor components 

◆ Pharmaceutical/medicine 

◆ Laser 






(Vacuum mode) mbar x l x s -1 1 x 10 -1 

Max. permissible inlet pressure mbar (Torr) 3.5 (2.63) 

Pumping speed during the m 3 x h -1 / cfm 1.6 (50 Hz) / 0.94 

evacuation process m 3 x h -1 / cfm 1.9 (60 Hz) / 1.12 

Pumping speed for helium at the inlet l/s 0.6 




Units of measurement (selectable) mbar x l x s -1 , 

Atm x cc x sec -1 , 

Pa x m 3 x s -1 , ppm 

Torr x l x s -1 * ) , g/a * ) ,oz/y* ) 



Ion source 


180¡ magnetic 

sector field 

2 yttrium / iridium 

long-life cathodes 





(19.6 x 17.2 x 10 in.) 

Weight kg (lbs.) 34.5 (76) 

UL 200 dry 

Part Number 

ULTRATEST UL 200 dry 


100 V, Pa readout, with TL 7 141 15 





Modul 200Ó Ð Page B5.36 

* ) Not in Japan version (Part Number 141 15) 

B5.11 

B5


Modul 200 Mobile and Flexible Helium Leak Detector 

Modul 200 Mobile and 

Flexible Helium Leak Detector 

The Modul 200 combines the excellent characteristics of the UL 200 

with those of the pump system which has been added to the basic 

leak detector module. 

The Modul 200 is available in two basic groups: 

◆ Dry, mobile leak detectors with selectable pumping speed Ð in 

combination with a laboratory trolley suitable for clean room applications 

◆ Oil-sealed, mobile leak detectors offering a high pumping speed at an 

optimum price-to-performance ratio. 

Modul 200 with Dry-Compressing 

Scroll Pump 

This combination represents a dry high-performance leak detector. 

Advantages 

◆ Very high pumping speed which is also acceptable for testing 

semiconductor production chambers without having to use their own 

pump systems 

◆ Fast response 

◆ Quick recovery (after helium contamination) 

◆ Absolutely dry 



All applications which demand a clean process. 

Modul 200 with Oil-Sealed 

Backing Pump 

This combination represents a powerful leak detector, the pumping speed of 

which is adapted to the particular application in each case. 

Advantages 

◆ Cost-effective leak detector 

◆ Pumping speed optimized for the particular application 


◆ Quick recovery 



All applications involving short cycles and/or larger volumes and which 

require a mobile system 


◆ Cooling and air conditioning 

◆ Manufacturers of furnaces/machines/systems 

◆ Packaging 

◆ Semiconductor industry (chip manufacturers) 

◆ Semiconductor industry (tool manufacturers and subcontractors) 

◆ High purity gas industry 

◆ Research and development 

◆ UHV applications 

B5.12

Modul 200 Mobile and Flexible Helium Leak Detector 



Modul 200 

With Scroll Pump 

With Rotary Vane Vacuum Pump 






(Vacuum mode) mbar x l x s -1 10 -1 

Max. permissible inlet pressure mbar (Torr) 3 (2.25) 

Pumping speed during the evacuation process 

TriScroll 600 m 3 x h -1 (cfm) 25 (14.7) Depends on the type of rotary vane vacuum pump used 

Pumping speed for helium at the inlet flange l/s 8 Depends on the type of rotary vane vacuum pump used 




Units of measurement (selectable) mbar x l x s -1 , Atm x cc x sec -1 , Pa x m 3 x s -1 , ppm, Torr x l x s -1 *) , g/a *) , oz/y *) 



180¡ magnetic sector field 

Ion source 

2 yttrium / iridium long-life cathodes 




Dimensions (W x H x D) mm (in.) 490 x 430 x 250 (19.6 x 17.2 x 10) 

Weight (without pump) kg (lbs.) 30.5 (67) 

B5 

The following Part Numbers contain only the individual components needed for assembly by the customer. For building a portable system we recommend our 

factory tested and pre-assembled systems (see next page ÒMobile Leak Detection Systems fitted to CART 200Ó). 


Modul 200 

Part Number 

Modul 200 without pump 1) 

Euro, 220-240 V, 50/60 Hz 140 34 

US,115 V, 50/60 Hz 141 34 

Japan,100 V, 50/60 Hz 141 36 

Modul 200 with TriScroll 600 

Euro, 220-240 V, 50/60 Hz 140 44 

US,115 V, 50/60 Hz 141 44 

Japan,100 V, 50/60 Hz 141 46 

Modul 200 with oil-sealed rotary vane vacuum pump 

upon request 




Modul 200Ó - Page B5.36 

*) Not for Japan version (Part number 141 36 and 141 46) 

1) But without integrated backing pump 

Please order cart separately 

B5.13

Leak Detectors Mobile Leak Detection Systems Fitted to CART 200 

Mobile Leak Detection Systems 

Fitted to CART 200 

These mobile systems are designed to fit on the CART 200 or 

the CART 200 CR. Either cart will accommodate the UL 200, 

UL 200 dry or Modul 200 leak detectors. 

Additional backing pumps (depending on the version required) are 

installed on the bottom level of the carts. 

CART 200 with Modul 200 and TRIVAC D 

25 B (helium cylinder is not included) 

CART 200 CR with UL 200 dry and 

TriScroll (helium cylinder is not included) 

The pre-assembled and tested systems include all required connecting 

components between leak detector and backing pump. 

Only the upper section of the system will be packaged separately. 

148 

705 

300 

320 

The helium cylinder is not part of the delivery. 

CART 200 

CART 200 is a special transport cart made of painted steel with an 

integrated holder for gas cylinders and space for small parts and 

documents. The leak detector and the pump are accommodated on 

two levels. 

CART 200 CR (Clean Room) 

Cart 200 CR is the clean room version of the CART 200. The fully enclosed 

cart is made of stainless steel. The pump is covered to prevent particles 

from escaping from the cart. 

Advantages 

◆ Complete, fully operational leak detection system 

◆ Simple to operate 

◆ Choice of either oil-sealed or dry compressing backing pump 

◆ In the case of these systems, the transport cart CART 200/ 

CART 200 CR is included 

1108 

685 

225 

560 

Dimensional drawing for the CART 200 (CR) 

480 

540 

B5.14

Mobile Leak Detection Systems Fitted to CART 200 



Modul 200 on CART 

Smallest detectable leak rate for air 


Smallest detectable leak rate for helium 


Max. detectable leak rate for helium 

(Vacuum mode) mbar x l x s -1 10 -1 

Max. inlet pressure mbar (Torr) 3 

Pumping speed during the evacuation process with 

TriScroll 600 m 3 x h -1 25 

TRIVAC D 16 B, US m 3 x h -1 20 

TRIVAC D 25 B, Euro m 3 x h -1 25 

Max. pumping speed for helium at the inlet flange l/s 8 


(blanked off, 63 % of final value) s < 1 


Units of measurement (selectable) mbar x l x s -1 , Atm x cc x sec -1 , Pa x m 3 x s -1 , ppm, Torr x l x s -1 1) , g/a 1) , oz/y 1) 



180¡ magnetic sector field 

Ion source 

2 yttrium / iridium long-life cathodes 

Detectable masses amu 2,3 and 4 


Cable length for the hand unit m 4 

Dimensions (W x H x D) mm (in.) 490 x 430 x 250 (19.6 x 17.2 x 10) 

Weight (without pump) kg (lbs.) 30.5 (67) 

B5 


Modul 200 on 

Modul 200 on 

CART 200 Part Number CART 200 CR 

UL 200 with partial flow pump set 

TRIVAC D 25 B Euro 140 85 140 80 

TRIVAC D 16 B US 141 85 141 80 

Japan Ñ 142 80 

UL 200 dry with partial flow pump set 

TriScroll 600 Euro 140 75 140 65 

US 141 75 141 65 

Japan 142 75 142 65 

Modul 200 2) with 

TriScroll 600 Euro 140 73 140 60 

US / Japan 141 70 141 60 

TRIVAC D 25 B Euro 140 72 140 62 

TRIVAC D 16 B US 141 72 Ñ 

1) Not for Japan version (Part Number 142 80, 142 75, 142 65,141 70 and 141 60) 

2) Without integrated backing pump 

B5.15


LDS 1000 Modular Leak Detection System 


For Integration in Industrial 

Leak Testing Systems 

The LDS 1000 is a helium leak detector for universal integration in 

industrial leak testing systems (vacuum or sniffing method). 

The detection system has been separated from the power supply 

electronics so that the LDS 1000 may be adapted to the particular 

application with great flexibility. 

Advantages 

◆ Fast response time for short testing cycles 

◆ Measurement of the true leak rate of the test sample while 

simultaneously pumping down the test chamber (partial flow operation) 

◆ Control and acquisition of data via programmable control compatible 

signals or RS 232 C interface 

◆ Easy to operate 


Leak tests in the areas of: 

◆ Mechanical engineering 

◆ Manufacture of systems 


◆ Lamps and tube production 

◆ Switching over from vacuum leak detection to sniffer leak detection 

upon a single key press allows for immediate pin-pointing of the leak 

during the same test step 

◆ The operating unit may also be detached from the instrument 

◆ Control and data acquisition software LDS-WARE (optional) 

◆ Chart recorder output 0 - 10 V lin/log for logging the leak rate and the 

forevacuum pressure 

◆ Calibration through internal calibrated leak Ñ also externally or 

dynamically while pumping down is in progress 

◆ Electronics module prepared for mounting in a 19" rack (3 HU) to offer 

protection against dust, high temperatures or electromagnetic interference 

330 

Dimensional drawing of the LDS 1000 

210 

135 

115 

170 

190 

128.5 

483 

320 

380 

Dimensional drawing of the electronics module for the LDS 1000 

B5.16





FINE mode mbar x 1 x s -1 5 x 10 -11 

GROSS mode mbar x 1 x s -1 3,5 x 10 -10 

Sniffer mode mbar x 1 x s -1 1 x 10 -7 

Units of measurement (selectable) 

mbar x l x s -1 , Pa x m 3 x s -1 , Atm x cc x sec -1 , g/a, ppm 

Max. inlet pressure mbar (Torr) 3 (2.25) 

Response time s < 1 

Ion source 

2 yttrium/iridium long life cathodes 

Vacuum connections DN 16 KF 

Relays 7 

Trigger relays/status relays 4 / 3 

Control inputs Programmable control compatible (max. 35 V) 

Chart recorder output lin/log V 0 - 10 

Interface 

LDS 1000 

Modular Leak Detection System 

RS 232 C 


LDS 1000 

Part Number 

LDS 1000, basic unit 

Consisting of 19" electronics module 145 00 

with integrated operating unit and mass spectrometer 

Connection cable 

Electronics module / mass spectrometer module 

1.5 m (4.8 ft) 145 34 

3.0 m (10 ft) 145 33 

5.0 m (16 ft) 145 30 

10.0 m (32 ft) consult factory 

Options 

Pump module (complete with connection accessories) 

TRIVAC D 2,5 E Single phase world motor 145 10 

TRIVAC D 5 E Single phase motor EURO/USA 145 11 

TRIVAC D 5 E Three phase world motor 145 12 

Internal standard calibrated leak 

TL 7 145 49 

Sniffer mode accessories 

Sniffer valve 145 20 

Sniffer line, with sniffer probe, 200 mm 

line length 3.0 m (10 ft) 145 21 

5.0 m (16 ft) 145 22 

10.0 m (32 ft) 145 23 

Replacement sniffer probe, 400 mm 200 04 642 

Extension cable 

Electronics module / Operating unit 

3.0 m (10 ft) 145 40 

5.0 m (16 ft) 145 41 

10.0 m (32 ft) 145 42 

PC software LDS-WARE 145 91 

B5 

B5.17


ULTRATEST UL 500 Stationary Helium Leak Detector 

ULTRATEST UL 500 

Stationary Helium Leak Detector 

The ULTRATEST UL 500 is an automatic leak detector offering 

fast pumpdown and short response times. 

Advantages 

◆ Wide dynamic measurement range over 14 decades 

◆ Leak detection is possible from atmospheric pressure 

◆ Short pumpdown and response times 

◆ Fully automatic run-up and very simple to operate via two 

main push-buttons 

◆ Large, clearly arranged and easy to read LCD display with analog 

and digital leak rate readout, and status display with alphanumeric 

plain text display for user guidance 

◆ Autoranging Ð rapid automatic range switching 

◆ Autozero Ð automatic Zero alignment 

◆ Autocal Ð automatic calibration via built-in calibrated leak 

◆ Low-maintenance special turbomolecular pump for quick operational 

readiness and high pumping speed at the test port 


Quality control of all types of components, continuous short cycle operation 

of large quantities (series testing) and single tests, for example in: 

◆ Electrical industry 


◆ Cooling and air conditioning industry 


◆ Container assembly 

◆ Packaging industry 

◆ Precision mechanics 

◆ Research 

The UL 500 can be used in connection with a helium sniffer for 

overpressure leak detection. 

◆ Electro-pneumatically operated long-life bellows-sealed valves 

◆ Mobile unit (table top enclosure) on castors 

◆ Optional V.24 / RS 232 C computer interface 

Dimensional drawing for the UL 500 

B5.18

ULTRATEST UL 500 Stationary Helium Leak Detector 




Smallest detectable leak rate for air mbar x l x s -1 7 x 10 -11 

Smallest detectable leak rate for helium mbar x l x s -1 2 x 10 -10 

Largest detectable leak rate for helium mbar x l x s -1 10 

Largest leak rate which can be indicated (qualitative) mbar x l x s -1 1000 

Max. inlet pressure for quantitative measurement mbar (Torr) 100 (75) 

Max. inlet pressure for qualitative measurement mbar (Torr) 1000 (750) 

Time until ready for operation min ² 5 


Pumping speed during the evacuation process m 3 x h -1 25 

Pumping speed for helium at the test port l x s -1 ³ 12 

Time constant of the leak signal (blanked off, 63% of final value) s ² 1 

Pumpdown time until ready to detect leaks 

Without additional volume s 6 

At a test volume of 1 l s 6 


Response times 

Up to a test volume of 10 l s ² 1 


Display capacity for leak rates 

1. Quasi-analog display 360¡ circular display, logarithmic divisions, 

1 decade per turn 

Bar scale for leak rate exponent 

Digital exponent display from Ð 10 to + 3 

2. Digital display 2 digits, two-digit exponent, sign 

B5 

Units of measurement (selectable) mbar x l x s -1 , Atm x cc x sec -1 

Pa x m 3 x s -1 , ppm 

Calibrated leak TL 7 (built-in), leak rate in the range mbar x l x s -1 10 -7 

Test port DN 40 KF 

Vacuum pumps 

High vacuum pump 

Backing pump 

Auxiliary pump 

Option 

Inputs/outputs 


TURBOVAC 150 LS 

TRIVAC D 4 B 

TRIVAC D 25 B 

TRIVAC D 40 / 65 B 

2 channels 0 - 10 V 

Mains connection V 100, 110, 127, 200, 220, 240, 

380, 50/60 Hz (selectable) 


(24.7 x 43.5 x 30.5 in.) 




Part Number 

ULTRATEST UL 500, with TRIVAC D 25 B and calibrated leak TL 7 155 85 

Options for larger test volumes 

ULTRATEST UL 500, with TRIVAC D 40 B, 380 V, 3 phase 

ULTRATEST UL 500, with TRIVAC D 65 B, 380 V, 3 phase 

For accessories see Section ÒAccessories for UL 500 and 500 dryÓ Ð Modul 200Ó - Page B5.35 

upon request 

upon request 

B5.19


ULTRATEST UL 500 dry Stationary Helium Leak Detector 

Ultratest UL 500 dry 


The ULTRATEST UL 500 dry is a dry automatic helium leak detector 

of the highest performance class. 

Advantages 

◆ Wide dynamic measurement range over 14 decades 

◆ Entirely dry vacuum system 

◆ Short pumpdown and response times 

◆ Fast clean-up after helium contamination 

◆ Fully automatic run-up and very simple to operate via 

two main push-buttons 

◆ Autoranging Ð rapid automatic range switching 

◆ Autozero Ð automatic Zero alignment 

◆ Autocal Ð automatic calibration via built-in calibrated leak 


Quality checks on all types of components, especially those which must 

meet stringent requirements regarding cleanliness. 

◆ Semiconductor industry (tool manufacturers) vacuum chambers, locks, 

gas supply lines 

◆ Semiconductor industry (subcontractors) series tests on tool 

components under short cycle conditions 

◆ Research and development nuclear fusion systems, space simulation 

chambers, UHV systems, storage rings 

The UL 500 dry may also be used in all those applications where the 

oil-sealed UL 500 is used. 

◆ Large, clearly arranged and easy to read LCD display with analog 

and digital leak rate readout, and status display with alphanumeric 

plain text display for user guidance 

◆ Low-maintenance special turbomolecular pump for quick operational 

readiness and high pumping speed at the test port 

◆ Electro-pneumatically operated long-life bellows-sealed valves 

Dimensional drawing for the UL 500 dry 

B5.20

ULTRATEST UL 500 dry Stationary Helium Leak Detector 




Smallest detectable helium leak rate mbar x l x s -1 5 x 10 -11 

Largest quantitatively detectable helium leak rate mbar x l x s -1 10 

Max. inlet pressure for quantitative measurements mbar (Torr) 100 / (75) 

Time until ready for operation min ² 5 


Pumping speed during the evacuation process m 3 x h -1 25 

Pumping speed for helium at test port l x s -1 ³ 12 

Time constant of the leak signal (blanked off, 63% of final value) s < 1 

Pumpdown time until ready for leak detection 

Without additional volume s 6 



Response times 



Display capacity for leak rates 

1. Quasi-analog display 360¡ circular display, 45 segments logarithmic divisions, 

1 decade per turn 

Bar scale for leak rate exponent 

2. Digital display 2 digits, two-digit exponent, sign 

Units of measurement (selectable) ppm, mbar x l x s -1 , Pa x m 3 x s -1 

Atm x cc x sec -1 

Vacuum pumps 

High vacuum pump 

TURBOVAC 150 LS 

Backing vacuum pump Tri Scroll 600 

Auxiliary pump TURBOVAC 35 LS / diaphragm MD 4 

B5 

Mains connection V 115 / 200 / 220 / 380 

Mains frequency Hz 50/60 


2 channels 0 - 10 V 

Noise level during operation, max. dB (A) 58 

Dimensions (W x H x D) mm (in.) 1105 x 627 x 775 (43.5 x 24.7 x 30.5 in.) 




Part Number 

ULTRATEST UL 500 dry with calibrated leak TL 7, TURBOVAC 35 LS and 150 LS 

115 / 220 V, 1 phase 140 50 

200 / 380 V, 3 phase 140 51 

For accessories see Section ÒAccessories for UL 500 and 500 dryÓ - Page B5.35 

B5.21


Protec Helium Sniffer Leak Detector 


The Protec is a sniffer leak detector exclusively for helium as the 

test gas. It represents a cost-effective alternative to the UL 200 

or the Ecotec II when dealing with sniffer applications involving 

helium only. It is the ideal instrument for tests on components or 

refrigerant systems before they are filled. Its sensitivity, response 

time and price-to-performance ratio exceed the specifications of 

comparable instruments. 

Advantages 


◆ Reproducible test results 

◆ With background subtraction facility for leak detection in atmospheres 

contaminated with helium 

◆ Highly flexible and rugged sniffer lines up to 10 m long for individual 

use and inaccessible test samples 

◆ Quasi-analog leak rate display with digital exponent 

◆ Audio alarm (volume is variable) 


Protec is ideal for all helium sniffing applications where pressurized 

components need to be leak tested. The main areas of application are: 

◆ Refrigerating / air conditioning industries 

- Testing of individual components 

- Testing of assembled systems before filling 

◆ Car industry 

- Brake lines 

- Fuel lines 

- Air conditioning systems and their components 

◆ Multi-line display panel for the leak rates (digital) and 

instrument messages 

◆ Autoranging 


◆ Highly reliable 

◆ Protected against misoperation 

◆ Sniffer tips with exchangeable filter made of felt, and additional 

sinter filter 

B5.22




PROTEC 

Detectable gases 

Smallest detectable leak rate for helium mbar x l x s -1 ² 4 x 10 -7 

Measurement range 

Response time s ² 1 

Time until ready to operate min < 3 


Helium 

6 Dekaden 

mbar x l x s -1 , g/a, oz/y, Pa x m 3 x s -1 , ppm 

Gas flow sccm 70 - 90 

Sniffer line m 3, 5, 10 

Operating panel 

Inputs 

Outputs 

Computer interface 

Mains power supply 

Leak rate display, audio alarm, 

display of error messages (plain text) 

Digital control signals for data acquisition 

and control purposes 

Relay contacts for triggers and status signalling 

RS 232 C 

90 - 127 V, 50 / 60 Hz 

115 - 140 V, 60 Hz 

187 - 265 V, 50/60 Hz 

Ambient temperature range ¡C +10 to +45 


(22.8 x 12.24 x 15) 


B5 


PROTEC 

Part Number 

Helium sniffer leak detector Protec 187 V - 265 V, 50/60 Hz 122 05 

90 V - 127 V, 50/60 Hz 122 06 

115 V - 140 V, 60 Hz 122 07 

Sniffer Lines with integrated LEDs and push-button for background subtraction 

SL 303 3 m 122 10 

SL 305 5 m 122 11 

SL 310 10 m 122 12 

Sniffer Probes rigid 120 mm 122 13 

385 mm 122 15 

flexible 120 mm 122 14 

385 mm 122 16 

External loudspeaker 122 08 

Helium sniffer calibrated leak 

S-TL 4 (10 -4 mbar x l x s -1 ) 122 37 

S-TL 5 (10 -5 mbar x l x s -1 ) 122 38 

S-TL 6 (10 -6 mbar x l x s -1 ) 122 39 

Replacement filter tip 122 17 

Replacement filters 

Felt (25 pieces) 200 35 02 

Sinter (5 pieces with gasket) 200 35 00 

B5.23


Ecotec II Sniffer Leak Detector 


For Refrigerant, SF6 and Other Gases 

The Ecotec II is a sniffer leak detector, for highly selective detection 

of refrigerants (R 134a, for example) and other gases. It may be 

programmed for simultaneous detection of two different gases in 

order to arrive at clear results even under critical conditions 

(to clearly differentiate between the propellant of an insulating 

foam and a refrigerant, for example). 

Advantages 

◆ 65 pre-programmed gases 

◆ 40 freely definable gases 

◆ Simultaneous detection of up to 4 gases 

◆ Selective measurements on refrigerants 

◆ Quasi-analog leak rate display through 45 LED segments and 

with a digital exponent 

◆ Background suppression 

◆ Highly flexible and rugged sniffer lines up to 10 m long for individual 

use and inaccessible test samples 

◆ Sniffer tips with exchangeable filter made of felt, and additional 

sinter filter 


The Ecotec II is used to test for leaks on soldered/welded joints and 

screwed connections which are exposed to pressures, for example in 

production lines for: 

◆ Refrigerators and deep freezers 

◆ Compressors and evaporators 

◆ Cooling and refrigeration systems 

◆ Air conditioning units (automotive industry) 

◆ Refrigerant vehicles 

◆ Halogen lamps 

◆ High tension switches 

◆ Audio alarm (variable volume) 

◆ Multi-line display for leak rates (digital) and status error messages 

◆ Autoranging 

◆ Easy to operate 

◆ Fast response, quick testing 

◆ Reproducible test results 

◆ Highly reliable 


◆ Mobile 

◆ Long periods between maintenance through an oil-free vacuum system 

without any valves 

B5.24




ECOTEC II 

Detectable gases 

For all refrigerants 

Smallest detectable leak rate for refrigerants R 600a g/a 0.08 

R 134a g/a 0.08 

Gas library 106 

Measurement range g/a 0.08 to 999.9 

Response time s < 1 

Time until ready to operate min < 3 


g/a, oz/y, mbar x l x s -1 , ppm 

Gas flow sccm 70 - 90 

Sniffer line m 3, 5, 10 

Operating panel 

Leak rate display, audio alarm, display of error messages 

(plain text) 

Inputs 

Digital control signals for data acquisition and control purposes 

Outputs 

Relay contacts for triggers and status signalling 

Computer interface 

RS 232 C 

Mains power supply 

90 - 127 V, 50/60 Hz 

115 - 140 V, 60 Hz 

187 - 265 V, 50/60 Hz 

Ambient temperature range ¡C +10 to +45 

Dimensions (W x H x D) mm 576 x 350 x 260 

Weight, approx. kg (lbs) 34 (75) 


ECOTEC II 

Part Number 

Refrigerant sniffer leak detector Ecotec II 187 - 265 V, 50/60 Hz 122 00 

115 - 140 V, 60 Hz 122 01 

090 - 127 V, 50/60 Hz 122 02 

Sniffer line with integrated LEDs and SL 303 3 m 122 10 

push-button for background subtraction SL 305 5 m 122 11 

SL 310 10 m 122 12 

Sniffer probe rigid 120 mm 122 13 

385 mm 122 15 

flexible 120 mm 122 14 

385 mm 122 16 

External loudspeaker 122 08 

Helium sniffer calibrated leak S-TL 4 (10 -4 mbar x l x s -1 ) 122 37 

S-TL 5 (10 -5 mbar x l x s -1 ) 122 38 

S-TL 6 (10 -6 mbar áx l x s -1 ) 122 39 

Replacement filter tip 122 17 

Replacement filters Felt (25 pieces) 200 35 02 

Sinter (5 pieces with gasket) 200 35 00 

Test leaks for refrigerants (2 - 5 g/a) R 134a 122 20 

R 600a 122 21 

R 404a 122 22 

R 502 122 23 

R 12 122 24 

R 22 122 25 

R 23 122 26 

R 152a 122 27 

R 407c 122 28 

R 410a 122 29 

R 401a 122 30 

R 290 122 31 

others 

upon request 

For calibrated leaks 16 g/a see section ÒCalibrated LeaksÓ - Page B5.30 

B5 

B5.25


HLD4000A Sniffer Leak Detector 


For Refrigerant R134a and Other Fluorine Based Refrigerants 

The HLD4000A Halogen Leak Detector is a simple, yet highly 

sensitive sniffer leak detector for detection of fluorine-based 

refrigerant gases. 

Using modern microprocessor technology, it is ideal for rough 

conditions and continuous use in industrial conditions. 

The HLD4000A Halogen Leak Detector is designed especially for detection 

of fluorocarbon compounds (for example R134a). It is used primarily for 

leak tests on components and systems charged with any fluorine-based 

refrigerant. The similar HLD4000C is designed for use with HCFCs 

(such as R22) or any compounds containing chlorine. 

Advantages 

◆ Small and lightweight 


◆ Automatic calibration feature with built-in R134a calibration standard 

◆ Alphanumeric display for parameter entry and status messages in 

English (German, French and Spanish display text is available after 

exchanging an EPROM) 

◆ Bar graph display for the leak rates 

◆ Leak rate trigger with audio alarm 

◆ Relay output 

◆ Continual self-monitoring of the instrument 

◆ Comprehensive diagnostic program with user guidance for servicing 

◆ V.24/RS 232 C computer interface 

◆ Application oriented test programs 

◆ Very simple to operate 

◆ Fast response, quick testing 

◆ Reliable and reproducible test results 

◆ Fast automatic calibration with almost no user intervention 

◆ Selectable manual calibration mode 


◆ Memory for test conditions 

◆ Automatic background suppression 

◆ Automatic flow control in the sniffer tip 


The HLD4000A is suited for sniffer leak detection (overpressure method) 

on the following products: 

◆ Refrigerators and deep freezers 

◆ Compressors and tubings 

◆ Air conditioning systems 

◆ Cooling systems 

◆ Refrigerating vehicles 

◆ Cold storage facilities 

◆ Heat pumps 

◆ Leak detection on components or systems filled with SF 6 

◆ May be used in series production, quality assurance and servicing 

◆ Ideal for series production testing 

Dimensional drawing for the HLD4000A 

B5.26




HLD4000A 

Measurement range g/a (R 134a) 0.28 - 140 

or oz/y (R 134a) 0.01 - 5.0 

or mbar x l x s -1 2 x 10 -6 - 1 x 10 -3 

Response time s 0.5 

Flow cm 3 / min 300 

Sniffer line, approx m (ft.) 4.5 (14.8) 

Outputs 

Inputs 

V.24/RS232C computer interface 

2 relays for alarm signalling 

2 relays for remote control 

Ambient temperature for operation ¡C (F) 10 to 40 / (50 to 104¡) 

Mains voltage either volt / Hz 120 +5%/-25%, 50/60 

or volt / Hz 240 +5%/-25%, 50/60 

Power consumption watts 70 

Weight kg (lbs.) 6.8 (15) 

Halogen Leak Detector HLD 4000A, 

complete with probe and sensor for 120 VAC 

Halogen Leak Detector HLD 4000A, 

complete with probe and sensor for 240 VAC 


Halogen Leak Detector HLD 4000C, 

complete with probe and sensor for 120 VAC for detection of chlorine-containing compounds 

Halogen Leak Detector HLD 4000C, 

complete with probe and sensor for 240 VAC for detection of chlorine-containing compounds 

Carrying Case for HLD 4000 

HLD4000-110 

HLD4000-210 

HLD4000-310 

HLD4000-410 

701-081-G1 

Additional Operation and Maintenance Manual for HLD 4000 074-189 

Filters, Box of 50 

Replacement Sensor for HLD 4000A 

701-237-G1 

702-010-G1 

Replacement Sensor for HLD 4000C 001-025 

Replacement Leak Standard Gas Canister, HLD 4000A 

Replacement Leak Standard Gas Canister, HLD 4000C 

HLD4000A 

Part Number 

702-207-G1 

701-022-G1 

B5 

B5.27


Contura Z Helium Leak Detector 


CONTURA Z verifies package strength and integrity for flexible, 

semi-rigid and rigid packaging. 

Non-Destructive Leak Testing 

For Flexible Packages 

Of the many requirements that a product package must meet, leaktightness 

merits special emphasis. In the case of packages under modified 

atmosphere, for example, a gas exchange must absolutely be avoided in 

order to preserve product quality. In the case of vacuum packages any rise 

in pressure (air pullers) or ingress of atmospheric oxygen is undesirable. 

Current testing methods are unsatisfactory, because of the inadequate 

display of their results, their handling requirements, their cost and, above 

all, their detection limits. 

Despite the variety of products, package types, packaging techniques 

and package materials, leaks are from just a few causes: 

Ð 

Ð 

Ð 

Ð 

Ð 

Product on the sealing seam 

Seal parameters out of tolerance 

Foil damaged during deep drawing 

Foil punctured by the product 

Wrinkles in the sealing seam 

The leaks caused by these defects range from obvious macrodamage 

down to microleaks whose effect is not known before the product reaches 

the consumer. 

Advantages 

◆ Nondestructive, stress-free testing 

◆ Immediate result 

◆ Detection of ultrasmall leak rates, including bacteria- and virus-tightness 

(




Contura Z 

Smallest detectable leak rate 

Automatic test sequence, test cycle duration approx. 15 s mbar x l x s -1 < 10 -7 

Continuous testing, test cycle duration 40 s mbar x l x s -1 < 10 -8 

Leak localization with sniffer probe mbar x l x s -1 < 10 -7 

Test cycle duration 

Base setting s approx. 15 

Continuous measurement (adjustable) s 999 


Qualitative measurement mbar x l x s -1 1.0 x 10 -8 - 9.9 x 10 -1 

Quantitative measurement mbar x l x s -1 > 9.9 x 10 -1 

Recorder outputs V lin: per decade 1-10 mantissa 

Staircase voltage for the exponents V log: 0-10 total meas. range 

Relay outputs Pcs. 3 

Ready: 

Measurement output ready 

Fail: 

Error message 

Meas: 

Trigger leak rate pass / fail 

Power consumption kVA 1.7 

Ramp-up time (after startup) min < 3 

Usable diameter of foil chamber 

Up to a product height of 20 mm mm 540 

Up to a product height of 100 mm mm 460 

Maximum product size (W x D) 

Up to a product height of 20 mm mm 380 x 380 / 250 x 470 

Up to a product height of 100 mm mm 325 x 325 / 250 x 380 

Power supply, single-phase 

230 V ± 5%, 50 Hz 

230 V ± 5%, 60 Hz 

Dimensions (W x H x D) mm 790 x 1210 x 1230 

Weight kg (lbs.) 166 (365.2) 

B5 


Contura Z 

Part Number 

Leak testing unit EURO 230 V / 50 Hz 122 60 

Leak testing unit 230 V / 60 Hz 122 61 

MONITOR software 122 65 

Calibrated test leak 122 67 

Test diaphragm (50 pcs.) for measuring helium concentrations 122 68 

B5.29


Calibrated Leaks 


Calibrated leaks are required for the alignment of mass 

spectrometers, for the calibration of leak rates and for determining 

the response time of vacuum systems. 

Calibrated Leaks for Vacuum Applications 

TL 4 and TL 6 

Calibrated leaks without gas reservoir (capillary type of leak) for sensitivity 

and signal response time determinations during vacuum leak detection and 

for determination of sniffer sensitivity for overpressure leak detection. 

Nominal leak rate ranges 10 -4 mbar x l x s -1 for TL 4 and 10 -6 mbar x l x s -1 

for TL 6. Suitable for helium. A purging valve with hose nozzle permits a 

rapid exchange of the gas in the dead volume. 

TL 4 - 6 

Helium calibrated leak (capillary leak) for gross leaks, adjustable in the 

range between 10 -4 to 10 -6 mbar x l x s -1 , with exchangeable helium 

reservoir, pressure gauge and two manually operated valves. For 

calibration of leak rate readings and the alignment of helium mass 

spectrometers in the vacuum pressure range and for determining the 

sensitivity of sniffers in the overpressure range. 

TL 7 

Helium calibrated leak (capillary leak) with helium reservoir and 

electromagnetically operated valve, for installation in the ULTRATEST 

UL 200. Leak rate range 10 -7 mbar x l x s -1 . The electromagnetically 

operated valve provided permits the opening and closing of the calibrated 

leak to be controlled by the leak detectorÕs software. 

