Toxic Gas Monitoring Systems â Design & Integration One Approach ...

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Safety Requirement Specification TGMS - Safety Requirement Specification: The TGMS safety requirement specification development requires participation of cross-functional disciplines (EH&S, Facilities, FAB Engineers, Management) – the goal being – consensus with no surprises! 2012 NE SESHA Conference
Safety Requirement Specification Safety Requirement Specification (SRS): Comprised of: 1. Functional Requirement Specifications • Safety monitoring, safety interlocks, alarming, notifications… (Cause & effect matrix) AND 2. Integrity Requirement Specifications • Availability, Probability of failure, Diagnostics… The #1 Danger to TGMS safety… is an incorrect “Safety Requirement Specification” (44%)… • Primary causes for an incorrect SRS include: • Lack of participation during SRS development with key multidisciplinary personnel (stakeholders): ▫ • Example: Project leader/s, EH&S, Facilities – (Electrical/Mechanical/Instrumentation), Researchers, Process and Operations personnel. Complacency, incomplete documentation, responsibilities not well defined… etc. 2012 NE SESHA Conference
Page 1 and 2: Toxic Gas Monitoring Systems - Desi
Page 3 and 4: 2012 NE SESHA Conference
Page 5 and 6: TGMS Purpose: TGMS Purpose & HPM De
Page 7 and 8: TGMS - Basis of Design Basis of Des
Page 9 and 10: Basis of Design - TGMS Reference (s
Page 11 and 12: IFC Basis of Design - TGMS Referenc
Page 15 and 16: CGA G-4-2008 G-4.4 G-5-2011 G-8.1-2
Page 17 and 18: SEMI Basis of Design - TGMS Referen
Page 19 and 20: SEMI Basis of Design - TGMS Referen
Page 23 and 24: Alarm Levels Basis of Design - TGMS
Page 25 and 26: Design Development - Information Ga
Page 27 and 28: Design Development - Information Ga
Page 29 and 30: TGMS - Reliability TGMS and Process
Page 31 and 32: TGMS - Reliability TGMS and Buildin
Page 33 and 34: Gas Detection Gas Monitoring Locati
Page 35 and 36: Gas Detection Gas Monitoring Locati
Page 37 and 38: Visualization: TGMS - Design & Inte
Page 39 and 40: Software Design Development “Argu
Page 41 and 42: Security: TGMS - Design & Integrati
Page 43 and 44: Security: TGMS - Design to Validati
Page 45: TGMS - Remote Visualization and Acc
Page 49 and 50: SRS Benefits: Safety Requirement Sp
Page 51 and 52: TGMS Testing • Initial Acceptance
Page 53 and 54: TGMS Testing • Records ▫ ▫
Page 55 and 56: Toxic Gas Monitoring - GLOBALFOUNDR
Page 57 and 58: Toxic Gas Monitoring - Design to Va

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