B2 - Schoonover, Inc.

Vacuum Gauges
Bayard-Alpert Pirani Gauge BPG400
Bayard-Alpert Pirani Gauge BPG400
This outstanding Bayard-Alpert Pirani Combination Gauge
(optional: with display) provides the functions of two gauges in a
single compact unit measuring from atmosphere to 5 x 10 -10 mbar
(3.8 x 10 -10 Torr). This reduces the complexity of installation, setup,
and use of vacuum measurement on the system. The integrated
Pirani protects the hot ion filament from burning out and reduces
the contamination by automatically switching it off at high pressures.
The optional integrated LCD display offers pressure reading and
status information. The BPG400 provides the best performance
for process and base pressure measurement in the most
economic package.
Patent granted on electronics Ð Patent pending on sensor
Advantages
♦ Extremely wide measurement range from 5 x 10 -10 mbar
(3.8 x 10 -10 Torr) to atmosphere combined with excellent repeatability
in the process pressure range (less than ±5%)
♦ Long-life yttrium oxide coated iridium cathode
♦ Robust, compact construction
♦ Easy integration:
Ð one formula produces a logarithmic analog output over entire
pressure range
Ð no interlock with other gauges is necessary
Ð RS 232 C interface
♦ Cost savings:
Ð single gauge instead of two
Ð single flange connection to the system
Ð single cable
♦ Single flange connection reduces probability of leaks
♦ Easy use:
Ð automatic high vacuum adjustment of Pirani through hot ion gauge
Ð optional integrated LCD display for pressure reading and
information status
Ð optional bakeout extension
Typical Applications
♦ Pressure measurement in semiconductor processes and
transfer chambers
♦ Industrial coating (PVD)
♦ General vacuum measurement and control on systems in rough to
high vacuum range
Advantages of BPG400 Over
Conventional Technology
Conventional hot ion gauges used for high vacuum measurement can only
be operated below atmospheric pressures typically in the range below
10 -2 mbar (Torr). When operated at higher pressures the filament lifetime is
dramatically reduced and may burn out almost immediately. Therefore, hot
ion gauges must be switched on only at specified operating pressures.
Usually, a fore vacuum gauge (Pirani) controls the switching on and off of
the hot ion gauge. Such systems consist of two gauges with the necessary
tubing, cabling and corresponding costly signal processing, which is done
by PLC software or hardwiring.
♦ High reliability:
Ð Pirani protects filament from burn out
(withstands air inrush > 10,000 times)
Ð In the unlikely case of failure the sensor can be easily replaced
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