B2 - Schoonover, Inc.

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Vacuum Gauge Controller VGC103 Vacuum Gauges Rear view of the VGC103 B6 Cables Technical Data Cable to VGC103 in m (ft) 3 (9.9) 5 (16.5) 10 (33) 15 (49.5) 20 (66) 30 (99) 40 (132) 50 (165) 75 (247.5) 100 (330) PSG/PEG BPG/BAG CDG 398-500 398-520 398-540 398-501 398-521 398-541 398-502 398-522 398-542 398-503 398-523 398-543 398-504 398-524 398-544 398-505 398-525 398-545 398-506 398-526 n/a 398-507 398-527 n/a 398-508 398-528 n/a 398-509 398-529 n/a B6.25
Vacuum Gauges Vacuum Gauge Controller VGC103 Measurement channels Display Range Technical Data mbar Torr Digital Analog Switching Rate 1/s Connectable transmitters with display range CDG Torr BPG mbar (Torr) PSG mbar (Torr) PEG mbar (Torr) BAG mbar (Torr) Measurement unit (selectable) Type of gas (selectable) Ð BAG only Setpoints Adjustment range Hysteresis Relay contact Contact rating V / A DC Ready indication relay Relay contact Contact rating V / A DC Analog output Channels Range Channel 1, 2, 3 Channel 4 Interface (digital) Connector Power Output for setpoint and analog output Supply V Frequency Hz Consumption W Temperature Operation (ambient) ¡C VGC103 3 backlit 2 x 10 -10 É 2000 1.5 x 10 -10 É 1500 LCD, 7-segments LCD, bargraph automatic or manual between connected sensors 4 1 x 10 -3 x FS É 1 x FS 5 x 10 -10 É 1000 5 x 10 -4 É 1000 1 x 10 -9 É 1 x 10 -2 2 x 10 -10 É 1 x 10 -1 mbar, Torr, Pascal, micron Air, Ar, N 2 3 assignable to channel 1, 2 or 3 sensor dependent adjustable potential free changeover contact 60 / 0.5 1 assignable to channel 1, 2 or 3 potential free changeover contact 60 / 0.5 4 0 É 10 V Sensor analog output signal Output of channel 1, 2, 3 with selectable scaling or combination PSG and BAG RS 232 C D sub, 9 pin D sub, 25 pin 85 É 264 50/60 60 0 É 50 Ordering Information VGC103 3 channel controller 398-000 mm (inches) B6.26
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INSTRUMENTATION CATALOG 2 0 0 0 - 2
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B1 FABGUARDTM Sensor Integration an
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FabGuard TM Sensor Integration and
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Residual Gas and Process Gas Analyz
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Applications and Accessories Residu
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Transpector® 2 Gas Analysis System
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TranspectorWare TM Software Residua
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Transpector® XPR Gas Analysis Syst
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Preclude TM Photoresist Detector Re
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Preclude TM Photoresist Detector Re
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Transpector® CIS2 Gas Analysis Sys
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PPM 422 Plasma Process Monitor Resi
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Composer® Gas Composition Controll
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TWare32 TM for Windows ® 95/98/NT/
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TWare32 TM for Windows® 95/98/NT/2
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TWare32 TM for Windows ® 95/98/NT/
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IPC400 Pumping Packages Residual Ga
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B3 Thin Film Metrology Sensor Syste
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LES1200 Thin Film Metrology Sensor
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LES1200 Thin Film Metrology Sensor
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OES1200 Optical Emission Sensor Thi
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OES1200 Optical Emission Sensor Thi
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Thin Film Deposition Controllers an
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Leak Detectors Contents General App
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Leak Detectors Leak Detection - Lea
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Leak Detectors Leak Detection Metho
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Leak Detectors Operating Principles
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Leak Detectors ULTRATEST UL 200 Hel
Page 89 and 90: Leak Detectors Modul 200 Mobile and
Page 91 and 92: Leak Detectors Mobile Leak Detectio
Page 93 and 94: Leak Detectors LDS 1000 Modular Lea
Page 95 and 96: Leak Detectors ULTRATEST UL 500 Sta
