B2 - Schoonover, Inc.
B2 - Schoonover, Inc.
B2 - Schoonover, Inc.
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Transpector® CIS2 Gas Analysis System<br />
Residual Gas and Process Gas Analyzers<br />
Ordering Information *Code-No. CIS2 -____ ____ ____ ____ ____ ____ ____ ____ ____ ____<br />
AMU range Transpector CIS 2<br />
100 AMU<br />
200 AMU<br />
300 AMU<br />
Sensor type<br />
PVD/LG electron multiplier<br />
CVD/LG electron multiplier<br />
IMP/LG electron multiplier<br />
Pumping system<br />
Alcatel ATH 20/40, thoria-coated iridium<br />
Alcatel ATH 20/40C, w/purge, W<br />
Alcatel ATH 20/40C, w/purge, for atmosphere<br />
Inlet valve<br />
PVD valve and heater<br />
CVD dual 90¡ valve, w/CF35<br />
CVD dual in-line valve, w/CF35<br />
CVD dual in-line valve, w/sample draw, w/CF35<br />
CVD dual 90¡ valve, w/sample draw, w/CF35<br />
Single capillary atmospheric inlet<br />
CVD dual 90¡ valve, w/sample draw, w/KF40<br />
CVD dual 90¡ valve, w/KF40<br />
CVD dual in-line valve, w/sample draw, w/KF40<br />
CVD dual in-line valve, w/KF40<br />
V1 orifice<br />
None<br />
Gasket (Ni VCR)<br />
10 mTorr<br />
100 mTorr<br />
1 Torr<br />
10 Torr<br />
100 Torr<br />
1.5m capillary<br />
3.0m capillary<br />
V2 orifice<br />
None<br />
Gasket (Ni VCR)<br />
10 mTorr<br />
100 mTorr<br />
1 Torr<br />
10 Torr<br />
100 Torr<br />
PM control cables<br />
1m<br />
3m<br />
5m<br />
9m<br />
Foreline pump<br />
None<br />
Standard pump, 120 VAC<br />
Standard pump, 230 VAC<br />
Foreline hose control<br />
None<br />
1m<br />
3m<br />
5m<br />
9m<br />
Calibration<br />
None<br />
Gasket and 4-VCR plug (for PVD inlet)<br />
PVD gas valve, hardware<br />
CVD gas valve, hardware<br />
1<br />
2<br />
3<br />
2<br />
4<br />
6<br />
1<br />
3<br />
4<br />
01<br />
02<br />
03<br />
04<br />
05<br />
07<br />
11<br />
12<br />
13<br />
14<br />
00<br />
01<br />
02<br />
03<br />
04<br />
05<br />
06<br />
20<br />
21<br />
00<br />
01<br />
02<br />
03<br />
04<br />
05<br />
06<br />
1<br />
3<br />
5<br />
9<br />
0<br />
1<br />
2<br />
0<br />
1<br />
3<br />
5<br />
9<br />
0<br />
1<br />
2<br />
3<br />
* Consult factory before ordering a CIS2 for proper application assistance.<br />
<strong>B2</strong><br />
<strong>B2</strong>.25
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