B2 - Schoonover, Inc.

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Sensors Thin Film Deposition Controllers and Monitors Standard sensor Ð for use in thermal depositions. Standard sensor with shutter (requires 007-199 control valve). Ordering Information Sputtering sensor Ð for use in sputtering or thermal depositions. Compact sensor Ð for use in thermal depositions, with rear mounted water tubes and in-vacuum coaxial cable for vertical installation. Compact sensor with shutter (requires 007-199 control valve). UHV bakeable sensor - for ultra-high vacuum applications bakeable to 450¡C. Specified lengths are measured from the center of the crystal to the face of the feedthrough flange. Sensor includes an integral 2 3 /4" ConFlat¨ flange feedthrough. Consult factory for a special bakeable crystal holder for sputtering applications and special bakeable sensor lengths. 11.7 in./30cm bakeable sensor 19.5 in./50cm bakeable sensor 29.6 in./76cm bakeable sensor 11.7 in./30cm bakeable sensor with shutter (requires 007-199 control valve) 19.5 in./50cm bakeable sensor with shutter (requires 007-199 control valve) 29.6 in./76cm bakeable sensor with shutter (requires 007-199 control valve) Dual sensor Ð two independent crystals contained in one sensor. Specifically designed for use with CrystalSwitch, with self-contained pneumatic shutter. Requires two active sensor circuits (requires 007-199 control valve). CrystalSix multiple sensor Ð six crystals contained in one sensor. Specifically designed for use with CrystalSwitch, this sensor sequentially advances to the next available crystal (requires 007-199 control valve; the required flow restrictor is easily installed into this valve). Pneumatic shutter assembly Ð for Ònew styleÓ 750-211 standard, 750-213 compact or 750-212 dual. A complete shutter assembly that can be added to non-shuttered crystal sensors (requires 007-199 control valve). Pneumatic shutter assembly (sputtering) Ð a complete shutter assembly that can be added to non-shuttered sputtering sensors (requires 007-199 control valve). Pneumatic shutter actuator control valve Ð for use with all shutter assemblies. May be mounted to either 2 3 /4" or 1" feedthrough. Bracket and tubing supplied. Requires 24 V, AC or DC. In-vacuum cable assembly - this cable connects the crystal sensor head to the vacuum feedthrough. These special lengths are replacements for our standard length 30.75 in. (78cm) cable. 6 in./ 15.2cm 12 in./ 30.5cm 24 in./ 61.0cm 36 in./ 91.4cm 48 in./121.9cm 60 in./152.4cm 72 in./182.9cm Material director Ð used for codeposition processing. It reduces the influence of one material on the other during the measurements (crosstalk). The crystal holder is exchanged against this material director. * For 750-211 or 213 standard or compact sensors For bakeable sensor Sensor emulator A diagnostic tool with multiple connections for emulating all or part of the sensor-crystal circuit from the oscillator connection to the sensor head. (For use with standard, compact, and dual sensors, connects to any INFICON feedthrough or oscillator to verify electrical connection.) Sensors Part Number 750-211-G1 750-211-G2 007-031 750-213-G1 750-213-G2 007-219 007-220 007-221 750-012-G1 750-012-G2 750-012-G3 750-212-G2 750-446-G1 750-210-G1 750-005-G1 007-199 321-039-G12 007-252 321-039-G11 007-059 007-061 321-039-G13 321-039-G14 750-201-G1 750-202-G1 760-601-G1 B4 * Note: This material director can not be used with sensors while using the pneumatic shutter feature B4.15
Thin Film Deposition Controllers and Monitors Sensors Ordering Information Standard, compact and dual sensors Body assembly Standard Compact Dual Crystal holder For 750-211, 212 or 213 sensor assemblies For 007-205, 206, 216, 218, 237, and 750-040-G1 or G3 sensor assemblies Finger spring contact strip Pneumatic actuator kit Shutter Sputtering sensor Body assembly Front cover assembly Crystal holder CrystalSix sensor Cover, heat shield Crystal holder Pneumatic actuator kit Crystal holder extraction tool For all sensors listed above: In-vacuum cable, 30.75 in. / 78cm long Crystal snatcher Ceramic retainer Bakeable sensor Ceramic retainer Crystal holder Pneumatic actuator 12 in. / 30.5cm 20 in. / 50.8cm 30 in. / 76.2cm Pneumatic actuator kit Shutter Accessories Part Number 750-207-G1 750-209-G1 750-208-G1 750-172-G1 007-083 750-171-P1 750-128-G1 750-216-G1 007-048 007-047 007-049 750-250-G1 750-262-G1 750-286-P2 750-279-P1 007-044 008-007 007-023 007-064 750-218-G1 750-022-G5 750-022-G6 750-022-G7 750-193-G1 750-216-G1 B4.16
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INSTRUMENTATION CATALOG 2 0 0 0 - 2
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B1 FABGUARDTM Sensor Integration an
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FabGuard TM Sensor Integration and
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Residual Gas and Process Gas Analyz
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Applications and Accessories Residu
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Transpector® 2 Gas Analysis System
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Page 17 and 18: TranspectorWare TM Software Residua
Page 19 and 20: Transpector® 2 Gas Analysis System
Page 21 and 22: Transpector® XPR Gas Analysis Syst
Page 23 and 24: Preclude TM Photoresist Detector Re
Page 25 and 26: Preclude TM Photoresist Detector Re
Page 27 and 28: Transpector® CIS2 Gas Analysis Sys
Page 33 and 34: PPM 422 Plasma Process Monitor Resi
Page 35 and 36: Composer® Gas Composition Controll
Page 37 and 38: TWare32 TM for Windows ® 95/98/NT/
Page 39 and 40: TWare32 TM for Windows® 95/98/NT/2
Page 41 and 42: TWare32 TM for Windows ® 95/98/NT/
Page 43 and 44: IPC400 Pumping Packages Residual Ga
Page 45 and 46: B3 Thin Film Metrology Sensor Syste
Page 47 and 48: LES1200 Thin Film Metrology Sensor
Page 49 and 50: LES1200 Thin Film Metrology Sensor
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Page 79 and 80: Leak Detectors Contents General App
Page 81 and 82: Leak Detectors Leak Detection - Lea
Page 83 and 84: Leak Detectors Leak Detection Metho