TL 8 

Helium calibrated leak calibrated for a leak rate in the range of 

10 -8 mbar x l x s -1 (helium leak rate), with gas reservoir and diaphragm 

shutoff valve. For alignment of a helium mass spectrometer, for calibration 

of the leak rate display of helium leak detectors and for response time 

measurements in connection with larger volumes. 

Advantages 

◆ Factory certificate (included) in accordance with DIN 55 350-18-4.2.2 

◆ Highly accurate 

◆ Very low temperature dependence 

◆ Determination of the nominal leak rate by comparison with a calibrated 

leak having a PTB 1) certificate 

◆ DKD 2) certificate (optional) traceable to PTB 

◆ Custom models for special applications 

The nominal leak rate applies only if the calibrated leak has been 

connected to a vacuum system at a pressure of less than 1 mbar. 

1) Federal Institution of Physics and Technology 

2) German Calibration Service 

Calibrated Leaks for Sniffer Applications 

These calibrated leaks have been set to a fixed value within the typical leak 

rate range (see Ordering Information). 

The exchangeable calibration gas reservoir is monitored through the 

built-in manometer. 

Helium Calibrated Leaks 

S-TL 4 to S-TL 6 with leak rates from 10 -4 to 10 -6 mbar x l x s -1 . 

Refrigerant Calibrated Leaks 

Available for all commonly used refrigerants with leak rates from 2 to 5 g/a 

and 16 g/a. 

B5.30



Technical Data Leak Rate Range Leak Detection Method Connection Flange 

TL 4, without helium gas reservoir 10 -4 mbar x l x s -1 Vacuum and sniffer DN 16 KF 

TL 6, without helium gas reservoir 10 -6 mbar x l x s -1 Vacuum and sniffer DN 16 KF 

TL 4-6, with helium gas reservoir 10 -4 to 10 -6 mbar x l x s -1 Vacuum and sniffer DN 16 KF 

TL 7, with helium gas reservoir 10 -7 mbar x l x s -1 Vacuum (for installation in the UL 200) DN 10 KF 

TL 8, with helium gas reservoir 10 -8 mbar x l x s -1 Vacuum DN 10 KF 

S-TL 4, with helium gas reservoir 10 -4 mbar x l x s -1 Sniffer Nozzle 



Calibrated leak for refrigerants 2 - 5 g/a resp. 16 g/a Sniffer nozzle 


Calibrated Leak 

Part Number 

TL 4, without helium gas reservoir *) 155 65 

TL 6, without helium gas reservoir *) 155 66 

TL 4-6, with helium gas reservoir *) 155 80 

TL 7, with helium gas reservoir, 

for installation within the UL 200 *) 140 23 

TL 8, with helium gas reservoir *) 165 57 

S-TL 4, with helium gas reservoir *) 122 37 



Calibrated leak for refrigerants *) 

(2 - 5 g/a, 0,07 - 0,18 oz/y) 

R 12 122 24 

R 22 122 25 

R 23 122 26 

R 134a 122 20 

R 152a 122 27 

R 290 122 31 

R 401a 122 30 

R 404a 122 22 

R 407c 122 28 

R 410a 122 29 

R 502 122 23 

R 600a 122 21 

(16 g/a, 0,56 oz/y) 

R 134a 122 40 

R 404a 122 42 

R 502 122 43 

R 600a 122 41 

Rubber bladder 200 20 218 

Hose clamp 200 20 217 

Helium can, 1 l 200 28 324 

DKD calibration for TL 7/8 154 15 

B5 

*) With factory certificate 

B5.31


Screw-in Calibrated Leaks 


The manufacturers of helium leak testing systems need calibrated leaks of 

various sizes with individually adjusted leak rates for setting up and 

calibrating their systems. 

Depending on the type of application, these calibrated leaks are either 

installed in the test sample as a master leak or used as a continually 

available facility in the test chamber itself. 

INFICON is now offering a new family of calibrated leaks which are capable 

of meeting the requirements concerning type and required leak rate. 

Calibrated Leak with Cylindrical Casing 

This calibrated leak is used to check the sensitivity of a sniffing facility. 

Before and after the actual test, the operator checks the sensitivity of his 

test facility within the scope of a plausibility check. 

The connection on the side of the customerÕs system is provided via a 

VCO fitting for a diameter of 10 mm. 

Calibrated Leak with Screw-in Sleeve 

This calibrated leak is used as a so-called master leak to check the entire 

helium leak testing system. 

Generally two leaktight test samples are equipped with these calibrated 

leaks. These will ensure proper separation between Òpassed and 

rejectedÓ parts. 

They are fitted to the customerÕs test samples either by a welded joint or 

the screw-in sleeve is glued in place. 


◆ As a master calibrated leak built-in directly into the test sample 

◆ Directly installed to the test chamber 

◆ Use as a calibrated leak for sniffer applications 

Advantages 

Calibrated Leak with Pin Type Casing 

Serves as a calibrated leak for the entire helium leak testing system without 

being influenced by the presence of a test sample. 

Here a dummy is placed in the test chamber. The connection to the test 

chamber is directly by a DN 10 KF fitting. The test gas connection is either 

by a VCO fitting or a hose nozzle for flexible connections. 

◆ Various types adapted to different customer requirements 


◆ Easy to install 

◆ Ideal installation dimensions 

◆ As a rule, all calibrated leaks are supplied with a certificate 

(factory certificate) indicating the leak rate which has been set up 

Connections on the side of the customerÕs system are: 

- 16 KF running to the vacuum chamber 

- Hose nozzle, 10 mm in diameter or 

VCO fitting, 10 mm in diameter 

B5.32



Leak rate as a function of applied test pressure vs. 0 bar. 

B5 

Calibrated leak with screw-in sleeve 

Calibrated leak with pin type casing and hose nozzle 

Calibrated leak with pin type casing and VCO fitting 

Calibrated leak with cylindrical casing and VCO fitting 



Casing Field 1 Field 2 Field 3 

Leak rate mbar x l x s -1 onlx 1-10 -4 10 -2 - 10 -5 10 -3 - 10 -8 



Part Number 

Calibrated leak 

With screw-in sleeve -- 143 00 143 01 143 02 

With pin type casing and VCO fitting 143 03 143 04 143 05 143 06 

With pin type casing and hose nozzle 143 07 143 08 143 09 143 10 

With cylindrical casing and VCO fitting 143 11 143 12 143 13 143 14 

* When ordering please always state leak rate, test pressure and helium concentration 

B5.33


Helium Sample Probes (Sniffers) 

Helium Sample Probes (Sniffers) 

Helium sniffers in connection with the ULTRATEST leak detectors 

are used for leak testing test samples in which a helium 

overpressure is present. Besides accurate pinpointing of leaks, it is 

also possible to determine the leak rate of the escaping helium. 

Helium sniffer line 

SL 200 P 

Helium sniffer QUICK-TEST QT 

100 with sniffer 

Advantages 

Helium Sniffer Line SL 200 for the UL 200 

◆ Sniffer line connects directly at the test connection 

◆ Very fast response 

◆ Extremely low detection limit< 1 x 10 -7 mbar x l x s -1 

◆ Rigid and flexible sniffer tips 120 mm (included) 

Helium Sniffers QUICK-TEST QT 100 for the 

UL 100, UL 200 and UL 500 

◆ Sniffer leak detection for greater distances between test object 

and leak detector 

◆ Diaphragm pump for sampling the search gas 

◆ Smallest detectable leak rate 1 x 10 -6 mbar x l x s -1 

◆ Short response and decay times 

◆ High sniffer velocity 

◆ Built-in transformer for adaptation to any required power supply voltage 


◆ Storage and transportation vessels for gases and liquids 

◆ Gas supply systems 

◆ Gas compressors 

◆ Components for the cooling and air conditioning industries 

◆ Heat pumps and components for thermal energy recovery units 

◆ Chemical production plants 

◆ Supply and phone lines laid in the ground 

◆ Power station condensers and turbines 

◆ Window and door seals of cars, refrigerators, etc. 

◆ Revision checks on leak testing systems 

◆ Measurement of helium concentrations ranging from ppm to % 

◆ All hollow objects exposed to overpressures 

Technical Data SL 200 QT 100 

Smallest detectable leak rate mbar x l x s -1 < 10 -7 10 -6 

Supply voltage Ð 220 V, 50/60 Hz switchable 

to 110/120/240 V, 50/60 Hz 

Signal response time, approx. at a length of 5 m s < 1 1 

20 m s Ð 8 

50 m s Ð 20 

Connection flange DN 25 KF 25 KF 

Weight kg (lbs.) 0.6 (1.32) 3.5 (7.72 ) 

B5.34 


SL 200 QT 100 

Part Number 

Helium sniffer line, SL 200 P, 4 m long, straight handle with red / green LED 

for go / no-go indication, rigid and flexible sniffer tip 120 mm 140 05 Ð 

Helium sniffer QUICK-TEST QT 100 Ð 155 94 

Sniffer line for the QT 100 5 m Ð 140 08 

20 m Ð 140 09 

50 m Ð upon request

Accessories for the UL 500 and UL 500 dry 


Accessories for the UL 500 and UL 500 dry 

Helium sniffer line SL 200 P 

1. V.24/RS 232 C Interface 

V.24/RS 232 C computer interface pcb, including software and additional 

mechanical installation components. The installation of the interface permits 

remote control of the UL 500 and reading of the measurement data by a 

computer or a terminal. In the PRINT ONLY mode the measurement data 

are output continuously to a printer. The baud rate is adjustable in six steps 

from 300 to 9600 baud. The UL 500 operates as data terminal equipment 

(DTE). A standard 25 way Sub-D connector is used. 

2. Exhaust Filter Set 

(TRIVAC D 4 B and D 25 B) 

Kit for installation by the user. 

3. Lifting Eyes 

Kit for installation by the user. 

4. Search Gas Spray Gun 

The search gas spray gun with PVC hose (5 m long) is used for well aimed 

spraying of search gas at places where a leak is suspected. 

5. Trigger Relay and Start/Stop Pcb. 

Trigger relay board with three normally open floating contacts; switching 

capacity 2 A, 60 V max. (resistive load) for LIMIT LOW, LIMIT HIGH, 

READY. Start and Stop inputs (optocouplers) for remote control. A standard 

25 way Sub-D connector is used. 

Antistatic Mat (not shown) 

(10 -11 ½ to DIN 53 482, VDE 0303, Part 3) for installation by the user. 

Replacement Ion Source (not shown) 

Complete replacement component, including two built-in iridium cathodes. 

Seal Kit (not shown) 

The seal kit contains all gaskets which are required for routine servicing of 

the instruments (with the exception of the mechanical vacuum pumps). 

Electrical Gas Ballast and 

Fresh Air Inlet System (not shown) 

This kit for installation by the user contains a valve block 

(electro-magnetically operated), hose lines and screw-in adapters. 

When using this facility the gas ballast will be open slightly (by about 10%) 

all the time in order to prevent the accumulation of helium in the backing 

pumps during continuous industrial leak testing of components having 

relatively high leak rates. 

The gas ballast will then only fully open when entering the appropriate 

command via the keypad of the UL 500. With this option fitted, the gas 

ballast can only be closed manually. 

In instruments beginning with Serial No. D 880200001 the mounting holes 

for the valve block are already provided. 


Accessories 

Part Number 

V.24/RS232C Interface 156 05 

Exhaust filter set (TRIVAC D 4 B and D 25 B) 200 59 658 

Lifting eyes 200 59 475 

Antistatic mat 200 59 665 

Replacement ion source 165 04 

Set of gaskets 200 59 168 

Electrical gas ballast and fresh air inlet system 200 59 643 

Search gas spray gun 165 55 

Trigger relay and Start/Stop pcb. 156 06 

B5 

B5.35

Leak Detectors Accessories for UL 200, UL 200 dry and Modul 200 

Accessories for UL 200, UL 200 dry and Modul 200 

CART 200 (standard steel, painted) 

CART 200/CART 200 CR 

CART 200 CR (stainless steel) 

For the UL 200, UL 200 dry and Modul 200; including shelf and holder for 

gas cylinders. CART 200 CR (closed version) is made of stainless steel and 

is clean room compatible. 

Transport case 

Transport Case 

For impact protected transportation of the UL 200; complete with strong 

carrying handles and plastic castors. Separate case for accessories. 

The carts are prepared for accommodating the TriScroll 600 and the 

TRIVAC D 25 B pumps. 

Replacement ion source 

Replacement Ion Source 

Partial flow system without pump 

Complete replacement component, including two built-in yttrium coated 

iridium cathodes. 

Partial Flow System 

For evacuation of test objects up to 100 l. Gross leak detection up to 

10 mbar x l x s -1 . Maximum test pressure: 1000 mbar. 

Equipment: 

Valve block (with inlet and venting valve) plus right-angle bellows valve 

DN 25 KF made of stainless steel, solenoid drives, suited for remote control 

by the UL 200, mains power 220 V / 50 Hz. 

The partial flow systems are available without pumps or as complete 

systems with oil-sealed TRIVAC D 16 B / D 25 B rotary vane pumps or 

TriScroll 600 dry compressing pumps. 

Extension line 

8 m Extension Line 

The use of extension lines permits operation of the ULTRATEST UL 200 up 

to 30 m away from the test objects. A maximum of three extension lines 

(of 8 m each) may be connected in series. 

PC Software LeakWare (not shown) 

The Windows PC software is used for data acquisition, documentation of the 

measurements and to control the operation of the leak detector. 

B5.36

General Accessories 



Accessories 

Part Number 

Transport case 140 96 

Carts 

CART 200 140 93 

CART 200 CR, stainless steel, with fan and clean room filter 110 V 140 94 

220 V 140 95 

Partial flow system for UL 200 

220 V, without pump 140 20 

110 V, without pump 140 28 

220 V, with D 25 B 140 25 

110 V, with D 16 B 140 26 

100 V, with D 25 B 140 27 

Partial flow system for UL 200 dry 

Without pump 140 29 

With TriScroll 600 114 88 

AF 16-25 exhaust filter, for partial flow system 189 11 

Replacement ion source 165 04 


8 m long extension line 140 22 

General Accessories 

B5 

Search Gas Spray Gun 

Test-Port Chamber 

Spring-loaded lid; 2 3/4" ID, 3/4" deep; DN 40 KF fitting. 

The search gas spray gun with PVC hose (5 m long) is used for well aimed 

spraying of search gas at places where a leak is suspected. 


Accessories 

Part Number 

Base Plate 

12" diameter stainless steel base plate. 

Test-port chamber 

DN 25 KF 122 44 

DN 40 KF 122 45 

Base plate 

DN 25 KF 122 46 

Search gas spray gun 165 55 

B5.37


Connection Flanges and Connection Components 

Connection Flanges 

Leak Detectors Helium Sniffers Calibrated Leaks 

ULTRATEST UL 200 Ð DN 25 KF SL 200 Ð DN 25 KF TL 4 - 6 Ð DN 16 KF 

ULTRATEST UL 200 dry Ð DN 25 KF QT Ð DN 25 KF TL 8 Ð DN 10 KF 

MODUL 200 Ð DN 25 KF ST 100 - DN 25 KF 

ULTRATEST UL 500 Ð DN 40 KF 

ULTRATEST UL 500 dry Ð DN 40 KF 

If components of the same nominal width are connected, only one centering ring and one clamping ring is required. 

Connection Components 

When wanting to connect accessories (helium sniffer and calibrated leaks) to a leak detector, the following reducers and components may be necessary: 

Centering Rings Clamping Rings 

Reduction Reducers Stainless Steel / FPM Aluminum 

DN 25 / 16 KF Part No. 183 86, aluminum or DN 25 KF Part No. 883 47 DN 20 / 25 KF Part No. 183 42 

Part No. 885 04, stainless steel DN 16 KF Part No. 883 46 DN 10 / 16 KF Part No. 183 41 

DN 25 / 10 KF Part No. 183 86, aluminum or DN 10 / 16 KF Part No. 883 56 DN 20 / 25 KF Part No. 183 42 






DN 40 / 10 KF Part No. 183 89, aluminum or DN 10 / 16 KF Part No. 883 56 DN 10 / 16 KF Part No. 183 41 


The following metal hoses are recommended to connect the leak detectors to systems: 

Nominal Width Length Part Number 

DN 16 KF 1.0 m 868 01 

DN 16 KF 0.5 m 867 91 

DN 25 KF 1.0 m 868 03 

DN 25 KF 0.5 m 867 93 

DN 40 KF 1.0 m 868 05 

DN 40 KF 0.5 m 867 95 

B5.38

B6 

Vacuum Gauges 

Vacuum Gauges and Control Instruments

Vacuum Gauges 

Contents 

General 

Basic Terms of Vacuum Metrology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.3 

Transmitter Technology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.4 

Measurements Units Conversion Chart . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C1.3 

Sensors 

SKYª Capacitance Diaphragm Gauge. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.6 

CDG025, CDG045 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.6 

CDG045-SD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.9 

Bayard-Alpert Pirani Gauge BPG400 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.12 

Pirani Standard Gauge. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.15 

PSG400, PSG400-S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.15 

PSG100-S, PSG101-S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.17 

Bayard-Alpert Gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.19 

BAG100-S, BAG101-S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.17 

Penning Gauge PEG100 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.22 

Controller 

Vacuum Gauge Controller VGC103 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.24 

Cables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.25 

Vacuum Switch 

Vacuum Switch VSA100. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.27 

Calibration 

Calibration Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.28 

B6.2

Basic Terms of Vacuum Metrology 

Vacuum Gauges 

Basic Terms of Vacuum Metrology 

Today, the total range of measurable vacuum pressure extends from 

atmospheric pressure (about 1000 mbar, 750 Torr) down to 10 -12 mbar 

(Torr) Ð over 15 decades. The instruments used for measuring pressure 

within this wide range are called vacuum gauges. It is impossible to create 

a single vacuum sensor capable of performing quantitative measurements 

throughout the entire pressure range. Therefore, a variety of different 

vacuum gauges are available, each with its own characteristic 

measurement range, commonly extending over several decades. 

Note the difference between direct and indirect pressure measurements. 

With direct pressure measurements, vacuum gauge readings are 

independent of gas type. Vacuum gauges, in which pressure is 

determined directly by recording the force acting on the surface of a 

diaphragm, are common. 

With indirect pressure measurements, pressure is determined as a function 

of a pressure-dependent property of the gas (i.e. thermal conductivity or 

resulting ion current). These properties not only depend on pressure, but 

also on the molar mass of the gases. Therefore, vacuum gauge presssure 

readings relying on indirect pressure measurements are gas composition 

dependent. These readings usually relate to air or nitrogen as the 

measurement gas. Appropriate correction factors must be applied for the 

measurement of other gases or vapors. 

Vacuum Gauges with Pressure Readings 

Independent of the Type of Gas 

Capacitance Diaphragm Vacuum Gauges 

A capacitance diaphragm gauge has two chambers. One is connected to 

the vacuum to be measured; the other holds a certain reference vacuum. 

The chambers are separated through a metal coated ceramic or thin metal 

membrane. Together with a parallel electrode this membrane functions as a 

condensator. When the pressure in one chamber is different from the 

pressure in the other chamber the membrane bends and thus changes the 

capacitance. The change is registered and converted into a pressure signal, 

a voltage proportional to the pressure. This method makes gas type 

independent absolute pressure measurement possible. Absolute capacitance 

gauges can accurately measure pressures from 10 -5 mbar (Torr) to well above 

atmospheric pressure using capacitance gauges having diaphragms of 

different thickness. 1) 

INFICON improvements in materials composition provide more stable and 

reliable measurements over an extended period of operation. At the same 

time, corrosion resistance is greatly enhanced by using ceramic instead 

of metal. 

Vacuum Gauges with Pressure Readings 

Depending on the Type of Gas 

Thermal Conductivity Vacuum Gauges (Pirani) 

The energy transfer from a hot wire by a gas can be used to measure the 

pressure. The heat is transferred into the gas by molecular collisions with 

the wire, i.e. by heat conduction and the rate at which the heat is 

transferred depends on the thermal conductivity of the gas. 

The heat loss from a wire (typically 5 µm to 20 µm in diameter) can be 

determined indirectly with a Wheatstone bridge circuit which both heats the 

wire and measures its resistance and therefore its temperature. 

A thin metal wire is suspended with at least one side electrically insulated 

in the gauge head and is exposed to the gas. Tungsten, nickel, iridium or 

platinum may be used for the wire. The wire is electrically heated and the 

heat transfer is electronically measured. There are three common operating 

methods: constant temperature method, constant voltage bridge, and the 

constant current bridge. All these methods indirectly measure the 

temperature of the wire by its resistance. 

This measurement principle uses the thermal conductivity of gases for 

pressure measurements from 10 -4 mbar (Torr) to atmospheric pressure. 

INFICON improvements in temperature compensation provide stable 

pressure readings in spite of large temperature changes, especially when 

measuring low pressures. 

Ionization Gauges 

When the pressure in a vacuum system is below about 10 -4 mbar (Torr), 

direct methods of measurement of the pressure by means such as the 

deflection of a diaphragm or measurement of bulk gas properties such as 

thermal conductivity are no longer readily applicable. Hence, it is necessary 

to resort to methods which essentially count the number of gas molecules 

present i.e., it is the number density not the pressure which is measured. 

One of the most convenient methods to measure the number density is to 

use some technique to ionize the gas molecules and then collect the ions. 

The resulting ion current is directly related to pressure and a calibration can 

be performed. The probability of ionizing a gas molecule will depend on a 

variety of factors and hence, the ionization gauge will have different 

sensitivity values for different gas species. 

B6 

1) For p < 1 mbar and T Gauge T Vacuum the linearity of a gauge with a controlled temperature is 

influenced by the thermal transpiration (gas type dependent) at the maximum in the same order 

of magnitude as the zero point stability. See K. F. Poulter, et al., Vacuum 33, 331 (1983); 

W. Jitschin and P. Ršhl, J. Vac. Sci. Technol. A, Vol. 5, No. 3, 1987. 

B6.3

Vacuum Gauges 

Transmitter Technology 

Hot Cathode Ionization Vacuum Gauges 

In a hot cathode ionization gauge, the electrons emitted from the surface of 

a hot filament are attracted to a highly transparent grid made from very thin 

wire and at a positive electrical potential. With the grid so open, there is a 

very high probability that the electron will pass right through the grid and 

not strike a wire. If the grid is surrounded by a screen at a negative 

electrical potential, the electron will be repelled by this screen and be 

attracted back to the grid. This process can happen many times before the 

electron finally hits the grid and is lost. As a result, very long electron paths 

can be achieved in a small volume, increasing the probability of ionizing a 

gas molecule. The resulting ions are attracted directly to the collector. 

Most hot cathode sensors used are based on this Bayard-Alpert 

arrangement of electrodes. With this electrode arrangement it is possible 

to make measurements in the pressure range from 10 -10 to 10 -2 mbar (Torr). 

Other electrode arrangements permit access to a higher range of pressures 

from 10 -10 mbar (Torr) up to 10 -1 mbar (Torr). For measurement of pressures 

below 10 -10 mbar (Torr), extractor ionization sensors are employed. In 

extractor ionization gauges, ions are focused on a very thin and short ion 

detector. Due to the geometry of this system, interfering influences such 

as X-ray effects and ion desorption are almost completely eliminated. 

The extractor ionization gauge permits pressure measurements in the 

range from 10 -12 to 10 -4 mbar (Torr). 

INFICON improvements in electrode arrangements provide a wider 

measurement range combined with excellent repeatability. The Bayard- 

Alpert Pirani Combination Gauge further improves the measurement range 

in an easy to use package. 

Cold Cathode Ionization Vacuum Gauges (Penning) 

The cold cathode ionization gauge dispenses with the hot filament and uses 

a combination of electric and magnetic fields. If one applies a potential of 

a few kilovolts between a parallel plate capacitor in the presence of a gas 

pressure of a few mbar (Torr), a glow discharge will result. In the glow 

discharge, energetic free electrons interact with neutral molecules to 

produce ions and more free electrons. The ions are attracted to the negative 

electrode and when they strike it, secondary electrons are created, which 

are attracted to the positive electrode. The glow discharge continues as 

long as the number of electrons being created is equal to or greater than 

the number being removed at the positive electrode. 


Transmitters convert an analog input signal (pressure) measurement value 

into an analog normed electronic measurement signal, i.e. 0 Ð 10 V. 

This measurement signal is typically available as a linear or logarithmic 

output signal. The advantages of transmitters over conventional gauges 

with a separate signal processing device are: 

♦ Sensor and electronics in one compact package 

♦ Large cost savings 

♦ Direct connection to customer control units 

♦ A simple formula to convert the measurement signal into any desired 

pressure unit 

♦ Clear error messages can be transmitted because of the structured 

measurement signals 

♦ Digital interfaces (RS 232 C, Profibus, DeviceNetª) allow direct 

measurement readings in digital form 

♦ Integrated setpoint for direct process control based on 

pressure measurement 

♦ Measurement signals can be transmitted over greater distances 

The INFICON transmitter vacuum gauge line provides unparalleled 

performance for system manufacturers taking advantage of unique 

technologies combined with cost saving potential. The transmitter 

technology combines the sensor with the control and evaluation electronics 

in one compact package. Several output concepts like 0 Ð 10 V analog 

output, digital RS 232 C and fieldbus communications are available. 

INFICON transmitter technology reduces the costs for vacuum 

measurement and system integration to a minimum. 

The Penning gauge design employs a ring as the positive electrode 

(anode), which is centrally located between two electrically connected, 

negatively charged, parallel plates (cathodes). Electrons are attracted to the 

plane of the ring. Upon arrival, these electrons pass through the ring, and 

continue to oscillate between the two cathode plates. This configuration 

lowers the pressure at which a discharge can be sustained by increasing 

the electron path length. By introducing a magnetic field this electron path 

becomes a spiral, significantly increasing the path length. This further 

lowers the pressure at which the discharge can be maintained. 

INFICON design concepts permit safe and reliable operation of ÒPenningÓ 

sensors in the pressure range from 1á10 -9 mbar to 1á10 -2 mbar (Torr). 

B6.4


Vacuum Gauges 

Conventional Measurement Systems 

Conventional vacuum measurement systems consist of separate sensors 

and control units. The unconditioned sensor signal has to be transmitted to 

the control and evaluation unit which makes the system susceptible to 

interferences and therefore requires special shielded cabling. Integration 

into vacuum systems is space consuming and usually inconvenient since 

the controller outputs are not linear or described completely by one 

simple formula and therefore require look-up tables to be integrated into 

the software. 

Transmitter Based Measurement Systems 

Analog Technology 

Digital Technology 

Digital interfaces (RS 232 C, Profibus DP, DeviceNetª) allow direct 

measurement readings in digital form and further enhance the advantages 

of transmitter technology. INFICON digital transmitters provide control of 

processes from one control position. 

This allows communication of exact digital information, independent control, 

maintenance and diagnostic routines for each connected instrument and 

simplifies the connection diagram further. 

Measures of control include: monitoring of measurement values, the 

automatic zero point adjustment of gauges, reminding the operator of 

scheduled maintenance work, warning signals in case of instrument 

failure and more. 

INFICON digital transmitters offer the flexibility and control of network 

communications further enhancing system quality and efficiency. 

B6 

The combination of sensor and electronics in one package simplifies the 

connection scheme of vacuum systems and saves valuable space and costs. 

The measuring signal is converted into an analog 0 Ð 10 V output signal, 

which can be directly converted to a digital signal and evaluated by a PLC or 

other control. This eliminates the need for a separate control and display unit. 

No look-up table is required anymore since the analog output signal is 

described completely by one simple formula. INFICON analog transmitters 

are the most economic solution for advanced vacuum measurement. 

B6.5

Vacuum Gauges 

SKY TM Capacitance Diaphragm Gauge 

SKY Capacitance Diaphragm Gauge 

CDG025, CDG045 

The SKY CDG uses an ultrapure aluminum oxide ceramic 

diaphragm instead of the traditional metal diaphragms used by 

other manufacturers. This ultrapure ceramic diaphragm is virtually 

corrosion proof resulting in improved reliability, stability and 

extended life time, even under the harshest conditions. SKY CDGs 

are used by several leading semiconductor system manufacturers. 

Patent pending on sensor and diaphragm 

Advantages 

♦ Marginal zero drift 

♦ Virtually corrosion proof Ð long sensor life results in reduced downtime 

thus reducing cost of ownership 

♦ Superior accuracy and repeatability over long period of operation 

♦ Better long-term and temperature stability 

♦ Less sensitive to frequent pressure cycles to atmosphere 

♦ Eliminates isolation valve (depending on operation mode) 

♦ Less susceptible to particles and process by-products through 

protective chamber 

♦ Fastest warm up time 

♦ Lower cost of investment 

♦ Supply with +15 V DC or +24 V DC 

Ceramic Diaphragms 

The diaphragm is the crucial element of any capacitance diaphragm gauge. 

Any alteration of the diaphragmÕs deflection characteristics leads to a 

change in the displayed pressure. 

The INFICON aluminum oxide ceramic (Alumina) diaphragms are especially 

designed and manufactured for the purpose of measuring also very low 

pressures. Ceramic membranes are produced from ultra pure, fine grained 

alumina powder in several sintering steps to achieve a dense, stress free 

and tension free diaphragm for the sensors. Several firing processes above 

1500 ¡C guarantee a purity of 99.5% or more than 99.9%. With this firing 

technique an exceptional uniformity of the material is achieved. Aluminum 

oxide ceramic diaphragms change less during operation than commonly 

used metal diaphragms. Temperature induced stretching, pressure and 

material induced creeping, as well as material alterations via corrosion, are 

greatly reduced or even eliminated in ceramic diaphragms. The pressure 

reading with ceramic diaphragms is more accurate and repeatable than with 

metal diaphragms over an extended period of time. 

♦ Drop-in replacement of existing CDGs due to interface compatibility 


♦ Etch, CVD, PVD, and other semiconductor production methods 

♦ Chemical process engineering 

♦ Reference sensor for monitoring of test instruments in accordance 

with DIN/ISO 9000 

B6.6


Vacuum Gauges 

A) Vacuum connection 

Stainless Steel, AlSl316L (18% Cr, 10% Ni, 3% Mo, 69% Fe) 

B) Protective chamber 


C) Plasma shield 


D) Metal-ceramic connection 

Vacon 70 (28% Ni, 23% Co, 49% Fe) 

and Braze, Ti, Ag, Cu 

E) Measurement chamber 

F) Reference chamber 

G) Diaphragm 

Al 2 

O 3 

³ 99.9% for 0.1 Ð 10 Torr 

Al 2 

O 3 

³ 99.5% for 100 Ð 1000 Torr 

H) Electrode 

Gold 

I) Glass ceramic solder 

J) Sensor housings 

Al 2 

O 3 

³ 99.5% 

Better Mechanical Stability 

The construction of the measuring cell is based on a symmetry principle. 

The diaphragm is bonded to the lower and upper sensor housing with the 

same material under the same process. Unwanted asymmetric tension of 

the diaphragm is avoided. Another benefit of such a relatively large bond is 

the good thermal contact between the housings and the diaphragm. 

Thanks to this construction the sensor has excellent mechanical and thermal 

stability. Even frequent pressure changes and overpressures cannot alter 

such a cell. The measuring results are consistent and remain excellent over 

much longer periods of operation than with metal ones. 

Better Temperature Stability 

Aluminum oxide ceramic has a significantly lower thermal expansion 

coefficient than the metals traditionally used. Conventional CDGs are 

constructed of a combination of ceramic parts and a metal diaphragm. 

The different thermal expansion of these materials can cause tension on the 

diaphragm resulting in a distorted pressure reading. The sensor of a 

SKYª CDG consists only of aluminum oxide ceramic. Because of this the 

span coefficient of a temperature compensated SKY CDG (CDG025) is 

improved over a conventional CDG by a factor of four. That of a temperature 

controlled gauge (CDG045) by a factor of two. 

High Corrosion Resistance 

Aluminum oxide ceramic is highly corrosion resistant. ThatÕs why the 

SKY CDGs are particularly useful under corrosive process conditions 

and deliver reliable measurement values much longer than conventional 

(metal diaphragm) CDGs. Corrosive process gases can impair or 

damage metal membranes to the point where accuracy and 

repeatability are adversely effected or the gauge ultimately fails. 

B6 

B6.7

Vacuum Gauges 



Measurement range F.S. Torr 1) 

Lowest suggested control pressure 

Lowest suggested reading 

Lowest reading 

Accuracy 2) 

Torr 

Torr 

Torr 

Resolution 

% F.S. 

Temperature effects 

Zero coefficient 

% F.S./¡C 

Span coefficient 

% of reading/¡C 

Temperature 

Operation (ambient) ¡C 

Bakeout at flange ¡C 

Pressure, max. absolute 

Output signal (analog) 

Supply 

Voltage 

Operating 3) / heating current 

Response time 

Electrical connector 

Materials exposed to process media 

Torr 

VDC 

VDC 

mA 

ms 

Internal volume cm 3 (inch 3 ) 

Weight 

Protection type 

kg 

CDG025 

CDG045 

Temperature Compensated Temperature Controlled 45 °C 

1000 100 10 1 1000 100 10 1 0.1 

5 5 x 10 -1 5 x 10 -2 5 x 10 -3 5 5 x 10 -1 5 x 10 -2 5 x 10 -3 5 x 10 -4 

5 x 10 -1 5 x 10 -2 5 x 10 -3 5 x 10 -4 5 x 10 -1 5 x 10 -2 5 x 10 -3 5 x 10 -4 5 x 10 -5 

1 x 10 -1 1 x 10 -2 1 x 10 -3 1 x 10 -4 1 x 10 -1 1 x 10 -2 1 x 10 -3 1 x 10 -4 1 x 10 -5 

0.2 0.15 

0.0015 0.0015 0.0015 0.0025 0.0015 0.0015 0.0015 0.0025 0.0025 

0.005 0.005 0.005 0.015 0.0025 0.0025 0.0025 0.0025 0.005 

0.01 0.01 

+5 É +50 +15 É +40 

+110 +90 

3000 2000 2000 2000 3000 2000 2000 2000 1000 

0 É +10 0 É +10 

+15 (±5%) or +24 (±10%) +15 (±5%) or +24 (±10%) 

60/- 60/- 220/440 220/670 

< 30 < 30 < 30 < 100 < 30 < 30 < 30 < 100 < 100 

D sub, 15 pin 

aluminum oxide ceramic (Al 2 O 3 ), stainless steel (AISI316L) 4) , Vacon 70 5) 

6 (0.36) 7 (0.43) 

0.26 0.49 

IP 30 


1000 100 10 1 1000 100 10 1 0.1 

Vacuum connector 

1/2Ó tube 

DN 16 ISO-KF 

DN 16 CF-R 

Swagelok¨ 8 VCR¨, female 

Terminal strip connector 

1) SKYª Capacitance Diaphragm Gauges are also available calibrated in mbar and Pa 

2) Non-linearity, hysteresis, repeatability at 25 ¡C ambient operating temperature without 

temperature effects 

360-000 361-000 362-000 364-000 360-010 361-010 362-010 364-010 365-010 

360-001 361-001 362-001 364-001 360-011 361-011 362-011 364-011 365-011 

360-002 361-002 362-002 364-002 360-012 361-012 362-012 364-012 365-012 

360-003 361-003 362-003 364-003 360-013 361-013 362-013 364-013 365-013 

374-990 

3) Typical value at 25 ¡C ambient temperature after reaching operating temperature 

4) 18% Cr, 10% Ni, 3% Mo, 69% Fe 

5) 28% Ni, 23% Co, 49% Fe 

mm (inches) 

mm (inches) 

B6.8


Vacuum Gauges 

SKY Capacitance Diaphragm Gauge 

CDG045-SD 

The SKY CDG045-SD provides the most powerful technology of 

network communications and advanced sensor technology available 

in the market. 