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Page 99 and 100: Leak Detectors Protec Helium Sniffe
Page 101 and 102: Leak Detectors Ecotec II Sniffer Le
Page 103 and 104: Leak Detectors HLD4000A Sniffer Lea
Page 105 and 106: Leak Detectors Contura Z Helium Lea
Page 107 and 108: Leak Detectors Calibrated Leaks Cal
Page 109 and 110: Leak Detectors Screw-in Calibrated
Page 111 and 112: Leak Detectors Helium Sample Probes
Page 113 and 114: Leak Detectors Accessories for UL 2
Page 115 and 116: Leak Detectors Connection Flanges a
Page 117 and 118: Vacuum Gauges Contents General Basi
Page 119 and 120: Vacuum Gauges Transmitter Technolog
Page 121 and 122: Vacuum Gauges SKY TM Capacitance Di
Page 127 and 128: Vacuum Gauges Bayard-Alpert Pirani
Page 129 and 130: Vacuum Gauges Bayard-Alpert Pirani
Page 131 and 132: Vacuum Gauges Pirani Standard Gauge
Page 133 and 134: Vacuum Gauges Pirani Standard Gauge
Page 135 and 136: Vacuum Gauges Bayard-Alpert Gauge F
Page 137 and 138: Vacuum Gauges Penning Gauge PEG100
Page 139: Vacuum Gauges Vacuum Gauge Controll
Page 143 and 144: Vacuum Gauges Calibration Service C
Page 145 and 146: Vacuum Feedthroughs Contents Produc
Page 147 and 148: Vacuum Feedthroughs Rotary Feedthro
Page 149 and 150: Vacuum Feedthroughs Linear Motion F
Page 151 and 152: Vacuum Feedthroughs Viewports ISO-K
Page 153 and 154: Vacuum Feedthroughs Viewports CF
Page 155 and 156: Vacuum Feedthroughs Electrical Feed
Page 157 and 158: Vacuum Feedthroughs Electrical Feed
Page 159 and 160: Vacuum Feedthroughs Coaxial Feedthr
Page 161 and 162: Vacuum Feedthroughs Liquid Feedthro
Page 163 and 164: Vacuum Feedthroughs Lubricants and
Page 165 and 166: Vacuum Valves B8
Page 167 and 168: Angle and Inline Valves Vacuum Valv
Page 177 and 178: Angle Valves Vacuum Valves Solenoid
Page 179 and 180: Angle Valves Vacuum Valves Type DN
Page 181 and 182: Butterfly Valves Vacuum Valves Conn
Page 183 and 184: Butterfly Valves Vacuum Valves VBP1
Page 185 and 186: Gas Dosing Valves Vacuum Valves Gas
Page 187 and 188: Gas Dosing Valves Vacuum Valves Man
Page 189 and 190: Control Valves Vacuum Valves Contro
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Controllers Vacuum Valves Controlle
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Venting Valves Vacuum Valves Ventin
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Safety Valves Vacuum Valves Safety
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Vacuum Locks and Sealing Valves Vac
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Vacuum Fittings Fittings and Ultra-
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General Vacuum Fittings Seals Seal
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ISO-KF Small Flange Components Vacu
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ISO-K Clamp Flange Components Vacuu
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ISO-F Fixed Flange Components Vacuu
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UHV CF Components Vacuum Fittings C
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UHV CF Components Vacuum Fittings F
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UHV CF Components Vacuum Fittings F
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UHV CF Components Vacuum Fittings P
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UHV CF Components Vacuum Fittings P
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Oil Diffusion Pumps Contents Produc
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Oil Diffusion Pumps Diffusion Pumps
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Oil Diffusion Pumps Diffusion Pumps
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Oil Diffusion Pumps Pump Accessorie
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Oil Diffusion Pumps Baffle Baffle W
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Oil Diffusion Pumps Refrigerator Re
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Oil Diffusion Pumps LN 2 Supply Ind
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Oil Diffusion Pumps Pumping System
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Oil Diffusion Pumps Titanium Sublim
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Oil Diffusion Pumps Pumping Body Pu
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Oil Diffusion Pumps Catalyzer Trap
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Product Index Instrumentation Catal
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Product Index Instrumentation Catal
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Inquiry Form Instrumentation Catalo
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