B2 - Schoonover, Inc.

Transpector® CIS2 Gas Analysis System
Residual Gas and Process Gas Analyzers
Transpector ® CIS2 Configuration Key:
1. Transpector 2 Electronics Unit
2. CIS 2 Vacuum System Controller (VSC)Ð
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Control and display of vacuum system status is by
TranspectorWareª software via the VSC.
Sampling valve control is integrated into analysis recipes or
by manual control.
Manual control of all components through password access.
Automatic pumpdown and shutdown sequences.
Separate temperature control for manifold and sample valves up
to 200¡C; constant temperature or timed bakeout sequences.
Automatic protection for sensor emission and electron multiplier
by sensing high-vacuum overpressure, foreline overpressure,
power interruption or failure.
Status information on all components, including operation time
and preventative maintenance times.
Safety and interlock control of all components, regardless of
computer status.
3. Transpector SensorÐ100, 200 or 300 amu with PVD or CVD/etch
closed ion source and EM/FC mounted in a UHV manifold.
4. UHV Compound PumpÐATH 30+ or ATH 30C (corrosive service);
grease-lubricated ceramic bearings.
5. Vacuum System Ionization GaugeÐITR-100 measures and protects
analyzer vacuum. Nude sensor with dual yttria-coated iridium
filaments (PVD) or dual tungsten filaments (CVD/etch).
6. Foreline Pressure GaugeÐPirani sensor measures and protects
analyzer vacuum, using tungsten element for PVD and platinum
element for CVD/etch.
7. Miniature Foreline Isolation Valve
8. Independent Heaters for manifold and sampling valves
(40¡C to 200¡C).
9. CIS Power ModuleÐProvides 24 VDC to all components; houses
the compound pump controller board and controls power for
the heaters.
10. Fan/Solenoid Valve AssemblyÐProvides cooling for the compound
pump and solenoid activation of all valves.
11. Diaphragm PumpÑMVP 015 dry, leak-tight diaphragm pump for
backing the compound pump.
12. Vent ValveÐnormally closed; opened before start of
diaphragm pump.
13. Purge ValveÐfor purging the compound pump bearings in
aggressive gas applications.
Inlet Valves ÐÐ normally closed, electropneumatic, 70-110 psig air.
14. PVDÐ90¡ Isolation ValveÐfully open or closed for use with PVD
closed ion source.
15. Dual-Pressure In-Line Inlet ValveÐwith two replaceable orifices to
sample process and background pressures of< 100 Torr with
CVD/etch closed ion source.
16. Dual-Pressure 90¡ Inlet ValveÐ90¡ version of 15.
17. Dual-Pressure Inlet Valve with High-Pressure SamplingÐBypass
to compound pump will draw a sample of 10 sccm to the orifice
for high-pressure applications requiring fast response time.
18. ComputerÐfor controlling and displaying TranspectorWareª or
TWare 32ª software.
B2
Not shown: Optional Calibration Gas Flow StandardÐfor RGA tuning and quantifiable references.
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