B2 - Schoonover, Inc.

XTC/2, XTC/C Thin Film Deposition Controller Thin Film Deposition Controllers and Monitors
Technical Data
XTC/2
Thin Film Deposition Controller
XTC/C
Crystal range and precision
Resolution for film thickness and deposition rate*
MHz
6.0 to 5.0 ± .05 Hz (per 250 ms sample)
0.0617 (per 250 ms sample)
Thickness accuracy %
0.5
Measurement frequency
Source control voltage
Number of sources
Output resolution
Update rate, max.
Inputs
Outputs
Internal inputs/outputs
Hz
V
Bit
Hz
4
0 to ± 10
2
15 over the full range (10 V)
4
8 defined TTL/CMOS logic compatible or closure to ground
12 single pole closing contacts (relays), 2.5 A at 120 V (100 VA)
not applicable
Display type **
Thickness resolution **
Rate resolution **
4x multiplexed LCD display
8 x LED, no display
1
0.1 for 1 to 99.9 /s / 1 for 100 to 999 /s
B4
Operation
Power requirements
90 to 132 V AC or 180 to 264 V AC, 47 to 63 Hz, 25 VA
Operating temperature ¡C
0 to 50
Max. frequency shift for the oscillator
Process data memory
Thin film programs
Process layers
Hardware interface
Sensors
Single
Dual
CrystalSix
Crucible positions
Weight
Dimensions (H x W x D)
MHz
lbs. / kg
in. / mm
1.0
9
3
2
1
2
8
5.95 / 2.7
3.47 x 7.92 x 11.9 / 89 x 203 x 305
* Material density = 1.0; Z ratio = 1.0; quartz frequency = 6 MHz ** Applies only to XTC/2; the XTC/C has LED displays /S/M = Angstrom/second/measurement
Ordering Information
Hand-held power controller
Allows remote control of deposition power levels while the controller is in manual mode.
Hand-held power control module plugs into the control unitÕs front panel.
Unit rack mount kits
Provides all required materials to mount the control unit in a standard rack.
Control units are half-rack in width. Two units can be mounted side-by-side in one standard rack width.
Choose the appropriate kit for the number and configuration of units to be mounted.
1 unit rack mount kit
2 unit rack mount kit
IEEE488 computer communications module
A plug-in module that provides complete computer interface capability utilizing the IEEE488 industry protocols.
XTC/2 and XTC/C instruction manual (one is provided with each unit)
Accessories and Spare Parts
Part Number
755-262-G1
757-212-G1
757-212-G2
757-122-G2
074-183
B4.5