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Instrumentation Catalog 2000 - 2001 Product Index L LDS1000 Modular Leak Detection System. . . . . . . . . . . . . . . . . . . . . B5.16 Leak Detectors Helium Leak Detector, LDS1000. . . . . . . . . . . . . . . . . . . . . . . B5.16 Helium Leak Detector, Modul 200. . . . . . . . . . . . . . . . . . . . . . B5.12 Helium Leak Detector, ULTRATEST UL200 . . . . . . . . . . . . . . B5.10 Helium Leak Detector, ULTRATEST UL200 dry. . . . . . . . . . . . B5.11 Helium Leak Detector, ULTRATEST UL500 . . . . . . . . . . . . . . B5.18 Helium Leak Detector, ULTRATEST UL500 dry. . . . . . . . . . . . B5.20 Modular Leak Detection System, LDS1000 . . . . . . . . . . . . . . B5.16 Refrigerant Leak Detector, HLD4000A . . . . . . . . . . . . . . . . . . B5.26 Sniffer Leak Detector, Ecotec II . . . . . . . . . . . . . . . . . . . . . . . B5.24 LES1200 Thin Film Metrology Sensor System. . . . . . . . . . . . . . . . . . . B3.3 Linear Motion Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.6 Liquid Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.18 LN2 Supply, Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.13 Lubricants and Sealing Materials, Vacuum Feedthroughs . . . . . . . . . B7.20 M Mass Spectrometers, Transpector 2 . . . . . . . . . . . . . . . . . . . . . . . . . . B2.4 Metal-Ceramic Connections, Vacuum Feedthroughs . . . . . . . . . . . . . B7.17 Mobile Helium Leak Detector, Modul 200. . . . . . . . . . . . . . . . . . . . . . B5.12 Modul 200 Helium Leak Detector. . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.12 Modular Leak Detection System, LDS1000 . . . . . . . . . . . . . . . . . . . . B5.16 N Narrowband Filters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.23 O OES1200 Optical Emission Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . B3.7 Optical Emission Sensor, OES1200 . . . . . . . . . . . . . . . . . . . . . . . . . . B3.7 Oscillators. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.12 P Penning Gauge, PEG100 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.22 Photoresist Detector, Preclude . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.17 Pirani Gauge, Bayard-Alpert, BPG-400 . . . . . . . . . . . . . . . . . . . . . . . B6.12 Pirani Standard Gauge, PSG400, PSG400-S, PSG100-S, PSG101-S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.15 Plasma Process Monitor, PPM422. . . . . . . . . . . . . . . . . . . . . . . . . . . B2.27 Portable, Dry Helium Leak Detector, UL200 dry . . . . . . . . . . . . . . . . . B5.11 Portable, Dry Helium Leak Detector, UL500 dry. . . . . . . . . . . . . . . . . B5.20 PPM422 Plasma Process Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.27 Preclude Photoresist Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.17 Pressure Converters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.36 Pressure Range, Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.3 Protec Helium Sniffer Leak Detector . . . . . . . . . . . . . . . . . . . . . . . . . B5.22 Pump Accessories, Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . . . . . B10.8 Pump Fluid Replenishing Device, Pump Accessories. . . . . . . . . . . . . B10.9 Pump Fluids . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.17 Pumping Body, Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.20 Pumping Packages, IPC400 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.37 Pumping System Controller, Diffusion Pumps . . . . . . . . . . . . . . . . . B10.16 Q Quartz Crystals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.17 R Refrigerant Leak Detectors Ecotec II Sniffer Leak Detector . . . . . . . . . . . . . . . . . . . . . . . . B5.24 HLD4000A Refrigerant Leak Detector. . . . . . . . . . . . . . . . . . . B5.26 Refrigerator, Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.12 Residual Gas Analyzers (RGA) Transpector 2 Gas Analysis System . . . . . . . . . . . . . . . . . . . . . B2.4 Transpector 2 Gas Analysis System Upgrade Package. . . . . . B2.12 Transpector XPR2 Gas Analysis System . . . . . . . . . . . . . . . . B2.14 Transpector CIS2 Gas Analysis System . . . . . . . . . . . . . . . . . B2.20 Rotary Feedthroughs, ISO-KF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.3 Rotary Feedthroughs, CF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.4 Rotary/Linear Motion Feedthroughs. . . . . . . . . . . . . . . . . . . . . . . . . . . B7.5 S Safety Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.31 Sealing Material, Vacuum Feedthroughs . . . . . . . . . . . . . . . . . . . . . . B7.21 Sealing Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.33 Seals, Components. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.3 Sensor Integration and Analysis System, FabGuard . . . . . . . . . . . . . . B1.3 Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.13 Sentinel III Thin Film Deposition Controller . . . . . . . . . . . . . . . . . . . . B4.18 Sky Capacitance Diaphragm Gauge, CDG025, CDG045, CDG045-SD. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.6 Sniffer Leak Detectors Ecotec II Sniffer Leak Detector . . . . . . . . . . . . . . . . . . . . . . . . B5.24 HLD4000A Refrigerant Leak Detector. . . . . . . . . . . . . . . . . . . B5.26 Sniffer Probes, Helium . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.34 Software, TranspectorWare . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.10 Software, TWare32 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.31 Stainless Steel, Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.3 Stationary Helium Leak Detector ULTRATEST UL500 Helium Leak Detector . . . . . . . . . . . . . . . B5.18 ULTRATEST UL500 dry Helium Leak Detector . . . . . . . . . . . . B5.20 T Thermal Switch, Pump Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . B10.8 Thin Film Deposition Controller IC/5 Thin Film Deposition Controller . . . . . . . . . . . . . . . . . . . . . B4.8 Sentinel III Thin Film Deposition Controller . . . . . . . . . . . . . . . B4.18 XTC/2 and XTC/C Thin Film Deposition Controllers . . . . . . . . . B4.4 Thin Film Deposition Monitor XTM/2 . . . . . . . . . . . . . . . . . . . . . . . . . . B4.6 Thin Film Metrology Sensor System, LES1200 . . . . . . . . . . . . . . . . . . B3.3 Thermostatic Cut-Out, Pump Accessories . . . . . . . . . . . . . . . . . . . . . B10.9 Thread Lubricant, Vacuum Feedthroughs . . . . . . . . . . . . . . . . . . . . . B7.20 Titanium Sublimator and Controller . . . . . . . . . . . . . . . . . . . . . . . . . B10.18 Transpector 2 Gas Analysis System . . . . . . . . . . . . . . . . . . . . . . . . . . B2.4 Transpector 2 Gas Analysis System Upgrade Package . . . . . . . . . . . B2.12 Transpector XPR2 Gas Analysis System . . . . . . . . . . . . . . . . . . . . . . B2.14 Transpector CIS2 Gas Analysis System. . . . . . . . . . . . . . . . . . . . . . . B2.20 TranspectorWare Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.10 TWare32 Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.31 D.2
