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B2 - Schoonover, Inc.

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ULTRATEST UL 200 dry Helium Leak Detector<br />

Leak Detectors<br />

ULTRATEST UL 200 dry Helium Leak Detector<br />

The UL 200 dry is a compact portable helium leak detector capable<br />

of meeting the highest cleanliness requirements.<br />

Technical Data<br />

UL 200 dry<br />

Based on the well-proven technology of the UL 200, but equipped with an<br />

oil-free pump system, the UL 200 dry meets the highest requirements<br />

concerning cleanness while at the same time being small in size.<br />

Advantages<br />

◆ Oil-free ÒdryÒ pump system<br />

◆ Small footprint<br />

◆ Quick start-up<br />

◆ Extremely fast response<br />

Typical Applications<br />

Leak tests with stringent requirements concerning cleanliness, for example<br />

◆ Semiconductor industry<br />

Ð After repairs or maintenance work<br />

◆ Semiconductor industry<br />

Ð Production of semiconductor components<br />

◆ Pharmaceutical/medicine<br />

◆ Laser<br />

Smallest detectable helium leak rate<br />

(Vacuum mode) mbar x l x s -1 < 3 x 10 -10<br />

Smallest detectable helium leak rate<br />

(Sniffer mode) mbar x l x s -1 < 1 x 10 -7<br />

Max. detectable helium leak rate<br />

(Vacuum mode) mbar x l x s -1 1 x 10 -1<br />

Max. permissible inlet pressure mbar (Torr) 3.5 (2.63)<br />

Pumping speed during the m 3 x h -1 / cfm 1.6 (50 Hz) / 0.94<br />

evacuation process m 3 x h -1 / cfm 1.9 (60 Hz) / 1.12<br />

Pumping speed for helium at the inlet l/s 0.6<br />

Time constant of the leak signal<br />

(blanked off, 63% of final value) s < 1<br />

Leak rate measurement range mbar x l x s -1 1 x 10 -11 to 1 x 10 -1<br />

Units of measurement (selectable) mbar x l x s -1 ,<br />

Atm x cc x sec -1 ,<br />

Pa x m 3 x s -1 , ppm<br />

Torr x l x s -1 * ) , g/a * ) ,oz/y* )<br />

Time until ready for operation min < 3<br />

Mass spectrometer<br />

Ion source<br />

Ordering Information<br />

180¡ magnetic<br />

sector field<br />

2 yttrium / iridium<br />

long-life cathodes<br />

Detectable masses amu 2, 3 and 4<br />

Test port DN 1 x 25 KF<br />

Length of the cable on the hand unit m 4<br />

Dimensions (W x H x D) mm (in.) 490 x 430 x 250<br />

(19.6 x 17.2 x 10 in.)<br />

Weight kg (lbs.) 34.5 (76)<br />

UL 200 dry<br />

Part Number<br />

ULTRATEST UL 200 dry<br />

220 V, mbar readout, with TL 7 140 15<br />

100 V, Pa readout, with TL 7 141 15<br />

115 V, mbar readout, with TL 7 142 15<br />

PC software LeakWare 140 90<br />

For further accessories see Section<br />

ÒAccessories for UL 200, UL 200 dry and<br />

Modul 200Ó Ð Page B5.36<br />

* ) Not in Japan version (Part Number 141 15)<br />

B5.11<br />

B5

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