The SKY CDG045-SD combines the advantages of DeviceNet 

network communications with the innovative technology of aluminum 

oxide ceramic CDGs. DeviceNet improves system quality, lowers cost 

and increases efficiency. It allows communication of exact digital 

information, independent control, maintenance and diagnostic routines 

for each connected instrument and simplifies the connection diagram. 

The SKY CDG045-SD conforms to the ODVA Specifications defined 

by the Semiconductor Special Interest Group. 

Patent pending on sensor and diaphragm 

Advantages 

♦ Marginal zero drift 

♦ Virtually corrosion proof Ð long sensor life results in reduced downtime 

thus reducing cost of ownership 

♦ Superior accuracy and repeatability over long period of operation 

♦ Better long-term and temperature stability 

♦ Less sensitive to frequent pressure cycles to atmosphere 

♦ Eliminates isolation valve (depending on operation mode) 

♦ Less susceptible to particles and process by-products through 

protective chamber 

♦ Fastest warm up time 

♦ Lower cost of investment 

♦ Supply with 11 to 25 V DC 

♦ Drop-in replacement of existing CDGs due to interface compatibility 


♦ Etch, CVD, PVD, and other semiconductor production methods 

♦ Chemical process engineering 

♦ Reference sensor for monitoring of test instruments in accordance 

with DIN/ISO 9000 

Using the SKY CDG045-SD with Fieldbus interface, processes can be 

controlled from one central position. The measures of control include: 

monitoring of measurement values, the automatic zero point adjustment 

of gauges, reminding the operator of scheduled maintenance work, 

warning signals in case of instrument failure and more. 

DeviceNet is a Fieldbus protocol with trunkline-dropline configuration 

which makes it possible to connect industrial instruments such as sensors, 

switches, valves, actuators etc. in a master/slave or peer-to-peer network. 

Such networks can connect up to 64 individual knots or instruments per 

network segment with one host (such as a PLC or PC). Integrated 

instruments can receive orders and requests from the host, execute them 

and then send information back as a result. DeviceNet offers the simplicity 

of running the signal as well as the power supply through the same 

Fieldbus cable. Knots can also be removed from the network without 

having to turn them off and without having to disconnect the network. 

DeviceNet uses the CAN (Controller Area Network) communications 

protocol for data transfer. CAN was originally developed for the automobile 

industry for applications such as control of ABS breaking systems and air 

bags Ð applications requiring fast response times and high reliability. 

The same speed and reliability in data transfer is utilized in the INFICON 

sensors with DeviceNet. 

DeviceNet is an open networking standard that follows the DeviceNet 

specifications Ð this means that it is manufacturer independent. 

INFICON sensors adhere to these documented standards and guarantee 

real plug and play functionality. 

B6 

B6.9

Vacuum Gauges 


Protocol 


Data rate switch 

Cable length 

125 Kbps m (ft) 



MAC ID 

Network size 

Digital functions 

Analog functions 

Visual communication indicators 



(ODVA Semiconductor Special Interest Group 

DeviceNet ODVA Specifications 

CDG045-SD 

DeviceNetª, group 2 slave only 

25 k, 250 k, 500 kBaud and programmable over network 

500 (1650) 

250 (825) 

100 (330) 

2 switches (address 00-63) or programmable over network 

up to 64 nodes per segment 

Read pressure, set 2 interlock relays A + B, 

select units: Torr, mbar, Pa, set zero over network (digital only) 

analog zero must be set with zero potentiometer, 

monitor: heater, gauge status, trip point high and low hysteresis, 

save state allows definition of behavior in case of error, detailed alarm and warning information 

Pressure monitor analog output 0 Ð 10 V 

LED network status (green/red) 

LED module status (green/red) 

2 LED interlock relays A + B (green/off) 

Micro style connector (with power and signal line), 5 pin 

DeviceNetª ÒVacuum Gauge Device ProfileÓ 

Interface Guidelines for DeviceNetª Devices on Semiconductor Manufacturing Tools 

Interface Guidelines Conformance Test Procedures 

Device type 

DeviceNet 

Explicit peer to peer messaging 

I/O peer to peer messaging 

Configuration consistency value 

Faulted node recovery 

Baud rates 

k Baud 

Master/Scanner 

I/O slave messaging 

Bit Strobe 

Polling 

Cyclic 

Change of State (COS) 

Interlock relays 

Range 

Relay contact 

Hysteresis 

Contact rating 

V / A DC 

Relay status 

Connector 

Supply for DeviceNetª and sensor together V DC 

Connectors for DeviceNetª 

for CDG, analog output and Interlock relay 

DeviceNet 

CDG045-SD 

generic 

no 

no 

no 

no 

125 

250 

500 

no 

no 

yes 

yes 

yes 

2 

1 x 10 -4 x F.S. É F.S. 

n.o., potential free 

adjustable over complete range 

60 / 0.5 

LED green 

D sub, 15 pin 

11 É 25 

Microstyle, 5 pin 

D sub, 15 pin 

B6.10


Vacuum Gauges 


Measurement range F.S. Torr 1) 

Lowest suggested control pressure 

Torr 

Lowest suggested reading 

Torr 

Lowest reading 

Torr 

Accuracy 2) 

Resolution 

% F.S. 

Temperature effects 

Zero coefficient 

% F.S./¡C 

Span coefficient 

% of reading/¡C 

Temperature 




Torr 

Output signal (analog) 

V 

Supply 

Voltage 

V DC 

Operating 3) / heating current 

mA 

Response time 

ms 




Weight 

kg 


CDG045-SD 

Temperature Controlled 45 °C 

1000 100 10 1 0.1 

5 5 x 10 -1 5 x 10 -2 5 x 10 -3 5 x 10 -4 

5 x 10 -1 5 x 10 -2 5 x 10 -3 5 x 10 -4 5 x 10 -5 

1 x 10 -1 1 x 10 -2 1 x 10 -3 1 x 10 -4 1 x 10 -5 

0.15 

0.0015 0.0015 0.0015 0.0025 0.0025 

0.0025 0.0025 0.0025 0.0025 0.005 

0.01 

+15 É +40 

+90 

3000 2000 2000 2000 1000 

0 É +10 

11 - 25 

220/450 

< 30 < 30 < 30 < 100 < 100 

D sub, 15 pin 

aluminum oxide ceramic (Al 2 O 3 ), stainless steel (AISI316L) 4) , Vacon 70 5) 

7 (0.43) 

0.49 

IP30 

With DeviceNetª 


other flanges available on request 


1) SKYª Capacitance Diaphragm Gauges are also available calibrated in mbar and Pa 

2) Non-linearity, hysteresis, repeatability at 25 ¡C ambient operating temperature without 

temperature effects 

3) Typical value at 25 ¡C ambient temperature after reaching operating temperature at 

24 V DC supply 

4) 18% Cr, 10% Ni, 3% Mo, 69% Fe 

5) 28% Ni, 23% Co, 49% Fe 

1000 100 10 1 0.1 

360-303 361-303 362-303 364-303 365-303 

B6 

mm (inches) 

B6.11

Vacuum Gauges 

Bayard-Alpert Pirani Gauge BPG400 


This outstanding Bayard-Alpert Pirani Combination Gauge 

(optional: with display) provides the functions of two gauges in a 

single compact unit measuring from atmosphere to 5 x 10 -10 mbar 

(3.8 x 10 -10 Torr). This reduces the complexity of installation, setup, 

and use of vacuum measurement on the system. The integrated 

Pirani protects the hot ion filament from burning out and reduces 

the contamination by automatically switching it off at high pressures. 

The optional integrated LCD display offers pressure reading and 

status information. The BPG400 provides the best performance 

for process and base pressure measurement in the most 

economic package. 

Patent granted on electronics Ð Patent pending on sensor 

Advantages 

♦ Extremely wide measurement range from 5 x 10 -10 mbar 

(3.8 x 10 -10 Torr) to atmosphere combined with excellent repeatability 

in the process pressure range (less than ±5%) 

♦ Long-life yttrium oxide coated iridium cathode 

♦ Robust, compact construction 

♦ Easy integration: 

Ð one formula produces a logarithmic analog output over entire 

pressure range 

Ð no interlock with other gauges is necessary 

Ð RS 232 C interface 

♦ Cost savings: 

Ð single gauge instead of two 

Ð single flange connection to the system 

Ð single cable 

♦ Single flange connection reduces probability of leaks 

♦ Easy use: 

Ð automatic high vacuum adjustment of Pirani through hot ion gauge 

Ð optional integrated LCD display for pressure reading and 

information status 

Ð optional bakeout extension 


♦ Pressure measurement in semiconductor processes and 

transfer chambers 

♦ Industrial coating (PVD) 

♦ General vacuum measurement and control on systems in rough to 

high vacuum range 

Advantages of BPG400 Over 

Conventional Technology 

Conventional hot ion gauges used for high vacuum measurement can only 

be operated below atmospheric pressures typically in the range below 

10 -2 mbar (Torr). When operated at higher pressures the filament lifetime is 

dramatically reduced and may burn out almost immediately. Therefore, hot 

ion gauges must be switched on only at specified operating pressures. 

Usually, a fore vacuum gauge (Pirani) controls the switching on and off of 

the hot ion gauge. Such systems consist of two gauges with the necessary 

tubing, cabling and corresponding costly signal processing, which is done 

by PLC software or hardwiring. 

♦ High reliability: 

Ð Pirani protects filament from burn out 

(withstands air inrush > 10,000 times) 

Ð In the unlikely case of failure the sensor can be easily replaced 

B6.12


Vacuum Gauges 

Advanced BPG400 

The unique concept of the Bayard-Alpert Pirani Combination Gauge 

eliminates the disadvantages of conventional technology and provides 

unparalleled performance. The gauge consists of two sensing systems, a 

hot ion sensor and a Pirani sensor, which signals are combined in one 

single compact package. 

The enclosed sensor tube with integrated grid protects the sensor from 

external electrical fields. The optional baffle is recommended in case of 

particles or process by-products possibly contaminating the sensor or when 

freak ions, stray light or fast electrons could influence the measurement. 

 

The Pirani sensor automatically controls the switching on and off of the hot 

ion sensor at a defined switching threshold. The filament therefore is 

protected since the hot ion sensor is switched off instantaneously in case of 

an air inrush. This minimizes problems associated with operator error, 

extended signal processing time, and other system failures. 

The electron bombardment degas function provides efficient cleaning of a 

contaminated sensor. These measures as well as the yttrium oxide coated 

iridium filament extend the lifetime of the gauge to its best. When the end 

of the sensorÕs lifetime is reached, simply unplug the sensing element from 

the electronics and plug in the replacement. 

For higher bakeout temperatures the electronics can be easily removed 

when no reading is required or the bakeout extension can be attached 

between the sensor and the electronics when a reading is required. 

B6 

Withstands air inrush > 10,000 times. 

The BPG400 eases the integration into process systems and reduces cost. 

The combination gauge eliminates the need of two single gauges, which 

saves one gauge, one port, one cable, tubing, flanging and converter parts. 

The software integration is very easy and convenient since the output 

signal is described by a simple formula, which reduces cost further. 

B6.13

Vacuum Gauges 



BPG400 


mbar 

Torr 

5 x 10 -10 É 1000 

3.8 x 10 -10 É 750 

Accuracy, 10 -8 É 10 -2 mbar 

% of reading 

±15% 

Repeatability, 10 -8 É 10 -2 mbar 

% of reading 

±5% 

Degas 1) (p < 7.2 x 10 -6 mbar (5.4 x 10 -6 Torr)) 

electron bombardment, 

3 min max. 


bar 

2 

Temperature 


Storage ¡C 

Bakeout ¡C 

At flange with extension ¡C 

At flange without extension ¡C 

Electronics removed ¡C 

0 É +50 

-20 É +70 

150 

80 

150 

Power supply 

Voltage 

Consumption, max. 

V DC 

W 

20 É 28 

16 

Output signal analog 

Measurement range, logarithmic 

Relation voltage/pressure 

Error signal 

Minimum load 

V 

V 

V/decade 

V 

k½ 

0 É 10 

0.774 É 10 

0.75 

< 0.4 

10 

optional: display for 

pressure and status 

information 

Interface (digital) 

RS 232 C 

Connector 

Cable length, max. 2) 

m (ft) 

D sub, 15 pin 

100 (330) 

mm (inches) 


yttrium oxide, iridium, 

stainless steel, Cu, W, 

glass, NiFe, NiCr 

Internal volume KF / CF cm 3 (inch 3 ) 

24 / 34 (1.46 / 2.1) 

Weight KF / CF 

g 

285 / 550 


IP 30 


BPG400 

Without LCD display 

DN 25 ISO-KF 

DN 40 CF-R 

353-500 

353-502 

With LCD display 

DN 25 ISO-KF 

DN 40 CF-R 

353-501 

353-503 

Replacement sensor 

DN 25 ISO-KF 

DN 40 CF-R 

354-490 

354-491 

Bakeout extension, 100 mm (3.94 inches) 

353-510 

24 V DC supply / RS 232 C line 

353-511 

Baffle 

353-512 

1) Reduced accuracy during degas 

2) RS 232 C operation < 30 m 

B6.14

Pirani Standard Gauge 

Vacuum Gauges 


PSG400, PSG400-S 

The Pirani Standard Gauge PSG400 represents the most advanced 

Pirani technology in a very compact, rugged package. The improved 

temperature compensation by the incorporated twin Pirani provides 

faster, more stable vacuum measurement and eliminates the slow 

response towards atmospheric pressures. The rugged stainless steel 

sensor cell qualifies it for use on semiconductor systems, as well as 

traditional applications such as fore vacuum lines. 

Patent granted on electronics 

Advantages 

♦ Small footprint 

♦ Mount in any orientation 

♦ Metal sealed feedthrough with stainless steel measuring cell 

♦ Optimized temperature compensation with twin Pirani principle 

♦ Logarithmic signal output for easy integration 

♦ High overpressure capability to 10 bar absolute with 

threaded connections 

♦ Bakeable version available for 250 ¡C at flange 

♦ Sensor cell easily replaced 


♦ Controlling of high vacuum ionization gauges 

♦ Fore vacuum pressure monitoring 

♦ Safety circuits in vacuum systems 

♦ General vacuum measurement and control in fine and rough 

vacuum range 

Advantages of PSG400 Over 

Conventional Technology 

In conventional Pirani gauges the filament used as measurement element is 

one arm of a self-adjusting bridge circuit. The filament temperature is in the 

range of 120 ¡C. Whenever a pressure change occurs a gain control 

amplifier automatically adjusts the bridge voltage to keep the filament 

temperature constant. This bridge excitation is the primary measurement 

used in determining the pressure. The ambient operating temperature also 

has an influence on the power necessary to keep the filament temperature 

constant. Ambient temperature changes appear as changes in pressure. 

To compensate, a temperature sensitive element is placed close to the 

sensor. The ambient temperature is thus registered and the measurement 

signal is compensated, accordingly. 

Advanced PSG400 

This sensor consists of two filaments, which are kept constant at two 

separate operating temperatures (65 ¡C and 120 ¡C). A change in pressure 

affects both filaments the same way. The power required to keep the 

filaments at the constant temperature is pressure dependent. By using the 

power difference between the two filaments one can easily eliminate 

changes in the temperature and thus isolate the changes in pressure. 

This satisfies the need for temperature compensation, but eliminates the 

delays associated with using a separate temperature sensor, resulting in 

a very fast response time. 

B6 

B6.15

Vacuum Gauges 



PSG400 PSG400-S 


Accuracy, 1 x 10 -2 É 100 mbar 

Repeatability, 1 x 10 -3 É 100 mbar 

Mounting orientation 

Setpoint 

Range 

Relay contact 

Hysteresis 


Relay status 

mbar 

Torr 

% of reading 

% of reading 

mbar 

V / A DC 


bar 

Temperature 


Storage ¡C 


Power supply 

Voltage 

VDC 


W 


V 

Measurement range, logarithmic 

V 


V/decade 

Error signal 

V 

Response time 

ms 

Connector 

Cable length, max. 


m (ft) 

Internal volume KF / CF cm 3 (inch 3 ) 

Weight KF / CF 


g 

5 x 10 -4 É 1000 

3.8 x 10 -4 É 750 

Å ±10 

Å ±2 

any 

n/a 1 

2 x 10 -3 É 500 

n.o. 

potential free 

approx. 30% 

of adjusted 

pressure 

60 / 0.5 

LED, green 

10 1) 

+ 5 É + 60 

- 20 É + 65 

80 / 250 2) 

14 É 32 

1 

0 É 10.3 

1.9 Ð 10 

1.286 

< 0.5 

10 

FCC 68, 8 pin (shielded) 

100 (330) 

tungsten, stainless steel, 

glass, Cu, NiFe, Ni 

2 / 10 (0.1 / 0.6) 

97 / 120 

IP 40 

mm (inches) 


PSG400 

PSG400-S 

DN 16 ISO-KF 

1/8Ó NPT 

DN 16 CF-R 2) 

1/2" tube 



DN 16 ISO-KF 

1/8Ó NPT 

DN 16 CF-R 2) 

1/2Ó tube 


350-000 350-010 

350-001 350-011 

350-002 350-012 

350-003 350-013 

350-004 350-014 

350-990 

350-991 

350-992 

350-993 

350-994 

1) Threaded connections only 2) Extended tube for bakeout with 250 ¡C at flange 

B6.16


Vacuum Gauges 


PSG100-S, PSG101-S 

The Pirani Standard Gauges PSG100-S and PSG101-S are 

especially designed for easy integration into vacuum systems using 

Profibus DP or DeviceNetª fieldbus protocols. The gauges are 

equipped with a set point and for corrosive applications, a platinum 

filament version is available. 

Patent pending 

Advantages 

♦ Fieldbus interface (Profibus, DeviceNet) for easy integration into vacuum 

systems using network communications 

♦ For corrosive applications or high levels of water vapors the PSG101-S 

uses a platinum filament and a Al 2 

O 3 

ceramic feedthrough 

♦ Setpoint with adjustable threshold over a wide range 

♦ Mount in any position 

♦ Logarithmic analog output signal available 

♦ Sensor cell is easily replaced 


♦ Processes with corrosive gases (PSG101-S) 

♦ Fore vacuum pressure monitoring 

♦ Controlling of high vacuum ionization gauges 

♦ Safety circuits in vacuum systems 

♦ General vacuum measurement and control in the fine and rough 

vacuum range 

Fieldbus 

Fieldbus allows processes or applications the flexibility and control of 

network communications. It permits communication of exact digital 


for each connected instrument and simplifies your connection diagram. 

The measures of control include: monitoring of measurement values, 

automatic zero point adjustment of gauges, update operator of scheduled 

maintenance work, warning signals in case of instrument failure, and more. 

Profibus DP 

The central automation systems, e.g. PLC/PC or process control systems, 

communicate through a fast serial connection with decentralized 

instruments such as I/O, motors, valves and pressure transmitters. The 

exchange of data with the decentralized instruments takes place mostly in 

cycles. The basic functions of the Profibus DP Communication Profile also 

include acyclic communication services for parameter setting, controlling, 

monitoring, and alert functions of intelligent instruments. 

DeviceNet 

The DeviceNet interface supports polling, bit strobe and change of 

state/cyclic commands. Like with other DeviceNet instruments the user 

can monitor and control all available sensor functions. 

B6 

B6.17

Vacuum Gauges 


Profibus DP 

PSG100-SP 

PSG101-SP 


PSG100-S 

PSG101-S 

Supported baud rates (for auto detection) 

Expanded user parameter data 

Configuring 

Number of input and output data 

Sync-Mode and Freeze-Mode 

Connector 

Device type 

Explicit Peer to Peer Messaging 

I/O Peer to Peer Messaging 



Baud rates 


I/O Slave Messaging 

Bit Strobe 

Polling 

Cyclic 


Supply 

Connector 

DeviceNet 

k Baud 

Bytes 

Bytes 

k Baud 

V DC 

9.6 

19.2 

93.75 

187.5 

500 

1500 

5 

2 

yes 

D sub, 9 pin 

PSG100-SD 

PSG101-SD 

generic 

no 

no 

no 

no 

125 

250 

500 

no 

yes 

yes 

yes 

yes 

11 É 25 

Phoenix Combicon, 5 pin 


Filament material 

Mounting position 

Fieldbus protocol 

Setpoint 

Range 

Relay contact 

Hysteresis 


Relay status 


mbar 

Torr 

mbar 

V / A DC 

bar 

Temperature 


Storage ¡C 


Power supply 

Voltage 

V DC 


W 


V 


V 


V/decade 

Connector 

Cable length, max. (analog) 


m (ft) 

Flange 


Weight, approx. 


kg 

5 x 10 -4 É 1000 

3.8 x 10 -4 É 750 

tungsten platinum 

any 

DeviceNetª or 

Profibus DP 

1 

1 x 10 -3 É 500 

n.o. / potential free 

ca. 30% of adjusted pressure 

60 / 0.5 

LED, green 

3 10 1) 

+10 É +50 

-20 É +70 

80 

14.5 É 36 

< 2 

0 É 10.6 

0.66 É 10 

1.333 


100 (330) 

tungsten, Al, platinum, 

nickel-plated stainl. steel, 

steel, stainless CrNi, Al 2 O 3 

steel, NiFe, ceramics, 

glass, NiFe, Mo, Ni 

CrNi8020, 

epoxy cement 

DN 16 ISO-KF 

11 (0.67) 

0.29 

IP 40 


PSG100-S 

PSG101-S 

With setpoint 

With DeviceNetª (PSG100-SD, PSG101-SD) 

With Profibus DP (PSG100-SP, PSG101-SP) 


n/a 350-030 

350-021 350-031 

350-022 350-032 

350-980 350-981 

1) Threaded connections only 

mm (inches) 

B6.18

Bayard-Alpert Gauge 

Vacuum Gauges 


BAG100-S, BAG101-S 

The Bayard-Alpert Gauge BAG100S covers an extremely wide 

measurement range with excellent reproducibility in the process 

pressure range. The sensor employs two filaments which are made 

of long-life yttrium oxide coated iridium for standard applications or 

alternatively tungsten, which is more compatible with halogens 

(Cl, Fl, Br) or hydrogen gas compositions. The gauge features 

selectable analog as well as digital communications by RS 232 C 

interface or fieldbus options like Profibus DP and DeviceNet. 

The IP54 rating ensures protection against dust, water spray, and 

electromagnetic interferences. 

Advantages 

♦ Wide measurement range of 2 x 10 -10 to 1 x 10 -1 mbar 

(1.5 x 10 -10 to 7.5 x 10 -2 Torr) with a single sensor 

♦ High reproducibility of ±10% of the measurement value within the 

process pressure range 

♦ Fully encapsulated sensor with a very stable electrode geometry 

♦ Longer life through dual cathodesÐautomatic switchover in case of failure 

♦ Long-life iridium cathodes with yttrium oxide coating 

♦ Continuous measurement available during electron bombardment degas 

♦ Easy-to-exchange sensors with automatic self-adjustment to 

maintain reproducibility 

♦ Relay contact switching threshold adjustable over a wide range 

♦ Analog output with selectable logarithmic / linear characteristic 

♦ Digital interfaces: RS 232 C / Fieldbus: Profibus DP or DeviceNetª 

♦ Rugged IP 54 metal enclosure 

♦ High EMI compatibility through screened enclosure, screened sensor, 

and interference suppression on all inputs and outputs 


♦ Pressure measurement in semiconductor processes and 

transfer chambers 

♦ Evaporation and coating systems 

♦ General pressure measurement and control in fine and high vacuum range 

The innovative Bayard-Alpert Transmitters BAG100-S and BAG101-S offer 

a wide measurement range spanning from 2 x 10 -10 to 1 x 10 -1 mbar. 

The wide range Bayard-Alpert measuring system is mechanically protected 

by the metal tube which surrounds it. The rugged arrangement of the 

electrodes ensures highly repeatable measurements over the entire range. 

Each sensor is individually calibrated in the factory. The calibration data 

are stored in an EEPROM which is fully integrated into the sensor. 

When exchanging the sensor, the electronics of the transmitter are 

automatically adjusted to the currently connected sensor so that the 

specified reproducibility can be guaranteed. The sensor with a CF flange 

is equipped with a welded current feedthrough which enables degassing 

of the sensor at a temperature of 150 ¡C with the electronics in place. 

Sensor supply and processing of the measurement data is performed by 

microprocessor controlled electronics which require a 24 V power supply 

and draw a very low current. The microcontroller also controls the 

BAG100-S and BAG101-S in that it monitors the emission, converts and 

corrects the measurement data (automatic correction of the sensorÕs 

sensitivity, matching of the unit etc.) and monitors the trigger thresholds 

for the relay. 

The selectable signal output characteristics (linear / logarithmic) as well 

as the digital computer interfaces permit easy integration in existing or 

future system concepts. 

B6 

B6.19

Vacuum Gauges 


Fieldbus 




for each connected instrument and simplifies your connection diagram. 

Device type 

DeviceNet 



BAG100-SD 

BAG101-SD 

generic 

no 

no 

The measures of control include: monitoring of measurement values, 

automatic zero point adjustment of gauges, update operator of scheduled 

maintenance work, warning signals in case of instrument failure, and more. 

Profibus DP 



instruments such as I/O, motors, valves and pressure transducers. 

The exchange of data with the decentralized instruments takes place 

mostly in cycles. The basic functions of the Profibus DP Communication 

Profile also include acyclic communication services for parameter setting, 

controlling, monitoring, and alert functions of intelligent instruments. 



Baud rates 



Bit Strobe 

Polling 

Cyclic 


Supply 

Connector 

k Baud 

V DC 

no 

no 

125 

250 

500 

no 

yes 

yes 

yes 

yes 

11 É 25 

Microstyle, 5 pin 

DeviceNet 


state/cyclic commands. Like with other DeviceNet instruments the user 

can monitor and control all available sensor functions. 

Profibus DP 

Supported baud rates (auto detection) 

k Baud 

BAG100-SP 

9.6 

19.2 

93.75 

187.5 

500 

1500 


no 

Configuring 


Bytes 

2 each 


yes 

Connector 

D sub, 9 pin 

mm (inches) 

B6.20


Vacuum Gauges 


BAG100-S 

BAG101-S 


Reproducibility 

Repeatability 

Long term sensitivity drift 

Filament material 

Number of filaments 

Degas (p < 2 x 10 -5 mbar (1.5 x 10 -5 Torr)) 

mbar 

Torr 

% of reading 

% of reading 

% of reading 

Setpoint 

Range 

mbar 

Relay contact 

Hysteresis 


V / A DC 

Relay status 


bar 

Temperature 


Storage ¡C 

Bakeout at flange DN 25 ISO-KF ¡C 

Bakeout at flange DN 40 CF-R ¡C 

Power supply 

Voltage 

VDC 

Current Consumption 

Operation 

A 

Bakeout 

A 

Measurement start (approx. 1 sec.) 

A 


V 


V 

Selectable scaling 


Response time (at p > 1 x 10 -6 mbar) 

ms 

Connector 


m (ft) 

Materials exposed to process media (excl. filament) 

Internal volume, approx. DN 25 KF / DN 40 CF cm 3 (inch 3 ) 

Weight, approx. DN 25 KF / DN 40 CF 

kg 


2 x 10 -10 É 1 x 10 -1 2 x 10 -10 É 5 x 10 -3 

1.5 x 10 -10 É 7.5 x 10 -2 1.5 x 10 -10 É 3.8 x 10 -3 

±10 

±2 

±2 

yttrium oxide, iridium 

tungsten 

2 

electron bombardment, 3 min max. 

1 1 

1 x 10 -9 É 1 x 10 -1 1 x 10 -9 É 1 x 10 -3 



approx. 10% of adjusted pressure approx. 10% of adjusted pressure 

60 / 0.5 60 / 0.5 

LED, green 

LED, green 

2 

0 É +50 

-20 É +70 

80 

150 

20 É 28 

0.5 

0.8 

1.4 

0 É 10 

0 É 10 

1 or 3 decades out of 9 

RS 232 C 

100 

D sub, 15 pin (shielded) 

100 (330) 

stainless steel, glass, NiFe, NiCr 

24 / 34 (1.46 / 2.1) 

0.98 / 1.28 

IP 54 

B6 


BAG100-S 

BAG101-S 

DN 25 ISO-KF 

DN 40 CF-R 

With Profibus DP (BAG100-SP) 

DN 25 ISO-KF 

DN 40 CF-R 

With DeviceNetª (BAG100-SD, BAG101-SD) 

DN 25 ISO-KF 

DN 40 CF-R 


DN 25 ISO-KF 

DN 40 CF-R 

24 V DC supply / RS 232 C line 

352-000 n/a 

352-002 352-003 

352-010 n/a 

352-011 n/a 

352-005 352-007 

352-006 352-008 

352-490 352-492 

352-491 352-493 

353-511 

B6.21

Vacuum Gauges 

Penning Gauge PEG100 


The Penning Gauge PEG100 provides reliable high vacuum 

measurements. The rugged penning cold cathode sensor has no 

filament to burn out. Due to titanium cathode plates and the reduced 

high voltage after plasma ignition, the gauge can be operated also in 

sputtering applications. The fieldbus options, in addition to the 

logarithmic analog output signal, allow easy integration into vacuum 

systems using Profibus DP or DeviceNet protocols. 

Patent pending on sensor 

Advantages 

♦ Wide measurement range from 1 x 10 -9 to 1 x 10 -2 mbar (7.5 x 10 -10 

to 7.5 x 10 -3 Torr) 

♦ All-metal cold cathode sensor (Penning) with ceramic feedthrough 

♦ New electrode geometry provides excellent ignition properties 

♦ Decreased high voltage after plasma ignition and titanium cathode 

plates reduce risk of contamination, even during sputtering operations 

with argon 

♦ The anode ring and the titanium cathode can be cleaned or 

replaced easily 

♦ Minimal magnetic field intensity adjacent to gauge 

♦ LED indicator for power on and plasma ignited 

♦ Logarithmic analog output signal 

♦ Fieldbus interface (Profibus DP, DeviceNet) for easy integration into 

vacuum systems using network communications 


♦ High vacuum pressure monitoring 

♦ Evaporation and sputtering systems 

♦ General vacuum measurement and control in the fine and high 

vacuum range 

The Penning Gauge PEG100 is a cold cathode sensor based on the well 

proven principle of Penning. For degassing of the all-metal sensor with 

Al 2 

O 3 

current feedthrough, the housing of the transmitter with its electronics 

and magnet may easily be removed. The magnet offers a closed magnetic 

field for negligible stray field. The PEG therefore may also be installed close 

to sensitive parts within a system. The anode ring and the titanium cathode 

plates may be exchanged easily for quick maintenance should they become 

contaminated. Since sputtered titan is not magnetic Ð limiting the build up of 

short circuits within the sensor Ð the risk of contamination is greatly 

reduced. The newly designed cathode plate acts as a baffle for the sensor. 

Fieldbus 



information, independent control, maintenance and diagnostic routines for 

each connected instrument and simplifies your connection diagram. 

The measures of control include the monitoring of measurement values, the 

automatic zero point adjustment of gauges, reminding the operator of 

scheduled maintenance work, warning signals in case of instrument failure 

and more. 

Profibus DP 



instruments such as I/O, motors, valves and pressure transducers. The 

exchange of data with the decentralized instruments takes place mostly in 

cycles. The basic functions of the Profibus DP Communication Profile also 

include acyclic communication services for parameter setting, controlling, 

monitoring, and alert functions of intelligent instruments. 

DeviceNet 


state/cyclic commands. Like with other DeviceNet instruments the user can 

monitor and control all available sensor functions. 

B6.22


Vacuum Gauges 

Profibus DP 

PEG100-P 


PEG100 

Supported baud rates (auto detection) 


Configuring 



k Baud 

Bytes 

Bytes 

9.6 

19.2 

93.75 

187.5 

500 

1500 

5 

2 

yes 


Accuracy, 1 x 10 -8 É 1 x 10 -4 mbar 

mbar 

Torr 

% of reading 


bar 

Temperature 


Storage ¡C 

Bakeout 

without electronics ¡C 

with electronics, at flange ¡C 

1 x 10 -9 É 1 x 10 -2 

7.5 x 10 -10 É 7.5 x 10 -3 

Å ±30 

10 

+10 É +50 

-20 É +75 

350 

70 

Connector 

D sub 9 pin 

Power supply 

Voltage 


VDC 

W 

14.5 É 36 

< 2 

Device type 





Baud rates 

DeviceNet 

k baud 

PEG100-D 

generic 

no 

no 

no 

no 

125 

250 

500 




Connector 



V 

V 

V/decade 

m (ft) 


Weight, approx. 

kg 


0 É 10.6 

0.66 É 10 

1.333 


100 (330) 

stainless steel, CrNi, 

Al 2 O 3 , NiFe, Mo, Cu, Ni, Ti 

21 (1.28) 

0.5 

IP 40 


no 


Bit Strobe 

Polling 

Cyclic 


Supply 

Connector 

V DC 

yes 

yes 

yes 

yes 

11 É 25 

Phoenix Combicon, 5 pin 


PEG100 

DN 25 ISO-KF 

DN 40 CF-R 

With DeviceNetª (PEG100-D) 

DN 25 ISO-KF 

DN 40 CF-R 

With Profibus DP (PEG100-P) 

DN 25 ISO-KF 

Replacement cathode plates, titanium 

Set of 5 pieces 

PEG100 

351-000 

351-002 

351-003 

351-004 

351-005 

351-490 

B6 

mm (inches) 

B6.23

Vacuum Gauges 

Vacuum Gauge Controller VGC103 


By combining up to three principles of measurement Ð from hot 

cathode, cold cathode, Pirani or capacitance diaphragm gauges Ð 

the Vacuum Gauge Controller VGC103 covers the entire pressure 

range from 10 -10 to 2000 mbar (Torr). Switching over of the display 

to the right pressure range is automatic for the most common sensor 

combinations. The display of the VGC103 combines the advantages 

of analog and digital readouts. 

