B2 - Schoonover, Inc.

More documents

Recommendations

Info

High Current Feedthroughs Vacuum Feedthroughs High Current Feedthroughs CF ♦ Selection of electrodes ♦ Slide into mounted feedthrough ♦ Current connection with water cooling Vacuum connection Technical Data DN 40 ISO-KF Number of feedthroughs 1 Voltage V 50 Current, with water cooling A 5000 Ordering Information Feedthrough 214-141 Current connection with water cooling 214-145 Straight electrode 214-142 Angle electrode 214-143 T-electrode 214-144 Tightness mbar l/s 1 x 10 -9 Pressure (absolute) 1 x 10 -8 mbar Ð 2.5 bar (max. 10 bar with external centering ring) Bakeout temperature ¡C 110 Housing aluminum Insulator thermoplast Seal FPM B7 Feedthrough Current connection with water cooling brass, copper Electrodes copper straight electrode angle electrode T-electrode B7.15
Vacuum Feedthroughs Coaxial Feedthroughs Coaxial Feedthroughs ♦ Based on MIL-C-39012A ♦ Voltage up to 5 kV DC ♦ With atmospheric connector Technical Data Vacuum connection DN 16 ISO-KF DN 16 ISO-KF DN 16 CF-F DN 16 CF-F DN 40 CF-F Number of feedthroughs 1 1 1 1 3 Type BNC MHV BNC MHV MHV Ordering Information 214-151 214-152 214-155 214-156 214-157 Voltage AC, 50 Hz kV 0.35 3.5 0.35 3.5 3.5 DC kV 0.5 5 0.5 5 5 Current A 3 3 3 3 3 Frequency MHz 150 Ñ 150 Ñ Ñ Impedance ½ 50 Ð 60 Ñ 50 Ð 60 Ñ Ñ Insulation resistance at 20 ¡C ½ 10 10 10 10 10 10 10 10 10 10 Tightness mbar l/s 1 x 10 -9 1 x 10-9 1 x 10 -10 1 x 10 -10 1 x 10 -10 Pressure (absolute) 1 x 10 -8 mbar Ð 2.5 bar 1) 1 x 10 -8 mbar Ð 2.5 bar 1) 1 x 10 -8 mbar Ð 10 bar 1 x 10 -8 mbar Ð 10 bar 1 x 10 -8 bar Ð 10 bar Housing, flange, conductor stainless steel stainless steel stainless steel stainless steel stainless steel Feedthrough, seal Al 2 O 3 Al 2 O 3 Al 2 O 3 Al 2 O 3 Al 2 O 3 Bakeout temperature With connector ¡C 50 50 50 50 50 Without connector 2) ¡C 200 200 400 400 400 Standard connection Atmospheric connector UG 88/U UG 932/U UG 88/U UG 932/U UG 932/U Cable RG 58/U RG 59/U RB 58/U RG 59/U RG 59/U Weight kg 0.1 0.1 0.14 0.14 0.5 1) Max. 10 bar with external centering ring 2) With elastomer seal up to 150 ¡C B7.16
Page 1 and 2:
INSTRUMENTATION CATALOG 2 0 0 0 - 2
Page 3 and 4:
B1 FABGUARDTM Sensor Integration an
Page 5 and 6:
FabGuard TM Sensor Integration and
Page 7 and 8:
Residual Gas and Process Gas Analyz
Page 9 and 10:
Applications and Accessories Residu
Page 11 and 12:
Transpector® 2 Gas Analysis System
Page 13 and 14:
Page 15 and 16:
Page 17 and 18:
TranspectorWare TM Software Residua
Page 19 and 20:
Page 21 and 22:
Transpector® XPR Gas Analysis Syst
Page 23 and 24:
Preclude TM Photoresist Detector Re
Page 25 and 26:
Preclude TM Photoresist Detector Re
Page 27 and 28:
Transpector® CIS2 Gas Analysis Sys
Page 29 and 30:
Page 31 and 32:
Page 33 and 34:
PPM 422 Plasma Process Monitor Resi
Page 35 and 36:
Composer® Gas Composition Controll
Page 37 and 38:
TWare32 TM for Windows ® 95/98/NT/
Page 39 and 40:
TWare32 TM for Windows® 95/98/NT/2
Page 41 and 42:
TWare32 TM for Windows ® 95/98/NT/
Page 43 and 44:
IPC400 Pumping Packages Residual Ga
Page 45 and 46:
B3 Thin Film Metrology Sensor Syste
Page 47 and 48:
LES1200 Thin Film Metrology Sensor
Page 49 and 50:
LES1200 Thin Film Metrology Sensor
Page 51 and 52:
OES1200 Optical Emission Sensor Thi
Page 53 and 54:
OES1200 Optical Emission Sensor Thi
Page 55 and 56:
Thin Film Deposition Controllers an
Page 57 and 58:
Page 59 and 60:
Page 61 and 62:
Page 63 and 64:
Page 65 and 66:
Page 67 and 68:
Page 69 and 70:
Page 71 and 72:
Page 73 and 74:
Page 75 and 76:
Page 77 and 78:
Page 79 and 80:
Leak Detectors Contents General App
Page 81 and 82:
Leak Detectors Leak Detection - Lea
Page 83 and 84:
Leak Detectors Leak Detection Metho
Page 85 and 86:
Leak Detectors Operating Principles
Page 87 and 88:
Leak Detectors ULTRATEST UL 200 Hel
Page 89 and 90:
Leak Detectors Modul 200 Mobile and
Page 91 and 92:
Leak Detectors Mobile Leak Detectio
Page 93 and 94:
Leak Detectors LDS 1000 Modular Lea
Page 95 and 96:
Leak Detectors ULTRATEST UL 500 Sta
Page 97 and 98:
Leak Detectors ULTRATEST UL 500 dry
Page 99 and 100:
Leak Detectors Protec Helium Sniffe
Page 101 and 102:
Leak Detectors Ecotec II Sniffer Le
Page 103 and 104:
Leak Detectors HLD4000A Sniffer Lea
Page 105 and 106:
Leak Detectors Contura Z Helium Lea
Page 107 and 108: Leak Detectors Calibrated Leaks Cal
Page 109 and 110: Leak Detectors Screw-in Calibrated
Page 111 and 112: Leak Detectors Helium Sample Probes
Page 113 and 114: Leak Detectors Accessories for UL 2
Page 115 and 116: Leak Detectors Connection Flanges a
Page 117 and 118: Vacuum Gauges Contents General Basi
Page 119 and 120: Vacuum Gauges Transmitter Technolog
Page 121 and 122: Vacuum Gauges SKY TM Capacitance Di
Page 127 and 128: Vacuum Gauges Bayard-Alpert Pirani
Page 129 and 130: Vacuum Gauges Bayard-Alpert Pirani
Page 131 and 132: Vacuum Gauges Pirani Standard Gauge
Page 133 and 134: Vacuum Gauges Pirani Standard Gauge
Page 135 and 136: Vacuum Gauges Bayard-Alpert Gauge F
Page 137 and 138: Vacuum Gauges Penning Gauge PEG100
Page 139 and 140: Vacuum Gauges Vacuum Gauge Controll
Page 141 and 142: Vacuum Gauges Vacuum Gauge Controll
Page 143 and 144: Vacuum Gauges Calibration Service C
Page 145 and 146: Vacuum Feedthroughs Contents Produc
Page 147 and 148: Vacuum Feedthroughs Rotary Feedthro
Page 149 and 150: Vacuum Feedthroughs Linear Motion F
Page 151 and 152: Vacuum Feedthroughs Viewports ISO-K
Page 153 and 154: Vacuum Feedthroughs Viewports CF
Page 155 and 156: Vacuum Feedthroughs Electrical Feed
Page 157: Vacuum Feedthroughs Electrical Feed
Page 161 and 162: Vacuum Feedthroughs Liquid Feedthro
Page 163 and 164: Vacuum Feedthroughs Lubricants and
Page 165 and 166: Vacuum Valves B8
Page 167 and 168: Angle and Inline Valves Vacuum Valv
Page 177 and 178: Angle Valves Vacuum Valves Solenoid
Page 179 and 180: Angle Valves Vacuum Valves Type DN
Page 181 and 182: Butterfly Valves Vacuum Valves Conn
Page 183 and 184: Butterfly Valves Vacuum Valves VBP1
Page 185 and 186: Gas Dosing Valves Vacuum Valves Gas
Page 187 and 188: Gas Dosing Valves Vacuum Valves Man
Page 189 and 190: Control Valves Vacuum Valves Contro
Page 191 and 192: Controllers Vacuum Valves Controlle
Page 193 and 194: Venting Valves Vacuum Valves Ventin
Page 195 and 196: Safety Valves Vacuum Valves Safety
Page 197 and 198: Vacuum Locks and Sealing Valves Vac
Page 199 and 200: Vacuum Fittings Fittings and Ultra-
Page 201 and 202: General Vacuum Fittings Seals Seal
Page 203 and 204: ISO-KF Small Flange Components Vacu
Page 209 and 210:
ISO-KF Small Flange Components Vacu
Page 211 and 212:
Page 213 and 214:
Page 215 and 216:
ISO-K Clamp Flange Components Vacuu
Page 217 and 218:
Page 219 and 220:
Page 221 and 222:
Page 223 and 224:
ISO-F Fixed Flange Components Vacuu
Page 225 and 226:
UHV CF Components Vacuum Fittings C
Page 227 and 228:
UHV CF Components Vacuum Fittings F
Page 229 and 230:
UHV CF Components Vacuum Fittings F
Page 231 and 232:
UHV CF Components Vacuum Fittings P
Page 233 and 234:
UHV CF Components Vacuum Fittings P
Page 235 and 236:
Oil Diffusion Pumps Contents Produc
Page 237 and 238:
Oil Diffusion Pumps Diffusion Pumps
Page 239 and 240:
Oil Diffusion Pumps Diffusion Pumps
Page 241 and 242:
Oil Diffusion Pumps Pump Accessorie
Page 243 and 244:
Oil Diffusion Pumps Baffle Baffle W
Page 245 and 246:
Oil Diffusion Pumps Refrigerator Re
Page 247 and 248:
Oil Diffusion Pumps LN 2 Supply Ind
Page 249 and 250:
Oil Diffusion Pumps Pumping System
Page 251 and 252:
Oil Diffusion Pumps Titanium Sublim
Page 253 and 254:
Oil Diffusion Pumps Pumping Body Pu
Page 255 and 256:
Oil Diffusion Pumps Catalyzer Trap
Page 257 and 258:
Product Index Instrumentation Catal
Page 259 and 260:
Product Index Instrumentation Catal
Page 261 and 262:
Inquiry Form Instrumentation Catalo
show all

B2 - Schoonover, Inc.

Create successful ePaper yourself

Delete template?

Save as template?