Toxic Gas Monitoring Systems â Design & Integration One Approach ...
Toxic Gas Monitoring Systems â Design & Integration One Approach ...
Toxic Gas Monitoring Systems â Design & Integration One Approach ...
You also want an ePaper? Increase the reach of your titles
YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.
<strong>Design</strong> Development – Information Gathering<br />
HPM <strong>Gas</strong> Storage, Distribution and Handling<br />
• Where and how will HPM gas be stored and how will it be sourced and<br />
delivered to tools?<br />
▫ <strong>Gas</strong> room/s with gas cabinet sources?<br />
▫<br />
▫<br />
▫<br />
Outdoor PAD (e.g., silane with open manifolds)?<br />
Local service chase locations?<br />
DCS – heat tracing required?<br />
• Will VMBs be used?<br />
▫ Equipped with individual stick shutdowns?<br />
• Will <strong>Gas</strong> isolation Boxes (GIBs) or <strong>Gas</strong> PODs be used?<br />
▫ Equipped with manual isolation valves, mass flow meters, etc.?<br />
2012 NE SESHA Conference
Change language