Advantages 

♦ Can be combined with up to three sensor types for an extremely wide 

measurement range 

♦ Full remote control via RS 232 C interface 

♦ User selectable measurement unit (millibar, Torr, Pascal or micron) 

♦ Analog bar graph display compliments digital readout 

♦ Three adjustable setpoints with adjustable hysteresis, may be assigned 

to any channel 

♦ Programmable 0 É 10 V chart recorder output with logarithmic / linear 

characteristics for each gauge or combination of PSG and BAG 

♦ Compact bench-top unit which can be installed in panel cut-outs or a 

19Ó racks (1/4 19Ó, 3U height) 

The VGC103 easily fits your application specifications thanks to the 

possibility of combining various sensors with different methods of 

measurement and different measurement ranges. 

Multiple Recorder Outputs and Control 

Signals For Simplified Process Integration 

The VGC103 offers standard features that other controllers only offer as 

add-on options: 

♦ Three adjustable setpoints with adjustable hysteresis and arbitrary 

allocation to the three measuring channels 

♦ Automatic control of the emission (Bayard-Alpert Gauge BAG) or of high 

voltage (Penning Gauge PEG) with Pirani Gauge PSG on channel 2 

Easy To Read – Easy To Use 

The large digital display allows for easy and quick reading of the 

measurement value, while the analog bar graph display allows for at a 

glance verification. During pressure measurement the display changes 

automatically over to the input channel of the correct sensor for the sensor 

combination: Ch 2 = PSG, Ch 3 = BAG. The values can be displayed in 

millibar, Torr, Pascal or micron. 

With its compact dimensions the VGC (1/4 19Ó, 3U height) easily fits 

into panel cutouts or 19Ó racks and can be used just as easily as a 

bench top unit. 

B6.24


Vacuum Gauges 

Rear view of the VGC103 

B6 

Cables 


Cable to VGC103 in m (ft) 

3 (9.9) 

5 (16.5) 

10 (33) 

15 (49.5) 

20 (66) 

30 (99) 

40 (132) 

50 (165) 

75 (247.5) 

100 (330) 

PSG/PEG BPG/BAG CDG 

398-500 398-520 398-540 

398-501 398-521 398-541 

398-502 398-522 398-542 

398-503 398-523 398-543 

398-504 398-524 398-544 

398-505 398-525 398-545 

398-506 398-526 n/a 

398-507 398-527 n/a 

398-508 398-528 n/a 

398-509 398-529 n/a 

B6.25

Vacuum Gauges 


Measurement channels 

Display 

Range 


mbar 

Torr 

Digital 

Analog 

Switching 

Rate 1/s 

Connectable transmitters with display range 

CDG 

Torr 

BPG 

mbar (Torr) 

PSG 

mbar (Torr) 

PEG 

mbar (Torr) 

BAG 

mbar (Torr) 

Measurement unit (selectable) 

Type of gas (selectable) Ð BAG only 

Setpoints 

Adjustment range 

Hysteresis 

Relay contact 


V / A DC 

Ready indication relay 

Relay contact 


V / A DC 

Analog output 

Channels 

Range 

Channel 1, 2, 3 

Channel 4 


Connector 

Power 

Output for setpoint and analog output 

Supply 

V 

Frequency 

Hz 

Consumption 

W 

Temperature 


VGC103 

3 

backlit 

2 x 10 -10 É 2000 

1.5 x 10 -10 É 1500 

LCD, 7-segments 

LCD, bargraph 

automatic or manual between connected sensors 

4 

1 x 10 -3 x FS É 1 x FS 

5 x 10 -10 É 1000 

5 x 10 -4 É 1000 

1 x 10 -9 É 1 x 10 -2 

2 x 10 -10 É 1 x 10 -1 

mbar, Torr, Pascal, micron 

Air, Ar, N 2 

3 assignable to channel 1, 2 or 3 

sensor dependent 

adjustable 

potential free changeover contact 

60 / 0.5 

1 assignable to channel 1, 2 or 3 

potential free changeover contact 

60 / 0.5 

4 

0 É 10 V 

Sensor analog output signal 

Output of channel 1, 2, 3 with selectable scaling or combination PSG and BAG 

RS 232 C 

D sub, 9 pin 

D sub, 25 pin 

85 É 264 

50/60 

60 

0 É 50 


VGC103 

3 channel controller 398-000 

mm (inches) 

B6.26

Vacuum Switch VSA100 

Vacuum Gauges 

Vacuum Switch VSA100 

The pressure switch VSA100 is used as a safety switch in vacuum 

systems. For example, to automatically interrupt the gas supply 

when venting vacuum systems with a purge gas at a pressure of 

6 mbar below atmospheric pressure. 

Advantages 

♦ Reliable control of atmospheric pressure during venting 

♦ High contact rating and life time 


Switching pressure at venting mbar (Torr) 

6 (4.5) below 

atmospheric pressure 

♦ Rugged design 

♦ Easy to integrate 

♦ IP 44 protection 

♦ Can be connected to a programmable control 

Switching pressure at pumping 

Switching inaccuracy 

Max. permissible 

operating pressure (absolute) 

mbar (Torr) 

mbar (Torr) 

mbar (Torr) 

3 (2.25) below 

atmospheric pressure 

1 (0.75) 

2000 (1500) 


♦ Control of load lock chambers 

♦ Safety shutdown of vacuum systems 

Temperature 


Storage ¡C 

Switching contact 

0 É +85 

-25 É +85 

Changeover contacts, 

gold-plated, for prog. controls 

B6 

At a differential pressure of 6 mbar below atmospheric pressure an elastic 

diaphragm actuates a high current changeover contact which in turn may 

be used to directly switch any ancillary equipment. The electrical connection 

is concealed by a polymeric cover 

Contact life (at 5 A) 


Electrical connection 

Cable length 

V AC / A / VA 

m (ft) 

> 10 5 switching cycles 

220 / 5 / 1100 

6.3 mm flat plug 

3 (9.9) 

Technical Note 

Due to the diaphragm material used (EPDM) the Vacuum Switch VSA100 is 

not suited for applications in which the process gas contains large quantities 

of helium. The leak rate of the diaphragm for helium is > 10 -6 mbar x l x s -1 . 

Vacuum connection 


Protection class 

DN 16 ISO-KF 

stainless steel 1.4305, 

EPDM, polyamide with 

glass fibre, epoxy cement 

IP 44 


DN 16 ISO-KF, complete with 3 m (10 ft) cable 

399-000 

mm (inches) 

B6.27

Vacuum Gauges 

Calibration Service 

Calibration Service 

INFICON offers calibration services for vacuum gauges. A DKD calibration 

certificate or a factory calibration certificate can be issued. Calibration to 

other standards (e.g. NIST) is available upon request. 

Advantages 

♦ Known deviation to calibration standards 

♦ Controlled quality over time 


♦ Reference to standard is required 

♦ Reference for customer in-house calibration service of vacuum gauges 

DKD Calibration 

The German Calibration Service (DKD) ensures traceability of industrial 

measurements and testing to national calibration standards. It is run jointly 

by the Federal Institution for Physics and Technology (PTB), the Industry, 

the Federal Minister for Economics and the Western European Metrology 

Club (WEMC). 

The transfer standards employed in the DKD calibration facility are checked 

regularly (recalibrated) by the PTB. 

Factory Calibration 

Factory calibrations are run with standards which have not been calibrated 

directly at the PTB; instead the transfer standards of the DKD calibration 

service are used. Thus traceability to national standards is ensured in 

both cases. 

Other Calibrations 

NIST Calibration available upon request. Call for pricing and availability. 


Calibration range 

to 10 -3 mbar/Torr 



DKD Calibration 

Factory Calibration 

398-900 398-910 

398-901 398-911 

398-902 398-912 

B6.28

B7 

Vacuum Feedthroughs

Vacuum Feedthroughs 

Contents 

Products and Accessories 

Rotary Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.3 

ISO-KF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.3 

CF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.4 

Rotary/Linear Motion Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.5 

Linear Motion Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.6 

Viewports. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.7 

ISO-KF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.7 

ISO-K . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.8 

ISO-F. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.9 

CF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.10 

Electrical Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.11 

16 ISO-KF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.11 

40 ISO-KF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.12 

CF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.13 

High Current Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.15 

Coaxial Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.16 

Metal-Ceramic Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.17 

Liquid Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.18 

Vacuum Ball Bearings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.19 

Lubricants and Sealing Materials . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.20 

Thread Lubricant . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.20 

Vacuum Grease/Oil . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.20 

Sealing Material . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.21 

B7.2

Rotary Feedthroughs 



ISO-KF 

♦ For transmitting high torque 

♦ With FPM shaft seal and ball bearings 


ISO-KF 

Vacuum connection DN 16 ISO-KF DN 25 ISO-KF DN 40 ISO-KF DN 63 ISO-K 

Feedthrough/seal FPM FPM FPM FPM 

Shaft connection mm ¿ 5 ¿ 8 ¿ 12 ¿ 20 

Type FRH016-H FRH025-H FRH040-H FRH063-H 


214-300 214-302 214-304 214-306 2) 

Transferable torque Nm 1.5 6 25 100 

Rotational speed 1) 1/min 1500 1000 750 500 

Shaft load 

Radial N 60 150 250 500 

Axial N 30 50 60 100 

Service life (revolutions) 20 000 000 20 000 000 20 000 000 10 000 000 

Tightness, static mbar l/s 1 x 10 -9 1 x 10 -9 mbar l/s 1 x 10 -9 mbar l/s 1 x 10 -9 mbar l/s 

Pressure (absolute) 1 x 10 -9 mbar Ð 1 bar 1 x 10 -9 mbar Ð 1 bar 1 x 10 -9 mbar Ð 1 bar 1 x 10 -9 mbar Ð 1 bar 

Operating temperature ¡C 50 50 50 50 

Bakeout temperature ¡C 110 110 110 110 

Materials exposed to process media stainless steel, stainless steel, stainless steel, stainless steel, 

aluminum, FPM aluminum, FPM aluminum, FPM aluminum, FPM 

Weight kg 0.1 0.2 0.6 2 

B7 

1) When a reduced service life is acceptable, the rotational 

speed can be increased by up to a factor of two 

2) Centering ring 

CR/aluminum Ordering information 212-251 

FPM/stainless steel Ordering information 212-281 

B7.3



CF 

♦ Bellow sealed 

♦ All-metal version 

♦ For very demanding vacuum requirements 


Vacuum connection DN 16 CF-F DN 40 CF-F DN 40 CF-F 

Feedthrough/seal bellow bellow bellow 

Shaft connection mm ¿ 4 ¿ 8 ¿ 12 

Type FRU016-H FRU040-N FRU040-L 


214-310 214-312 214-314 

Transferable torque 

Dynamic Nm 0.4 4 10 

Dynamic, at 300 ¡C Nm 0.2 2 2 

Static Nm 0.2 3 5 

Rotational speed 1/min 200 1000 500 

at max. torque 1/min Ñ 500 300 

Shaft load 

Radial N 10 60 100 

Axial N 5 20 30 

Service life (revolutions) 1 000 000 2 000 000 1 000 000 

Scale division 10¡ Ñ Ñ 

Tightness mbar l/s 1 x 10 -10 1 x 10 -10 1 x 10 -10 

Pressure (absolute) 1 x á10 -9 mbar Ð 2 bar 1 x á10 -9 mbar Ð 2 bar 1 x 10 -9 mbar Ð 2 bar 

Operating temperature ¡C 300 300 300 

Bakeout temperature ¡C 300 300 300 

Materials exposed to process media stainless steel stainless steel stainless steel 

Weight kg 0.3 1.5 3.0 

B7.4

Rotary/Linear Motion Feedthroughs 


Rotary/Linear Motion Feedthroughs 

♦ Two FPM shaft seals 

♦ Direct push/pull and rotary actuation 

♦ With locking ring and optional anti-rotation device 


Vacuum connection DN 16 ISO-KF DN 25 ISO-KF DN 40 ISO-KF 

Feedthrough/seal FPM FPM FPM 

Shaft connection mm M 3 / ¿ 5 M 4 / ¿ 8 M 6 / ¿ 12 

Stroke mm 50 100 150 

Type FCH016-H FCH025-H FCH040-H 


Rotary/linear feedthrough 214-320 214-322 214-324 

Anti-rotation device 214-072 214-073 214-074 

Shaft load 

Radial, at max. displacement N 10 15 30 

Torsion Nm 2 8 20 

Tightness, static mbar l/s 1 x 10 -9 1 x 10 -9 1 x 10 -9 

Pressure (absolute) 1 x 10 -8 mbar Ð 1 bar 1 x 10 -8 mbar Ð 1 bar 1 x 10 -8 mbar Ð 1 bar 

Operating temperature ¡C 50 50 50 


Materials exposed to process media stainless steel, stainless steel, stainless steel, 

aluminum, FPM aluminum, FPM aluminum, FPM 

Weight kg 0.1 0.2 0.3 

B7 

Feedthrough 

Anti-rotation device 

B7.5


Linear Motion Feedthroughs 

Linear Motion Feedthroughs 

♦ With bellows for more demanding vacuum requirements 

♦ Direct push and pull actuation 

♦ High accuracy adjustment using micrometer screw 

♦ Equipped with set screw for positioning 


Vacuum connection DN 16 CF-R DN 40 CF-R DN 16 CF-R DN 40 CF-R 

Feedthrough/seal bellow bellow bellow bellow 

Shaft connection mm M 4 x 16 M 6 x 10, ¿ 10 M 4 x 16 M 6 x 10, ¿ 10 

Actuator manually manually micrometer micrometer 

Stroke mm 25 50 20 50 

Type FPU016-H FPU040-H FPU016-Z FPU040-Z 

Ordering Information 214-330 214-332 214-334 214-336 

Stroke per revolution mm Ñ Ñ 0.5 1 

Scale division mm 5 10 0.01 0.005 

Shaft load 

Radial at max. displacement N 20 100 20 100 

Axial, against vacuum N 85 140 185 440 

Axial, against atmosphere N 100 200 200 500 

Torsion Nm 0.2 0.5 0.2 0.5 

Tightness mbar l/s 1 x 10 -10 1 x 10 -10 1 x 10 -10 1 x 10 -10 

Pressure (absolute) 1 x 10 -9 mbar Ð 2 bar 1 x 10 -9 mbar Ð 2 bar 1 x 10 -9 mbar Ð 2 bar 1 x 10 -9 mbar Ð 2 bar 

Bakeout temperature 

Feedthrough ¡C 300 300 300 300 

Micrometer screw ¡C Ñ Ñ 100 100 

Materials exposed to process media stainless steel stainless steel stainless steel stainless steel 

Weight kg 0.15 0.75 0.25 1 

B7.6

Viewports 


Viewports 

ISO-KF 

♦ Wide viewing angle 

Average transmittance curve 

ÐÐÐÐÐÐ Sapphire 

- Ñ - Ñ Kodial 

- - - - - - Borosilicate 



Window borosilicate borosilicate borosilicate 

Seal FPM FPM FPM 

Flange aluminum aluminum aluminum 


Ordering Information 1) 214-003 214-004 214-005 



Max. at 150 ¡C bar 3 3 3 

Window thickness mm 3.8 3.8 3.8 

Weight g 20 30 40 

B7 

1) Claws and clamping ring not included 

Mounting 

2.5 

2.5 

Ø 40 

Ø 55 

Ø 75 

B7.7


Viewports 

ISO-K 


Vacuum connection DN 63 ISO-K DN 100 ISO-K DN 160 ISO-K 



Flange aluminum aluminum aluminum 


Ordering Information 1) 214-006 214-007 214-008 



max. at 150 ¡C bar 1 1 1 

Window thickness mm 6 8 10 

Weight kg 0.2 0.3 0.4 

1) Claws not included 

Mounting 

Transmittance curve see page 7 

B7.8

Viewports 


ISO-F 

♦ Window and protective glass replaceable 


Vacuum connection DN 63 ISO-F DN 100 ISO-F DN 160 ISO-F 



Flange anodized aluminum, black anodized aluminum, black anodized aluminum, black 


Ordering Information 1) 

Viewport 214-016 214-017 214-018 

Protective glass, 5 pcs. 214-046 214-047 214-048 



max. at 150 ¡C bar 1 1 1 

Window thickness mm 7.5 11 15 

Protective glass thickness mm 2.5 2.5 2.5 

Weight kg 0.8 1.4 3 

1) Claws, screws, washers and nuts included 

Mounting 

B7 


B7.9


Viewports 

CF 

♦ Window is protected 

♦ With Fe-Ni alloy as transitional material 


Vacuum connection DN 16 CF-F DN 40 CF-F DN 40 CF-F DN 63 CF-F DN 100 CF-F DN 160 CF-F 

Window kodial kodial sapphire kodial kodial kodial 

Seal metal metal metal metal metal metal 

Flange stainless steel stainless steel stainless steel stainless steel stainless steel stainless steel 

Bakeout temperature ¡C 400 400 400 400 400 400 


Viewport 214-021 214-022 214-032 214-023 214-024 214-025 

Set of hexagon bolts and nuts 213-416 standard standard standard standard Standard 

Tightness mbar l/s 1 x 10 -10 1 x á10 -10 1 x 10 -10 1 x á10 -10 1 x 10 -10 1 x 10 -10 

Pressure (absolute) 

min. mbar 1 x 10 -10 1 x 10 -10 1 x 10 -10 1 x 10 1 x 10 -10 1 x 10 -10 

max. bar 2 2 2 2 2 2 

max. at 400 ¡C bar 1 1 1 1 1 1 

Window thickness mm 1.5 3 3 4 6 8 

Weight 40 g 240 g 350 g 850 g 1.4 kg 2.8 kg 

1) Screw set and seal not included 

Mounting 


B7.10

Electrical Feedthroughs 



16 ISO-KF 



Number of feedthroughs 4 9 9 

Voltage per pole 1) V 50 50 50 

Current per pole 1) A 1 2 2 


Feedthrough 214-111 214-112 214-113 

Connector: vacuum side Ñ Ñ 214-191 

Connector: air side 214-171 214-172 214-172 

Connection 

Vacuum side solder connection solder connection connector 

Air side connector connector connector 

Diameter of connecting wire mm 0.6 1.2 1.2 

Test voltage V / Hz 500 / 50 500 / 50 500 / 50 


Pressure (absolute) 2) 1 x 10 -8 mbar Ð 2.5 bar 1 x 10 -8 mbar Ð 2.5 mbar 1 x 10 -8 mbar Ð 2.5 mbar 

Bakeout temp. (feedthrough, connector) ¡C 130 130 130 

Housing nickel-plated steel nickel-plated steel nickel-plated steel 

Insulator PEEK / Araldit PEEK / Araldit PEEK / Araldit 


Contact (feedthrough, connector) gold-plated bronze gold-plated bronze gold-plated bronze 

1) Local regulations concerning use must be followed 

2) Pressure max. 10 bar with external centering ring 

B7 

Connector: vacuum side 

Feedthrough 

Connector: air side 

B7.11



40 ISO-KF 


Vacuum connection DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF 

Number of feedthroughs 7 7 4 1 

Voltage per pole 1) V 380 380 800 6000 

Current per pole 1) A 16 16 16 25 


Feedthrough 214-121 214-122 214-123 214-131 

Connector: vacuum side Ñ 214-193 214-194 Ñ 

Connector: air side 214-174 214-174 214-175 214-180 

Connection 

Vacuum side solder connection connector connector screw coupling 

Air side connector connector connector connector 

Diameter of connecting wire mm 1.8 1.8 2.5 5 

Test voltage kV / Hz Ñ Ñ Ñ 15 / 50 


Pressure (absolute) 2) 1 x 10 -8 mbar l/s Ð 2.5 bar 1 x 10 -8 mbar l/s Ð 2.5 bar 1 x 10 -8 mbar l/s Ð 2.5 bar 1 x 10 -8 mbar l/s Ð 2.5 bar 

Bakeout temp. (feedthrough, connector) ¡C 130 130 130 130 

Housing chrome-plated steel chrome-plated steel chrome-plated steel chrome-plated steel 

Insulator PTFE / Araldit PTFE / Araldit PTFE / Araldit PTFE / Araldit 

Seal FPM FPM FPM FPM 

Contact (feedthrough, connector) gold-plated bronze gold-plated bronze gold-plated bronze nickel-plated brass 


2) Pressure max. 10 bar with external centering ring 

Connector: vacuum side 

Feedthrough 

Connector: air side 

B7.12



CF 




Voltage per pole 1) kV 1 1 4 

Current per pole 1) A 8 8 150 


Feedthrough 214-116 214-117 214-126 

Connection piece: vacuum side 214-192 214-198 214-195 

Connector: atmospheric side 214-173 214-181 214-176 


Temperature rise at max. current ¡C 40 40 50 



Flange stainless steel stainless steel stainless steel 

Conductor stainless steel stainless steel copper 

Insulator Al 2 O 3 Al 2 O 3 Al 2 O 3 

Weight kg 0.3 0.4 0.15 

Connection piece: vacuum side 1) pcs. 5 10 2 

Current max. A 12 12 90 


Material stainless steel stainless steel stainless steel 

Feedthrough 

B7 

Connector: atmospheric side 1) pcs. 5 10 2 

Current max. A 12 12 A 90 

Not insulated, for use up to V Ñ 50 V 50 

Insulated, for use up to V 100 Ñ Ñ 


Contact gold-plated brass gold-plated brass silver-plated brass 


B7.13




CF 



Voltage per pole 1) kV 1 4 4 

Current per pole 2)) A 250/1000 150 150 


Feedthrough 214-127 214-128 214-136 

Connector: vacuum side 214-196 214-195 214-195 

Connector: atmospheric side 214-177 214-176 214-176 

Connector: atm. side, H 2 O cooled 214-178 Ñ Ñ 


Temperature rise at max. current ¡C 40 50 50 



Flange stainless steel stainless steel stainless steel 

Conductor copper copper copper 

Insulator Al 2 O 3 Al 2 O 3 Al 2 O 3 

Weight kg 0.5 0.45 0.15 

Connection piece: vacuum side 1) pcs. 1 2 2 

Current max. A 1000 1000 90 


Material copper stainless steel stainless steel 

Feedthrough 

Connector: atmospheric side 1) pcs. 1 2 2 

Current max. A 250 90 90 

Not insulated, for use up to V 50 50 50 


Contact silver-plated brass silver-plated brass silver-plated brass 


2) With water-cooling 

With water-cooling 1) 

Current max. 

1000 A 

Not insulated, for use up to 24 ¡C 

Bakeout temperature 120 ¡C 

Contact 

silver-plated brass 

B7.14

High Current Feedthroughs 


High Current Feedthroughs 

CF 

♦ Selection of electrodes 

♦ Slide into mounted feedthrough 

♦ Current connection with water cooling 



DN 40 ISO-KF 

Number of feedthroughs 1 

Voltage V 50 

Current, with water cooling A 5000 


Feedthrough 214-141 

Current connection with water cooling 214-145 

Straight electrode 214-142 

Angle electrode 214-143 

T-electrode 214-144 

Tightness mbar l/s 1 x 10 -9 

Pressure (absolute) 

1 x 10 -8 mbar Ð 2.5 bar 

(max. 10 bar with external centering ring) 

Bakeout temperature ¡C 110 

Housing 

aluminum 

Insulator 

thermoplast 

Seal 

FPM 

B7 

Feedthrough 

Current connection with water cooling 

brass, copper 

Electrodes 

copper 

straight electrode 

angle electrode 

T-electrode 

B7.15


Coaxial Feedthroughs 

Coaxial Feedthroughs 

♦ Based on MIL-C-39012A 

♦ Voltage up to 5 kV DC 

♦ With atmospheric connector 


Vacuum connection DN 16 ISO-KF DN 16 ISO-KF DN 16 CF-F DN 16 CF-F DN 40 CF-F 

Number of feedthroughs 1 1 1 1 3 

Type BNC MHV BNC MHV MHV 


214-151 214-152 214-155 214-156 214-157 

Voltage 

AC, 50 Hz kV 0.35 3.5 0.35 3.5 3.5 

DC kV 0.5 5 0.5 5 5 

Current A 3 3 3 3 3 

Frequency MHz 150 Ñ 150 Ñ Ñ 

Impedance ½ 50 Ð 60 Ñ 50 Ð 60 Ñ Ñ 

Insulation resistance at 20 ¡C ½ 10 10 10 10 10 10 10 10 10 10 

Tightness mbar l/s 1 x 10 -9 1 x 10-9 1 x 10 -10 1 x 10 -10 1 x 10 -10 

Pressure (absolute) 1 x 10 -8 mbar Ð 2.5 bar 1) 1 x 10 -8 mbar Ð 2.5 bar 1) 1 x 10 -8 mbar Ð 10 bar 1 x 10 -8 mbar Ð 10 bar 1 x 10 -8 bar Ð 10 bar 

Housing, flange, conductor stainless steel stainless steel stainless steel stainless steel stainless steel 

Feedthrough, seal Al 2 O 3 Al 2 O 3 Al 2 O 3 Al 2 O 3 Al 2 O 3 


With connector ¡C 50 50 50 50 50 

Without connector 2) ¡C 200 200 400 400 400 

Standard connection 

Atmospheric connector UG 88/U UG 932/U UG 88/U UG 932/U UG 932/U 

Cable RG 58/U RG 59/U RB 58/U RG 59/U RG 59/U 

Weight kg 0.1 0.1 0.14 0.14 0.5 

1) Max. 10 bar with external centering ring 

2) With elastomer seal up to 150 ¡C 

B7.16

Metal-Ceramic Connections 


Metal-Ceramic Connections 

♦ High grade materials allow repeated bakings at 400 ¡C 


Voltage 1) 12 kV 10 kV 20 kV 30 kV 


214-161 214-162 214-163 214-164 

Insulator Al 2 O 3 Al 2 O 3 Al 2 O 3 Al 2 O 3 

Connection 

a Fe-Ni Fe-Ni Fe-Ni Fe-Ni 

b Fe-Ni stainless steel stainless steel stainless steel 

Bakeout temperature ¡C 400 400 400 400 


Weight g 5 12 25 90 

1) Permissible operating voltage (50 Hz) as a function of the 

surface-leakage path under normal conditions (1000 mbar, 

50% relative air humidity) at which arcs do not yet occur. 

In vacuums lower than 10-4 mbar, these values can be 

increased by 80%. The absolute value for welded-in 

electrodes depends on the electrode geometry. 

B7 

B7.17


Liquid Feedthroughs 

Liquid Feedthroughs 

♦ For H 2 O and LN 2 

♦ Thermically insulated 

♦ Especially suited for very hot and very cold applications 


Vacuum connection DN 40 ISO-KF DN 40 CF-F 

Feedthrough/seal welded welded 

Connection mm ¿ 8 x 1 ¿ 8 x 1 

Number of tubes 2 2 

Ordering Information 1) 214-101 214-102 

Tightness mbar l/s 1 x 10 -9 1 x 10 -10 

Pressure (absolute) 10 -8 mbar Ð 2.5 bar 1) 10 -9 mbar Ð 10 bar (at 400 ¡C max. 2 bar) 

Temperature range ¡C -200 Ð +150 -200 Ð +400 

Material stainless steel stainless steel 

Weight kg 0.3 0.4 

1) Max. 10 bar with external centering ring 

B7.18

Vacuum Ball Bearings 


Vacuum Ball Bearings 

Especially suited for clean vacuum applications and extreme residual 

gas requirements. 


Service life 1) (revolutions) > 20 Mio. > 20 Mio. > 20 Mio. > 20 Mio. > 20 Mio. 

Pressure (absolute) mbar 1 x 10 -12 Ð 1 x 10 -2 1 x 10 -12 Ð 1 x 10 -2 1 x 10 -12 Ð 1 x 10 -2 1 x 10 -12 Ð 1 x 10 -2 1 x 10 -12 Ð 1 x 10 -2 

Operating temperature 2) ¡C -200 Ð +300 -200 Ð +300 -200 Ð +300 -200 Ð +300 -200 Ð +300 

Material stainless steel stainless steel stainless steel stainless steel stainless steel 

1.3543/1.4301 1.3543/1.4301 1.3543/1.4301 1.3543/1.4301 1.3543/1.4301 

Type 624 605 626 608 6000 


214-211 214-212 214-213 214-214 214-215 

Rotational speed at 

20 ¡C U/min 5000 4000 3000 2500 2000 

300 ¡C U/min 1500 1500 1000 800 500 

Load capacity 3) 

Static Co N 400 400 800 1000 1500 

Dynamic C N 50 50 100 150 200 

Axial load


Lubricants and Sealing Materials 


Thread Lubricant 

♦ Prevents seizing of stainless steel screw connections at atmosphere 

even at high temperatures 

♦ Remains fully effective for at least 10 bakeout cycles 


Temperature resistance 1000 ¡C 

In packages of 

28 g 

Type C 100 

Ordering Information 214-231 

Vacuum Grease/Oil 

♦ For sliding elastomer seals 

♦ Low vapor pressure 

♦ Good adhesiveness 


Temperature resistance 10 Ð 30 ¡C -40 Ð 200 ¡C -20 Ð 200 ¡C -60 Ð 300 ¡C -60 Ð 300 ¡C 

Vapor pressure at 

20¡C mbar < 10 -7 < 10 -7 < 10 -12



Sealing Material 

♦ For sealing small leaks 


Temperature resistance -40 Ð 200 ¡C 350 ¡C 

Version Paste Spray 

Solvent Axarel 6100/9100 Axarel 6100/9100 

In packages of 200 g 170 g 

Type Rhodosil 340 Sprayseal 

Ordering Information 214-233 214-234 

B7 

B7.21

Vacuum Valves 

B8

Vacuum Valves 

Contents 


Angle and Inline Valves. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.3 

DN 5 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.3 

DN 16 - 160 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.6 

Angle Valves 

DN 16-63 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.12 

DN 250 - 1000 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.14 

Butterfly Valves. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.16 

Gate Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.20 

Gas Dosing Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.21 

Manually Actuated Coarse Gas Dosing Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.21 

Manually Actuated Dosing and Shut-off Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.22 

Manually Actuated All-metal Dosing Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.23 

Gas Dosing Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.24 

Control Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.25 

Controllers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.26 

Interface Module VCA200-Z . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.28 

Venting Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.29 

Manually Actuated. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.29 

Solenoid Actuated . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.30 

Safety Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.31 

Vacuum Safety Valves. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.31 

Power Failure Venting Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.32 

High Pressure Relief Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.32 

Vacuum Locks and Sealing Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.33 

Ball Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.34 

B8.2

Angle and Inline Valves 

Vacuum Valves 


DN 5 

Manually Actuated 

♦ Spindle drive 

♦ Angle valve 

Pneumatically Actuated 

♦ Extremely high service life of 5 million cycles 

♦ Angle valves 

♦ With and without pilot valve 

Solenoid Actuated 

♦ Extremely high service life > 2 million cycles 

♦ Angle and inline valves 

B8 

Connections 

B8.3

Vacuum Valves 


DN 5 


Actuation manual pneumatic electropneumatic solenoid solenoid solenoid 

Feedthrough bellows bellows bellows without without without 

Nominal diameter mm 5 / M 14 x 1 5 / M 14 x 1 5 / M 14 x 1 5 / M 14 x 1 5 / M 14 x 1 5 / M 14 x 1 

Service life cycles Ñ 5 million 5 million 2 million 2 million 2 million 

Attribute angle valve angle valve angle valve angle valve inline valve inline valve 

without pilot valve with pilot valve 


Type VAH005-X VAP005-X VAP005-X VAM005-X VIM005-X VIM005-Z 

Valve 250-070 250-040 Ñ Ñ Ñ Ñ 

normally closed Ñ Ñ 250-050 250-000 250-010 Ñ 

normally open Ñ Ñ Ñ Ñ Ñ 250-020 

Tightness mbar l/s 1 x 10 -9 1 x 10 -9 1 x 10 -9 1 x 10 -9 1 x 10 -9 1 x 10 -9 

Conductance for 

molecular flow l/s 0.4 0.4 0.4 0.3 0.2 0.2 

laminar flow l/s 4 4 4 3 2 2 

Pressure, min. / max. mbar / bar 10 -8 / 4 10 -8 / 4 10 -8 / 4 10 -8 / 10 10 -8 / 10 10 -8 / 10 