Product Index Instrumentation Catalog 2000 - 2001 U UHV - CF Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.26 ULTRATEST UL200 Helium Leak Detector . . . . . . . . . . . . . . . . . . . . B5.10 ULTRATEST UL200 dry Helium Leak Detector . . . . . . . . . . . . . . . . . B5.11 ULTRATEST UL500 Helium Leak Detector . . . . . . . . . . . . . . . . . . . . B5.18 ULTRATEST UL500 dry Helium Leak Detector . . . . . . . . . . . . . . . . . B5.20 Upgrade Package for Transpector 2 Gas Analysis System. . . . . . . . . B2.12 V Vacuum Ball Bearings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.19 Vacuum Gauge Controller, VGC103 . . . . . . . . . . . . . . . . . . . . . . . . . B6.24 Vacuum Grease/Oil, Vacuum Feedthroughs. . . . . . . . . . . . . . . . . . . . B7.20 Vacuum Locks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.33 Vacuum Switch, VSA100. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.27 Valves Angle Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.3 Ball Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.34 Butterfly Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.16 Control Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.25 Gas Dosing Valves. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.21 Gate Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.20 Safety Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.31 Sealing Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.33 Venting Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.29 Venting Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.29 Viewports, Vacuum Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.7 D X XTC/2 Thin Film Deposition Controller. . . . . . . . . . . . . . . . . . . . . . . . . B4.4 XTC/C Thin Film Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . B4.4 XTM/2 Thin Film Deposition Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . B4.6 D.3
Page 1 and 2:
INSTRUMENTATION CATALOG 2 0 0 0 - 2
Page 3 and 4:
B1 FABGUARDTM Sensor Integration an
Page 5 and 6:
FabGuard TM Sensor Integration and
Page 7 and 8:
Residual Gas and Process Gas Analyz
Page 9 and 10:
Applications and Accessories Residu
Page 11 and 12:
Transpector® 2 Gas Analysis System
Page 13 and 14:
Page 15 and 16:
Page 17 and 18:
TranspectorWare TM Software Residua
Page 19 and 20:
Page 21 and 22:
Transpector® XPR Gas Analysis Syst
Page 23 and 24:
Preclude TM Photoresist Detector Re
Page 25 and 26:
Preclude TM Photoresist Detector Re
Page 27 and 28:
Transpector® CIS2 Gas Analysis Sys
Page 29 and 30:
Page 31 and 32:
Page 33 and 34:
PPM 422 Plasma Process Monitor Resi
Page 35 and 36:
Composer® Gas Composition Controll
Page 37 and 38:
TWare32 TM for Windows ® 95/98/NT/
Page 39 and 40:
TWare32 TM for Windows® 95/98/NT/2
Page 41 and 42:
TWare32 TM for Windows ® 95/98/NT/
Page 43 and 44:
IPC400 Pumping Packages Residual Ga
Page 45 and 46:
B3 Thin Film Metrology Sensor Syste
Page 47 and 48:
LES1200 Thin Film Metrology Sensor
Page 49 and 50:
LES1200 Thin Film Metrology Sensor
Page 51 and 52:
OES1200 Optical Emission Sensor Thi
Page 53 and 54:
OES1200 Optical Emission Sensor Thi
Page 55 and 56:
Thin Film Deposition Controllers an
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Page 61 and 62:
Page 63 and 64:
Page 65 and 66:
Page 67 and 68:
Page 69 and 70:
Page 71 and 72:
Page 73 and 74:
Page 75 and 76:
Page 77 and 78:
Page 79 and 80:
Leak Detectors Contents General App
Page 81 and 82:
Leak Detectors Leak Detection - Lea
Page 83 and 84:
Leak Detectors Leak Detection Metho
Page 85 and 86:
Leak Detectors Operating Principles
Page 87 and 88:
Leak Detectors ULTRATEST UL 200 Hel
Page 89 and 90:
Leak Detectors Modul 200 Mobile and
Page 91 and 92:
Leak Detectors Mobile Leak Detectio
Page 93 and 94:
Leak Detectors LDS 1000 Modular Lea
Page 95 and 96:
Leak Detectors ULTRATEST UL 500 Sta
Page 97 and 98:
Leak Detectors ULTRATEST UL 500 dry
Page 99 and 100:
Leak Detectors Protec Helium Sniffe
Page 101 and 102:
Leak Detectors Ecotec II Sniffer Le
Page 103 and 104:
Leak Detectors HLD4000A Sniffer Lea
