B2 - Schoonover, Inc.

General
Thin Film Deposition Controllers and Monitors
Thin Film Deposition Controllers
Controller
Vacuum Feedthrough
Oscillator
Water
and air
Components for the production of thin films
Introduction
Crystal sensor
Vacuum system
Quartz
monitor
crystal
However simple or complex your process, INFICON has a thin film
deposition controller to meet your needs. All models use ModeLock, our
revolutionary, patented measurement system, making them the most
precise, most advanced controllers available.
A controller, oscillator assembly, vacuum feedthrough, crystal sensor
and crystals are necessary to produce thin films in new installations.
Fewer components are required when upgrading existing systems.
Unsurpassed Performance
ModeLock provides crystal frequency information with precision
unobtainable from conventional active oscillator systems. This precision,
combined with control algorithms tailored to your deposition process,
provides unsurpassed performance for long crystal life, low-rate
depositions, and overall rate control.
ModeLockÕs extension of crystal life is especially impressive. For some
materials this system increases crystal life by nearly 100%.
We call our system ModeLock because it virtually eliminates Òmode
hopping,Ó a failure to maintain crystal oscillation at the fundamental
frequency. ModeLock offers a single-measurement resolution of 0.005 Ð
even while measuring at ten times per second. This kind of precision means
smoother rate control Ð especially important at low rates of deposition.
How ModeLock Works
Conventional measurement uses the quartz monitor crystal to control the
oscillator circuit. As the electrical characteristics of the crystal change
during deposition, the oscillator circuit becomes less stable, eventually
ÒhoppingÓ to another resonant frequency or failing completely.
ModeLock is faster, more powerful and more precise. It continually tests
and analyzes the phase/frequency relationship of the monitor crystal.
ModeLock generates a precise frequency and applies it to the crystal.
It then analyzes the returned phase and frequency information, makes
comparisons, and computes the new resonant frequency. The entire
process occurs thousands of times per second, yet distinguishes resonant
frequencies 0.0055 Hz apart.
ModeLockÕs intelligent link between monitor crystal and instrument
enhances crystal performance. ItÕs the fastest available measurement
system, providing the highest precision and freedom from mode hopping.
You enjoy improved yield, throughput, and quality.
Extending Crystal Life in
Sputtering Processes
All controllers come with INFICONÕs RateWatcher ¨ feature, which provides
long-term rate control for in-line or load-locked sputtering processes.
RateWatcher ¨ takes advantage of a sputtering sourceÕs short-term stability
by sampling the deposition rate periodically. In a cycle that may repeat
indefinitely, RateWatcher ¨ opens a shutter on the sensor, exposes it to
the deposition source, adjusts the power to achieve the desired deposition
rate, recloses the shutter, then holds power at the adjusted level.
This sampling approach greatly extends the life of the crystal, allowing
automatic correction of rate changes due to cathode wear.
Security Times Six
All INFICON deposition controllers can be equipped with the optional,
patented CrystalSix TM sensor, which holds six crystals. Whenever one crystal
becomes unstable or fails, the deposition controller signals the CrystalSix to
automatically sequence to the next crystal for uninterrupted control.
Because ModeLock nearly doubles the life of each crystal, the CrystalSix
sensor lets you deposit without interruptions up to twelve times as long as a
conventional single-crystal system, significantly enhancing process security.
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