B2 - Schoonover, Inc.

Leak Detectors
Modul 200 Mobile and Flexible Helium Leak Detector
Modul 200 Mobile and
Flexible Helium Leak Detector
The Modul 200 combines the excellent characteristics of the UL 200
with those of the pump system which has been added to the basic
leak detector module.
The Modul 200 is available in two basic groups:
◆ Dry, mobile leak detectors with selectable pumping speed Ð in
combination with a laboratory trolley suitable for clean room applications
◆ Oil-sealed, mobile leak detectors offering a high pumping speed at an
optimum price-to-performance ratio.
Modul 200 with Dry-Compressing
Scroll Pump
This combination represents a dry high-performance leak detector.
Advantages
◆ Very high pumping speed which is also acceptable for testing
semiconductor production chambers without having to use their own
pump systems
◆ Fast response
◆ Quick recovery (after helium contamination)
◆ Absolutely dry
◆ High sensitivity
Typical Applications
All applications which demand a clean process.
Modul 200 with Oil-Sealed
Backing Pump
This combination represents a powerful leak detector, the pumping speed of
which is adapted to the particular application in each case.
Advantages
◆ Cost-effective leak detector
◆ Pumping speed optimized for the particular application
◆ Fast response
◆ Quick recovery
◆ High sensitivity
Typical Applications
All applications involving short cycles and/or larger volumes and which
require a mobile system
◆ Automotive industry
◆ Cooling and air conditioning
◆ Manufacturers of furnaces/machines/systems
◆ Packaging
◆ Semiconductor industry (chip manufacturers)
◆ Semiconductor industry (tool manufacturers and subcontractors)
◆ High purity gas industry
◆ Research and development
◆ UHV applications
B5.12