Differential pressure in 

closing / opening direction bar 4 / 4 3 / 3 3 / 3 5 / 1.5 5 / 1.5 5 / 1.5 

Can be opened to a differential pressure bar 4 3 3 1 1 1 

Ambient temperature ¡C 5 Ð 70 5 Ð 80 5 Ð 40 5 Ð 40 5 Ð 40 5 Ð 40 

Bakeout temperature housing / actuator ¡C 150 / 70 150 / 80 150 / 80 150 150 150 

Closing / opening time ms Ñ 35 / 35 35 / 35 7 / 30 7 / 30 7 / 30 

Switching frequency 1/min Ñ 150 150 300 300 300 

Protection acc. to DIN 40050 Ñ IP 65 IP 65 IP 65 IP 65 IP 65 

Supply / power consumption V DC / W Ñ Ñ 24 / 1 24 / 10 24 / 10 24 / 10 

Housing, stainless steel 1.4301 1.4301 1.4301 1.4301 1.4301 1.4301 

Actuator, stainless steel 1.4301 1.4301 1.4301 Ñ Ñ Ñ 

Bellows, valve plate, stainless steel 1.4301 1.4301 1.4301 Ñ Ñ Ñ 

Guiding tube, armature, stainless steel Ñ Ñ Ñ 1.4105 1.4105 1.4105 

Seal FPM FPM FPM FPM FPM FPM 

Weight kg 0.15 0.18 0.20 0.26 0.28 0.28 

Spare parts 

Seal set 215-373 215-372 215-372 215-371 215-371 215-371 

Spare parts set 215-369 215-368 215-368 215-365 215-366 215-367 


Connection 

DN 10 ISO-KF Tube OD 1/4“ Tube 6 mm 

250-080 250-085 250-086 

B8.4


Vacuum Valves 

DN 5 

VAH005-X VAP005-X VAP005-X 

VAM005-X 

VIM005-X/-Z 

Compressed air connection 

Power connection 

B8 

B8.5

Vacuum Valves 


DN 16 – 160 

Manually Actuated DN 16 – 40 

♦ Multi-functional rotary knob 

♦ Quick opening with 130¡ turn 

♦ Soft start in four steps 

Manually Actuated DN 63, 100 

♦ Spindle drive with hand wheel 

♦ Smooth opening 

Pneumatically Actuated DN 16 – 160 

♦ Visual indication of the open and closed position 

♦ Electrical position indicator for open and closed valve 

♦ Can be used as normally closed or normally open valve 

B8.6


Vacuum Valves 

Manually Actuated with CF Flanges 

♦ For UHV applications 

♦ Extremely high safety standard for high-purity or toxic gases 

♦ Bakeable at up to 180 ¡C in open and closed position 

♦ FPM sealed 

♦ Maintenance-free 


♦ High conductance 

♦ Compact design 

♦ Visual position indicator (LED) 

♦ Selectable operating mode 

Remote control via PLC or PC 

Local operation 

B8 

B8.7

Vacuum Valves 


DN 16 - 160 

Angle valve DN 16 ISO-KF 16 ISO-KF Ñ 25 ISO-KF 25 ISO-KF Ñ 

Inline valve DN Ñ Ñ 16 ISO-KF Ñ Ñ 25 ISO-KF 

Housing material aluminum stainless steel stainless steel aluminum stainless steel stainless steel 

Service life, cycles million 10 10 10 10 10 10 

Conductance for molecular flow l/s 4.5 4.5 2.5 16 16 8 


Pressure, absolute, min. / max. mbar / bar 10 -8 / 4 10 -8 / 4 10 -8 / 4 10 -8 / 4 10 -8 / 4 10 -8 / 4 


closing / opening direction bar 2 / 2 2 / 2 2 / 2 2 / 2 2 / 2 2 / 2 

Opens to a pressure difference of bar 2 2 2 3 3 3 

Mounting orientation any any any any any any 


housing / actuator, pilot valve ¡C 80 / 50 150 / 50 150 / 50 80 / 50 150 / 50 150 / 50 



Weight kg 0.3 0.4 0.55 0.43 0.75 1.35 

Type VAH016-A VAH016-X VIH016-X VAH025-A VAH025-X VIH025-X 


Angle valve 250-260 250-265 Ñ 250-270 250-275 Ñ 

Inline valve Ñ Ñ 250-365 Ñ Ñ 250-375 


Closing time ms 200 200 200 290 290 290 

Opening time ms 100 100 100 110 110 110 

Electrical position indicator, 

load capacity V AC / A 250 / 0.125 250 / 0.125 250 / 0.125 250 / 0.125 250 / 0.125 250 / 0.125 

V DC / A 50 / 0.25 50 / 0.25 50 / 0.25 50 / 0.25 50 / 0.25 50 / 0.25 

Compressed air, overpressure bar 3 Ð 7 3 Ð 7 3 Ð 7 3 Ð 7 3 Ð 7 3 Ð 7 

Air cylinder volume cm 3 5.5 5.5 5.5 12.1 12.1 12.1 

Weight with pilot valve kg 0.3 0.4 0.54 0.44 0.75 0.73 

Type VAP016-A VAP016-X VIP016-X VAP025-A VAP025-X VIP025-X 


Angle valve without pilot valve 250-204 250-214 Ñ 250-224 250-234 Ñ 

Inline valve without pilot valve Ñ Ñ 250-314 Ñ Ñ 250-334 

Angle valve with pilot valve 

24 V DC 250-200 250-210 Ñ 250-220 250-230 Ñ 

24 V AC 250-201 250-211 Ñ 250-221 250-231 Ñ 

100 Ð 115 V AC 250-202 250-212 Ñ 250-222 250-232 Ñ 

200 Ð 240 V AC 250-203 250-213 Ñ 250-223 250-233 Ñ 

Inline valve with pilot valve 

24 V DC Ñ Ñ 250-310 Ñ Ñ 250-330 

24 V AC Ñ Ñ 250-311 Ñ Ñ 250-331 

100 Ð 115 V AC Ñ Ñ 250-312 Ñ Ñ 250-332 

200 Ð 240 V AC Ñ Ñ 250-313 Ñ Ñ 250-333 

Spare parts 

Seal set 215-025 215-025 215-025 215-075 215-075 215-075 

Bellows set for manually actuated valves 215-042 215-042 215-042 215-092 215-092 215-092 

Bellows set for pneumatically actuated valves 215-027 215-027 215-027 215-077 215-077 215-077 

B8.8


Vacuum Valves 

40 ISO-KF 40 ISO-KF Ñ 63 ISO-K 63 ISO-K 100 ISO-K 100 ISO-K 160 ISO-K 

Ñ Ñ 40 ISO-KF Ñ Ñ Ñ Ñ Ñ 

aluminum stainless steel stainless steel aluminum stainless steel aluminum stainless steel aluminum 

10 10 10 1.5 1.5 1.5 1.5 1.5 

40 40 20 140 140 330 330 800 

1 x 10 -9 1 x 10 -9 1 x 10 -9 1 x 10 -9 1 x 10 -9 1 x 10 -9 1 x 10 -9 1 x 10 -9 

10 -8 / 2.5 10 -8 / 2.5 10 -8 / 2.5 10 -8 / 4 10 -8 / 4 10 -8 / 4 10 -8 / 4 10 -8 / 4 

2 / 1.5 2 / 1.5 2 / 1.5 1.5 / 1.5 1.5 / 1.5 1.5 / 1.5 1.5 / 1.5 1.5 / 1.5 

2 2 2 1.5 1.5 1.5 1.5 1.5 

any any any any any any any any 

80 / 50 150 / 50 150 / 50 150 / 60 150 / 60 150 / 60 150 / 60 150 / 60 

FPM FPM FPM FPM FPM FPM FPM FPM 

0.48 0.85 1.4 3.6 6.5 6.1 11.1 Ñ 

VAH040-A VAH040-X VIH040-X VAH063-A VAH063-X VAH100-A VAH100-X Ñ 

250-280 250-285 Ñ 250-470 250-475 250-480 250-485 Ñ 

Ñ Ñ 250-385 Ñ Ñ Ñ Ñ Ñ 

500 500 500 250 250 300 300 550 

250 250 250 300 300 450 450 450 

250 / 0.125 250 / 0.125 250 / 0.125 250 / 0.125 250 / 0.125 250 / 0.125 250 / 0.125 250 / 0.125 

50 / 0.25 50 / 0.25 50 / 0.25 50 / 0.25 50 / 0.25 50 / 0.25 50 / 0.25 50 / 0.25 

3 Ð 7 3 Ð 7 3 Ð 7 4 Ð 8 4 Ð 8 4 Ð 8 4 Ð 8 4 Ð 8 

26.2 26.2 26.2 75 75 195 195 570 

0.9 1.6 1.5 4.0 6.8 6.7 11.7 11.4 

VAP040-A VAP040-X VIP040-X VAP063-A VAP063-X VAP100-A VAP100-X VAP160-A 

250-244 250-254 Ñ 250-404 250-414 250-424 250-434 250-444 

Ñ Ñ 250-354 Ñ Ñ Ñ Ñ Ñ 

250-240 250-250 Ñ 250-400 250-410 250-420 250-430 250-440 

250-241 250-251 Ñ 250-401 250-411 250-421 250-431 250-441 

250-242 250-252 Ñ 250-402 250-412 250-422 250-432 250-442 

250-243 250-253 Ñ 250-403 250-413 250-423 250-433 250-443 

B8 

Ñ Ñ 250-350 Ñ Ñ Ñ Ñ Ñ 

Ñ Ñ 250-351 Ñ Ñ Ñ Ñ Ñ 

Ñ Ñ 250-352 Ñ Ñ Ñ Ñ Ñ 

Ñ Ñ 250-353 Ñ Ñ Ñ Ñ Ñ 

215-125 215-125 215-125 215-251 215-251 215-271 215-271 215-291 

215-142 215-142 215-142 215-254 215-254 215-274 215-274 Ñ 

215-127 215-127 215-127 215-253 215-253 215-273 215-273 215-293 

B8.9

Vacuum Valves 



Angle valves 

ISO-KF 

Position indicator 

DN A B C D E 

DN 16 ISO-KF 118.3 44 62 40 5 

DN 25 ISO-KF 154.5 58 79 50 10 

DN 40 ISO-KF 173.8 82 106 65 12 

Inline valves 

ISO-KF 

Angle valves 

ISO-K 

DN A B C D E F 

DN 16 ISO-KF 100.3 44 44 80 22 5 

DN 25 ISO-KF 136 58 58 100 31.5 10 

DN 40 ISO-KF 154.3 82 82 130 45.5 12 

DN A B C D E 

DN 63 ISO-K 266 124 150 88 20 

DN 100 ISO-K 345 164 190 108 25 

B8.10


Vacuum Valves 


Angle valves 

ISO-KF 



Position indicator connection 

Position indicator 

DN A B C D E 

DN 16 ISO-KF 154 51 60 40 100 ¿ 4+6 

DN 25 ISO-KF 176 63 74 50 108 ¿ 4+6 

DN 40 ISO-KF 196.5 83 98 65 120 ¿ 4+6 

Inline valves 

ISO-K 

Angle valves 

ISO-K 

B8 

DN A B C D E F 

DN 16 ISO-KF 139.5 51 60 80 100 22 ¿ 4+6 

DN 25 ISO-KF 157.4 63 74 100 108 31.5 ¿ 4+6 

DN 40 ISO-KF 177 83 98 130 120 45.5 ¿ 4+6 

DN A B C D E 

DN 63 ISO-K 250 130 168 88 14 ¿ 6 

DN 100 ISO-K 282 170 208 108 14 ¿ 6 

DN 160 ISO-K 380 221 264 138 14 ¿ 6 

B8.11

Vacuum Valves 

Angle Valves 

Angle Valves 

DN 16 - 63 

Manually Actuated with CF Flanges 


Vacuum connection DN 16 CF-R DN 40 CF-R DN 63 CF-R 

Actuation manual manual manual 

Type VAH016-Z VAH040-Z VAH063-Z 

Ordering Information 250-731 250-736 250-741 

Service life cycles 50 000 50 000 50 000 

Tightness mbar l/s 10 -10 10 -10 10 -10 

Conductance for molecular flow l/s 3 34 100 

Pressure (absolute) min. / max. mbar / bar 1 x 10 -10 / 4 1 x 10 -10 / 4 1 x 10 -10 / 4 

Mounting orientation any any any 

Spindle turns 10 12 30 


without hand wheel 1) ¡C 180 180 180 

with hand wheel ¡C 80 80 80 

Heating and cooling rate ¡C/h 240 240 240 

Bellows stainless steel 1.4541 stainless steel 1.4541 stainless steel 1.4541 

Housing stainless steel 1.4301 stainless steel 1.4301 stainless steel 1.4301 

Housing with actuator welded welded welded 

Valve plate seal FPM FPM FPM 

Valve plate stainless steel stainless steel stainless steel 

Weight kg 0.5 2 6.2 

Spare parts 

FPM seal, 10 pcs. 215-341 215-342 215-343 

1) Valves for 300 ¡C please ask for more information 

DN A B C SW 

DN 16 CF-R 86.1 38 15.5 8 

DN 40 CF-R 138 63 20 17 

DN 63 CF-R 210 105 34.2 22 

B8.12

Angle Valves 

Vacuum Valves 



Vacuum connection DN 16 ISO-KF DN 16 ISO-KF DN 25 ISO-KF DN 25 ISO-KF DN 40 ISO-KF DN 40 ISO-KF 

Housing material aluminum stainless steel aluminum stainless steel aluminum stainless steel 

Type VAM016-A VAM016-X VAM025-A VAM025-X VAM040-A VAM040-X 


100 Ð 230 V, 50/60 Hz 250-661 250-666 250-671 250-676 250-681 250-686 

Service life cycles 2 000 000 2 000 000 2 000 000 2 000 000 2 000 000 2 000 000 


Conductance for molecular flow l/s 3 3 12 12 32 32 

Mounting orientation any any any any any any 

Pressure (absolute) min. / max. mbar 10 -9 / 1300 10 -9 / 1300 10 -9 / 1300 10 -9 / 1300 10 -9 / 1300 10 -9 / 1300 

Differential pressure 

in closing, opening direction bar 1.3 1.3 1.3 1.3 1.3 1.3 

Opens to a pressure difference of bar 1.3 1.3 1.3 1.3 1.3 1.3 


Housing ¡C 120 120 120 120 120 120 

Actuator, powerless ¡C 50 50 50 50 50 50 

Pickup / holding current A 5.2 / 0.7 5.2 / 0.7 5.3 / 0.7 5.3 / 0.7 4.8 / 0.7 4.8 / 0.7 

Load rating of position feedback switches V DC / mA 15 Ð 30 / 100 15 Ð 30 / 100 15 Ð 30 / 100 15 Ð 30 / 100 15 Ð 30 / 100 15 Ð 30 / 100 

Closing / opening time ms 100 / 100 100 / 100 120 / 240 120 / 140 230 / 700 230 / 700 

Closing delay ms 50 50 170 170 500 500 

Switching frequency at 

40¡C 1/min 30 30 30 30 30 30 

50¡C 1/min 20 20 20 20 20 20 

Supply V DC / mA 15 Ð 30 / 3 Ð 5 15 Ð 30 / 3 Ð 5 15 Ð 30 / 3 Ð 5 15 Ð 30 / 3 Ð 5 15 Ð 30 / 3 Ð 5 15 Ð 30 / 3 Ð 5 

Pickup power W 400 400 400 400 400 400 

Protection IP54 IP54 IP54 IP54 IP54 IP54 

Bellows stainless steel stainless steel stainless steel stainless steel stainless steel stainless steel 


Weight kg 1.3 1.45 2.2 2.9 4 5.4 

Spare parts Ð Seal set 215-029 215-029 215-079 215-079 215-129 215-129 

Ð Bellows set 215-032 215-032 215-082 215-082 215-122 215-122 

B8 

DN A B C D 

DN 16 ISO-KF 160 40 84.5 59 

DN 40 ISO-KF 194 50 96.5 75 

DN 63 ISO-KF 230 65 119.5 96 

B8.13

Vacuum Valves 

Angle Valves 

DN 250 - 1000 


♦ Electrical position indicators 

DN 250 – 630 

♦ With bellows feedthrough 

DN 800 and 1000 

♦ With elastomer shaft feedthrough 


Vacuum connection DN 250 ISO-K DN 320 ISO-K DN 400 ISO-K 

Conductance for molecular flow l/s 2 700 5 100 7 700 

Type VAP250-X VAP320-X VAP400-X 


Valve without coil 250-800 250-805 250-810 

Coil 

230 V, 50 Hz 215-804 215-804 215-804 

115 V, 60 Hz 215-809 215-809 215-809 

24 V, 50 Hz 215-814 215-814 215-814 

24 V DC 215-819 215-819 215-819 

Service life cycles 1 000 000 1 000 000 800 000 


Pressure min. / max. mbar / bar 10 -7 / 2 10 -7 / 2 10 -7 / 2 

Differential pressure in either direction bar 1 1 1 

Opening / closing time s 6 / 6 7 / 7 8 / 8 

Compressed air, overpressure bar 4 Ð 8 4 Ð 8 4 Ð 8 

Compressed air 

cylinder volume cm 3 2 100 2 700 3 300 


Housing ¡C 120 120 120 

Actuator ¡C 60 60 60 

Housing stainless steel stainless steel stainless steel 

Valve plate stainless steel stainless steel stainless steel 


Weight kg 66 128 148 

Spare parts 

Seal set 215-375 215-376 215-377 

Bellows set 215-385 215-386 215-386 

B8.14

Angle Valves 

Vacuum Valves 

Type DN DN1 A B C D E F 

VAP250-X DN 250 ISO-K DN 50 ISO-KF 650 200 250 163 205 208 

VAP320-X DN 320 ISO-K DN 63 ISO-K 753 250 275 173 318 244 




Type DN DN1 A B C D E F G 

VAP800-S DN 800 ISO-F DN 160 ISO-K 1823 550 200 440 550 490 435 

VAP999-S DN 1000 ISO-F DN 160 ISO-K 2240 650 200 440 560 620 575 

DN 500 ISO-K DN 630 ISO-K DN 800 ISO-F DN 1000 ISO-F 

12 000 20 000 40 000 62 000 

VAP500-X VAP630-X VAP800-S VAP999-S 

250-815 250-820 250-825 250-830 

215-804 215-804 215-804 215-804 

215-809 215-809 215-809 215-809 

215-814 215-814 215-814 215-814 

215-819 215-819 215-819 215-819 

800 000 600 000 20 000 20 000 

1 x 10 -9 1 x 10 -9 1 x 10 -8 1 x 10 -8 

10 -7 / 2 10 -7 / 2 10 -7 / 1 10 -7 / 1 

0.5 0.5 0.25 0.25 

9 / 9 11 / 11 8 / 8 10 / 10 

4 Ð 8 4 Ð 8 5.5 Ð 8 5.5 Ð 8 

4 200 5 200 8 100 9 800 

B8 

120 120 150 150 

60 60 60 60 

stainless steel stainless steel stainless steel stainless steel 

stainless steel stainless steel stainless steel stainless steel 

FPM FPM FPM FPM 

180 310 430 520 

215-378 215-379 215-380 215-381 

215-387 215-388 Ñ Ñ 

B8.15

Vacuum Valves 

Butterfly Valves 


DN 63 - 250 


♦ Compact design, low installation height 

♦ With bypass, gauge and valve connections 

Housing 

with lateral connection flanges DN 63 ISO-F Ñ DN 100 ISO-F 

without lateral connection flanges Ñ DN 63 ISO-F Ñ 

Bypass connection DN 16 ISO-KF Ñ DN 25 ISO-KF 

Gauge, valve connection DN 10 ISO-KF Ñ 2 x DN 10 ISO-KF 

Ñ Ñ Ñ 

Service life cycles 100 000 100 000 100 000 


Conductance for air for molecular flow l/s 350 400 1000 

Pressure min. / max. mbar / bar 10 -8 / 10 10 -8 / 10 10 -8 / 10 

Differential pressure in either direction bar 4 4 4 

Housing, valve plate, valve shaft / seal stainless steel / FPM stainless steel / FPM stainless steel / FPM 


Bakeout temperature: housing ¡C 150 Ñ 150 

Weight kg 3.1 Ñ 5.2 

Type VBH063-X Ñ VBH100-X 


250-560 Ñ 250-570 


Bakeout temperature: housing / actuator ¡C 150 / 80 150 / 80 150 / 80 

Closing / opening time s 0.5 / 0.5 0.5 / 0.5 0.5 / 0.5 

Pickup / holding power VA 10 / 6 10 / 6 10 / 6 

Compressed air, overpressure bar 5 Ð 9 5 Ð 9 5 Ð 9 

Air cylinder volume cm 3 50 50 130 

Weight kg 3.8 3.5 6.5 

Type VBP063-X VBP063-Z VBP100-X 


Valve without pilot valve and position indicator 250-600 250-605 250-610 

Position indicator 215-135 215-135 215-136 

Pilot valve 

230 V / 50 Hz 215-131 215-131 215-131 

115 V / 60 Hz 215-132 215-132 215-132 

24 V / 50 Hz 215-133 215-133 215-133 

24 V DC 215-134 215-134 215-134 

Accessories Set of connection elements 1) 215-212 215-213 215-214 

Claw grips Ñ Ñ Ñ 

Spare parts Seal set 215-143 215-144 215-145 

1) Comprising 4 threaded pins and 8 claw grips with nuts 

B8.16


Vacuum Valves 

Connection Elements 

1 ISO-K-flange 

2 Valve housing 

3 ISO seal (not included) 

3a O-ring (included) 

4 Claw grip 

5 Threaded pin 

6 Nut 

A1 

VBH063-X VBP063-X 100 

VBH100-X VBP100-X 110 

VBH160-X VBP160-X 115 

A 

VBP063-Z 100 

VBP100-Z 100 

VBP160-Z 102 

Ñ DN 160 ISO-F Ñ DN 250 ISO-K 

DN 100 ISO-F Ñ DN 160 ISO-F Ñ 

Ñ DN 25 ISO-KF Ñ DN 40 ISO-KF 

Ñ 2 x DN 10 ISO-KF Ñ 2 x DN 10 ISO-KF 

Ñ Ñ Ñ DN 25 ISO-KF 

100 000 100 000 100 000 100 000 

1 x 10 -9 1 x 10 -9 1 x 10 -9 1 x 10 -9 

1400 3400 4000 8200 

10 -8 / 10 10 -8 / 10 10 -8 / 10 10 -8 / 10 

4 4 4 4 

stainless steel / FPM stainless steel / FPM stainless steel / FPM stainless steel / FPM 

Ñ 150 Ñ Ñ 

Ñ 10.6 Ñ Ñ 

Ñ VBH160-X Ñ Ñ 

Ñ 250-580 Ñ Ñ 

150 / 80 150 / 80 150 / 80 150 / 80 

0.5 / 0.5 0.5 / 0.5 0.5 / 0.5 2 / 5 

10 / 6 10 / 6 10 / 6 10 / 6 

5 Ð 9 5 Ð 9 5 Ð 9 5 Ð 9 

130 130 130 700 

4.9 11.6 9.5 15.7 

VBP100-Z VBP160-X VBP160-Z VBP250-X 

250-615 250-620 250-625 250-630 

215-136 215-136 215-136 215-137 

B8 

215-131 215-131 215-131 215-131 

215-132 215-132 215-132 215-132 

215-133 215-133 215-133 215-133 

215-134 215-134 215-134 215-134 

215-215 215-216 215-217 Ñ 

Ñ Ñ Ñ 3 x 212-225 

215-146 215-147 215-148 215-149 

B8.17

Vacuum Valves 


VBH063-X VBH100-X VBH160-X 

VBP063-X 

VBP100-X 

VBP063-Z 

VBP100-Z 



1 Pilot valve 

2 Electrical position indicator 

B8.18


Vacuum Valves 

VBP160-X 

VBP250-X 

VBP160-Z 

B8 

B8.19

Vacuum Valves 

Gate Valves 

Gate Valves 

DN 16 – 400 

We cooperate with VAT! 

The following products are available from us: 

Mini Gate Valves 

♦ Small and light-weight for universal applications 

♦ Aluminum housing with shaft seal DN 16 Ð 50 ISO-KF 

♦ Stainless steel housing with bellows feedthrough DN 40 CF 

♦ Manual actuator with toggle lever or hand wheel 

♦ Pneumatic actuator with position indicator and pilot valve 

Low Cost Vacuum Gate Valves 

♦ With shaft feedthrough 

♦ Aluminum housing DN 63 Ð 320 ISO-F 

♦ Manual or pneumatic actuator with position indicators and pilot valve 

UHV Gate Valves 

♦ With bellows feedthrough 

♦ Stainless steel housing DN 63 Ð 250 CF 


Vacuum Gate Valves for Production Systems 

♦ Compact, long service life Ð 200 000 cycles 

♦ With rotary feedthrough 

♦ Stainless steel housing DN 63 Ð 400 ISO-F 


B8.20

Gas Dosing Valves 

Vacuum Valves 


Manually Actuated Coarse Gas 

Dosing Valves 

♦ For admitting a reproducible flow of gas into the vacuum chamber 

and for slow venting 



DN 10 ISO-KF 

Gas flow controllable 

min. mbar l/s 600 

max. mbar l/s 1700 

Type 

VDH010-A 




Housing 

Seal 

aluminum 

FPM 

Weight kg 0.2 

Spare parts 

Seal set 215-207 

B8 

B8.21

Vacuum Valves 


Manually Actuated Dosing and 

Shut-off Valves 

♦ Very wide control range 

♦ Optimal control characteristics 

♦ Digital display 

♦ Excellent reproducibility 

♦ Extremely small dead volume 

♦ integrated shut-off valve 

♦ Closing without change of flow setting 



DN 16 ISO-KF 

Gas flow controllable 

min. mbar l/s 5 x 10 -6 


Type 

VDH016-X 


250-500 

Tightness mbar l/s 1 x 10-9 

Differential pressure bar 2.5 

Dead volume cm3 0.032 

Operating temperature ¡C 80 

Bakeout temperature, flanges ¡C 150 

Housing, needle, filter 

Dosing sleeve 

Seal 

Weight 

kg 

stainless steel 

fluorplastomer 

FPM 

Filter, vacuum side 

590 mbar l/s 215-462 

1250 mbar l/s 215-463 

B8.22


Vacuum Valves 

Manually Actuated All-metal Dosing Valves 

♦ Minimal dead volume 

♦ Controlled routing of the gas flow using capillaries 

♦ 200 ¡C operating temperature 


Connection flange 

Input 

DN 16 CF-R 

Output 

DN 40 CF-F 

Gas flow min. for 

Pure gases mbar l/s 1 x 10 -10 

Air mbar l/s 1 x 10 -9 

Gas flow 


adjustable max. mbar l/s 100 

Type 

VDH040-U 


250-700 


Pressure absolute min. / max. mbar / bar 1 x 10 -11 / 30 

Conductance for molecular flow l/s 0.7 



Valve plate 

sapphire 

Valve seat 

copper alloy 

Housing 


Weight kg 1.4 

Accessories 

Capillary complete, vacuum side, 1 m 215-708 

Heater, 200 ¡C 215-706 

Adapter DN 40/16 CF 213-071 

Option 

Tool kit 215-707 

Spare parts 

Valve plate, sapphire 215-715 

Valve seat Ð standard 215-716 

Ð gold plated 215-717 

B8 

B8.23

Vacuum Valves 

Gas Dosing Systems 

Gas Dosing Systems 

Upstream 

control 

Downstream 

control for 

small gas flow 

VDM005-X 

VCC500-Z 

or 

VDE016-X 

VCC500-Z 

or 

VCA200-Z 

e.g. PC 

IPC 

PLC 

MC 

Pressure 

gauges 

Process Chambers 

B8.24

Control Valves 

Vacuum Valves 

Control Valve VDM005-X 

♦ Fast pressure control in a vacuum system 

♦ Wide control range at low cost 

♦ Withstands corrosive gases Ð stainless steel / FPM 

♦ Valve closes automatically in case of a power failure 


Vacuum connection DN 5 mm / M 14 x 1 

Gas flow, controllable 



Pressure, absolute 

min. mbar 1 x 10 -8 

max. bar 1.5 

Closing / opening time ms 150 / 100 

Type 

VDM005-X 


250-515 


Actuator 

solenoid 

Controller 

VCC500-Z 


Housing / actuator ¡C 80 / 60 

Ambient temperature ¡C 5 Ð 40 

Supply V DC / W 24 / 2 

Housing 


Seal 

FPM 

Weight 1) g 80 

Cable VCC Ð VDM 

3 m 216-160 

5 m 216-161 

10 m 216-162 

15 m 216-163 

20 m 216-164 

25 m 216-165 

Connection 

DN 10 ISO-KF 250-080 

Tube OD 1/4″ 250-085 

Tube OD 6 mm 250-086 

B8 

1) Flag receptacles included 

B8.25

Vacuum Valves 

Controllers 

Controller 

Control Valve VDE016-X 

♦ Very wide control range 

♦ Large gas throughput 

♦ Withstands corrosive gases Ð stainless steel / FPM 

♦ In combination with the VCC500-Z controller, the valve closes 

automatically in the event of a power failure 



DN 16 ISO-KF 

Gas flow, controllable 



Pressure, absolute 

min. mbar 1 x 10 -8 

max. bar 1.5 

Closing / opening time s 3 / 4 

Type 

VDE016-X 


250-505 


Actuator 

electric motor 

Controller 

VCC500-Z, VCA200-Z 0 Ð 10 V DC 


Housing / actuator ¡C 80 / 60 

Ambient temperature ¡C 5 Ð 40 

Supply V DC / VA 24 / 24 

Housing 


Dosing sleeve 

fluorplastomer 

Seal 

FPM 

Weight 1) kg 0.7 

Cable VCC Ð VDE 

03 m 216-150 

05 m 216-151 

10 m 216-152 

15 m 216-153 

20 m 216-154 

25 m 216-155 

1) Connector included 

B8.26

Controllers 

Vacuum Valves 

Controller VCC500-Z 

♦ Easy operation Ð self-explaining LCD and function keys 

♦ Analog/digital in-/outputs and interfaces 

♦ Adjustable PID control algorithms 


Analog input V DC / mA 0 Ð 10 / 0 Ð 20 

mA 4 Ð 20 

Analog output V DC 0 Ð 10 

pressure, valve position 

Type 

VCC500-Z 


250-900 

Operating modes 

Digital input 

Digital output 

local / remote 

valve to be opened, closed, closed asap, opened asap, 

selection: pressure / gas flow control 

valve open, closed, in position, 

defective, sensor defective 

Selection 

Functions 

pressure control, flow control, test mode 

Units 

mbar, Pa, Torr 

Languages 

English, German 

LCD 

contrast 

Interfaces RS 232C, RS 485 

Control speed selectable steps 1 Ð 99 

Control accuracy % FS sensor 1 

Display accuracy % FS sensor 0.2 

Supply 

Voltage V AC 90 Ð 250 

Consumption VA 50 

Weight kg 2.5 

B8 

B8.27

Vacuum Valves 

Interface Module VCA200-Z 

Interface Module VCA200-Z 

♦ Easy and cost effective integration into systems 

♦ Pressure signal conditioned by the system controller 

♦ Operation only in combination with control valve VDE016-X 


Interface 

RS 232C 

Supply V DC / A 24 / 0.5 

Type 

VCA200-Z 


250-915 

Installation 

DIN mounting rail 

Connection 

terminals 

Safety EN 61010-1, EN 60950 

Weight g 40 

B8.28

Venting Valves 

Vacuum Valves 


Manually Actuated Venting Valve 

♦ Simple opening and closing of the valve by loosening or tightening the 

screw cap 


Vacuum connection DN 10 ISO-KF DN 10 ISO-KF 

Housing aluminum stainless steel 

Type VVH010-A VVH010-X 


250-840 250-841 

Tightness mbar l/s 1 x 10 -9 1 x 10 -9 

Pressure abs. min. / max. mbar / bar 1 x 10 -8 / 8 1 x 10 -8 / 8 

Valve plate aluminum stainless steel 

Screw cap brass brass 

nickel plated 

nickel plated 

Seal FPM FPM 


Spare parts 

O-ring B 4070 207 PV B 4070 207 PV 

B8 

B8.29

Vacuum Valves 


Solenoid Actuated Venting Valve 

♦ No vacuum feedthrough 

♦ Long service live 

♦ Mountable in any position 



Type 

DN 10 ISO-KF 

VVM010-A 


230 V AC, 50/60 Hz 250-533 

115 V AC, 50/60 Hz 250-532 

24 V AC, 50/60 Hz 250-531 

24 V DC 250-530 

Service life cycles 1 500 000 


Conductance for molecular flow l/s 1 

Pressure absolute min. / max. mbar / bar 1 x 10 -8 / 10 


closing / opening direction bar 10 / 1 

Can be opened to a pressure difference of bar 2 


housing / actuator ¡C 150 / 80 

Pickup / holding power VA 35 / 15 

Closing / opening time ms 60 / 45 

Switching frequency 1/min 50 

Housing 

aluminum 

Seal 

FPM 

Weight kg 0.46 

Options 

Filter with port, centering ring and clamping ring 215-152 

Spare parts 

Seal set 215-208 

Filter 

B 4161 210 4F 

B8.30

Safety Valves 

Vacuum Valves 

Safety Valves 

Vacuum Safety Valves 

♦ Fast-closing high vacuum isolation valve for separating the vacuum 

chamber from the backing pump 

♦ Venting valve for roughing pumps 

♦ Immediate closing action upon power failure 

♦ Opening action only after the intake line has been evacuated 


Vacuum connection DN 16 ISO-KF DN 25 ISO-KF DN 40 ISO-KF DN 63 ISO-KF DN 100 ISO-KF 

Type VSM016-A VSM025-A VSM040-A VSM063-A VSM100-A 


200 Ð 230 V AC 250-754 250-764 250-774 250-784 250-794 

100 Ð 115 V AC 250-752 250-762 250-772 250-782 250-792 

24 V DC 250-750 250-760 250-770 250-780 250-790 

230 V AC Eex e II T4, incl. 5 m cable 250-756 250-766 250-776 250-786 250-796 

24 V DC Eex e II T4, incl. 5 m cable 250-755 250-765 250-775 250-785 250-795 

Tightness mbar l/s 1 x 10 -9 1 x 10 -9 1 x 10 -9 1 x 10 -9 1 x 10 -9 

Conductance for molecular flow l/s 2.8 11 30.5 126 400 

Can be opened to a pressure difference of mbar 700 700 700 700 700 


Housing, actuator ¡C 80 80 80 80 80 

Mounting orientation any any any any any 

Housing aluminum aluminum aluminum aluminum aluminum 

Seal FPM FPM FPM FPM FPM 

Weight kg 0.42 0.8 1.3 2.85 4.8 

Spare parts 

Seal set 215-036 215-086 215-156 215-256 215-276 

B8 

DN A B C 

DN 16 ISO-KF 154 40 36 

DN 25 ISO-KF 152 50 60 

DN 40 ISO-KF 173 65 80 

DN A B C 

DN 63 ISO-K 226 88 128 

DN 100 ISO-K 265 108 172 

B8.31

Vacuum Valves 

Safety Valves 

Power Failure Venting Valve 

♦ For automatic venting of pumps, systems or vacuum chambers in the 

event of a power failure. 



