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B2 - Schoonover, Inc.

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Vacuum Gauges<br />

SKY TM Capacitance Diaphragm Gauge<br />

Protocol<br />

Technical Data<br />

Data rate switch<br />

Cable length<br />

125 Kbps m (ft)<br />

250 Kbps m (ft)<br />

500 Kbps m (ft)<br />

MAC ID<br />

Network size<br />

Digital functions<br />

Analog functions<br />

Visual communication indicators<br />

Electrical connector<br />

Specifications<br />

(ODVA Semiconductor Special Interest Group<br />

DeviceNet ODVA Specifications<br />

CDG045-SD<br />

DeviceNetª, group 2 slave only<br />

25 k, 250 k, 500 kBaud and programmable over network<br />

500 (1650)<br />

250 (825)<br />

100 (330)<br />

2 switches (address 00-63) or programmable over network<br />

up to 64 nodes per segment<br />

Read pressure, set 2 interlock relays A + B,<br />

select units: Torr, mbar, Pa, set zero over network (digital only)<br />

analog zero must be set with zero potentiometer,<br />

monitor: heater, gauge status, trip point high and low hysteresis,<br />

save state allows definition of behavior in case of error, detailed alarm and warning information<br />

Pressure monitor analog output 0 Ð 10 V<br />

LED network status (green/red)<br />

LED module status (green/red)<br />

2 LED interlock relays A + B (green/off)<br />

Micro style connector (with power and signal line), 5 pin<br />

DeviceNetª ÒVacuum Gauge Device ProfileÓ<br />

Interface Guidelines for DeviceNetª Devices on Semiconductor Manufacturing Tools<br />

Interface Guidelines Conformance Test Procedures<br />

Device type<br />

DeviceNet<br />

Explicit peer to peer messaging<br />

I/O peer to peer messaging<br />

Configuration consistency value<br />

Faulted node recovery<br />

Baud rates<br />

k Baud<br />

Master/Scanner<br />

I/O slave messaging<br />

Bit Strobe<br />

Polling<br />

Cyclic<br />

Change of State (COS)<br />

Interlock relays<br />

Range<br />

Relay contact<br />

Hysteresis<br />

Contact rating<br />

V / A DC<br />

Relay status<br />

Connector<br />

Supply for DeviceNetª and sensor together V DC<br />

Connectors for DeviceNetª<br />

for CDG, analog output and Interlock relay<br />

DeviceNet<br />

CDG045-SD<br />

generic<br />

no<br />

no<br />

no<br />

no<br />

125<br />

250<br />

500<br />

no<br />

no<br />

yes<br />

yes<br />

yes<br />

2<br />

1 x 10 -4 x F.S. É F.S.<br />

n.o., potential free<br />

adjustable over complete range<br />

60 / 0.5<br />

LED green<br />

D sub, 15 pin<br />

11 É 25<br />

Microstyle, 5 pin<br />

D sub, 15 pin<br />

B6.10

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