B2 - Schoonover, Inc.

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Residual Gas and Process Gas Analyzers Contents General Applications and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.3 Products Transpector¨ 2 Gas Analysis System. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.4 TranspectorWare TM Software. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.10 Transpector¨ 2 Gas Analysis System Upgrade Package . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.12 Transpector¨ XPR 2 Gas Analysis System. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.14 Preclude TM Photoresist Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.17 Transpector¨ CIS2 Gas Analysis System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.20 Fabstar TM Gas Analysis System. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.26 PPM 422 Plasma Process Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.27 Composer¨ Gas Composition Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.28 TWare32 TM for Windows¨ 95/98/NT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.31 Pressure Converters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.36 IPC400 Pumping Packages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.37 B2.2
Applications and Accessories Residual Gas and Process Gas Analyzers Applications and Accessories Transpector 2 Transpector XPR 2 Preclude Transpector CIS 2 FabStar PPM 422 Composer B2 Applications Production of semiconductors Vacuum measurement systems Research and development Multi-chamber systems Calibration systems Lamps and tubes manufacture Cluster systems Particle accelerators Gas analysis Sputtering Vacuum furnaces Leak testing CVD Process monitoring Process control Process troubleshooting Accessories ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ Compact sensor ◆ ◆ High-performance sensor Pressure converters Software (TranspectorWare or TWare 32) Atmospheric sampler Heating jackets ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ ◆ . B2.3
Page 1 and 2: INSTRUMENTATION CATALOG 2 0 0 0 - 2
Page 3 and 4: B1 FABGUARDTM Sensor Integration an
Page 5 and 6: FabGuard TM Sensor Integration and
Page 7: Residual Gas and Process Gas Analyz
Page 11 and 12: Transpector® 2 Gas Analysis System
Page 17 and 18: TranspectorWare TM Software Residua
Page 21 and 22: Transpector® XPR Gas Analysis Syst
Page 23 and 24: Preclude TM Photoresist Detector Re
Page 25 and 26: Preclude TM Photoresist Detector Re
Page 27 and 28: Transpector® CIS2 Gas Analysis Sys
Page 33 and 34: PPM 422 Plasma Process Monitor Resi
Page 35 and 36: Composer® Gas Composition Controll
Page 37 and 38: TWare32 TM for Windows ® 95/98/NT/
Page 39 and 40: TWare32 TM for Windows® 95/98/NT/2
Page 41 and 42: TWare32 TM for Windows ® 95/98/NT/
Page 43 and 44: IPC400 Pumping Packages Residual Ga
Page 45 and 46: B3 Thin Film Metrology Sensor Syste
Page 47 and 48: LES1200 Thin Film Metrology Sensor
Page 49 and 50: LES1200 Thin Film Metrology Sensor
Page 51 and 52: OES1200 Optical Emission Sensor Thi
Page 53 and 54: OES1200 Optical Emission Sensor Thi
Page 55 and 56: Thin Film Deposition Controllers an
Page 57 and 58: Thin Film Deposition Controllers an
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Thin Film Deposition Controllers an
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Leak Detectors Contents General App
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Leak Detectors Leak Detection - Lea
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Leak Detectors Leak Detection Metho
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Leak Detectors Operating Principles
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Leak Detectors ULTRATEST UL 200 Hel
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Leak Detectors Modul 200 Mobile and
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Leak Detectors Mobile Leak Detectio
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Leak Detectors LDS 1000 Modular Lea
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Leak Detectors ULTRATEST UL 500 Sta
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Leak Detectors ULTRATEST UL 500 dry
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Leak Detectors Protec Helium Sniffe
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Leak Detectors Ecotec II Sniffer Le
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Leak Detectors HLD4000A Sniffer Lea
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Leak Detectors Contura Z Helium Lea
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Leak Detectors Calibrated Leaks Cal
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Leak Detectors Screw-in Calibrated
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Leak Detectors Helium Sample Probes
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Leak Detectors Accessories for UL 2
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Leak Detectors Connection Flanges a
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Vacuum Gauges Contents General Basi
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Vacuum Gauges Transmitter Technolog
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Vacuum Gauges SKY TM Capacitance Di
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Vacuum Gauges Bayard-Alpert Pirani
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Vacuum Gauges Bayard-Alpert Pirani
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Vacuum Gauges Pirani Standard Gauge
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Vacuum Gauges Pirani Standard Gauge
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Vacuum Gauges Bayard-Alpert Gauge F
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Vacuum Gauges Penning Gauge PEG100
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Vacuum Gauges Vacuum Gauge Controll
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Vacuum Gauges Vacuum Gauge Controll
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Vacuum Gauges Calibration Service C
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Vacuum Feedthroughs Contents Produc
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Vacuum Feedthroughs Rotary Feedthro
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Vacuum Feedthroughs Linear Motion F
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Vacuum Feedthroughs Viewports ISO-K
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Vacuum Feedthroughs Viewports CF
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Vacuum Feedthroughs Electrical Feed
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Vacuum Feedthroughs Electrical Feed
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Vacuum Feedthroughs Coaxial Feedthr
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Vacuum Feedthroughs Liquid Feedthro
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Vacuum Feedthroughs Lubricants and
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Vacuum Valves B8
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Angle and Inline Valves Vacuum Valv
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Angle Valves Vacuum Valves Solenoid
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Angle Valves Vacuum Valves Type DN
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Butterfly Valves Vacuum Valves Conn
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Butterfly Valves Vacuum Valves VBP1
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Gas Dosing Valves Vacuum Valves Gas
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Gas Dosing Valves Vacuum Valves Man
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Control Valves Vacuum Valves Contro
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Controllers Vacuum Valves Controlle
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Venting Valves Vacuum Valves Ventin
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Safety Valves Vacuum Valves Safety
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Vacuum Locks and Sealing Valves Vac
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Vacuum Fittings Fittings and Ultra-
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General Vacuum Fittings Seals Seal
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ISO-KF Small Flange Components Vacu
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ISO-K Clamp Flange Components Vacuu
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ISO-F Fixed Flange Components Vacuu
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UHV CF Components Vacuum Fittings C
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UHV CF Components Vacuum Fittings F
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UHV CF Components Vacuum Fittings F
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UHV CF Components Vacuum Fittings P
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UHV CF Components Vacuum Fittings P
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Oil Diffusion Pumps Contents Produc
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Oil Diffusion Pumps Diffusion Pumps
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Oil Diffusion Pumps Diffusion Pumps
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Oil Diffusion Pumps Pump Accessorie
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Oil Diffusion Pumps Baffle Baffle W
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Oil Diffusion Pumps Refrigerator Re
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Oil Diffusion Pumps LN 2 Supply Ind
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Oil Diffusion Pumps Pumping System
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Oil Diffusion Pumps Titanium Sublim
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Oil Diffusion Pumps Pumping Body Pu
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Oil Diffusion Pumps Catalyzer Trap
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Product Index Instrumentation Catal
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Product Index Instrumentation Catal
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Inquiry Form Instrumentation Catalo
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B2 - Schoonover, Inc.

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