B2 - Schoonover, Inc.

Thin Film Deposition Controllers and Monitors
Sensors
Technical Data
Temperature, max. ¡C
(for bake only; water flow
required for actual
deposition monitoring)
Standard Sputtering Compact
Sensor Sensor Sensor
130* 105* 130*
Dimensions (maximum envelope)
Dimensions with shutter assembly
Water tube and coax length
Body and holder
in. / cm
in. / mm
1.063" x 1.33" x .69" high 1.36" dia. x .47" high 1.11" x 1.06" x 1.06" high
(2.7cm dia. x 3.4cm x 1.75cm high) (3.45cm dia. x 1.18cm high) (2.8cm x 2.7cm x 2.7cm high)
1.67" x 2.15" x 1.95" high 1.36"dia. x 1.28" high 2.08" x 1.62" x 1.83" high
(4.2cm dia. x 5.5cm x 5.0cm high) (3.45cm dia. x 3.25cm high) (5.3cm x 4.1cm x 4.6cm high)
Standard 30 / 762 Standard 30 / 762 Standard 30 / 762
Stainless steel 304 Gold plated beryllium-copper Stainless steel 304
Bakeable Dual Shutter CrystalSix
UHV Sensor Sensor Assembly
Temperature, max. * ¡C
(for bake only; water flow
required for actual
deposition monitoring)
450¡C 130* 400 130*
Dimensions (maximum envelope)
Dimensions with shutter assembly
Water tube and coax length
Body and holder
in. / mm
1.35" x 1.38" x .94" high 1.06" x 2.20" x 0.69" high Varies with sensor 3.5" dia x 2.0" high
(3.4cm x 3.5cm x 2.4cm high) (2.7cm x 5.6cm x 1.75cm high) (8.9cm dia. x 5.1cm high)
1.46" x 1.37" x 1.21" high 1.54" x 2.20" x 1.95" high _ _
(3.7cm x 3.5cm x 3.1cm high) (3.9cm x 5.6cm x 5.0cm high)
Standard 29.7 / 750 Standard 29.7 / 762 Ð Standard 29.7 / 754
Standard 19.81 / 503
Standard 11.9 / 302
Stainless steel 304 Stainless steel 304 Stainless steel 300 Stainless steel 304
(plate, holders and
material shield)
aluminum body
* A conservative maximum device temperature, limited by the properties of Teflon (PTFE) at higher temperatures in vacuum.
In usage, the water cooling allows operation in significantly elevated environments without harmful effects.
B4.14