B2 - Schoonover, Inc.

Residual Gas and Process Gas Analyzers
Transpector® CIS2 Gas Analysis System
Technical Data
Transpector ® CIS2 Gas Analysis System
1 to 100, 1 to 200 or 1 to 300 amu
Mass range
5 Depends on orifice size selected in the inlet system.
Detector type
Resolution (per 1993 AVS Recommended Practice)
Base pressure performance
(UHV system after 8-hour bake @ 200¡C)
Ambient temperature
Relative humidity
Utility requirements
high-performance combination electron multiplier/Faraday cup (EM/FC)
< 1 amu wide @ 10% peak height over entire mass range
< 5 x 10 -9 Torr ( 6.6 x 10 -9 mbar)
(UHV system after 8-hour bake @ 200¡C)
20¡C to 50¡C
² 80%
No rack space required.
110/120 VAC, 4-amp or 220/240 VAC, 2-amp outlet located at the power module
110/120 VAC, 1.5-amp or 220/240 VAC, 0.75-amp outlet located at the foreline pump
70-110 psig (5.8-8.6 bar) of compressed air located near the compound pump
15 psig (1.3 bar) of dry nitrogen located at the compound pump for CVD/etch applications (10 sccms consumption)
Sensitivity
35 eV @ 200 mA 70 eV @ 2000 mA
EM/FC (as FC)
measured @ 3 x 10 -3 Torr (4 x 10 -3 mbar)
measured @ 1 x 10 -7 Torr (1.3 x 10 -7 mbar)
EM/FC (as EM) 1
Process Monitoring
Background Monitoring
³ 1 x 10 -6 amps/Torr (7.6 x 10 -7 amps/mbar) ³ 1 x 10 -5 amps/Torr (7.6 x 10 -6 amps/mbar)
³ 1 amps/Torr (0.76 amps/mbar) ³ 10 amps/Torr (7.6 amps/mbar)
Zero blast
< 1 ppm contribution of zero blast @ mass 2 with 3 mTorr of Ar
PVD ION SOURCE
Ion source conductance
Process pressure range 2
Minimum detectable composition change 3
0.1 l/s (1 x 10 -4 m3/s)
1 to 10 mTorr (1.3 x 10 -3 to 1.3 x 10 -2 mbar)
0.2 ppm
Minimum detectable partial pressure
35 eV @ 200 mA 70 eV @ 2000 mA
EM/FC (as EM)
CVD/ETCH ION SOURCE
Ion source conductance
² 5 x 10 -13 Torr (6.6 x 10 -13 mbar) ² 5 x 10 -14 Torr (6.6 x 10 -14 mbar)
0.7 l/s (7 x 10-4 m3/s)
Process pressure range
(defined by orifice diameter in inlet system)
Orifice Size (Optimum Pressure)
0.01, 0.1, 1, 10, 100 Torr
(0.013, 0.13, 1.3, 13, 133 mbar)
Minimum detectable composition change 3
< 1 ppm
1, 4, 5
Minimum detectable partial pressure
Maximum pressure EM/FC (as EM) 35 eV @ 200 m
35 eV @ 200 mA 70 eV @ 2000 mA
0.01 Torr (0.013 mbar)
² 5 x 10 -12 Torr (6.6 x 10 -12 mbar) ² 1 x 10 -12 Torr (1.3 x 10 -12 mbar)
0.1 Torr (0.13 mbar)
² 5 x 10 -11 Torr (6.6 x 10 -11 mbar) ² 1 x 10 -11 Torr (1.3 x 10 -11 mbar)
1 Torr (1.3 mbar)
² 5 x 10 -10 Torr (6.6 x 10 -10 mbar) ² 1 x 10 -10 Torr (1.3 x 10 -10 mbar)
10 Torr (13 mbar)
² 5 x 10 -9 Torr (6.6 x 10 -9 mbar) ² 1 x 10 -9 Torr (1.3 x 10 -9 mbar)
100 Torr (133 mbar)
² 5 x 10 -8 Torr (6.6 x 10 -8 mbar) ² 1 x 10 -8 Torr (1.3 x 10 -8 mbar)
1 Values were measured with an electron multiplier gain of 7.5 x 10 5 .
2 Higher operating pressures (up to 30 mtorr) are possible with reduced performance.
3 Value is measured as minimum detectable change of CO 2, N 2, O 2 or He ion current in the presence of 100% argon.
4 Minimum Detectable Partial Pressure (MDPP) is calculated as the standard deviation of the noise (minimum detectable signal) divided by the sensitivity of the sensor (EM or FC)
with a dwell of one second.
B2.24