DN 10 ISO-KF 

Venting time for a 50 l vessel s 50 

Type 

VIM010-A 


200 Ð 230 V, 50/60 Hz 250-851 

24 V DC 250-850 


Ambient temperature ¡C 50 

Switching frequency 1/min 60 

Housing 

aluminum 

Seal 

FPM 


High Pressure Relief Valve 

♦ Relief trigger point 1.2 to 1.5 bar absolute 



Type 

DN 16 ISO-KF 

VSA016-X 


250-555 


Pressure absolute min. / max. mbar / bar 1 x 10 -8 / 1.2 

Gas flow l/min 6 



Housing 


Seal 

FPM 

Weight kg 0.1 

B8.32

Vacuum Locks and Sealing Valves 

Vacuum Valves 

Vacuum Locks and Sealing Valves 

♦ Simple to use, handy knob 

♦ Compact, low weight 

♦ High conductance, short pumpdown times 

♦ Spindle can be locked in end position 



Type VAC016-A VAC025-A VAC040-A 


Vacuum lock 250-870 250-871 250-872 

Clamping ring 211-001 211-002 211-003 

Centering ring 211-066 211-068 211-070 

Sealing valve with KF flange 250-877 250-878 250-879 

Sealing valve with tubing 250-874 250-875 250-876 


Conductance for molecular flow 

Vacuum lock l/s 3 8 13 

Sealing valve l/s 0.03 0.2 0.5 

Pressure absolute min. / max.mbar / bar 10 -8 / 5 10 -8 / 5 10 -8 / 5 

Travel of the vacuum lock mm 56 76 105 


Vacuum lock ¡C 60 60 60 

Sealing valve ¡C 100 100 100 

Housing of vacuum lock aluminum aluminum aluminum 


Sealing valve stainless steel stainless steel stainless steel 

Weight 

Vacuum lock kg 0.5 0.98 1.8 

Sealing valve kg 0.04 0.1 0.12 

Repair kit for 

Vacuum lock 215-048 215-088 215-158 

Sealing valve 215-049 215-089 215-159 

1 Vacuum lock 

2 Centering ring 

3 Clamping ring 

4 Sealing valve with KF flange 

5 Sealing valve with tubing 

DN A B C D E 

DN 16 ISO-KF 124 40 25 16 30 

DN 25 ISO-KF 160 50 31 25 30 

DN 40 ISO-KF 190 65 40 38 40 

B8 

B8.33

Vacuum Valves 

Ball Valves 

Ball Valves 

♦ Rugged and cost effective 

♦ Simple opening and closing by lever 


♦ Unobstructed passage 


Vacuum connection DN 10 ISO-KF DN 16 ISO-KF DN 25 ISO-KF DN 40 ISO-KF 


215-860 215-861 215-862 215-863 


Conductance for molecular flow l/s 60 130 350 550 

Pressure absolute min. / max. mbar / bar 10 -5 / 5 1) 10 -5 / 5 1) 10 -5 / 5 1) 10 -5 / 5 1) 


Housing, lever ¡C 80 80 80 80 

Housing brass brass brass brass 

nickel plated nickel-plated nickel-plated nickel-plated 

Seal PTFE PTFE PTFE PTFE 

Weight kg 0.35 0.4 0.75 2.6 

1) With outer centering ring and clamping element or chain clamp 

DN A B C 

DN 10 ISO-KF 75 80 68 

DN 16 ISO-KF 100 80 70 

DN 25 ISO-KF 130 110 83 

DN 40 ISO-KF 160 138 120 

B8.34

Vacuum Fittings 

Fittings and Ultra-High Components 

B9


Contents 

Components 

Seals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.3 

Pressure Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.3 

Stainless Steel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.3 

ISO-KF Ð Small Flange Components. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.4 

Connection Elements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.4 

Seals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.6 

Flanges. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.8 

Pipe Fittings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.9 

Bellows / Hose with Flanges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.11 

Transition Pieces. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.12 

Hose, Hose Connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.14 

Protective Lids . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.15 

ISO-K Ð Clamp Flange Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.16 

Connection Elements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.17 

Seals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.17 

Flanges. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.19 

Pipe Fittings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.20 

Bellows / Hose with Flanges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.21 



ISO-F Ð Fixed Flange Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.24 

UHV Ð CF Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.26 

Connection Elements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.26 

Seals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.27 

Flanges. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.29 

Pipe Fittings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.32 

Bellows / Hose with Flanges, Compensator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.33 



B9.2

General 


Seals 

Seal Material 

Temperature 

Reusable 

Elastomer 

NBR ¡C -30 Ð +90 Yes 

CR ¡C -40 Ð +100 Yes 

FPM ¡C -15 Ð +150 / +200 * Yes 

Metal 

Indium ¡C -196 Ð +60 Yes 

Aluminum ¡C -196 Ð +200 No 

Copper ¡C -196 Ð +200 No 

Silver-plated copper ¡C -270 Ð +450 No 

Gold-plated copper ¡C -270 Ð +450 No 

* Not guaranteed 

Code Designation 

Chemical Designation 

Typical Trade Name 

NBR Acrylonitrile-butadiene rubber Perbunan¨ 

CR Neoprene¨ Ñ 

FPM Fluorcaoutchouc Viton¨ 

Pressure Range 

Code Designation 

Pressure Range Tightness 

[mbar – bar] [mbar l/s] Centering Connection 

ISO-KF Aluminum 10 -7 Ð 2.5 10 -8 inside Clamping ring/rapid clamping ring 

10 -7 Ð 5 10 -8 outside Clamping ring/rapid clamping ring 

10 -7 Ð 10 10 -8 outside Clamping element/chain clamp 

Stainless steel 10 -8 Ð 2.5 10 -9 inside Clamping ring/rapid clamping ring 

10 -8 Ð 5 10 -9 outside Clamping ring/rapid clamping ring 

10 -8 Ð 10 10 -9 outside Clamping element/chain clamp 

ISO-K Stainless steel 10 -8 Ð 2.5 10 -9 inside Clamping screw, claw grips 

CF-F/R Stainless steel 10 -12 Ð 1 10 -9 Ñ Screws 

Stainless Steel 

German Material No. 

AISI 

SAE 

DIN Designation 

1.4301 304 X5CrNi 18 10 

1.4429 316 LN X2CrNiMoN 17 13 3 

1.4435 316 L X2CrNiMo 18 14 3 

1.4571 316 Ti X6CrNiMoTi 17 12 2 

B9 

B9.3


ISO-KF Small Flange Components 

ISO-KF Small 

Flange Components 

♦ Small flange fittings conform to Pneurop 6606/1981 and DIN 28403 

♦ Stainless steel fittings comply with the published specifications 

1 Small flange port 

2 Housing wall with threaded tap 

3 Claw grip 

4 Centering ring 

Nominal 

Diameter 

Number of 

A B C D Claw Grips 

DN 10 ISO-KF 30 12.2 12.2 45 4 

DN 16 ISO-KF 30 17.2 17.2 45 4 

DN 25 ISO-KF 40 26.2 26.2 55 4 

DN 40 ISO-KF 55 41.2 41.2 71 4 

DN 50 ISO-KF 75 52.4 52.4 91 4 


Clip 

Clamping Ring 

DN ... ISO-KF Ordering No. A B C 

Stainless steel, plastic 10 Ð 16 211-012 38 47 12 

20 Ð 25 211-013 48 57 12 

32 Ð 40 211-014 63 70 12 

Set of 5 pcs. 

For elastomer seal 

Clamping Ring 


Aluminum 10 Ð 16 211-001 45 61 16 

20 Ð 25 211-002 55 72 16 

32 Ð 40 211-003 70 90 18 

50 211-004 95 123 25 


Rapid 

Fastening Clamp 


Aluminum, plastic, steel 10 Ð 16 211-005 52 70 16 

20 Ð 25 211-006 61 81 16 

32 Ð 40 211-007 75 98 18 

B9.4




Hose Clip 

Clamping Ring DN ... ISO-KF Ordering No. A B C 

Aluminum, steel 10 Ð 16 211-016 42 54 16 

20 Ð 25 211-017 52 64 16 

32 Ð 40 211-018 67 79 16 

Installation with tool 


Clamping 

Element DN ... ISO-KF Ordering No. A B C 

Aluminum 10 Ð 16 211-008 52 Ð 18 

20 Ð 25 211-009 75 Ð 20 

32 Ð 40 211-010 90 Ð 23 

50 211-011 115 Ð 28 

Installation with tool 

For aluminum and elastomer seal 

Chain Clamp DN ... ISO-KF Ordering No. A B C 

Aluminum, stainless steel 10 Ð 16 211-021 71 52.5 18 

20 Ð 25 211-022 82 65 18 

32 Ð 40 211-023 98 79 18 

50 211-024 117 97.5 20 

For aluminum and elastomer seal 

Claw Grip 

DN ... ISO-KF Ordering No. A B C D E 

Aluminum, stainless steel 10 Ð 50 211-015 19.5 11.5 12.5 20 14 

Set of 4 pcs. 

B9 

B9.5



Seals 

Centering Ring 

DN ... ISO-KF Ordering No. A B C D 

CR / aluminum 10 211-051 12 10 8 3.9 

16 211-052 17 16 8 3.9 

20 211-053 22 20 8 3.9 

25 211-054 26 25 8 3.9 

32 211-055 34 32 8 3.9 

40 211-056 41 40 8 3.9 

50 211-057 52 50 8 3.9 

FPM / aluminum 10 211-058 12 10 8 3.9 

16 211-059 17 16 8 3.9 

20 211-060 22 20 8 3.9 

25 211-061 26 25 8 3.9 

32 211-062 34 32 8 3.9 

40 211-063 41 40 8 3.9 

50 211-064 52 50 8 3.9 

FPM / stainless steel 10 211-065 12 10 8 3.9 

16 211-066 17 16 8 3.9 

20 211-067 22 20 8 3.9 

25 211-068 26 25 8 3.9 

32 211-069 34 32 8 3.9 

40 211-070 41 40 8 3.9 

50 211-071 52 50 8 3.9 

External 

Centering Ring DN ... ISO-KF Ordering No. A B C D 

CR / aluminum 10 Ð 16 211-081 32 30.2 7 3.9 

20 Ð 25 211-082 42 40.2 7 3.9 

32 Ð 40 211-083 57 55.2 7 3.9 

50 211-084 77 75.2 7 3.9 

FPM / aluminum 10 Ð 16 211-085 32 30.2 7 3.9 

20 Ð 25 211-086 42 40.2 7 3.9 

32 Ð 40 211-087 57 55.2 7 3.9 

50 211-088 77 75.2 7 3.9 

Reducing 


DN ... ISO-KF/ 


CR / aluminum 10 / 16 211-072 17 10 12 8 3.9 

20 / 25 211-073 26 20 22 8 3.9 

32 / 40 211-074 41 32 34 8 3.9 

FPM / aluminum 10 / 16 211-075 17 10 12 8 3.9 

20 / 25 211-076 26 20 22 8 3.9 

32 / 40 211-077 41 32 34 8 3.9 

FPM / stainless steel 10 / 16 211-078 17 10 12 8 3.9 

20 / 25 211-079 26 20 22 8 3.9 

32 / 40 211-080 41 32 34 8 3.9 

B9.6



Seals 


with Filter 

DN ... ISO-KF Ordering No. A B C D Throughput * 

FPM / stainless steel 10 211-089 12 8 8 3.9 0.5 m 3 /h 

16 211-090 17 14 8 3.9 1.2 m 3 /h 

25 211-092 26 23 8 3.9 4.2 m 3 /h 

40 211-094 41 38 8 3.9 11.3 m 3 /h 

Filter: stainless steel, 

pore size 0.02 mm 

* Air at 20 ¡C, 200 mbar 

differential pressure 

50 211-095 52 48 8 3.9 18.1 m 3 /h 


with Fine Filter DN ... ISO-KF Ordering No. A B C D 

FPM / stainless steel 10 211-096 12 9 8 3.9 

16 211-097 17 13 8 3.9 

25 211-098 26 22 8 3.9 

40 211-099 41 35.5 8 3.9 

Filter: stainless steel, 

pore size 0.004 mm 

Degree of separation at 0.001 mm 

up to 98% 

50 211-100 52 45.7 8 3.9 

O-Ring DN ... ISO-KF Ordering No. A B 

CR 10 211-131 15 5 

16 211-132 18 5 

20 211-133 25 5 

25 211-134 28 5 

32 211-135 40 5 

40 211-136 42 5 

50 211-137 55 5 

FPM 10 211-138 15 5 

16 211-139 18 5 

20 211-140 25 5 

25 211-141 28 5 

32 211-142 40 5 

40 211-143 42 5 

50 211-144 55 5 

Indium Seal 


Stainless steel, aluminum 10 Ð 16 211-162 32 18 30 3.9 7 

20 Ð 25 211-163 42 28 40 3.9 7 

32 Ð 40 211-164 57 43 55 3.9 7 

50 211-165 77 63 75 3.9 7 

Indium: -196 Ð +60 ¡C 

B9 

B9.7



Seals 

Aluminum Seal 

Set of 3 pcs. 

With chain clamp, clamping element 

With 

DN ... ISO-KF Ordering No. A B C D Support Ring 

10 Ð 16 211-167 25.6 19.6 4.5 22.6 211-171 

20 Ð 25 211-168 35.6 29.6 4.5 32.6 211-172 

32 Ð 40 211-169 50.6 44.6 4.5 47.6 211-173 

50 211-170 65.6 59.6 4.5 62.6 211-174 

Support Ring for 

Aluminum Seal 

For 

DN ... ISO-KF Ordering No. A B Aluminum Seal 

Stainless steel 10 Ð 16 211-171 32 7 211-167 

20 Ð 25 211-172 42 7 211-168 

32 Ð 40 211-173 57 7 211-169 

50 211-174 77 7 211-170 

Reusable 

Flanges 

Blank Flange DN ... ISO-KF Ordering No. A 

Aluminum 10 211-176 5 

16 211-177 5 

25 211-178 5 

40 211-179 5 

50 211-180 6 

Stainless steel 10 211-181 5 

16 211-182 5 

25 211-183 5 

40 211-184 5 

50 211-185 6 

Flange with 

Tube, Short 


Steel 10 211-201 20 12 16 

16 211-202 20 16 20 

25 211-203 20 26 30 

40 211-204 20 41 45 

50 211-205 20 51 55 

Stainless steel 10 211-211 20 12 16 

16 211-212 20 16 20 

25 211-213 20 26 30 

40 211-214 20 41 45 

50 211-215 20 50 54 

B9.8



Flanges 

Flange with 

Tube, Long DN ... ISO-KF Ordering No. A B C 

Steel 10 211-206 70 12 16 

16 211-207 70 16 20 

25 211-208 70 26 30 

40 211-209 70 41 45 

50 211-210 70 51 55 


16 211-217 70 16 20 

25 211-218 70 26 30 

40 211-219 70 41 45 

50 211-220 70 50 54 

Pipe Fittings 

Elbow 90° 

DN ... ISO-KF Ordering No. A B 

Aluminum 10 211-251 30 12 

16 211-252 40 16 

25 211-253 50 25 

40 211-254 65 39 

Stainless steel 10 211-286 30 9 

16 211-287 40 15 

25 211-288 50 25 

40 211-289 65 40.5 

50 211-290 70 49 

Elbow 135° DN ... ISO-KF Ordering No. A B C 


25 211-308 32 68.8 25 

40 211-309 40 87.7 37 

Tee DN ... ISO-KF Ordering No. A B C 

Aluminum 10 211-261 30 60 12 

16 211-262 40 80 16 

25 211-263 50 100 25 

40 211-264 65 130 39 


16 211-292 40 80 16 

25 211-293 50 100 25 

40 211-294 65 130 40.5 

50 211-295 70 140 53 

B9 

B9.9



Pipe Fittings 

Cross DN ... ISO-KF Ordering No. A B C 

Aluminum 10 211-266 30 60 12 

16 211-267 40 80 16 

25 211-268 50 100 25 

40 211-269 65 130 39 


16 211-297 40 80 16 

25 211-298 50 100 25 

40 211-299 65 130 40.5 

50 211-300 70 140 53 

Reducing Cross 

DN ... ISO-KF Ordering No. A B C D E F 

Aluminum 25 211-271 35 70 35 70 25 16 

40 211-272 40 80 45 90 39 16 

Stainless steel 25 211-301 35 70 35 70 25 17 

40 211-302 40 80 45 90 40.5 16 

50 211-303 50 100 50 100 53 16 

Intermediate 

Piece 

DN ... ISO-KF Ordering No. A B 

Aluminum 16 211-227 80 16 

25 211-228 100 25 

40 211-229 130 40 


25 211-278 100 25 

40 211-279 130 40.5 

50 211-280 140 53 

Reducer ISO-KF / ISO-KF Ordering No. A B 

Aluminum 25 / 16 211-231 40 16 

40 / 16 211-232 40 16 

40 / 25 211-233 40 25 

50 / 40 211-234 40 40 

Stainless steel 25 / 16 211-281 40 16 

40 / 16 211-282 40 16 

40 / 25 211-283 40 26 

50 / 40 211-284 40 40 

B9.10



Bellows /Hose with Flanges 

Bellows 

Deviation from 

DN ... ISO-KF Ordering No. A B C axis max. 

Stainless steel 10 211-326 70 3.5 3 23¡ 

16 211-327 70 6.4 4.1 21¡ 

25 211-328 80 8 5 17¡ 

40 211-329 100 11 7 15¡ 

50 211-330 100 10 6 15¡ 

A = unstressed length 

Metal Hose DN ... ISO-KF Ordering No. A B C 


10 211-332 500 70 32 

10 211-333 750 70 32 

10 211-334 1000 70 32 

16 211-335 250 70 50 

16 211-336 500 70 50 

16 211-337 750 70 50 

16 211-338 1000 70 50 

25 211-339 250 100 60 

25 211-340 500 100 60 

25 211-341 750 100 60 

25 211-342 1000 100 60 

40 211-343 250 130 100 

40 211-344 500 130 100 

40 211-345 750 130 100 

40 211-346 1000 130 100 

50 211-347 250 200 130 

50 211-348 500 200 130 

50 211-349 750 200 130 

50 211-350 1000 200 130 

B = radius for multiple bending 

C = radius for single bend 

Metal Hose, 

High Flexible DN ... ISO-KF Ordering No. A B C 


16 211-516 500 40 25 

25 211-519 250 55 36 

25 211-520 500 55 36 

40 211-523 250 90 60 

40 211-524 500 90 60 

50 211-527 250 100 65 

50 211-528 500 100 65 



B9 

B9.11




PVC Hose 

With steel spiral, 

aluminum hose nipple 

Temperature: -10 Ð +60 ¡C 


16 211-406 500 65 130 

16 211-407 1000 65 130 

25 211-408 500 100 200 

25 211-409 1000 100 200 

40 211-410 500 130 260 

40 211-411 1000 130 260 



Transition Pieces 

Adaptor 

ISO-KF / ISO-K ISO-KF / ISO-K Ordering No. A 

Aluminum 40 / 63 212-171 40 

50 / 63 212-172 45 

Stainless steel 40 / 63 212-173 40 

50 / 63 212-174 45 

40 / 100 212-175 40 

Adaptor 

ISO-KF / CF ISO-KF / CF Ordering No. A B 

Stainless steel 16 / 16 213-251 35 16 

25 / 16 213-252 35 16 

16 / 40 213-254 30 16 

25 / 40 213-255 30 26 

40 / 40 213-256 50 37 

40 / 63 213-259 35 41 

Adaptor ISO-KF / 

VRC-Female 

ISO-KF / VCR Ordering No. A 

Stainless steel 16 / 1/4" 211-359 35.8 

25 / 1/4" 211-480 35.8 

25 / 1/2" 211-360 40.6 

40 / 3/4" 211-361 53.3 

B9.12




Adaptor ISO-KF / 

VRC-male 

ISO-KF / VCR Ordering No. A 

Stainless steel 16 / 1/4" 211-362 35.8 

25 / 1/4" 211-481 35.8 

25 / 1/2" 211-363 40.6 

40 / 3/4" 211-364 53.3 

Adaptor ISO-KF/ 

Swagelok 

ISO-KF / DN Ordering No. A B 

Stainless steel 16 / 6 mm 211-356 37 15.3 

25 / 10 mm 211-357 45 17.2 

40 / 16 mm 211-358 53 24.4 

16 / 1/8" 211-476 34.5 12.7 

25 / 1/4" 211-477 37 15.3 

40 / 1/4" 211-478 37 15.3 

40 / 1/2" 211-479 47.5 22.8 

Glass Tube 

Connection DN ... ISO-KF Ordering No. A B C D 

Aluminum, FPM 10 211-351 50 8 10 30 

40 211-353 65 22 26 45 

Glass = Pyrex 

Screw-in 

Flange ISO-KF / DN Ordering No. A B C D 

Stainless steel, FPM 10 / G 3/8" 211-366 35 15 G 3/8" 12 

16 / G 1/2" 211-367 35 15 G 1/2" 16 

25 / G 1" 211-368 45 25 G 1" 25 

40 / G 1 1/2" 211-369 50 30 G 1 1/2" 41 

Screw-on 

Flange ISO-KF / DN Ordering No. A B C D 

Stainless steel, FPM 10 / G 3/8" 211-376 35 15 G 3/8" 10 

16 / G 1/2" 211-377 35 15 G 1/2" 15 

25 / G 1" 211-378 45 25 G 1" 24 

40 / G 1 1/2" 211-379 50 30 G 1 1/2" 38 

B9 

B9.13



Hose, Hose Connection 

Hose Adaptor 

90° 

DN ... ISO-KF Ordering No. A B C D 

Aluminum 16 211-257 40 40 16 13 

25 211-258 50 50 25 22 

40 211-259 65 65 40 37 

C = nominal connection 

for sleeve / hose 

Hose Adaptor 

for Rubber Hose 


Aluminum 16 211-387 40 7 12 

25 211-388 40 7 12 

40 211-389 40 7 12 


25 211-393 40 7 12 

40 211-394 40 7 12 

C = nominal connection for hose 

Hose 

Connection DN ... ISO-KF Ordering No. A B C 

Aluminum 25 211-401 40 13 16 

16 211-402 40 13 16 

25 211-403 40 22 25 

40 211-404 40 37 40 

C = nominal connection 

for sleeve / hose 

Sleeve with 

Hose Clamp 

DN Ordering No. A B C D E 

CR, stainless steel 16 211-417 58 7 14 16 44 

25 211-418 60 9 16 25 50 

40 211-419 64 13 20 40 68 

Hose Clamp DN Ordering No. A B 


25 211-462 19 44 

40 211-463 29 76 

B9.14



Hose, Hose Connection 

PVC Hose DN Ordering No. A B C 

Without spiral 12 211-441 21 10 Ð 

With spiral 16 211-442 23 16 130 

25 211-443 33 25 200 

40 211-444 53 40 260 

For vacuum application 

Give length in meters 

Rubber Hose DN Ordering No. A B 

For vacuum application 

Give length in meters 

Hardness: 55 ± 5 Shore A 

Temperature: -30 Ð +85 ¡C 

10 211-451 17 7 

16 211-452 25 10 

20 211-453 32 16 

Protective Lids 

Protective Lid DN ... ISO-KF Ordering No. A B C 

Polyethylene 10 - 16 211-427 32 29 7.5 

20 - 25 211-428 42 39 7.5 

32 - 40 211-429 57 54 7.5 

50 211-430 77 74 7.5 

B9 

B9.15


ISO-K Clamp Flange Components 

ISO-K Clamp 


♦ Clamping flange fittings conform to Pneurop 6606/1981 and DIN 28404 


Nominal Diameter 

Number of Screws of Number of 

A B C Clamping Screws D Claw Grip Claw Grip 

DN 63 ISO-K 95 70 12 4 110 M 8 x 35 4 

DN 80 ISO-K 110 83 12 4 125 M 8 x 35 8 

DN 100 ISO-K 130 102 12 4 145 M 8 x 35 8 

DN 160 ISO-K 180 153 12 4 200 M 10 x 35 8 

DN 200 ISO-K 240 213 12 6 260 M 10 x 35 12 

DN 250 ISO-K 290 261 12 6 310 M 10 x 35 12 

DN 320 ISO-K 370 318 17 8 395 M 12 x 50 12 

DN 400 ISO-K 450 400 17 8 480 M 12 x 50 16 

DN 500 ISO-K 550 501 17 12 580 M 12 x 50 16 

DN 630 ISO-K 690 651 22 12 720 M 12 x 55 20 

1 Clamp flange 

2 Claw grip 

3 Base plate 

4 Claw grip 


Clamp DN ... ISO-K Ordering No. A B C 

Steel zinc plated 63 Ð 250 212-225 60 17 27 

320 Ð 500 212-226 78 27 39 

630 212-227 88 31 49 

Stainless steel 63 Ð 250 212-228 60 17 27 

320 Ð 500 212-229 78 27 39 

630 212-230 88 31 49 

Set of 4 pcs. 

B9.16




Claw DN ... ISO-K Ordering No. A B C 

Clamping flange / base plate 63 Ð 100 212-231 22.5 35 13.9 

160 Ð 250 212-232 23 35 13.9 

320 Ð 500 212-233 36.5 50 20.6 

630 212-234 41.5 55 25.6 

Clamping flange / 63 Ð 100 212-235 18.6 30 10 

base plate with groove 160 Ð 250 212-236 19 35 10 

320 Ð 500 212-237 31 45 15 

630 212-233 36.5 50 20.6 

Clamping flange with 63 Ð 100 212-247 20.6 30 12 

groove / base plate 160 Ð 250 212-248 21.1 35 12 

320 Ð 500 212-249 33.9 45 18 

630 212-233 36.5 50 20.6 

Steel zinc plated 

Set of 4 pcs. 

Seals 


DN ... ISO-K Ordering No. A B C D 

CR / aluminum 63 212-251 96 70 3.9 8 

80 212-091 109 83 3.9 8 

100 212-252 128 102 3.9 8 

160 212-253 179 153 3.9 8 

200 212-254 239 213 3.9 8 

250 212-255 287 261 3.9 8 

320 212-256 358 318 5.6 14 

400 212-257 440 400 5.6 14 

500 212-258 541 501 5.6 14 

630 212-259 691 651 5.6 14 

FPM / aluminum 63 212-261 96 70 3.9 8 

80 212-092 109 83 3.9 8 

100 212-262 128 102 3.9 8 

160 212-263 179 153 3.9 8 

200 212-264 239 213 3.9 8 

250 212-265 287 261 3.9 8 

320 212-266 358 318 5.6 14 

400 212-267 440 400 5.6 14 

500 212-268 541 501 5.6 14 

630 212-269 691 651 5.6 14 

800 212-270 840 800 5.6 14 

1000 212-271 1040 1000 5.6 14 

FPM / stainless steel 63 212-281 96 70 3.9 8 

80 212-093 109 83 3.9 8 

100 212-282 128 102 3.9 8 

160 212-283 179 153 3.9 8 

200 212-284 239 213 3.9 8 

250 212-285 287 261 3.9 8 

Outer ring aluminum 

B9 

B9.17



Seals 


with Fine Filter DN ... ISO-K Ordering No. A B C D 

FPM / stainless steel 63 212-291 62 69.8 3.9 8 

100 212-292 94 101.8 3.9 8 

Filter: Stainless steel 

Pore size 0.004 mm 

Degree of separation at 

0.001 mm up to 98% 

O-Ring DN ... ISO-K Ordering No. A B 

CR 63 212-351 75.6 5.3 

80 212-097 88.3 5.3 

100 212-352 107.3 5.3 

160 212-353 158.1 5.3 

200 212-354 208.9 5.3 

250 212-355 253.4 5.3 

320 212-356 329.6 7 

400 212-357 405.3 7 

500 212-358 506.9 7 

630 212-359 658.9 7 

FPM 63 212-361 75.6 5.3 

80 212-098 88.3 5.3 

100 212-362 107.3 5.3 

160 212-363 158.1 5.3 

200 212-364 208.9 5.3 

250 212-365 253.4 5.3 

320 212-366 329.6 7 

400 212-367 405.3 7 

500 212-368 506.9 7 

630 212-369 658.9 7 

800 212-370 808 7 

1000 212-371 1006 7 

Aluminum Seal 

DN ... ISO-K Ordering No. A B C D E 

63 212-301 85.6 83 69.8 2.6 4.5 

100 212-302 116.6 114 101.8 2.6 4.5 

160 212-303 166.6 164 152.8 2.6 4.5 

250 212-305 276.6 274 260.8 2.6 4.5 

B9.18



Flanges 

Blank Flange DN ... ISO-K Ordering No. A B 

Steel nickel plated 63 212-001 95 12 

100 212-002 130 12 

160 212-003 180 12 

250 212-005 290 12 

320 212-006 370 17 

400 212-007 450 17 

500 212-008 550 17 

630 212-009 690 22 


80 212-076 110 12 

100 212-012 130 12 

160 212-013 180 12 

200 212-014 240 12 

250 212-015 290 12 

320 212-016 370 17 

400 212-017 450 17 

500 212-018 550 17 

630 212-019 690 22 

Welding Flange 


Steel 63 212-021 95 76.1 70.3 12 6 

100 212-022 130 108 102.2 12 6 

160 212-023 180 159 153.2 12 6 

250 212-025 290 267 261 12 6 

Stainless steel 63 212-031 95 76.1 71.5 12 6 

80 212-078 110 88.9 84.9 12 6 

100 212-032 130 108 102 12 6 

160 212-033 180 159 155 12 6 

200 212-034 240 219.1 213.9 12 6 

250 212-035 290 267 261 12 6 

B9 

B9.19



Flanges 

Flange 

with Tube 

DN ... ISO-K Ordering No. A B C 

Steel 63 212-041 100 76.1 70.3 

100 212-042 100 108 102.2 

160 212-043 100 159 153.2 

250 212-045 100 267 261 

320 212-046 100 324 318 

400 212-047 100 406 400 

500 212-048 100 508 500 

630 212-049 100 660 650 

Stainless steel 63 212-051 100 76.1 71.5 

100 212-052 100 108 104 

160 212-053 100 159 155 

200 212-054 100 219.1 213.1 

250 212-055 100 267 261 

320 212-056 100 324 318 

400 212-057 100 406 400 

500 212-058 100 508 500 

630 212-059 100 660 650 

Pipe Fittings 

Elbow 90° 

DN ... ISO-K Ordering No. A B 


100 212-102 108 100 

160 212-103 138 150 

250 212-105 208 250 

Tee 



100 212-112 108 100 

160 212-113 138 150 

250 212-115 208 250 

Reducer DN ... ISO-K Ordering No. A 


100 / 63 212-161 50 

250 / 200 212-170 50 

B9.20



Pipe Fittings 

Cross 



100 212-122 108 100 

160 212-123 138 150 

250 212-125 208 250 

Reducing Cross 


Stainless steel 63 212-131 88 44 66 64 59 

100 212-132 100 50 82 80 77 

160 212-133 100 50 107 107 105 


Bellows 

Deviation from 

DN ... ISO-K Ordering No. A B C D Axis Max. 

Stainless steel 63 212-201 132 20 20 66 30¡ 

100 212-202 132 28 28 95 30¡ 

160 212-203 150 22 22 153 14¡ 

250 212-205 200 30 30 261 13¡ 


Metal Hose DN ... ISO-K Ordering No. A B C 


63 212-212 500 250 160 

63 212-213 750 250 160 

63 212-214 1000 250 160 

100 212-215 250 370 240 

100 212-216 500 370 240 

100 212-217 750 370 240 

100 212-218 1000 370 240 


C = radius for single bending 

B9 

B9.21




Adaptor Flange ISO-K / ISO-F Ordering No. A 


160 / 100 212-153 25 

200 / 100 212-155 20 

200 / 160 212-156 25 

250 / 160 212-159 22 

Adaptor ISO-K / ISO-KF Ordering No. A 

Aluminum 63 / 40 212-171 40 

63 / 50 212-172 45 


63 / 50 212-174 45 

100 / 40 212-175 40 

Adaptor 

ISO-K / CF-F Ordering No. A B C 

Stainless steel 63 / 63 213-271 90 1 1 

100 / 100 213-272 90 1 1 

160 / 160 213-273 90 1.5 1.5 

Sleeve 

Connection 


Aluminum 63 212-181 51 76 

100 212-182 56 107 

160 212-183 56 156 

Sleeve with 

Hose Clamp 


CR, stainless steel 63 212-186 70 14 24 75 120 

100 212-187 72 8 26 106 150 

160 212-188 72 8 26 155 200 

B9.22





DN ... ISO-K Ordering No. A B C 

Polyethylene 63 212-311 102 95 18 

100 212-312 137 130 18 

160 212-313 187 180 18 

200 212-314 248 240 18.5 

250 212-315 297.5 290 18.5 

320 212-316 380 370 23.5 

400 212-317 461 450 23.5 

500 212-318 557 550 24 

630 212-319 697 690 29 

B9 

B9.23


ISO-F Fixed Flange Components 

ISO-F Fixed 


1 Clamp flange 

2 Collar flange 

3 Fixed flange 


A B C Number of Holes Screws for Fixed Flange 

DN 63 ISO-F 70 130 110 4 M 8 x 40 

DN 100 ISO-F 102 165 145 8 M 8 x 40 

DN 160 ISO-F 153 225 200 8 M 10 x 50 

DN 200 ISO-F 213 285 260 12 M 10 x 50 

DN 250 ISO-F 261 335 310 12 M 10 x 50 

DN 320 ISO-F 318 425 395 12 M 12 x 65 

DN 400 ISO-F 400 510 480 16 M 12 x 65 

DN 500 ISO-F 501 610 580 16 M 12 x 65 

DN 630 ISO-F 651 750 720 20 M 12 x 80 

DN 800 ISO-F 800 920 890 24 M 12 x 70 

DN 1000 ISO-F 1000 1120 1090 32 M 12 x 70 

Collar Flange 

with 

Retaining Ring DN ... ISO-F Ordering No. A B C 

Steel nickel plated 63 212-061 12 95.5 130 

100 212-062 12 130.5 165 

160 212-063 16 180.7 225 

200 212-064 16 240.7 285 

250 212-065 16 290.7 335 

320 212-066 20 370.8 425 

400 212-067 20 450.8 510 

500 212-068 20 550.8 610 

630 212-069 24 691 750 

Adaptor Flange 

ISO-K / ISO-F 

ISO-K / ISO-F Ordering No. A 


160 / 100 212-153 25 

200 / 100 212-155 20 

200 / 160 212-156 25 

250 / 160 212-159 22 

B9.24

ISO-F Fixed Flange Components 


Measurement 

Flange 

DN ... ISO-F Ordering No. A B C 

Aluminum 100 212-142 30 165 M 8 

160 212-143 30 225 M 10 

Stainless steel 63 212-146 30 130 M 8 

100 212-147 30 165 M 8 

160 212-148 30 225 M 10 

* Claw grip DN 16 ISO-KF included 

Set of 

Hexagon Bolts 

DN ... ISO-F Ordering No. A B Set of 

Steel zinc plated 63 Ð 100 212-241 40 8 8 pcs. 