Page 85 and 86: Leak Detectors Operating Principles
Page 87 and 88: Leak Detectors ULTRATEST UL 200 Hel
Page 89 and 90: Leak Detectors Modul 200 Mobile and
Page 91 and 92: Leak Detectors Mobile Leak Detectio
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Page 95 and 96: Leak Detectors ULTRATEST UL 500 Sta
Page 97 and 98: Leak Detectors ULTRATEST UL 500 dry
Page 99 and 100: Leak Detectors Protec Helium Sniffe
Page 101 and 102: Leak Detectors Ecotec II Sniffer Le
Page 103 and 104: Leak Detectors HLD4000A Sniffer Lea
Page 105 and 106: Leak Detectors Contura Z Helium Lea
Page 107 and 108: Leak Detectors Calibrated Leaks Cal
Page 109 and 110: Leak Detectors Screw-in Calibrated
Page 111 and 112: Leak Detectors Helium Sample Probes
Page 113 and 114: Leak Detectors Accessories for UL 2
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Page 117 and 118: Vacuum Gauges Contents General Basi
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Vacuum Gauges Transmitter Technolog
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Vacuum Gauges SKY TM Capacitance Di
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Vacuum Gauges Bayard-Alpert Pirani
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Vacuum Gauges Bayard-Alpert Pirani
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Vacuum Gauges Pirani Standard Gauge
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Vacuum Gauges Pirani Standard Gauge
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Vacuum Gauges Bayard-Alpert Gauge F
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Vacuum Gauges Penning Gauge PEG100
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Vacuum Gauges Vacuum Gauge Controll
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Vacuum Gauges Vacuum Gauge Controll
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Vacuum Gauges Calibration Service C
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Vacuum Feedthroughs Contents Produc
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Vacuum Feedthroughs Rotary Feedthro
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Vacuum Feedthroughs Linear Motion F
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Vacuum Feedthroughs Viewports ISO-K
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Vacuum Feedthroughs Viewports CF
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Vacuum Feedthroughs Electrical Feed
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Vacuum Feedthroughs Electrical Feed
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Vacuum Feedthroughs Coaxial Feedthr
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Vacuum Feedthroughs Liquid Feedthro
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Vacuum Feedthroughs Lubricants and
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Vacuum Valves B8
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Angle and Inline Valves Vacuum Valv
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Angle Valves Vacuum Valves Solenoid
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Angle Valves Vacuum Valves Type DN
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Butterfly Valves Vacuum Valves Conn
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Butterfly Valves Vacuum Valves VBP1
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Gas Dosing Valves Vacuum Valves Gas
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Gas Dosing Valves Vacuum Valves Man
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Control Valves Vacuum Valves Contro
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Controllers Vacuum Valves Controlle
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Venting Valves Vacuum Valves Ventin
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Safety Valves Vacuum Valves Safety
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Vacuum Locks and Sealing Valves Vac
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Vacuum Fittings Fittings and Ultra-
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General Vacuum Fittings Seals Seal
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ISO-KF Small Flange Components Vacu
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ISO-K Clamp Flange Components Vacuu
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ISO-F Fixed Flange Components Vacuu
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UHV CF Components Vacuum Fittings C
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UHV CF Components Vacuum Fittings F
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UHV CF Components Vacuum Fittings F
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UHV CF Components Vacuum Fittings P
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UHV CF Components Vacuum Fittings P
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Oil Diffusion Pumps Contents Produc
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Oil Diffusion Pumps Diffusion Pumps
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Oil Diffusion Pumps Diffusion Pumps
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Oil Diffusion Pumps Pump Accessorie
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Oil Diffusion Pumps Baffle Baffle W
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Oil Diffusion Pumps Refrigerator Re
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Oil Diffusion Pumps LN 2 Supply Ind
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Oil Diffusion Pumps Pumping System
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Oil Diffusion Pumps Titanium Sublim
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Oil Diffusion Pumps Pumping Body Pu
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Oil Diffusion Pumps Catalyzer Trap
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Product Index Instrumentation Catal
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Product Index Instrumentation Catal
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Inquiry Form Instrumentation Catalo
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