B2 - Schoonover, Inc.
B2 - Schoonover, Inc.
B2 - Schoonover, Inc.
Create successful ePaper yourself
Turn your PDF publications into a flip-book with our unique Google optimized e-Paper software.
XTM/2 Thin Film Deposition Monitor<br />
Thin Film Deposition Controllers and Monitors<br />
Technical Data<br />
Measurement data<br />
Crystal range and precision<br />
MHz<br />
Resolution for film thickness<br />
and deposition rate *<br />
Thickness accuracy %<br />
Measurements per second<br />
Averaging of the measurements<br />
Operating modes<br />
Display type<br />
Thickness resolution<br />
Rate resolution**<br />
Alternative units of measurement<br />
Update rate<br />
Process variables<br />
Memory<br />
Chart recorder output<br />
Voltage<br />
V<br />
Resolution<br />
Update rate<br />
Hz<br />
Functions<br />
Max. load<br />
kOhm<br />
Inputs<br />
TTL<br />
Outputs<br />
I/O Sample rate<br />
Hz<br />
Hardware interface<br />
Sensor<br />
Sub D<br />
Inputs<br />
Sub D<br />
Outputs<br />
Sub D<br />
Communication<br />
Chart recorder<br />
Power supply<br />
V<br />
Operating temperature ¡C<br />
Weight<br />
lbs. / kg<br />
Dimensions (W x H x D)<br />
in. / mm<br />
Hz<br />
XTM/2 Thin Film Deposition Monitor<br />
6.0 to 5.0 ± 0.1 Hz (per 250 ms sample)<br />
0.123 (per 250 ms sample)<br />
0.5<br />
4<br />
selectable 1 /4, 1, 4 or 16 seconds<br />
deposition and etching<br />
2 x multiplexed LCD display<br />
1<br />
0.01, 0.02, 0.05 /s for 0 to 9.99 /s (dependent on averaging) 0.1 /s for 10 to 99.9 /s, 1 for 100 to 999 /s<br />
µg, mg (mass) Hz (frequency)<br />
1<br />
9 sets 6 variables per set<br />
0 to ± 10<br />
13 bit over the full range (one bit is reserved for the sign)<br />
4<br />
Rate or film thickness or mass<br />
2.0<br />
5<br />
4 single pole closing contacts (relays), 2.5 A at 120 V (100 VA)<br />
4<br />
15 pin<br />
25 pin<br />
9 pin<br />
RS232C as standard (IEEE488 optional)<br />
BNC<br />
90 to 132 or 180 to 264, 49 to 61 Hz 25 Hz, 25 VA<br />
0 to 50<br />
5.95 / 2.7<br />
3.47 x 7.92 x 11.9 / 89 x 203 x 305<br />
B4<br />
* Material density = 1.0; Z ratio = 1.0; quartz frequency = 6 MHz<br />
** Alternative units of measurement; these are scaled accordingly. Resolution can only be improved through averaging.<br />
IEEE488 computer communications module<br />
Ordering Information<br />
Plug-in module that provides complete interface capability utilizing the IEEE488 industry standard protocols.<br />
Unit rack mount kits<br />
Provides all required materials to mount the control units into a standard rack.<br />
The control units are 1 /2 rack in width. Two units can be mounted side by side in one standard rack width.<br />
Choose the appropriate kit for the number and configuration of units to be mounted.<br />
Kit for 1 unit<br />
Kit for 2 units<br />
XTM/2 instruction manual (one is provided with each unit)<br />
Accessories and Spare Parts<br />
Part Number<br />
757-122-G2<br />
757-212-G1<br />
757-212-G2<br />
074-186<br />
B4.7
Change language