160 Ð 250 212-242 50 10 12 pcs. 

320 Ð 500 212-243 70 12 16 pcs. 

630 212-244 80 12 20 pcs. 

Sealing Disk DN ... ISO-F Ordering No. A B 

Aluminum / CR 63 212-321 73 3.9 

100 212-322 107 3.9 

160 212-323 160 3.9 

250 212-325 270 3.9 

320 212-326 330 5.6 

400 212-327 415 5.6 

500 212-328 515 5.6 

630 212-329 656 5.6 

800 212-330 825 5.6 

1000 212-331 1025 5.6 

O-Ring DN ... ISO-F Ordering No. A B 

CR 63 212-333 80 5 

100 212-334 110 5 

160 212-335 165 5 

250 212-337 265 5 

320 212-338 325 8 

400 212-339 412 8 

500 212-340 510 8 

630 212-341 640 8 

800 212-342 820 8 

1000 212-343 1023 8 

B9 

B9.25


UHV CF Components 


♦ CF flanges conform to Conflat¨ flange specifications and conform to 

the international standard 



A O.D. B C D E Number of Holes 

DN 16 CF 34 1 1/3" 27 Ð 4.3 1.2 6 

DN 40 CF 69.5 2 3/4" 58.7 Ð 6.6 1.2 6 

DN 63 CF 113.5 4 1/2" Ð 92.2 8.4 1.2 8 

DN 100 CF 152 6" Ð 130.3 8.4 1.2 16 

DN 160 CF 202.5 8" Ð 181 8.4 1.2 20 

DN 200 CF 253 10" Ð 231.8 8.4 1.2 24 

DN 250 CF 305 12" Ð 284 8.4 1.2 32 

DN 300 CF 368 14 1/2" Ð 338.1 10.5 1.2 32 

DN 350 CF 419 16 1/2" Ð 388.9 10.5 1.2 36 


Hexagonal Bolts 

with Nuts 

Required Torque 

DN ... CF Ordering No. A B Set of (lubricated) 

16 213-401 20 3.2 25 x M 4 4 Nm 

40 213-402 35 5 25 x M 6 10 Nm 

63 213-403 45 6.5 25 x M 8 20 Nm 

100 213-404 50 6.5 25 x M 8 20 Nm 

160 213-405 55 6.5 25 x M 8 20 Nm 

200 Ð 250 213-406 60 6.5 25 x M 8 20 Nm 

300 213-408 70 8 34 x M 10 30 Nm 

350 213-409 70 8 38 x M 10 30 Nm 

B9.26




Hexagon Bolts 

without Nuts 


DN ... CF Ordering No. A Set of (lubricated) 

16 213-411 16 25 x M 4 4 Nm 

40 213-412 25 25 x M 6 10 Nm 

63 Ð 160 213-413 35 25 x M 8 20 Nm 

Hexagon Bolts 

with Duo Nuts 

Screws/ Required Torque 

DN ... CF Ordering No. A B C Duo Nuts (lubricated) 

16 213-421 20 7 4 6 x M 4 / 3 4 Nm 

40 213-422 35 10 5 6 x M 6 / 3 10 Nm 

63 213-423 45 12 8 8 x M 8 / 3 20 Nm 

100 213-424 50 12 8 16 x M 8 / 8 20 Nm 

160 213-425 55 12 8 20 x M 8 / 10 20 Nm 

Set of 

Stud Screws 


DN ... CF Ordering No. A Set of (lubricated) 

16 213-431 20 6 x M 4 4 Nm 

40 213-432 35 6 x M 6 10 Nm 

63 Ð 100 213-433 45 16 x M 8 20 Nm 

Thread 

Lubricant 

Ordering No. Temperature Resistant 

C100 28 g 214-231 1000 ¡C 

Remains fully effective for at 

least 10 bakeout cycles 

Seals 

Copper Gasket 

DN ... CF Ordering No. A B C Number 

Premium quality 16 213-371 2 21.3 16.2 10 pcs. 

Diamond surface finish 40 213-372 2 48.1 36.8 10 pcs. 

Individual packaging 63 213-373 2 82.4 63.6 10 pcs. 

100 213-374 2 120.5 101.7 10 pcs. 

160 213-375 2 171.3 152.5 10 pcs. 

200 213-376 2 222.1 203.3 10 pcs. 

250 213-377 2 272.7 254 5 pcs. 

Standard quality 16 213-451 2.1 21.3 16.2 10 pcs. 

40 213-452 2.1 48.1 39 10 pcs. 

63 213-453 2.1 82.4 63.6 10 pcs. 

100 213-454 2.1 120.5 101.8 10 pcs. 

160 213-455 2.1 171.3 152.6 10 pcs. 

200 213-456 2.1 222.1 203.4 10 pcs. 

300 213-458 2.1 326.2 307 1 pcs. 

350 213-459 2.1 376.5 357 1 pcs. 

B9 

B9.27



Seals 

Copper Gasket, 

Silver Plated 




Individual packaging 63 213-383 2 82.4 63.6 10 pcs. 

100 213-384 2 120.5 101.7 10 pcs. 

160 213-385 2 171.3 152.5 5 pcs. 

200 213-386 2 222.1 203.3 5 pcs. 

250 213-387 2 272.7 254 5 pcs. 

Copper Gasket, 

Gold Plated 




Individual packaging 

FPM Seal 

DN ... CF Ordering No. A B C D Number 

16 213-391 2 21 16 Ð 5 pcs. 

40 213-392 2.5 48.2 42 Ð 5 pcs. 

63 213-393 3.2 82.7 69.7 2.5 2 pcs. 

100 213-394 3.2 119.8 107.8 2.5 2 pcs. 

160 213-395 3.2 171.7 156 2.5 2 pcs. 

200 213-396 3.2 222.5 206 2.5 2 pcs. 

FPM Seal with 

Support Ring 

DN ... CF Ordering No. A B C D Number 

250 213-397 5 266.5 248.3 256.2 1 pcs. 

B9.28



Flanges 

Blank Flange 

DN ... CF-F Ordering No. A B C 

1.4301 (AISI 304) 16 213-001 7.5 14 1.4 

40 213-002 13 38 1.4 

63 213-003 17.5 66 1.4 

100 213-004 20 104 1.4 

160 213-005 22 155 1.4 

200 213-006 24.5 205 1.4 

250 213-007 24.5 256 1.4 

1.4435 (AISI 316L) 300 213-008 28.5 306 1.4 

350 213-009 28.5 356 1.4 

1.4429 (AISI 316LN) 16 213-101 7.5 14 1.4 

40 213-102 13 38 1.4 

63 213-103 17.5 66 1.4 

100 213-104 20 104 1.4 

160 213-105 22 155 1.4 

200 213-106 24.5 205 1.4 

250 213-107 24.5 256 1.4 

Blank Flange, 

Rotatable 

DN ... CF-R Ordering No. A B C D E 

1.4301 (AISI 304) 16 213-011 7.5 5.8 18.6 14 1.4 

40 213-012 13 7.6 41 38 1.4 

63 213-013 17.5 12.6 71 66 1.4 

100 213-014 20 14.3 109 104 1.4 

160 213-015 22 15.8 160 155 1.4 

200 213-016 24.5 17.1 206 205 1.4 

250 213-017 24.5 18 257 256 1.4 

1.4429 (AISI 316LN) 16 213-111 7.5 5.8 18.6 14 1.4 

40 213-112 13 7.6 41 38 1.4 

63 213-113 17.5 12.6 71 66 1.4 

100 213-114 20 14.3 109 104 1.4 

160 213-115 22 15.8 160 155 1.4 

200 213-116 24.5 17.1 206 205 1.4 

250 213-117 24.5 18 257 256 1.4 

Outer ring 1.4301 (AISI 304) 

B9 

B9.29



Flanges 


DN ... CF-F Ordering No. A B C D E 

1.4301 (AISI 304) 16 213-021 7.5 3.3 17.2 18 1 

40 213-022 13 7.5 39.5 40 1.5 

63 213-023 17.5 8 66 70 2 

100 213-024 20 9 104 108 2 

160 213-025 22 10 155 159 2 

200 213-026 24.5 12 205 205 2.5 

250 213-027 24.5 12 256 256 3 

1.4435 (AISI 316L) 300 213-028 28.5 15.8 306 306 3 

350 213-029 28.5 15.8 356 356 3 

1.4429 (AISI 316LN) 16 213-121 7.5 3.3 17.2 18 1 

40 213-122 13 7.5 39.5 40 1.5 

63 213-123 17.5 8 66 70 2 

100 213-124 20 9 104 108 2 

160 213-125 22 10 155 159 2 

200 213-126 24.5 12 205 205 2.5 

250 213-127 24.5 12 256 256 3 

Welding Flange, 

Rotatable 

DN ... CF-R Ordering No. A B C D E 

1.4301 (AISI 304) 16 213-041 7.5 3.3 17.2 18 1 

40 213-042 13 7.5 39.5 40 1.5 

63 213-043 17.5 8 66 70 2 

100 213-044 20 9 104 108 2 

160 213-045 22 10 155 159 2 

200 213-046 24.5 12 205 205 2.5 

250 213-047 24.5 12 256 256 3 

1.4429 (AISI 316LN) 16 213-141 7.5 3.3 17.2 18 1 

40 213-142 13 7.5 39.5 40 1.5 

63 213-143 17.5 8 66 70 2 

100 213-144 20 9 104 108 2 

160 213-145 22 10 155 159 2 

200 213-146 24.5 12 205 205 2.5 

250 213-147 24.5 12 256 256 3 

Outer ring 1.4301 (AISI 304) 


with 

Tapped Holes 

DN ... CF-F Ordering No. A B C D E 

1.4301 (AISI 304) 16 213-031 7.5 3.3 17.2 18 1 6 x M 4 

40 213-032 13 7.5 39.5 40 1.5 6 x M 6 

63 213-033 17.5 8 66 70 2 8 x M 8 

100 213-034 20 9 104 108 2 16 x M 8 

160 213-035 22 10 155 159 2 20 x M 8 

B9.30



Flanges 


for Gauge 

DN ... CF-F Ordering No. A B C D E F G H 

1.4301 (AISI 304) 40 213-092 24 17 38 69.5 1.75 48 10 4 

Flange with Tube 

DN ... CF-F Ordering No. A B C D 

1.4301 (AISI 304) 16 213-051 38 17.2 18 1 

40 213-052 63 39.5 40 1.6 

63 213-053 105 66 70 2 

100 213-054 135 104 108 2 

160 213-055 167 155 159 2 

Flange with 

Tube, Rotatable 

DN ... CF-R Ordering No. A B C D 

1.4301 (AISI 304) 16 213-061 38 17.2 18 1 

40 213-062 63 39.5 40 1.6 

63 213-063 105 66 70 2 

100 213-064 135 104 108 2 

160 213-065 167 155 159 2 

Reducing Flange 

CF / CF 


1.4301 (AISI 304) 40 / 16 213-071 13 16 22 5.5 6 x M 4 

63 / 40 213-073 17.5 39 50 9 6 x M 6 

100 / 40 213-075 20 39 55 9 6 x M 6 

100 / 63 213-076 20 66 85 11 8 x M 8 

160 / 40 213-078 22 39 60 9 6 x M 6 

160 / 63 213-079 24 66 85 13 8 x M 8 

160 / 100 213-080 22 104 120 11 16 x M 8 

1.4429 (AISI 316LN) 40 / 16 213-171 13 16 22 5.5 6 x M 4 

63 / 40 213-173 17.5 39 50 9 6 x M 6 

100 / 40 213-175 20 39 55 9 6 x M 6 

100 / 63 213-176 20 66 85 11 8 x M 8 

160 / 40 213-178 22 39 60 9 6 x M 6 

160 / 100 213-180 22 104 120 11 16 x M 8 

B9 

B9.31



Pipe Fittings 

Intermediate 

Piece 

DN ... CF Ordering No. A B C D 

1.4301 (AISI 304) 16 213-201 76 0.5 0.5 16 

40 213-202 126 1 1 37 

63 213-203 210 1 1 66 

100 213-204 270 1 1 104 

160 213-205 334 1.5 1.5 155 

Intermediate 

Piece, Insulated 

Surface 

DN ... CF Ordering No. A B C D E F Leakage* 

1.4301 (AISI 304 ) 40 213-212 70 1 1 25 30 34.5 44 mm 

Al 2 O 3 63 213-213 90 1 1 53 45 66 65 mm 

Bakeout temperature: 350 ¡C 

Transition insulator/flange: FeNi 

* 20 kV at 10 -4 mbar 

Reducer 

CF / CF 


1.4301 (AISI 304) 40 / 16 213-221 45 1 1 16 

63 / 40 213-223 75 1 1 37 

100 / 40 213-225 75 1 1 37 

100 / 63 213-226 95 1 1 66 

160 / 100 213-230 105 1.5 1.5 104 

Elbow 90° 


1.4301 (AISI 304) 16 213-301 38 0.5 0.5 15 

40 213-302 63 0.5 0.5 38 

63 213-303 105 1 1 66 

100 213-304 135 1 1 100 

160 213-305 167 1.5 1.5 150 

Tee DN ... CF Ordering No. A B C D 

1.4301 (AISI 304) 16 213-311 38 0.5 0.5 15 

40 213-312 63 0.5 0.5 38 

63 213-313 105 1 1 66 

100 213-314 135 1 1 100 

160 213-315 167 1.5 1.5 150 

B9.32



Pipe Fittings 

Cross DN ... CF Ordering No. A B C D 

1.4301 (AISI 304) 16 213-321 38 0.5 0.5 15 

40 213-322 63 0.5 0.5 38 

63 213-323 105 1 1 66 

100 213-324 135 1 1 100 

160 213-325 167 1.5 1.5 150 

Double 

Cross-Piece 


1.4301 (AISI 304) 40 213-332 63 0.5 0.5 38 

3 rotatable 63 213-333 105 1 1 66 

3 fix 100 213-334 135 1 1 100 

160 213-335 167 1.5 1.5 150 

Reducing 

Cross 

DN ... CF Ordering No. A B C D E F 

1.4301 (AISI 304) 100 213-342 135 1 1 67.5 106 84 

Bellows /Hose With Flanges, Compensator 

Compensator 

Angular 

Deviation 

DN...CF-F OrderingNo. A B C D E F Max. 

Flange 40 213-346 120 10 0 36.8 100 10 10¡ 

1.4301 (AISI 304) 63 213-347 130 20 0 62 154 13 12¡ 

Bellow 100 213-348 127 30 0 92 192 13 12¡ 

1.4571 (AISI 316Ti) 

Pressure max. (absolute) 5 bar 

Bellow 

Deviation 

From Axis 

DN ... CF Ordering No. A B C D E F Max. 

Flange 16 213-351 76 1.5 1.5 15 22 16 21¡ 

1.4301 (AISI 304) 40 213-352 126 2 2 40 55 36.8 7.5¡ 

Bellow 63 213-353 139 2 2 62 80 66 37¡ 

1.4571 (AISI 316Ti) 100 213-354 142 2 2 92 116 102.5 28¡ 

160 213-355 250 3 3 154 187 153 16¡ 



B9 

B9.33



Bellows /Hose with Flanges, Compensator 

Flexible 

Metal Hose 

DN ... CF Ordering No. A B C D E F G 

Flange 16 213-361 250 23 16 15 22.5 70 50 

1.4301 (AISI 304) 16 213-362 500 23 16 15 22.5 70 50 

Bellow 16 213-363 750 23 16 15 22.5 70 50 

1.4571 (AISI 316Ti) 16 213-364 1000 23 16 15 22.5 70 50 

40 213-365 250 46 36.8 40.5 53 130 100 

40 213-366 500 46 36.8 40.5 53 130 100 

40 213-367 750 46 36.8 40.5 53 130 100 

40 213-368 1000 46 36.8 40.5 53 130 100 

F = radius for multiple bending 

G = radius for single bend 



Adaptor CF-F / ISO-KF Ordering No. A B 

1.401 (AISI 304) 16 / 16 213-251 35 16 

16 / 25 213-252 35 16 

40 / 16 213-254 30 16 

40 / 25 213-255 30 26 

40 / 40 213-256 50 37 

63 / 40 213-259 35 41 

100 / 40 213-262 50 41 

Adaptor CF-F / ISO-K Ordering No. A B C D 

1.4301 (AISI 304) 63 / 63 213-271 90 1 1 66 

100 / 100 213-272 90 1 1 104 

160 / 160 213-273 90 1.5 1.5 153 

Glass Metal 

Connection 

DN ... Ordering No. A B C D E F 

1.4301 (AISI 304) 20 213-276 121 19.05 0.9 19.05 1.25 41 

Pyrex 36 213-277 121 38.1 1.65 38.1 2.3 39 

Glass Metal 

Connection 

with Flange 


1.4301 (AISI 304) 16 213-281 124 17.25 19.05 1.25 

Pyrex 40 213-282 124 34.8 38.1 2.3 

B9.34




Protective Lids DN ... CF Ordering No. A B C 

Polyethylene 16 213-441 36 34 9.5 

40 213-442 71.5 69.5 17.5 

63 213-443 115.5 113.5 22 

100 213-444 154 152 24.5 

160 213-445 205 202.5 27 

200 213-446 263 254 36 

250 213-447 315 306 36 

B9 

B9.35

Oil Diffusion Pumps 

Titanium, Sublimator, Catalyzer Trap 

B10


Contents 


Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.3 

Integrated Baffle. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.3 

Cold Cap or Baffle Cap . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.5 

Pump Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.8 

Thermal Switch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.8 

Flow Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.8 

Pump Fluid Replenishing Device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.9 

Thermostatic Cut-Out . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.9 

Baffle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.10 

Water Baffle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.10 

Combination Baffle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.11 

Refrigerator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.12 

LN 2 

Supply. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.13 

Automatic LN 2 

Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.13 

Individual Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.14 


Level Control System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.15 


Level Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.15 

Pumping System Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.16 

Pump Fluids . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.17 

Titanium Sublimator and Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.18 

Titanium Sublimator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.18 

Specific Pumping Speed . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.19 

Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.19 

Integrated Timer. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.19 

Pumping Body . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.20 

LN 2 

Supply System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.21 

Catalyzer Trap . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.22 

B10.2

Diffusion Pumps 



Integrated Baffle 

♦ Built-in water baffle 

♦ Suitable for mineral oils, silicone oils and pentaphenylether 

♦ High vacuum stability due to integrated booster stage 

♦ Pump unit and pumping system on request 


Vacuum Connection 

DN 63 ISO-K DN 100 ISO-K DN 160 ISO-K DN 250 ISO-K 

Pumping speed 1) for air at 10 -4 mbar l/s 150 300 650 1750 

Type PDI063-W PDI100-W PDI160-W PDI250-W 


2) 3) 

230 V 260-022 260-032 260-042 260-052 

115 V 260-023 260-033 260-043 Ñ 

Fore vacuum, max. mbar 0.8 0.8 0.8 0.8 

Pump fluid charge, min. / max. cm 3 50 / 70 80 / 120 150 / 300 450 / 1000 

Power consumption W 400 650 1275 2400 

Heating / cooling time, typical min 10 / 10 12 / 10 15 / 15 17 / 60 

Recommended pumping speed 

for roughing pump at working 

pressure > 10 -4 / < 10 -4 mbar m 3 /h 4 / 4 8 / 4 16 / 8 60 / 30 

Housing stainless steel stainless steel stainless steel stainless steel 

Jet system aluminum aluminum aluminum aluminum 

Weight kg 4 8.5 14.5 30 

Spare parts 

Seal set BN 841 180-T BN 841 181-T BN 841 182-T BN 841 193-T 

Heating ring 

230 V B 5170 218 QG B 5170 028 QG B 5170 004 QG B 5170 038 QG 

+ B 5170 057 QG + B 5170 089 QG 2) 

115 V B 5170 217 QG B 5170 027 QG B 5170 003 QG Ñ 

+ B 5170 056 QG Ñ 

Accessories 

Thermal switch 216-058 216-058 216-058 216-058 

Cooling water monitor without fittings 216-059 216-060 216-060 B 4747 111 SE 

Orifice for flow monitor Ñ Ñ Ñ B 4747 308 SE 

1) Values measured according DIN 28427, gauge head calibrated with spinning rotor gauge. 

Experiments have shown that with other vacuum gauges and/or measuring methods 

(e.g. AVS) the values are up to 40% higher. 

2) Pump fluids to be ordered separately 

3) Seal on high vacuum side included in scope of delivery 

4) 230/208 V 

B10.3 

B10



Minimum cooling 

water requirements 

A PDB040-G + PDB040-W 

B PDI063-W 

C PDI100-W 

D PDI160-W 

E PDI250-W 

The minimum inlet water pressure can be calculated: 

P required = 1 bar + ∆p DIF complete + ∆p supply line + ∆p return line 

Example: 

PDI100-W with 4 m each supply and return lines (1/2" hose) 

operated with cooling water of 20 ¡C. 

Min. water requirement = 50 l/h 

P required = 1 + 0.3 + 0.025 + 0.025 = 1.35 bar 


Water connection 

Pump fluid refilling port 

DN A B C D E F G H J 

PDI063-W DN 63 ISO-K 360 150 100 169 46 72 115 101 120 

PDI100-W DN 100 ISO-K 412 194 128 184 42 82 145 120 135 

PDI160-W DN 160 ISO-K 570 290 172 269 53 106 192 185 160 

PDI250-W DN 250 ISO-K 690 450 272 330 60 150 295 Ð 212 



DN 40 ISO-KF 

DN 40 ISO-KF 

PDB040-G 

PDB040-W 

Cooling air water 

Pumping speed for air at 10 -4 mbar 1) 

Without baffle l/s 38 40 

With baffle l/s 22 22 

Built-in thermal protection switch Ñ yes 

Type PDB040-G PDB040-W 

Ordering 

Information 2) 

230 V 260-002 260-012 

115 V 260-003 260-013 

Vacuum stability mbar 0.3 0.3 

Pump fluid charge, min. / max. cm 3 10 / 15 10 / 15 

Heating / cooling time min 10 / 6 10 / 10 

Recommended pumping speed 

of the roughing pump m 3 /h 1.5 1.5 

Weight kg 3 1.5 

Spare parts 

Seal set BN 841 151-T BN 841 151-T 

Heating plate 

230 V 216-275 216-275 

115 V 216-277 216-277 

1) Measured with 66A or DC 704 according to DIN 28427 

2) Without pump fluid 



B10.4



Cold Cap or Baffle Cap 

♦ Rugged design 

♦ Low ultimate pressure 

♦ Integrated cold cap reduces oil backstreaming 

♦ Low pump fluid consumption due to built-in fore vacuum baffle 

♦ Suitable for mineral oils, silicone oils or pentaphenylether 

(e.g. Santovac) 

PDA320-W PDA400-W PDA500-W * 

PDA630-W * + PDB630-W * PDA800-W + PDB800-W PDA999-W + PDB999-W 

* Without groove for retaining ring 



Viewport 

B10.5 

B10



The natural aging process in the cooling water circuit (not including 

mineral deposits, algae deposits, etc.) is taken into account in the 

calculation of the minimum water requirements. We recommend 

operating the pumps with sufficient throughput so that the temperature 

of the water at the outlet does not exceed 30 ¡C. ∆p of the complete 

diffusion pump is the pressure drop across the pump, including the cold 

cap, internal connection lines and connection nipple, but not including the 

supply and return lines. The pressure can be calculated as follows: 

Required = 1 bar + ∆p DIF complete 

+ ∆p supply line 

+ ∆p return line 

Minimum cooling 

water requirements 

A PDA320-W 

B PDA400-W 

C PDA500-W 

D PDA630-W + 

PDB630-W 

E PDA800-W + 

PDB800-W 



DN 320 ISO-K DN 400 ISO-K DN 500 ISO-K 

Pumping speed for air at 10 -4 mbar 1) l/s 3 500 5 000 7 500 

With cold cap PDA320-W PDA400-W PDA500-W 

With baffle cap Ñ Ñ Ñ 


3 x 400 V Ñ Ñ Ñ 

3 x 400 V / 3 x 230 V 260-071 260-081 260-090 

Fore vacuum, max. mbar 0.5 0.5 0.5 

Pump fluid charge, min. / max. cm 3 1 200 / 1 800 2 000 / 3 000 3 000 / 5 000 

Power consumption kW 4.4 5.4 7.2 

Heating / cooling time min 17 / 50 28 / 50 25 / 80 

Recommended pumping speed for roughing pump 2) 

at working pressure 3) 

> 10 -4 mbar m 3 /h 120 240 250 Ð 500 

< 10 -4 mbar m 3 /h 60 120 120 

Weight kg 55 75 180 

Spare parts 

Seal set BN 841 071-T BN 841 070-T BN 841 076-T 

Heating plate 

3 x 400 V Ñ Ñ Ñ 

Ñ Ñ Ñ 

3 x 400 V / 3 x 230 V 216-280 3 x 216-282 3 x 216-284 

Accessories 

Pump fluid replenishing device 216-061 216-061 216-061 

Temperature switch 216-056 216-056 216-056 

Thermostatic cut-out 216-057 216-057 216-057 

Flow monitor B 4747 111 SE B 4747 111 SE B 4747 111 SE 

Orifice for flow monitor B 4747 308 SE B 4747 311 SE B 4747 311 SE 

1) Values measured according DIN 28427, gauge head calibrated with spinning rotor gauge. 

Experiments have shown that with other vacuum gauges and/or measuring methods (e.g. AVS) the values are up to 40% higher. 

2) Two-stage rotary vane vacuum pumps, or pump combinations of one or two-stage rotary vane vacuum pump and roots pumps, are used as roughing pumps. 

3) In continuous operation 

4) Incl. baffle cap 

5) Seal on high and fore vacuum side included 

B10.6



Minimum cooling water requirements 

PDA999-W + PDB999-W 

O upper circuit 

U lower circuit 

DN 630 ISO-K DN 800 ISO-F DN 1000 ISO-F 

15 000 13 000 4) 23 000 20 000 4) 40 000 34 000 4) 

PDA630-W Ñ PDA800-W Ñ PDA999-W Ñ 

Ñ PDB630-W Ñ PDB800-W Ñ PDB999-W 

Ñ Ñ 260-111 260-116 260-121 260-126 

260-101 260-106 Ñ Ñ Ñ Ñ 

0.5 0.5 0.4 0.4 0.4 0.4 

6 000 / 8 000 6 000 / 8 000 7 000 / 13 000 7 000 / 13 000 16 000 / 24 000 16 000 / 24 000 

10.5 10.5 17.4 17.4 25.2 25.2 

50 / 90 50 / 90 50 / 100 50 / 100 45 / 200 45 / 200 

240 Ð 1 000 240 Ð 1 000 500 Ð 1 000 500 Ð 1 000 1 000 Ð 2 000 1 000 Ð 2 000 

170 170 240 240 500 Ð 1 000 500 Ð 1 000 

250 260 480 480 700 721 

BN 841 077-T BN 841 077-T BN 841 236-T BN 841 236-T BN 841 237-T BN 841 237-T 

Ñ Ñ 1 x 216-290 1 x 216-290 7 x 216-290 7 x 216-290 

Ñ Ñ + 6 x 216-288 + 6 x 216-288 Ñ Ñ 

7 x 216-286 7 x 216-286 Ñ Ñ Ñ Ñ 

216-061 216-061 216-061 216-061 216-061 216-061 

216-056 216-056 216-056 216-056 216-056 216-056 

216-057 216-057 216-057 216-057 216-057 216-057 

B 4747 111 SE B 4747 111 SE B 4747 111 SE B 4747 111 SE B 4747 111 SE B 4747 111 SE 

B 4747 311 SE B 4747 311 SE B 4747 326 SE B 4747 326 SE B 4747 326 SE B 4747 326 SE 

B10.7 

B10


Pump Accessories 


Thermal Switch 

♦ For interlocking or controlling the pumping system peripheral equipment 

♦ The thermal relay closes when the diffusion pump is ready for operation 


PDI063-250-W 

PDA320-999-W PDB800-999-W 

Adjustment range ¡C Ñ 45 Ð 180 ±5 

Switching difference ¡C Ñ 15 

Switching point ¡C 70 Ñ 


216-058 216-056 

Power V / A 250 / 16 250 / 10 

Contact Closes at rising temperature Closes at rising temperature 

Flow Monitor 

♦ For monitoring the cooling water flow 

♦ Flow monitors are installed at the outlet of the cooling water circuit of 

the diffusion pump 


Connection 

G 3/8“ G 1/2“ 

Closing rate, min. / max. l/min 2.2 / 2.9 Depending on the orifice 


B 4747 434 SS 

B 4747 111 SE 

Switching 

Voltage, V AC / V DC 230 / 30 250 / 30 

Current, V AC / V DC A 1 / 1 10 / 5 

Consumption, V AC / V DC VA / W 26 / 20 Ñ 

Pressure (absolute) bar 25 16 


Orifice 

4 Ð 08 l/min Ñ B 4747 308 SE 

8 Ð 16 l/min Ñ B 4747 311 SE 

16 Ð 32 l/min Ñ B 4747 326 SE 

B10.8



Pump Fluid Replenishing Device 

♦ For replenishing pump fluid in processes with high gas throughput 

♦ Refilling is possible while pump is running 

♦ Visual level control on viewport 


Thermostatic Cut-Out 

♦ Protects DIF from overheating 

♦ Manual resetting 


Cut-off temperature 190 ¡C 


Current A 10 

Contact 

Opens at rising temperature 

Mounting 2 x M 4 

Weight g 225 

B10 

B10.9


Baffle 

Baffle 

Water Baffle 



DN 320 ISO-K DN 400 ISO-K DN 500 ISO-K DN 630 ISO-K DN 800 ISO-F DN 1000 ISO-F 

Conductance for molecular flow l/s 4 300 7 000 9 000 16 000 24 500 42 500 

Type PBW320-S PBW400-S PBW500-S PBW630-S PBW800-S PBW999-S 

Ordering Information 260-260 260-270 260-280 260-290 260-300 260-310 

Cooling water consumption 1) l/h 20 25 32 42 52 65 

Weight kg 15.7 21.8 55 60 152 205 

1) These values are valid for a 3 ¡C increase in cooling 

water temperature. In the presence of heat radiation 

from the high vacuum side, the values increase by a 

factor of up to 5. 


