Toxic Gas Monitoring Systems â Design & Integration One Approach ...

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TGMS – Design & Integration Safety Goals Flexibility: • The ability to easily – and quickly – schedule periodic sensor maintenance, sensor additions and sensor removals, without compromise to operational gas safety monitoring or interruptions are very important. • Scheduled periodic testing of the TGMS – similar to the facility Fire Alarm System (FAS) are performed to eliminate the presence of any passive safety system fault – to ensure TGMS availability. • A TGMS in a research or manufacturing environment, requires the flexibility to accommodate changes in target gas and the corresponding changes in alarm settings, safety actions and alarm notification. Changes are typically required “on-line” in the manufacturing environment. • Management of Change (MOC) is critical to the integrity of the TGMS. • Functional changes to the TGMS require “reacceptance testing” to verify hardware/software changes are valid. 2012 NE SESHA Conference
Visualization: TGMS – Design & Integration Safety Goals Emergency Control Station & View Node Presentations - • Emergency Responders, ERT and Security personnel require fast, detailed and accurate gas alarm information. Visual information should be provided at selected safe locations (e.g., ECS) to aid and facilitate a safe response and fast alarm recovery (content example): • Overall facility site floor plans, depicting all building levels • Each floor plan includes information illustrating or linking to the following information: • Alarm location; specific alarm point location and tag name • Ambient breathing location (room / area) • Contained exhaust location (gas cabinet, VMB, tool cabinet, pump housing…) 2012 NE SESHA Conference
Page 1 and 2: Toxic Gas Monitoring Systems - Desi
Page 3 and 4: 2012 NE SESHA Conference
Page 5 and 6: TGMS Purpose: TGMS Purpose & HPM De
Page 7 and 8: TGMS - Basis of Design Basis of Des
Page 9 and 10: Basis of Design - TGMS Reference (s
Page 11 and 12: IFC Basis of Design - TGMS Referenc
Page 15 and 16: CGA G-4-2008 G-4.4 G-5-2011 G-8.1-2
Page 17 and 18: SEMI Basis of Design - TGMS Referen
Page 19 and 20: SEMI Basis of Design - TGMS Referen
Page 23 and 24: Alarm Levels Basis of Design - TGMS
Page 25 and 26: Design Development - Information Ga
Page 27 and 28: Design Development - Information Ga
Page 29 and 30: TGMS - Reliability TGMS and Process
Page 31 and 32: TGMS - Reliability TGMS and Buildin
Page 33 and 34: Gas Detection Gas Monitoring Locati
Page 35: Gas Detection Gas Monitoring Locati
Page 39 and 40: Software Design Development “Argu
Page 41 and 42: Security: TGMS - Design & Integrati
Page 43 and 44: Security: TGMS - Design to Validati
Page 45 and 46: TGMS - Remote Visualization and Acc
Page 47 and 48: Safety Requirement Specification Sa
Page 49 and 50: SRS Benefits: Safety Requirement Sp
Page 51 and 52: TGMS Testing • Initial Acceptance
Page 53 and 54: TGMS Testing • Records ▫ ▫
Page 55 and 56: Toxic Gas Monitoring - GLOBALFOUNDR
Page 57 and 58: Toxic Gas Monitoring - Design to Va

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