B2 - Schoonover, Inc.

Thin Film Deposition Controllers and Monitors
IC/5 Thin Film Deposition Controller
IC/5 Thin Film Deposition Controller
Typical Applications
♦ Multi-source deposition
♦ Flexible control
♦ Coordination of processes between pump system, valves, substrate
heater, substrate drive and selected deposition process
Advantages
♦ ModeLock measurement system for superior rate control, and longer
crystal life
♦ Extensive logic and process control capabilities, including 100
programmable logic statements; 20 counters and 20 timers;
I/O relay boards providing up to 24 relay outputs, 28 TTL inputs and
14 TTL outputs
♦ Dedicate the CrystalSix sensorÕs crystals to specific materials
♦ Unique, multiple-sensor control
♦ Six assignable analog outputs for source control or chart recorder
outputs, including rate, thickness, and rate deviation
♦ Optical and precision coating
♦ Research, development, production
♦ Precise measurement of film thickness in multi-layer systems
Options
♦ 3 1 / 2" disk drive
♦ Off-line editing software
♦ Microbalance measurement card to control low deposition rates of
low-density materials
♦ Extend input and output capacity with optional I/O cards
♦ Generous on-board storage of process data and recipe files Ð up to 50
processes and 250 total layers Ð with optional diskette drive for nearly
unlimited storage
♦ Data logging to remote communications port, printer port, or
diskette drive
♦ Codeposition
♦ Auto Z function for accurate thickness measurement of layered or
alloyed materials deposited onto a single crystal
Dimensional drawing for the IC/5
♦ RateWatcher feature provides long-term rate control for in-line or
load-locked sputtering processes, or processes using a thermal
resistive source
♦ Standard RS232 computer interface or optional IEEE488 interface
B4.8