Baffle DN A B 

PBW320-S DN 320 ISO-K 460 220 

PBW400-S DN 400 ISO-K 546 245 

Baffle DN A B 

PBW500-S* DN 500 ISO-K 688 260 

PBW630-S* DN 630 ISO-K 840 300 

PBW800-S DN 800 ISO-F 1016 340 

PBW999-S DN 1000 ISO-F 1212 340 


B10.10

Baffle 


Combination Baffle 



DN 320 ISO-K DN 400 ISO-K DN 500 ISO-K DN 630 ISO-K DN 800 ISO-F DN 1000 ISO-F 

Pumping speed for water vapor with LN 2 cooling l/s 11 000 17 500 24 000 47 000 71 000 110 000 

Conductance 2) for molecular flow l/s 3 500 5 500 6 500 12 500 16 500 33 000 

Type PBC320-X PBC400-X PBC500-X PBC630-X PBC800-X PBC999-X 

Refrigerator 

Ordering Information 260-265 260-275 260-285 260-295 260-305 260-315 

Refrigerant charge (R134a) g 95 120 140 250 300 380 

Cooling time to +10 ¡C / ultimate temp. min 2 / 15 3 / 18 5 / 20 7 / 25 8 / 30 10 / 40 

Attainable ultimate temperature 3) ¡C -17 Ð -20 -13 Ð -17 -12 Ð -14 -8 Ð -10 -4 Ð -6 +1 Ð +4 

Bakeout temperature with R134a ¡C 90 90 90 90 90 90 

LN 2 consumption 

Cooling to -180 ¡C kg 3 4.5 6 8 12 25 

Continuous operation kg/h 1.6 2.4 3.6 5.7 7.2 11 

Weight kg 21 26.5 98 117 225 300 

Accessories 

Refrigerator 260-420 260-420 260-420 260-420 260-420 260-420 

2) Measured acc. to PNEUROP 

3) Without additional heat radiation from external sources 


LN 2 connection 

Refrigerant connection 

Cooling connection (also H 2 O) 

Connection for temperature sensor 

Baffle DN A B 

PBC320-X DN 320 ISO-K 460 220 

PBC400-X DN 400 ISO-K 546 245 

Baffle DN A B 

PBC500-X* DN 500 ISO-K 688 260 

PBC630-X* DN 630 ISO-K 840 300 

PBC800-X DN 800 ISO-F 1016 340 

PBC999-X DN 1000 ISO-F 1212 340 


B10 

B10.11


Refrigerator 

Refrigerator 

♦ For baffles with a nominal width of DN 320 to DN 1000 

♦ Ultimate baffle temperatures of -25 ¡C to +5 ¡C are achieved, depending 

on the size 

Refrigerant 

R134a 

Refrigeration capacity at 

+15 ¡C W 385 

-10 ¡C W 140 

Type 


PCF145-Z 



Voltage V 240 

Frequency Hz 50/60 

Power consumption W 145 

Motor starting current A 8 

Cooling water 

Consumption l/h 3 Ð 8 

Pressure (overpressure) bar 11 

Noise level dB(A) 39 

Connections 

Refrigerant G 3/8" 

Water ¿14 

Weight kg 15 

B10.12

LN 2 Supply 


LN 2 Supply 

Automatic LN 2 Supply 


With compressed air compressed air central supply central supply 

(Dewar vessel) 

(Dewar vessel) 

For baffle PBC320-400-X Ñ PBC320-400-X Ñ 

Ñ PBC500-999-X Ñ PBC500-999-X 

Ordering Information 216-062 216-063 216-064 216-065 

A PCB100-A, LN 2 filling device 1) , 220 V / 50 Hz ● ● Ñ Ñ 

C PCF200-Z, LN 2 control module ● ● ● ● 

D LN 2 sensor 

PCF190-Z ● Ñ ● Ñ 

PCF220-Z Ñ ● Ñ ● 

G Solenoid valve for LN 2 , 24 V, 50/60 Hz, 

with fitting for pipe diameter 8/10 ● ● ● ● 

H LN 2 line, diameter 8/10 with insulating hose, 1.8 m ● ● ● ● 

J Dewar vessel Ñ Ñ Ñ Ñ 

1) DN 50 ISO-KF clamping ring and 

centering ring to be ordered separately 



B10.13 

B10


LN 2 Supply 

Individual Components 

♦ For feeding LN 2 to the point of use 

♦ The LN 2 admission is regulated by means of a pressure reducing valve 


LN 2 filling Automatically Manually 

Type PCB100-A PCB100-H 


260-355 

230 V / 50 Hz 260-350 Ñ 

115 V / 60 Hz 260-351 Ñ 

24 V / 50 Hz 260-352 Ñ 

Air pressure in the supply line 1) bar 1 / 8 1 / 8 

Adjustable pressure in Dewar 1) bar 0 Ð 1 0 Ð 1 

Bursting pressure of the rupture disc 1) bar 1.7 1.7 

LN 2 throughput l/h 0 Ð 300 0 Ð 300 

Power consumption W 8 Ñ 


1) Overpressure 

PCB100-A 

PCB100-H 

B10.14

LN 2 Supply 


Automatic LN 2 Level Control System 

♦ Switching function for controlling a combination baffle 

♦ One- or two- point level control operation 

♦ Alarm in case of sensor or cable failure 

♦ Sensor especially reliable due to patented sensor principle 

♦ PTC resistor for emergency cooling 

♦ Customized tailored sensors possible 


For Baffle 

— PBC320-400-X PBC500-999-X 

Type PCF200-Z PCF190-Z PCF220-Z 


Control module 260-410 Ñ Ñ 

Sensor Ñ 260-412 260-413 

Control module Ð Voltage, selectable 24 V AC or 24 V DC Ñ Ñ 

Current consumption with closed valve mA 100 Ñ Ñ 

Contact rating A at 48 V 2 Ð 4 Ñ Ñ 

DIN standard housing EN 50022-35 Ñ Ñ 

For mounting rails EN 500035-G32 Ñ Ñ 

Operating temperature ¡C Ñ -196 Ð +50 -196 Ð +50 

Automatic LN 2 Level Valve 

♦ For controlling a constant LN 2 level in reservoir cold trap 

♦ LN 2 flow control on Meissner or port traps 

♦ Automatic vent valve in large, central LN 2 supply system 

♦ No power supply required 


Type 

PBF101-Z 


Flow rate l/h 180 

Pressure indication on the pressure 

gauge with - Warm probe kp/cm 2 4 

- Cold probe (vacuum) kp/cm 2 0 

Mounting position (pressure gauge on top) 

vertical 

Weight g 350 


B10.15 

B10


Pumping System Controller 

Pumping System Controller 

♦ Remote control and monitoring via digital inputs and outputs 

♦ Communication with standard phrases 

♦ Switching functions programmable over the whole range 

♦ Error indication, time and reason stated 

Pressure display: The main display indicates the pressure relevant in the 

actual operating mode. The secondary display indicates the pressure of one 

of the vacuum gauges selected at will. 

Programmable parameters: Upper and lower switching point of all four 

vacuum gauges as well as the system times, e.g. maximum roughing time, 

heat-up and cool down time of the diffusion pump. 

Front and mimic panel can be mounted up to 15 m from the unit. 

Software and mimic panel according to customer specifications possible. 


Pressure range mbar 2 á 10 -9 Ð 1000 

Type 

PCA600-Z 


Pumping system controller 

1) The exact configuration of the PCA600-Z depends on the 

pumping unit and has to be defined. 

2) Pumping systems over 7 kW are controlled by the PCA600-Z 

with external relays for motors and diffusion pump heater. 

3) Other voltages on request 

on request 

Mimic display for two valves 260-401 

Input 

Analog 

4 compact gauges 

Digital 16 

Interface 

Integrated 

RS 232C 

Optional RS 485 

Output 

Analog V 4 x 0 Ð 10 

Digital V DC / A 16 x 24 / 1 

Power unit, integrated kW 2) 7 

Supply 

Voltage V / Hz 3) 230 / 50 

Consumption kVA 8 


B10.16

Pump Fluids 


Pump Fluids 

Typical Applications: 

♦ Vacuum metallurgy 

♦ Vacuum tube industry 

♦ Electron beam welding 

♦ Vacuum chemistry 

Attainable ultimate pressure: The ultimate pressures indicated in the table 

can be attained with correct conditioning of the high vacuum pumping 

system. They refer to blanked off groups of pumps with an appropriate 

pumping fluid/baffle combination. The ultimate pressure values shown may 

be decreased if the gas sources are further reduced. 

Technical Data Mineral oil Silicon oil Silicon oil Pentaphenylether 

Vapor pressure at 20 ¡C mbar 4 á 10 -8 2 á 10 -8 4 á 10 -10 1 á 10 -10 

Chemical resistance good better better very good 

Oxidation resistance good better better very good 

Thermal resistance good better better very good 

Type 66 A DC 704 AN 175 Santovac 5 


500 cm 3 260-390 260-387 260-394 B 0480 559 

2000 cm 3 260-391 260-388 260-395 Ñ 

5000 cm 3 260-392 260-389 260-396 Ñ 

Viscosity at 

20 ¡C mm 2 /s 25 Ñ Ñ Ñ 

25 ¡C mm 2 /s Ñ 39 175 1000 

70 ¡C mm 2 /s Ñ Ñ Ñ 12 

100 ¡C mm 2 /s Ñ Ñ Ñ 12 

Preferred pressure range mbar 5 á 10 -7 Ð 10 -3 10 -7 Ð 10 -3 10 -8 Ð 10 -5 10 -7 Ð 10 -3 

Ultimate pressure with 

LN 2 cooling mbar < 6 á 10 -9 < 6 á 10 -9 < 6 á 10 -9 < 6 á 10 -9 

Machine cooling -20 ¡C mbar < 6 á 10 -8 < 3 á 10 -8 < 3 á 10 -8 < 3 á 10 -8 

Water cooling 20 ¡C mbar < 4 á 10 -7 < 6 á 10 -8 < 3 á 10 -8 < 3 á 10 -8 

Air cooling 25 ¡C mbar < 1 á 10 -6 < 5 á 10 -7 < 2 á 10 -7 < 2 á 10 -7 

B10 

B10.17


Titanium Sublimator and Controller 


♦ Base pressure in the 10 -12 mbar range 

♦ High pumping speed for chemically active gases 

When switching on the filament a ramp integrator is activated. This feature 

increases the lifetime of the filament and prevents an undesirable 

pressure rise. The current rise time is 30 s. 

For interval pumping a timer is available as an option. 

Titanium Sublimator 

Sublimation filaments 3 

Titanium sublimator 

Ti-Mo 

Type 


Connection Flange 

DN 40 CF-F 

PSU040-T 


Usable titanium quantity g 3 x 1.2 

Sublimation rate, max. g/h 0.2 

Operating data 

Voltage V 3 Ð 6 

Current A 30 Ð 50 

Connected load, max. kVA 0.3 

Bakeout temperature, max. ¡C 400 

Weight kg 0.6 

B10.18



Specific Pumping Speed 

(Approximate value of a freshly coated surface < 10 -6 mbar) In UHV 

systems titanium sublimation pumps are used as supplementary pumps 

for gases which react chemically with titanium. 

Pumping body 

Titanium sublimator 

Catalyzer trap 


Gas Type 

H2 N2 O2 CO CO2 H2O 

Getter layer temperature of 20 ¡C l/s cm 3 3 5 9 9 8 3 

195 ¡C l/s cm 3 9 9 11 11 9 14 

Controller 


Heating voltage V 0 Ð 6 

Heating current, max. A 50 

Run-up time s 30 

Type 

PCU300-T 


Controller 

230 V 260-365 

115 V 260-366 

Cable PSU Ð PCU (2 pcs. required) 

02 m B 4564 491 AD 

05 m B 4564 491 AC 

12 m B 4564 491 AF 

Voltage V 115/230 

Frequency Hz 50 Ð 60 

Power consumption VA 0 Ð 350 

Protection 

IP23 


Integrated Timer 

Option 


Time ranges 7 

Programmable 

0.05 s Ð 10 h 


B 4779 251 GM 


B10.19 

B10


Pumping Body 

Pumping Body 

♦ Additional pumping speed for turbo or ion getter pumping units 

♦ Effective water vapor condenser 



Vacuum chamber DN 160 CF-F DN 160 CF-F 

High vacuum pump DN 100 CF-F DN 160 CF-F 

Titanium sublimator DN 40 CF-F DN 40 CF-F 

Type PSU100-T PSU160-T 

Ordering Information 260-440 260-445 

Conductance l/s 500 600 

Mounting orientation any any 

Pumping speed on vacuum chamber for 

H 2 O vapor (LN 2 cooling) l/s 1 500 1 500 

N 2 /H 2 (titanium sublimation, LN 2 cooling) l/s 1 300/3 600 1 300/3 600 

Bakeout temperature ¡C 400 400 

Consumption of liquid nitrogen for initial 

charge at room temperature, approx. kg 2 2 

Per hour of continuous cooling, approx. kg 1.4 1.4 

Cooling time from room temperature 

to 77K at o.4 bar min 8 8 

Materials 

Housing, flanges stainless steel stainless steel 

Getter surfaces copper copper 

Weight kg 14 15 

B10.20

Pumping Body 


LN 2 Supply System 

♦ Current-less automatic LN 2 supply 

♦ Maintenance liquid level constant with phase separator 


LN 2 Filling Device 

PCB100-H 

LN 2 Control Valve 

With Phase Separator PSU101-Z 

260-355 260-361 

Compressed air in the supply line, 

overpressure, min. bar 1 1 

Operating pressure, 

adjustable/recommended bar 0.1 - 1 0.4 

Sensor length m 2 2 

Weight PCB + PSU kg 2.3 

PSU101-Z 

Phase separator 


B10.21 

B10


Catalyzer Trap 


♦ Eliminates hydrocarbon backstreaming from rotary vane pumps 

♦ Catalytic combustion technology reduces hydrocarbon levels by a factor 

of at least 1000 

♦ Continuous maintenance-free operation Ñ costs less to operate than a 

zeolite trap 

♦ No regeneration required due to self-regeneration during venting and 

pump down 

♦ Over two years of operation with one filling 

Eliminate back streaming hydrocarbons in your vacuum system with the 

catalyzer traps. Just place the trap between your roughing pump and the 

vacuum chamber or the high vacuum pump. 

Potentially damaging and contaminating oil vapors are eliminated by 

catalytic combustion into the gases CO 2 

and H 2 

O which are harmlessly 

pumped down. 

The catalyzer operates at elevated temperatures of approx. 250 ¡C and 

automatically regenerates itself with the oxygen in the air each time the 

vacuum system is vented and pumped down. 

The traps do not adsorb gases so they have a very short uptime, unlike 

zeolite traps which require frequent, time consuming regeneration. 

The catalyzer trap can not to be used for synthetic oils. 

After about 12 months of use, the cost of ownership for 

a catalyzer trap is less than for a zeolite trap. 

B10.22





DN 25 ISO-KF 

DN 40 ISO-KF 

Cooling Ñ water 

Type PTR025-U PTR040-U 


100 V 260-373 Ñ 

110/115 V 260-372 260-382 

230/240 V 260-370 260-380 

208 V 260-371 260-381 

1 catalyzer filling 216-106 216-107 

Mounting orientation 

Normal operation any any 

With water cooling A Ñ vertical 

Conductance at 1 á 10 -2 / 1 mbar l/s 3 / 9 9 / 45 

Power consumption W 25 50 

Lifetime of one filling, normal operation years 2 2 

Cooling water consumption, approx. l/h Ñ 5 

Weight incl. catalyzer filling kg 1.8 3.6 



B10 

B10.23

Product Index 

Instrumentation Catalog 2000 - 2001 

A 

Accessories for UL200 dry and Modul 200 . . . . . . . . . . . . . . . . . . . . B5.36 

Accessories for UL500 and UL500 dry . . . . . . . . . . . . . . . . . . . . . . . B5.35 

Accessories, General for Helium Leak Detectors . . . . . . . . . . . . . . . . B5.37 

Angle Valves. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.3 


Gas Analyzers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.2 

Leak Detectors. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.3 

Thin Film Deposition Controllers and Monitors . . . . . . . . . . . . . B4.2 

B 

Baffle Cap or Cold Cap, Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . B10.5 

Baffle, Combination . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.11 

Baffle, Water . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.10 

Ball Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.34 

Bayard-Alpert Pirani Gauge, BPG400 . . . . . . . . . . . . . . . . . . . . . . . . B6.12 

Binary Gas Composition Controller, Composer . . . . . . . . . . . . . . . . . B2.28 

Butterfly Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.16 

C 

Cables, Vacuum Gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.24 

Calibrated Leaks. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.30 

Calibration Service, Vacuum Gauges. . . . . . . . . . . . . . . . . . . . . . . . . B6.28 

Capacitance Diaphragm Gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.6 

CART 200, Mobile Leak Detection System . . . . . . . . . . . . . . . . . . . . B5.14 

Catalyzer Trap, Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.22 

Coaxial Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.16 

Cold Cap or Baffle Cap, Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . B10.5 

Components 

ISO-F - Fixed Flange Components . . . . . . . . . . . . . . . . . . . . . B9.24 

ISO-K - Clamp Flange Components . . . . . . . . . . . . . . . . . . . . B9.16 

ISO-KF - Small Flange Components. . . . . . . . . . . . . . . . . . . . . B9.4 

UHV - CF Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.26 

Composer Gas Composition Controller . . . . . . . . . . . . . . . . . . . . . . . B2.28 

Connection Components for Leak Testing Instruments. . . . . . . . . . . . B5.38 

Control Valves. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.25 

Controllers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.26 

CONTURA Z Helium Leak Detector. . . . . . . . . . . . . . . . . . . . . . . . . . B5.28 

Crystals, Quartz . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.17 

CrystalSix Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.13 

D 

Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.3 

E 

Ecotec II Sniffer Leak Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.24 

EIES Sensor and Feedthrough Packages, Rigid or Fiber Optics . . . . B4.21 

Electrical Feedthroughs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.11 

F 

FabGuard Sensor Integration and Analysis System . . . . . . . . . . . . . . . B1.3 

FabStar Gas Analysis System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.26 

Feedthroughs 

Coaxial . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.16 

Electrical . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.11 

High Current . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.15 

Liquid. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.18 

Rotary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.3 

Flow Monitor, Pump Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.8 

G 

Gas Analyzers 

FabStar Gas Analysis System . . . . . . . . . . . . . . . . . . . . . . . . B2.26 

Transpector 2 Gas Analysis System . . . . . . . . . . . . . . . . . . . . . B2.4 

Transpector 2 Gas Analysis System Upgrade Package. . . . . . B2.12 

Transpector XPR2 Gas Analysis System . . . . . . . . . . . . . . . . B2.14 

Transpector CIS2 Gas Analysis System . . . . . . . . . . . . . . . . . B2.20 

Gas Composition Controller, Composer. . . . . . . . . . . . . . . . . . . . . . . B2.28 

Gas Dosing Systems. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.24 

Gas Dosing Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.21 

Gate Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.20 

Gauge Controller. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.24 

H 

Helium Leak Detector Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . B5.37 

Helium Leak Detector Connection Components. . . . . . . . . . . . . . . . . B5.38 

Helium Leak Detector 

CONTURA Z . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.28 

LDS1000 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.16 

Modul 200 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.12 

ULTRATEST UL200 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.10 

ULTRATEST UL200 dry . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.11 

ULTRATEST UL500 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.18 

ULTRATEST UL500 dry . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.20 

Helium Sample Probes, Sniffers . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.34 

Helium Sniffer Leak Detector, Protec . . . . . . . . . . . . . . . . . . . . . . . . . B5.22 

High Current Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.15 

HLD4000A Leak Detector for Refrigerant 134a and Others . . . . . . . . B5.26 

I 

IC/5 Thin Film Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . . . B4.8 

Inline Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.3 

Integrated Baffle, Diffusion Pumps. . . . . . . . . . . . . . . . . . . . . . . . . . . B10.3 

Interface Module, VCA200-Z . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.28 

IPC400 Pumping Packages. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.37 

ISO-F - Fixed Flange Components . . . . . . . . . . . . . . . . . . . . . . . . . . B9.24 

ISO-K - Clamp Flange Components . . . . . . . . . . . . . . . . . . . . . . . . . B9.16 

ISO-KF - Small Flange Components . . . . . . . . . . . . . . . . . . . . . . . . . . B9.4 

D 

D.1


Product Index 

L 

LDS1000 Modular Leak Detection System. . . . . . . . . . . . . . . . . . . . . B5.16 


Helium Leak Detector, LDS1000. . . . . . . . . . . . . . . . . . . . . . . B5.16 

Helium Leak Detector, Modul 200. . . . . . . . . . . . . . . . . . . . . . B5.12 

Helium Leak Detector, ULTRATEST UL200 . . . . . . . . . . . . . . B5.10 

Helium Leak Detector, ULTRATEST UL200 dry. . . . . . . . . . . . B5.11 

Helium Leak Detector, ULTRATEST UL500 . . . . . . . . . . . . . . B5.18 

Helium Leak Detector, ULTRATEST UL500 dry. . . . . . . . . . . . B5.20 

Modular Leak Detection System, LDS1000 . . . . . . . . . . . . . . B5.16 

Refrigerant Leak Detector, HLD4000A . . . . . . . . . . . . . . . . . . B5.26 

Sniffer Leak Detector, Ecotec II . . . . . . . . . . . . . . . . . . . . . . . B5.24 

LES1200 Thin Film Metrology Sensor System. . . . . . . . . . . . . . . . . . . B3.3 

Linear Motion Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.6 

Liquid Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.18 

LN2 Supply, Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.13 

Lubricants and Sealing Materials, Vacuum Feedthroughs . . . . . . . . . B7.20 

M 

Mass Spectrometers, Transpector 2 . . . . . . . . . . . . . . . . . . . . . . . . . . B2.4 

Metal-Ceramic Connections, Vacuum Feedthroughs . . . . . . . . . . . . . B7.17 

Mobile Helium Leak Detector, Modul 200. . . . . . . . . . . . . . . . . . . . . . B5.12 

Modul 200 Helium Leak Detector. . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.12 

Modular Leak Detection System, LDS1000 . . . . . . . . . . . . . . . . . . . . B5.16 

N 

Narrowband Filters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.23 

O 

OES1200 Optical Emission Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . B3.7 

Optical Emission Sensor, OES1200 . . . . . . . . . . . . . . . . . . . . . . . . . . B3.7 

Oscillators. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.12 

P 

Penning Gauge, PEG100 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.22 

Photoresist Detector, Preclude . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.17 

Pirani Gauge, Bayard-Alpert, BPG-400 . . . . . . . . . . . . . . . . . . . . . . . B6.12 

Pirani Standard Gauge, PSG400, PSG400-S, PSG100-S, 

PSG101-S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.15 

Plasma Process Monitor, PPM422. . . . . . . . . . . . . . . . . . . . . . . . . . . B2.27 

Portable, Dry Helium Leak Detector, UL200 dry . . . . . . . . . . . . . . . . . B5.11 

Portable, Dry Helium Leak Detector, UL500 dry. . . . . . . . . . . . . . . . . B5.20 

PPM422 Plasma Process Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.27 

Preclude Photoresist Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.17 

Pressure Converters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.36 

Pressure Range, Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.3 

Protec Helium Sniffer Leak Detector . . . . . . . . . . . . . . . . . . . . . . . . . B5.22 

Pump Accessories, Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . . . . . B10.8 

Pump Fluid Replenishing Device, Pump Accessories. . . . . . . . . . . . . B10.9 

Pump Fluids . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.17 

Pumping Body, Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.20 

Pumping Packages, IPC400 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.37 

Pumping System Controller, Diffusion Pumps . . . . . . . . . . . . . . . . . B10.16 

Q 

Quartz Crystals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.17 

R 

Refrigerant Leak Detectors 

Ecotec II Sniffer Leak Detector . . . . . . . . . . . . . . . . . . . . . . . . B5.24 

HLD4000A Refrigerant Leak Detector. . . . . . . . . . . . . . . . . . . B5.26 

Refrigerator, Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.12 

Residual Gas Analyzers (RGA) 

Transpector 2 Gas Analysis System . . . . . . . . . . . . . . . . . . . . . B2.4 

Transpector 2 Gas Analysis System Upgrade Package. . . . . . B2.12 

Transpector XPR2 Gas Analysis System . . . . . . . . . . . . . . . . B2.14 

Transpector CIS2 Gas Analysis System . . . . . . . . . . . . . . . . . B2.20 

Rotary Feedthroughs, ISO-KF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.3 

Rotary Feedthroughs, CF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.4 

Rotary/Linear Motion Feedthroughs. . . . . . . . . . . . . . . . . . . . . . . . . . . B7.5 

S 

Safety Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.31 

Sealing Material, Vacuum Feedthroughs . . . . . . . . . . . . . . . . . . . . . . B7.21 

Sealing Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.33 

Seals, Components. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.3 

Sensor Integration and Analysis System, FabGuard . . . . . . . . . . . . . . B1.3 

Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.13 

Sentinel III Thin Film Deposition Controller . . . . . . . . . . . . . . . . . . . . B4.18 

Sky Capacitance Diaphragm Gauge, CDG025, CDG045, 

CDG045-SD. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.6 

Sniffer Leak Detectors 

Ecotec II Sniffer Leak Detector . . . . . . . . . . . . . . . . . . . . . . . . B5.24 

HLD4000A Refrigerant Leak Detector. . . . . . . . . . . . . . . . . . . B5.26 

Sniffer Probes, Helium . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.34 

Software, TranspectorWare . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.10 

Software, TWare32 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.31 

Stainless Steel, Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.3 


ULTRATEST UL500 Helium Leak Detector . . . . . . . . . . . . . . . B5.18 

ULTRATEST UL500 dry Helium Leak Detector . . . . . . . . . . . . B5.20 

T 

Thermal Switch, Pump Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . B10.8 

Thin Film Deposition Controller 

IC/5 Thin Film Deposition Controller . . . . . . . . . . . . . . . . . . . . . B4.8 

Sentinel III Thin Film Deposition Controller . . . . . . . . . . . . . . . B4.18 

XTC/2 and XTC/C Thin Film Deposition Controllers . . . . . . . . . B4.4 

Thin Film Deposition Monitor XTM/2 . . . . . . . . . . . . . . . . . . . . . . . . . . B4.6 

Thin Film Metrology Sensor System, LES1200 . . . . . . . . . . . . . . . . . . B3.3 

Thermostatic Cut-Out, Pump Accessories . . . . . . . . . . . . . . . . . . . . . B10.9 

Thread Lubricant, Vacuum Feedthroughs . . . . . . . . . . . . . . . . . . . . . B7.20 

Titanium Sublimator and Controller . . . . . . . . . . . . . . . . . . . . . . . . . B10.18 

Transpector 2 Gas Analysis System . . . . . . . . . . . . . . . . . . . . . . . . . . B2.4 

Transpector 2 Gas Analysis System Upgrade Package . . . . . . . . . . . B2.12 

Transpector XPR2 Gas Analysis System . . . . . . . . . . . . . . . . . . . . . . B2.14 

Transpector CIS2 Gas Analysis System. . . . . . . . . . . . . . . . . . . . . . . B2.20 

TranspectorWare Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.10 

TWare32 Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.31 

D.2

Product Index 


U 

UHV - CF Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.26 

ULTRATEST UL200 Helium Leak Detector . . . . . . . . . . . . . . . . . . . . B5.10 

ULTRATEST UL200 dry Helium Leak Detector . . . . . . . . . . . . . . . . . B5.11 

ULTRATEST UL500 Helium Leak Detector . . . . . . . . . . . . . . . . . . . . B5.18 

ULTRATEST UL500 dry Helium Leak Detector . . . . . . . . . . . . . . . . . B5.20 

Upgrade Package for Transpector 2 Gas Analysis System. . . . . . . . . B2.12 

V 

Vacuum Ball Bearings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.19 

Vacuum Gauge Controller, VGC103 . . . . . . . . . . . . . . . . . . . . . . . . . B6.24 

Vacuum Grease/Oil, Vacuum Feedthroughs. . . . . . . . . . . . . . . . . . . . B7.20 

Vacuum Locks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.33 

Vacuum Switch, VSA100. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.27 

Valves 

Angle Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.3 

Ball Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.34 

Butterfly Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.16 

Control Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.25 

Gas Dosing Valves. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.21 

Gate Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.20 

Safety Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.31 

Sealing Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.33 

Venting Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.29 

Venting Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.29 

Viewports, Vacuum Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.7 

D 

X 

XTC/2 Thin Film Deposition Controller. . . . . . . . . . . . . . . . . . . . . . . . . B4.4 

XTC/C Thin Film Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . B4.4 

XTM/2 Thin Film Deposition Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . B4.6 

D.3

® 

® 

Instrumentation Catalog 2000-2001 

Quick Reference 

To Place An Order 

By Telephone 

In the U.S., our Customer Service Representatives are available to take your orders by telephone Monday through Friday from 

8:15 am to 5:00 pm Eastern Time. Call 315-434-1129. In other locations, contact the INFICON sales office nearest you. 

By Fax 

In the U.S., place your orders by fax at 315-437-3803. For other locations, refer to the listing of sales and service offices on the 

back cover. 

By Mail 

In the U.S., address your orders to: 

INFICON Inc. 

Two Technology Place 

East Syracuse, NY 13057-9714 

To order by mail outside the U.S., refer to the listing of sales and service offices on the back cover. 

For Price and Availability Information 

Simply complete the form in the Appendix and fax it to the sales office nearest you. 

By E-mail 

http://www.reachus@inficon.com or refer to the listing of sales and service offices on the back cover. 

Terms 

In the U.S., terms of payment are net 30 days. Minimum order is $50. 

, , and are accepted. 

For terms in other locations, please contact the sales office nearest you. 

A.2

Inquiry Form Instrumentation Catalog 2000 - 2001 

TELEFAX INQUIRY 

Name 

Title 

Company 

Street 

To 

INFICON Inc. 

See back cover for the 

sales office nearest you. 

City/State,Zip/Postal Code 

Phone 

Fax 

E-mail 

Please fill in your request for quote and we will fax back pricing information. 

For Office 

Use Only 

Part No. Quantity Brief Description Price 

Place/Date 

Signature

UNITED STATES 

Sales and Service Offices 

CALIFORNIA 

6878 Santa Teresa Boulevard 

San Jose, CA 95119 

Sales: 

Tel: 408-436-2828 

Fax: 408-361-1274 

Email: reachus@inficon.com 

Service: 

Tel: 408-436-1120 

Fax: 408-361-1274 

Email: service.usa@inficon.com 

17932 Sky Park Circle, Ste. C 

Irvine, CA 92614 

Tel: 949-261-2956 

Fax: 949-261-2959 

COLORADO 

Prima West Sales 

33 Castle Peak Lane 

Edwards, CO 81632 

Tel: 970-926-9240 

Fax: 970-926-9241 

GEORGIA 

Schoonover, Inc. 

5490 Crossroads Dr. Ste. 5 

Acworth, GA 30102 

Tel: 800-331-2808 

Fax: 770-924-5441 

ILLINOIS 

1339 W. Byron Street 

Chicago, IL 60613 

Tel: 773-935-0521 

Fax: 773-935-0626 

Vacuum One 

2502 N. Clark Street, Suite 207 

Chicago, IL 60614 

Tel: 773-244-3102 

Fax: 773-244-3975 

MASSACHUSETTS 

154 Hickory Hills Road 

N. Andover, MA 01845 

Tel: 978-725-4933 

Fax: 978-725-3280 

MINNESOTA 

Vacuum One 

9757 W. 208th Street 

Lakeville, MN 55044 

Tel: 612-469-5340 

Fax: 617-924-2234 

NEW YORK 

Hudson Valley High Vacuum 

9 Mill Creek Drive 

E. Greenbush, NY 12061 

Tel: 518-477-6964 

Fax: 518-477-7480 

Email: hv2@worldnet.att.net 

Service 

Two Technology Place 

East Syracuse, NY 13053 

Tel: 315-434-1167 

Fax: 315-434-2551 


OHIO 

One Corporate Exchange #100 

25825 Science Park Drive 

Cleveland, OH 44122 

Tel: 216-766-5735 

Fax: 216-766-5749 

OREGON 

Alpha & Omega Ent. 

2925 Ascot Circle 

West Linn, OR 97068 

Tel: 503-657-6244 

Fax: 503-212-0134 

PENNSYLVANIA 

AOTA-VAC 

747 Hunt Club Lane 

Chester Springs, PA 19425 

Tel: 610-363-0545 

Fax: 610-363-3830 

Email: aotavac@aol.com 

TEXAS 

4020 S. Industrial Drive, Ste. 145 

Austin, TX 78744 

Sales and Service: 

Tel: 512-448-0488 

Fax: 512-448-0398 


WASHINGTON 

7544 Delaware 

Vancouver, WA 98663 

Tel: 360-696-0946 

Fax: 360-696-0962 

ASIA 

CHINA 

Sales & Service: 

12/F, Belgian Bank Tower 

77 Gloucester Road 

Wanchai, Hong Kong 

Tel: 852-2520-2880 

Fax: 852-2865-6883 

Email: reach.china@inficon.com 

1/F, East Office Building 

Shanghai Yangtze New World Hotel 

2099 Yanan Road West 

Shanghai 200336, P.R. China 

Tel: 86-21-6209-3094 

Fax: 86-21-6295-2852 

1608, Landmark Tower 

8 North Dongsanhuan Road 

Chaoyang District 

Beijing 100004 

Tel: 86-10-6590-0165 

Fax: 86-10-6590-0521 

CHINA 

Service: 

Rm B08 Weicheng Business Bldg. 

No. 35 Xiaoyn Road 

Beijing 100027 

Tel: 86-10-6460-4920 

Fax: 86-10-6460-6140 

TAIWAN 

No. 416, Section 3 

Chung Hsin Road 

Hsinchu 300 

Tel: 88-635-933-988 

Fax: 88-635-833-999 

Email: reach.taiwan@inficon.com 

Sales: 

Tel: 88-635-933-988 

Fax: 88-635-833-999 

Service: 

Tel: 88-635-829-077 

Fax: 88-635-829-340 

JAPAN 

Tobu A.K. Bldg. 4th Floor 

23-3, Shin-Yokohama 3-chome 

Kohoku-ku, Yokohama 222 

Tel: 81-45-471-3330 

Fax: 81-45-471-3323 

Email: reach.japan@inficon.com 

Central Shin-Osaka Bldg. 9th Floor 

5-36, Miyahara 4-chome 

Yodogawa-ku, Osaka 532 

Tel: 81-6-393-5211 

Fax: 81-6-393-5215 

Service: 

Tsukuba Minami Daiichi Kogyo 

Danchi 

21 Kasumi-no-Sato Ami-machi 

Inashiki-gun 

Ibaraki-ken 300-03 

Tel: 81-298-89-2841 

Fax: 81-298-89-2838 

KOREA 

Shinahn Building 3rd Floor 

173-1, 2-ga Changchoong-Dang 

Choong-ku, Seoul 100-392 

Tel: 82-2-2270-1330 

Fax: 82-2-2271-1568 

Email: reach.korea@inficon.com 

SINGAPORE 

1 Tuas South Street 3 

Singapore 638043 

Tel: 65-865-1861 

Fax: 65-862-3349 

Email: reach.singapore@inficon.com.sg 

EUROPE 

FRANCE 

7, Avenue du Quebec 

Z.A. de Courtaboeuf B.P. 42 

F-91942 

Tel: 33-1-6982-4800 

Fax: 33-1-6907-5738 

Email: reach.france@inficon.com 

Agence Rohone Alpes 

1 D Traverse les Aubepines 

Lotissement les Aubepines 

38450 VIF 

Tel: 33-4-7672-5215 

Fax: 33-4-7672-5235 

GERMANY 

Sales: 

Fliederstr. 12 

63486 Bruchkobel 

Tel: 49-61-81-78852 

Fax: 49-61-81-78843 

Email: reach.germany@inficon.com 

Nadistrasse 32 

D-80809 Munich 

Tel: 49-89357-09220 

Fax: 49-8935-709-219 

GERMANY 

Service: 

Bonner Strasse 498 

D-50968 Cologne 

Tel: 49-221-347-2222 

Fax: 49-221-347-1082 

Email: service.leakdetection@inficon.com 

UNITED KINGDOM 

Waterside Way 

Plough Lane 

London SW17 OHB 

Tel: 44-208-971-7000 

Fax: 44-208-971-7001 

Email: reach.unitedkingdom@inficon.com 

LIECHTENSTEIN 

Service: 

FL-9496 Balzers 

Principality of Liechtenstein 

Tel: 423-388-3222 

Fax: 423-388-3726 

Email: 

service.europe@inficon.com 

CORPORATE OFFICE: 

Two Technology Place, East Syracuse, NY 13057 USA 

Tel: +315.434.1100 Fax: +315.437.3803 Email: reachus@inficon.com 

UNITED STATES TAIWAN JAPAN KOREA SINGAPORE GERMANY FRANCE UNITED KINGDOM CHINA 

Visit our website for contact information and other sales offices worldwide. www.inficon.com 

Due to INFICON’s continuing program of product improvements, specifications are subject to change without notice. 

ylla67a1(ooo8) ©2000 INFICON Inc.

B2 - Schoonover, Inc.

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