Page 105 and 106:
Leak Detectors Contura Z Helium Lea
Page 107 and 108:
Leak Detectors Calibrated Leaks Cal
Page 109 and 110:
Leak Detectors Screw-in Calibrated
Page 111 and 112:
Leak Detectors Helium Sample Probes
Page 113 and 114:
Leak Detectors Accessories for UL 2
Page 115 and 116:
Leak Detectors Connection Flanges a
Page 117 and 118:
Vacuum Gauges Contents General Basi
Page 119 and 120:
Vacuum Gauges Transmitter Technolog
Page 121 and 122:
Vacuum Gauges SKY TM Capacitance Di
Page 123 and 124:
Page 125 and 126:
Page 127 and 128:
Vacuum Gauges Bayard-Alpert Pirani
Page 129 and 130:
Vacuum Gauges Bayard-Alpert Pirani
Page 131 and 132:
Vacuum Gauges Pirani Standard Gauge
Page 133 and 134:
Vacuum Gauges Pirani Standard Gauge
Page 135 and 136:
Vacuum Gauges Bayard-Alpert Gauge F
Page 137 and 138:
Vacuum Gauges Penning Gauge PEG100
Page 139 and 140:
Vacuum Gauges Vacuum Gauge Controll
Page 141 and 142:
Vacuum Gauges Vacuum Gauge Controll
Page 143 and 144:
Vacuum Gauges Calibration Service C
Page 145 and 146:
Vacuum Feedthroughs Contents Produc
Page 147 and 148:
Vacuum Feedthroughs Rotary Feedthro
Page 149 and 150:
Vacuum Feedthroughs Linear Motion F
Page 151 and 152:
Vacuum Feedthroughs Viewports ISO-K
Page 153 and 154:
Vacuum Feedthroughs Viewports CF
Page 155 and 156:
Vacuum Feedthroughs Electrical Feed
Page 157 and 158:
Vacuum Feedthroughs Electrical Feed
Page 159 and 160:
Vacuum Feedthroughs Coaxial Feedthr
Page 161 and 162:
Vacuum Feedthroughs Liquid Feedthro
Page 163 and 164:
Vacuum Feedthroughs Lubricants and
Page 165 and 166:
Vacuum Valves B8
Page 167 and 168:
Angle and Inline Valves Vacuum Valv
Page 169 and 170:
Page 171 and 172:
Page 173 and 174:
Page 175 and 176:
Page 177 and 178:
Angle Valves Vacuum Valves Solenoid
Page 179 and 180:
Angle Valves Vacuum Valves Type DN
Page 181 and 182:
Butterfly Valves Vacuum Valves Conn
Page 183 and 184:
Butterfly Valves Vacuum Valves VBP1
Page 185 and 186:
Gas Dosing Valves Vacuum Valves Gas
Page 187 and 188:
Gas Dosing Valves Vacuum Valves Man
Page 189 and 190:
Control Valves Vacuum Valves Contro
Page 191 and 192:
Controllers Vacuum Valves Controlle
Page 193 and 194:
Venting Valves Vacuum Valves Ventin
Page 195 and 196:
Safety Valves Vacuum Valves Safety
Page 197 and 198:
Vacuum Locks and Sealing Valves Vac
Page 199 and 200:
Vacuum Fittings Fittings and Ultra-
Page 201 and 202:
General Vacuum Fittings Seals Seal
Page 203 and 204:
ISO-KF Small Flange Components Vacu
Page 205 and 206:
ISO-KF Small Flange Components Vacu
Page 207 and 208: ISO-KF Small Flange Components Vacu
Page 215 and 216: ISO-K Clamp Flange Components Vacuu
Page 223 and 224: ISO-F Fixed Flange Components Vacuu
Page 225 and 226: UHV CF Components Vacuum Fittings C
Page 227 and 228: UHV CF Components Vacuum Fittings F
Page 229 and 230: UHV CF Components Vacuum Fittings F
Page 231 and 232: UHV CF Components Vacuum Fittings P
Page 233 and 234: UHV CF Components Vacuum Fittings P
Page 235 and 236: Oil Diffusion Pumps Contents Produc
Page 237 and 238: Oil Diffusion Pumps Diffusion Pumps
Page 239 and 240: Oil Diffusion Pumps Diffusion Pumps
Page 241 and 242: Oil Diffusion Pumps Pump Accessorie
Page 243 and 244: Oil Diffusion Pumps Baffle Baffle W
Page 245 and 246: Oil Diffusion Pumps Refrigerator Re
Page 247 and 248: Oil Diffusion Pumps LN 2 Supply Ind
Page 249 and 250: Oil Diffusion Pumps Pumping System
Page 251 and 252: Oil Diffusion Pumps Titanium Sublim
Page 253 and 254: Oil Diffusion Pumps Pumping Body Pu
Page 255 and 256: Oil Diffusion Pumps Catalyzer Trap
Page 257: Product Index Instrumentation Catal
Page 261 and 262: Inquiry Form Instrumentation Catalo
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