B2 - Schoonover, Inc.

Residual Gas and Process Gas Analyzers
FabStar TM Gas Analysis System
FabStar TM
Gas Analysis System
Exhaust Abatement and
Process Optimization
Reliable Identification of Gases at
Atmospheric Pressure
FabStar is a corrosive-resistant, benchtop gas analysis system that provides
quantitative and qualitative analysis of gases in semiconductor fabrication
facilities. Its user interface provides maximum flexibility for correlation of
FabStar data with process conditions.
Semiconductor Applications
♦ Exhaust Abatement
♦ Process Optimization
♦ Process Research
♦ Alternative Chemistries
♦ Scrubber Efficiency
♦ PFC Research
♦ Gas Optimization
FabStar Features at a Glance
♦ Simple operation and fast response time
♦ Qualitative and quantitative analysis
♦ Monitors up to 64 components
♦ Detection limits down to ppm level
♦ No memory effects
FabStar Offers
♦ Valve control and system operation via software
Specifications
Mass Range
1 - 100 amu
1 - 200 amu
1 - 300 amu
Gas Connection Stainless steel capillary
1/16" O.D. (1.6 mm O.D.)
3.28' (1 meter length)
Gas Inlet
Valve control via software with two stage pressure reduction
Sampling Pressure 1 atmosphere (760 torr) (1 bar)
Capillary Temperature Up to 200û C
Dimensions (WxHxL) 11" x 16" x 28" (280x420x710 mm)
Weight
99 lbs. (45 kg)
Configuration
♦ Qualitative analysis of all gases using spectrum libraries
♦ Quantitative analysis with concentration algorithm and
statistical functions
4
1
2
♦ Gas concentrations plotted over user-defined times to identify trends
3
Note: Contact the sales office nearest you for ordering information.
Key:
1 Heating conditioning of the analysis chamber
2 Heated gas inlet chamber
3 Temperature controlled gas transfer line (capillary)
4 Quadrupole mass spectrometer
B2.26