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Vacuum Valves Contents Products and Accessories Angle and Inline Valves. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.3 DN 5 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.3 DN 16 - 160 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.6 Angle Valves DN 16-63 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.12 DN 250 - 1000 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.14 Butterfly Valves. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.16 Gate Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.20 Gas Dosing Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.21 Manually Actuated Coarse Gas Dosing Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.21 Manually Actuated Dosing and Shut-off Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.22 Manually Actuated All-metal Dosing Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.23 Gas Dosing Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.24 Control Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.25 Controllers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.26 Interface Module VCA200-Z . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.28 Venting Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.29 Manually Actuated. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.29 Solenoid Actuated . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.30 Safety Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.31 Vacuum Safety Valves. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.31 Power Failure Venting Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.32 High Pressure Relief Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.32 Vacuum Locks and Sealing Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.33 Ball Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B8.34 B8.2
Angle and Inline Valves Vacuum Valves Angle and Inline Valves DN 5 Manually Actuated ♦ Spindle drive ♦ Angle valve Pneumatically Actuated ♦ Extremely high service life of 5 million cycles ♦ Angle valves ♦ With and without pilot valve Solenoid Actuated ♦ Extremely high service life > 2 million cycles ♦ Angle and inline valves B8 Connections B8.3
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INSTRUMENTATION CATALOG 2 0 0 0 - 2
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B1 FABGUARDTM Sensor Integration an
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FabGuard TM Sensor Integration and
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Residual Gas and Process Gas Analyz
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Applications and Accessories Residu
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Transpector® 2 Gas Analysis System
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TranspectorWare TM Software Residua
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Transpector® XPR Gas Analysis Syst
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Preclude TM Photoresist Detector Re
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Preclude TM Photoresist Detector Re
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Transpector® CIS2 Gas Analysis Sys
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Page 33 and 34:
PPM 422 Plasma Process Monitor Resi
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Composer® Gas Composition Controll
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TWare32 TM for Windows ® 95/98/NT/
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TWare32 TM for Windows® 95/98/NT/2
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TWare32 TM for Windows ® 95/98/NT/
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IPC400 Pumping Packages Residual Ga
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B3 Thin Film Metrology Sensor Syste
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LES1200 Thin Film Metrology Sensor
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LES1200 Thin Film Metrology Sensor
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OES1200 Optical Emission Sensor Thi
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OES1200 Optical Emission Sensor Thi
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Thin Film Deposition Controllers an
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Leak Detectors Contents General App
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Leak Detectors Leak Detection - Lea
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Leak Detectors Leak Detection Metho
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Leak Detectors Operating Principles
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Leak Detectors ULTRATEST UL 200 Hel
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Leak Detectors Modul 200 Mobile and
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Leak Detectors Mobile Leak Detectio
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Leak Detectors LDS 1000 Modular Lea
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Leak Detectors ULTRATEST UL 500 Sta
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Leak Detectors ULTRATEST UL 500 dry
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Leak Detectors Protec Helium Sniffe
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Leak Detectors Ecotec II Sniffer Le
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Leak Detectors HLD4000A Sniffer Lea
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Leak Detectors Contura Z Helium Lea
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Leak Detectors Calibrated Leaks Cal
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Leak Detectors Screw-in Calibrated
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Leak Detectors Helium Sample Probes
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Leak Detectors Accessories for UL 2
Page 115 and 116: Leak Detectors Connection Flanges a
Page 117 and 118: Vacuum Gauges Contents General Basi
Page 119 and 120: Vacuum Gauges Transmitter Technolog
Page 121 and 122: Vacuum Gauges SKY TM Capacitance Di
Page 127 and 128: Vacuum Gauges Bayard-Alpert Pirani
Page 129 and 130: Vacuum Gauges Bayard-Alpert Pirani
Page 131 and 132: Vacuum Gauges Pirani Standard Gauge
Page 133 and 134: Vacuum Gauges Pirani Standard Gauge
Page 135 and 136: Vacuum Gauges Bayard-Alpert Gauge F
Page 137 and 138: Vacuum Gauges Penning Gauge PEG100
Page 139 and 140: Vacuum Gauges Vacuum Gauge Controll
Page 141 and 142: Vacuum Gauges Vacuum Gauge Controll
Page 143 and 144: Vacuum Gauges Calibration Service C
Page 145 and 146: Vacuum Feedthroughs Contents Produc
Page 147 and 148: Vacuum Feedthroughs Rotary Feedthro
Page 149 and 150: Vacuum Feedthroughs Linear Motion F
Page 151 and 152: Vacuum Feedthroughs Viewports ISO-K
Page 153 and 154: Vacuum Feedthroughs Viewports CF
Page 155 and 156: Vacuum Feedthroughs Electrical Feed
Page 157 and 158: Vacuum Feedthroughs Electrical Feed
Page 159 and 160: Vacuum Feedthroughs Coaxial Feedthr
Page 161 and 162: Vacuum Feedthroughs Liquid Feedthro
Page 163 and 164: Vacuum Feedthroughs Lubricants and
Page 165: Vacuum Valves B8
Page 169 and 170: Angle and Inline Valves Vacuum Valv
Page 177 and 178: Angle Valves Vacuum Valves Solenoid
Page 179 and 180: Angle Valves Vacuum Valves Type DN
Page 181 and 182: Butterfly Valves Vacuum Valves Conn
Page 183 and 184: Butterfly Valves Vacuum Valves VBP1
Page 185 and 186: Gas Dosing Valves Vacuum Valves Gas
Page 187 and 188: Gas Dosing Valves Vacuum Valves Man
Page 189 and 190: Control Valves Vacuum Valves Contro
Page 191 and 192: Controllers Vacuum Valves Controlle
Page 193 and 194: Venting Valves Vacuum Valves Ventin
Page 195 and 196: Safety Valves Vacuum Valves Safety
Page 197 and 198: Vacuum Locks and Sealing Valves Vac
Page 199 and 200: Vacuum Fittings Fittings and Ultra-
Page 201 and 202: General Vacuum Fittings Seals Seal
Page 203 and 204: ISO-KF Small Flange Components Vacu
Page 215 and 216: ISO-K Clamp Flange Components Vacuu
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ISO-K Clamp Flange Components Vacuu
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ISO-F Fixed Flange Components Vacuu
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UHV CF Components Vacuum Fittings C
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UHV CF Components Vacuum Fittings F
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UHV CF Components Vacuum Fittings F
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UHV CF Components Vacuum Fittings P
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UHV CF Components Vacuum Fittings P
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Oil Diffusion Pumps Contents Produc
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Oil Diffusion Pumps Diffusion Pumps
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Oil Diffusion Pumps Diffusion Pumps
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Oil Diffusion Pumps Pump Accessorie
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Oil Diffusion Pumps Baffle Baffle W
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Oil Diffusion Pumps Refrigerator Re
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Oil Diffusion Pumps LN 2 Supply Ind
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Oil Diffusion Pumps Pumping System
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Oil Diffusion Pumps Titanium Sublim
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Oil Diffusion Pumps Pumping Body Pu
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Oil Diffusion Pumps Catalyzer Trap
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Product Index Instrumentation Catal
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Product Index Instrumentation Catal
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Inquiry Form Instrumentation Catalo
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