B2 - Schoonover, Inc.

Thin Film Deposition Controllers and Monitors
XTM/2 Thin Film Deposition Monitor
XTM/2 Thin Film Deposition Monitor
♦ Operate in ÒdepositÓ or ÒetchÓ modes
♦ Saves rack space
♦ Simple operation
♦ ÒOperateÓ and ÒProgrammingÓ modes
♦ Select settings for etch mode, chart recorder output ranges and
restricting access to parameters via rear-mounted configuration switches
♦ Stores programmed data
♦ Four fixed function relays (ON/OFF)
Advantages
♦ Exclusive ModeLock measurement for monitoring thin film deposition
rate Ð especially valuable for low deposition rate film production
♦ Eliminates frequency mode hopping
♦ Extends crystal life
♦ More cost-effective than conventional Òactive oscillatorÓ units
♦ Improved resolution of 0.01 angstroms when multiple measurement
averaging is selected
♦ Select units of measurement (angstrom, gram, hertz) for a direct
readout (when applied to non-traditional applications such as corrosion
and contamination studies)
♦ Control via the RS232C computer interface (standard) or via the
IEEE488 interface (optional)
♦ Five fixed input functions, selectable via TTL signals
Typical
Applications
♦ Monitor any single-layer
deposition process and
select among 9 thin
films stored in memory
♦ Measure removal rate
and film thickness in
etch mode
♦ Special applications,
such as corrosion
and contaminationcause
investigation
Displayed unit of measurement
Type of measurement Rate Film thickness
Thickness /s k
Mass ng/s or µg/s µg or mg
Frequency n.a. Hz
Dimensional drawing for the XTM/2
Ordering Information Code-No. XTM/2 – _____ _____ _____ _____
Base unit
XTM/2, 115 V
XTM/2, 230 V
Additional computer communications module
None (only RS232C)
IEEE488 GPIB parallel
Rack mount kits
None
For 1 unit
For 2 units
1
2
1
2
0
1
2
Optional crystals (only available for the XTM/2)
None 0
One box gold crystals (10 crystals/box) 1
Five boxes gold crystals (10 crystals/box) 2
Ten boxes gold crystals (10 crystals/box) 3
One box silver crystals (10 crystals/box) 4
Five boxes silver crystals (10 crystals/box) 5
Ten boxes silver crystals (10 crystals/box) 6
Ordering Information Ð Order through our feature/option part number ordering system for a control unit configured with all features and options installed.
Contact INFICON for details. Base unit includes RS232C communication. Only one Òadditional computer communications moduleÓ can be added to the control unit.
Note: A complete deposition control system requires 5 components: a controller, an oscillator package, a vacuum feedthrough, a crystal sensor, and crystals.
Existing installations may only require individual components.
B4.6