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Catalyzer Trap Oil Diffusion Pumps Technical Data Connection Flange DN 25 ISO-KF DN 40 ISO-KF Cooling Ñ water Type PTR025-U PTR040-U Ordering Information 100 V 260-373 Ñ 110/115 V 260-372 260-382 230/240 V 260-370 260-380 208 V 260-371 260-381 1 catalyzer filling 216-106 216-107 Mounting orientation Normal operation any any With water cooling A Ñ vertical Conductance at 1 á 10 -2 / 1 mbar l/s 3 / 9 9 / 45 Power consumption W 25 50 Lifetime of one filling, normal operation years 2 2 Cooling water consumption, approx. l/h Ñ 5 Weight incl. catalyzer filling kg 1.8 3.6 Power connection Water connection B10 B10.23
Product Index Instrumentation Catalog 2000 - 2001 A Accessories for UL200 dry and Modul 200 . . . . . . . . . . . . . . . . . . . . B5.36 Accessories for UL500 and UL500 dry . . . . . . . . . . . . . . . . . . . . . . . B5.35 Accessories, General for Helium Leak Detectors . . . . . . . . . . . . . . . . B5.37 Angle Valves. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.3 Applications and Accessories Gas Analyzers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.2 Leak Detectors. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.3 Thin Film Deposition Controllers and Monitors . . . . . . . . . . . . . B4.2 B Baffle Cap or Cold Cap, Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . B10.5 Baffle, Combination . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.11 Baffle, Water . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.10 Ball Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.34 Bayard-Alpert Pirani Gauge, BPG400 . . . . . . . . . . . . . . . . . . . . . . . . B6.12 Binary Gas Composition Controller, Composer . . . . . . . . . . . . . . . . . B2.28 Butterfly Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.16 C Cables, Vacuum Gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.24 Calibrated Leaks. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.30 Calibration Service, Vacuum Gauges. . . . . . . . . . . . . . . . . . . . . . . . . B6.28 Capacitance Diaphragm Gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.6 CART 200, Mobile Leak Detection System . . . . . . . . . . . . . . . . . . . . B5.14 Catalyzer Trap, Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.22 Coaxial Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.16 Cold Cap or Baffle Cap, Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . B10.5 Components ISO-F - Fixed Flange Components . . . . . . . . . . . . . . . . . . . . . B9.24 ISO-K - Clamp Flange Components . . . . . . . . . . . . . . . . . . . . B9.16 ISO-KF - Small Flange Components. . . . . . . . . . . . . . . . . . . . . B9.4 UHV - CF Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B9.26 Composer Gas Composition Controller . . . . . . . . . . . . . . . . . . . . . . . B2.28 Connection Components for Leak Testing Instruments. . . . . . . . . . . . B5.38 Control Valves. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.25 Controllers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.26 CONTURA Z Helium Leak Detector. . . . . . . . . . . . . . . . . . . . . . . . . . B5.28 Crystals, Quartz . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.17 CrystalSix Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B4.13 D Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.3 E Ecotec II Sniffer Leak Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.24 EIES Sensor and Feedthrough Packages, Rigid or Fiber Optics . . . . B4.21 Electrical Feedthroughs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.11 F FabGuard Sensor Integration and Analysis System . . . . . . . . . . . . . . . B1.3 FabStar Gas Analysis System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.26 Feedthroughs Coaxial . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.16 Electrical . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.11 High Current . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.15 Liquid. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.18 Rotary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.3 Flow Monitor, Pump Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . B10.8 G Gas Analyzers FabStar Gas Analysis System . . . . . . . . . . . . . . . . . . . . . . . . B2.26 Transpector 2 Gas Analysis System . . . . . . . . . . . . . . . . . . . . . B2.4 Transpector 2 Gas Analysis System Upgrade Package. . . . . . B2.12 Transpector XPR2 Gas Analysis System . . . . . . . . . . . . . . . . B2.14 Transpector CIS2 Gas Analysis System . . . . . . . . . . . . . . . . . B2.20 Gas Composition Controller, Composer. . . . . . . . . . . . . . . . . . . . . . . B2.28 Gas Dosing Systems. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.24 Gas Dosing Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.21 Gate Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.20 Gauge Controller. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B6.24 H Helium Leak Detector Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . B5.37 Helium Leak Detector Connection Components. . . . . . . . . . . . . . . . . B5.38 Helium Leak Detector CONTURA Z . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.28 LDS1000 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.16 Modul 200 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.12 ULTRATEST UL200 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.10 ULTRATEST UL200 dry . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.11 ULTRATEST UL500 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.18 ULTRATEST UL500 dry . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.20 Helium Sample Probes, Sniffers . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5.34 Helium Sniffer Leak Detector, Protec . . . . . . . . . . . . . . . . . . . . . . . . . B5.22 High Current Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7.15 HLD4000A Leak Detector for Refrigerant 134a and Others . . . . . . . . B5.26 I IC/5 Thin Film Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . . . B4.8 Inline Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.3 Integrated Baffle, Diffusion Pumps. . . . . . . . . . . . . . . . . . . . . . . . . . . B10.3 Interface Module, VCA200-Z . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.28 IPC400 Pumping Packages. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B2.37 ISO-F - Fixed Flange Components . . . . . . . . . . . . . . . . . . . . . . . . . . B9.24 ISO-K - Clamp Flange Components . . . . . . . . . . . . . . . . . . . . . . . . . B9.16 ISO-KF - Small Flange Components . . . . . . . . . . . . . . . . . . . . . . . . . . B9.4 D D.1
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INSTRUMENTATION CATALOG 2 0 0 0 - 2
Page 3 and 4:
B1 FABGUARDTM Sensor Integration an
Page 5 and 6:
FabGuard TM Sensor Integration and
Page 7 and 8:
Residual Gas and Process Gas Analyz
Page 9 and 10:
Applications and Accessories Residu
Page 11 and 12:
Transpector® 2 Gas Analysis System
Page 13 and 14:
Page 15 and 16:
Page 17 and 18:
TranspectorWare TM Software Residua
Page 19 and 20:
Page 21 and 22:
Transpector® XPR Gas Analysis Syst
Page 23 and 24:
Preclude TM Photoresist Detector Re
Page 25 and 26:
Preclude TM Photoresist Detector Re
Page 27 and 28:
Transpector® CIS2 Gas Analysis Sys
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Page 31 and 32:
Page 33 and 34:
PPM 422 Plasma Process Monitor Resi
Page 35 and 36:
Composer® Gas Composition Controll
Page 37 and 38:
TWare32 TM for Windows ® 95/98/NT/
Page 39 and 40:
TWare32 TM for Windows® 95/98/NT/2
Page 41 and 42:
TWare32 TM for Windows ® 95/98/NT/
Page 43 and 44:
IPC400 Pumping Packages Residual Ga
Page 45 and 46:
B3 Thin Film Metrology Sensor Syste
Page 47 and 48:
LES1200 Thin Film Metrology Sensor
Page 49 and 50:
LES1200 Thin Film Metrology Sensor
Page 51 and 52:
OES1200 Optical Emission Sensor Thi
Page 53 and 54:
OES1200 Optical Emission Sensor Thi
Page 55 and 56:
Thin Film Deposition Controllers an
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Page 75 and 76:
Page 77 and 78:
Page 79 and 80:
Leak Detectors Contents General App
Page 81 and 82:
Leak Detectors Leak Detection - Lea
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Leak Detectors Leak Detection Metho
Page 85 and 86:
Leak Detectors Operating Principles
Page 87 and 88:
Leak Detectors ULTRATEST UL 200 Hel
Page 89 and 90:
Leak Detectors Modul 200 Mobile and
Page 91 and 92:
Leak Detectors Mobile Leak Detectio
Page 93 and 94:
Leak Detectors LDS 1000 Modular Lea
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Leak Detectors ULTRATEST UL 500 Sta
Page 97 and 98:
Leak Detectors ULTRATEST UL 500 dry
Page 99 and 100:
Leak Detectors Protec Helium Sniffe
Page 101 and 102:
Leak Detectors Ecotec II Sniffer Le
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Leak Detectors HLD4000A Sniffer Lea
Page 105 and 106:
Leak Detectors Contura Z Helium Lea
Page 107 and 108:
Leak Detectors Calibrated Leaks Cal
Page 109 and 110:
Leak Detectors Screw-in Calibrated
Page 111 and 112:
Leak Detectors Helium Sample Probes
Page 113 and 114:
Leak Detectors Accessories for UL 2
Page 115 and 116:
Leak Detectors Connection Flanges a
Page 117 and 118:
Vacuum Gauges Contents General Basi
Page 119 and 120:
Vacuum Gauges Transmitter Technolog
Page 121 and 122:
Vacuum Gauges SKY TM Capacitance Di
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Page 127 and 128:
Vacuum Gauges Bayard-Alpert Pirani
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Vacuum Gauges Bayard-Alpert Pirani
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Vacuum Gauges Pirani Standard Gauge
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Vacuum Gauges Pirani Standard Gauge
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Vacuum Gauges Bayard-Alpert Gauge F
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Vacuum Gauges Penning Gauge PEG100
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Vacuum Gauges Vacuum Gauge Controll
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Vacuum Gauges Vacuum Gauge Controll
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Vacuum Gauges Calibration Service C
Page 145 and 146:
Vacuum Feedthroughs Contents Produc
Page 147 and 148:
Vacuum Feedthroughs Rotary Feedthro
Page 149 and 150:
Vacuum Feedthroughs Linear Motion F
Page 151 and 152:
Vacuum Feedthroughs Viewports ISO-K
Page 153 and 154:
Vacuum Feedthroughs Viewports CF
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Vacuum Feedthroughs Electrical Feed
Page 157 and 158:
Vacuum Feedthroughs Electrical Feed
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Vacuum Feedthroughs Coaxial Feedthr
Page 161 and 162:
Vacuum Feedthroughs Liquid Feedthro
Page 163 and 164:
Vacuum Feedthroughs Lubricants and
Page 165 and 166:
Vacuum Valves B8
Page 167 and 168:
Angle and Inline Valves Vacuum Valv
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Page 171 and 172:
Page 173 and 174:
Page 175 and 176:
Page 177 and 178:
Angle Valves Vacuum Valves Solenoid
Page 179 and 180:
Angle Valves Vacuum Valves Type DN
Page 181 and 182:
Butterfly Valves Vacuum Valves Conn
Page 183 and 184:
Butterfly Valves Vacuum Valves VBP1
Page 185 and 186:
Gas Dosing Valves Vacuum Valves Gas
Page 187 and 188:
Gas Dosing Valves Vacuum Valves Man
Page 189 and 190:
Control Valves Vacuum Valves Contro
Page 191 and 192:
Controllers Vacuum Valves Controlle
Page 193 and 194:
Venting Valves Vacuum Valves Ventin
Page 195 and 196:
Safety Valves Vacuum Valves Safety
Page 197 and 198:
Vacuum Locks and Sealing Valves Vac
Page 199 and 200:
Vacuum Fittings Fittings and Ultra-
Page 201 and 202:
General Vacuum Fittings Seals Seal
Page 203 and 204:
ISO-KF Small Flange Components Vacu
Page 205 and 206: ISO-KF Small Flange Components Vacu
Page 215 and 216: ISO-K Clamp Flange Components Vacuu
Page 223 and 224: ISO-F Fixed Flange Components Vacuu
Page 225 and 226: UHV CF Components Vacuum Fittings C
Page 227 and 228: UHV CF Components Vacuum Fittings F
Page 229 and 230: UHV CF Components Vacuum Fittings F
Page 231 and 232: UHV CF Components Vacuum Fittings P
Page 233 and 234: UHV CF Components Vacuum Fittings P
Page 235 and 236: Oil Diffusion Pumps Contents Produc
Page 237 and 238: Oil Diffusion Pumps Diffusion Pumps
Page 239 and 240: Oil Diffusion Pumps Diffusion Pumps
Page 241 and 242: Oil Diffusion Pumps Pump Accessorie
Page 243 and 244: Oil Diffusion Pumps Baffle Baffle W
Page 245 and 246: Oil Diffusion Pumps Refrigerator Re
Page 247 and 248: Oil Diffusion Pumps LN 2 Supply Ind
Page 249 and 250: Oil Diffusion Pumps Pumping System
Page 251 and 252: Oil Diffusion Pumps Titanium Sublim
Page 253 and 254: Oil Diffusion Pumps Pumping Body Pu
Page 255: Oil Diffusion Pumps Catalyzer Trap
Page 259 and 260: Product Index Instrumentation Catal
Page 261 and 262: Inquiry Form Instrumentation Catalo
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B2 - Schoonover, Inc.

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