B2 - Schoonover, Inc.

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Vacuum Valves Gas Dosing Systems Gas Dosing Systems Upstream control Downstream control for small gas flow VDM005-X VCC500-Z or VDE016-X VCC500-Z or VCA200-Z e.g. PC IPC PLC MC Pressure gauges Process Chambers B8.24
Control Valves Vacuum Valves Control Valve VDM005-X ♦ Fast pressure control in a vacuum system ♦ Wide control range at low cost ♦ Withstands corrosive gases Ð stainless steel / FPM ♦ Valve closes automatically in case of a power failure Technical Data Vacuum connection DN 5 mm / M 14 x 1 Gas flow, controllable min. mbar l/s 1 x 10 -5 max. mbar l/s 100 Pressure, absolute min. mbar 1 x 10 -8 max. bar 1.5 Closing / opening time ms 150 / 100 Type VDM005-X Ordering Information 1) 250-515 Tightness mbar l/s 1 x 10 -9 Actuator solenoid Controller VCC500-Z Bakeout temperature Housing / actuator ¡C 80 / 60 Ambient temperature ¡C 5 Ð 40 Supply V DC / W 24 / 2 Housing stainless steel Seal FPM Weight 1) g 80 Cable VCC Ð VDM 3 m 216-160 5 m 216-161 10 m 216-162 15 m 216-163 20 m 216-164 25 m 216-165 Connection DN 10 ISO-KF 250-080 Tube OD 1/4″ 250-085 Tube OD 6 mm 250-086 B8 1) Flag receptacles included B8.25
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INSTRUMENTATION CATALOG 2 0 0 0 - 2
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B1 FABGUARDTM Sensor Integration an
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FabGuard TM Sensor Integration and
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Residual Gas and Process Gas Analyz
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Applications and Accessories Residu
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Transpector® 2 Gas Analysis System
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TranspectorWare TM Software Residua
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Transpector® XPR Gas Analysis Syst
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Preclude TM Photoresist Detector Re
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Preclude TM Photoresist Detector Re
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Transpector® CIS2 Gas Analysis Sys
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PPM 422 Plasma Process Monitor Resi
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Composer® Gas Composition Controll
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TWare32 TM for Windows ® 95/98/NT/
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TWare32 TM for Windows® 95/98/NT/2
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TWare32 TM for Windows ® 95/98/NT/
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IPC400 Pumping Packages Residual Ga
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B3 Thin Film Metrology Sensor Syste
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LES1200 Thin Film Metrology Sensor
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LES1200 Thin Film Metrology Sensor
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OES1200 Optical Emission Sensor Thi
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OES1200 Optical Emission Sensor Thi
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Thin Film Deposition Controllers an
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Leak Detectors Contents General App
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Leak Detectors Leak Detection - Lea
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Leak Detectors Leak Detection Metho
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Leak Detectors Operating Principles
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Leak Detectors ULTRATEST UL 200 Hel
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Leak Detectors Modul 200 Mobile and
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Leak Detectors Mobile Leak Detectio
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Leak Detectors LDS 1000 Modular Lea
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Leak Detectors ULTRATEST UL 500 Sta
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Leak Detectors ULTRATEST UL 500 dry
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Leak Detectors Protec Helium Sniffe
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Leak Detectors Ecotec II Sniffer Le
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Leak Detectors HLD4000A Sniffer Lea
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Leak Detectors Contura Z Helium Lea
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Leak Detectors Calibrated Leaks Cal
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Leak Detectors Screw-in Calibrated
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Leak Detectors Helium Sample Probes
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Leak Detectors Accessories for UL 2
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Leak Detectors Connection Flanges a
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Vacuum Gauges Contents General Basi
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Vacuum Gauges Transmitter Technolog
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Vacuum Gauges SKY TM Capacitance Di
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Vacuum Gauges Bayard-Alpert Pirani
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Vacuum Gauges Bayard-Alpert Pirani
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Vacuum Gauges Pirani Standard Gauge
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Vacuum Gauges Pirani Standard Gauge
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Vacuum Gauges Bayard-Alpert Gauge F
Page 137 and 138: Vacuum Gauges Penning Gauge PEG100
Page 139 and 140: Vacuum Gauges Vacuum Gauge Controll
Page 141 and 142: Vacuum Gauges Vacuum Gauge Controll
Page 143 and 144: Vacuum Gauges Calibration Service C
Page 145 and 146: Vacuum Feedthroughs Contents Produc
Page 147 and 148: Vacuum Feedthroughs Rotary Feedthro
Page 149 and 150: Vacuum Feedthroughs Linear Motion F
Page 151 and 152: Vacuum Feedthroughs Viewports ISO-K
Page 153 and 154: Vacuum Feedthroughs Viewports CF
Page 155 and 156: Vacuum Feedthroughs Electrical Feed
Page 157 and 158: Vacuum Feedthroughs Electrical Feed
Page 159 and 160: Vacuum Feedthroughs Coaxial Feedthr
Page 161 and 162: Vacuum Feedthroughs Liquid Feedthro
Page 163 and 164: Vacuum Feedthroughs Lubricants and
Page 165 and 166: Vacuum Valves B8
Page 167 and 168: Angle and Inline Valves Vacuum Valv
Page 177 and 178: Angle Valves Vacuum Valves Solenoid
Page 179 and 180: Angle Valves Vacuum Valves Type DN
Page 181 and 182: Butterfly Valves Vacuum Valves Conn
Page 183 and 184: Butterfly Valves Vacuum Valves VBP1
Page 185 and 186: Gas Dosing Valves Vacuum Valves Gas
Page 187: Gas Dosing Valves Vacuum Valves Man
Page 191 and 192: Controllers Vacuum Valves Controlle
Page 193 and 194: Venting Valves Vacuum Valves Ventin
Page 195 and 196: Safety Valves Vacuum Valves Safety
Page 197 and 198: Vacuum Locks and Sealing Valves Vac
Page 199 and 200: Vacuum Fittings Fittings and Ultra-
Page 201 and 202: General Vacuum Fittings Seals Seal
Page 203 and 204: ISO-KF Small Flange Components Vacu
Page 215 and 216: ISO-K Clamp Flange Components Vacuu
Page 223 and 224: ISO-F Fixed Flange Components Vacuu
Page 225 and 226: UHV CF Components Vacuum Fittings C
Page 227 and 228: UHV CF Components Vacuum Fittings F
Page 229 and 230: UHV CF Components Vacuum Fittings F
Page 231 and 232: UHV CF Components Vacuum Fittings P
Page 233 and 234: UHV CF Components Vacuum Fittings P
Page 235 and 236: Oil Diffusion Pumps Contents Produc
Page 237 and 238: Oil Diffusion Pumps Diffusion Pumps
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Oil Diffusion Pumps Diffusion Pumps
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Oil Diffusion Pumps Pump Accessorie
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Oil Diffusion Pumps Baffle Baffle W
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Oil Diffusion Pumps Refrigerator Re
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Oil Diffusion Pumps LN 2 Supply Ind
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Oil Diffusion Pumps Pumping System
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Oil Diffusion Pumps Titanium Sublim
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Oil Diffusion Pumps Pumping Body Pu
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Oil Diffusion Pumps Catalyzer Trap
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Product Index Instrumentation Catal
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Product Index Instrumentation Catal
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Inquiry Form Instrumentation Catalo
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B2 - Schoonover, Inc.

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