Toxic Gas Monitoring Systems â Design & Integration One Approach ...

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Design Development - Information Gathering What are the Gas Cabinet/VMB - Integral Controller Safety Monitoring Controls? (example): • Excess Flow • Secondary containment piping failure • Loss of cabinet exhaust ventilation • Emergency Power Off • Z-purge failure (where applicable) • UV/IR fire/fault (where applicable) • High Delivery Pressure • High Outlet Pressure • Low Cylinder Pressure • High Manifold Pressure • Low Manifold Pressure • Low Purge Pressure • High Purge Pressure • High Vent Pressure 2012 NE SESHA Conference
Design Development – Information Gathering I/O Interface configurations of gas cabinet / VMB controllers • What are the controller safety interlock inputs and status outputs available - to and from - each gas cabinet and/or VMB controller… for TGMS monitoring, safety actions, local and remote notifications? (example): Interface to TGMS from gas controller/s: ▫ ▫ ▫ ▫ ▫ ▫ ▫ Gas available / unavailable Excess Flow Secondary containment piping failure – (per gas cabinet outlet or VMB stick) Loss of cabinet exhaust ventilation Emergency Power Off – (local controller) Z-purge failure (where applicable) UV/IR fire/fault (where applicable) Interface from TGMS to gas controller: ▫ ▫ Gas Shutdown interlock/s – gas cabinet ESOVs and VMB stick outlet ESOVs Loss of N 2 trickle purge in silane vent header – suspend controller purging (CGA G-13) 2012 NE SESHA Conference
Page 1 and 2: Toxic Gas Monitoring Systems - Desi
Page 3 and 4: 2012 NE SESHA Conference
Page 5 and 6: TGMS Purpose: TGMS Purpose & HPM De
Page 7 and 8: TGMS - Basis of Design Basis of Des
Page 9 and 10: Basis of Design - TGMS Reference (s
Page 11 and 12: IFC Basis of Design - TGMS Referenc
Page 15 and 16: CGA G-4-2008 G-4.4 G-5-2011 G-8.1-2
Page 17 and 18: SEMI Basis of Design - TGMS Referen
Page 19 and 20: SEMI Basis of Design - TGMS Referen
Page 23 and 24: Alarm Levels Basis of Design - TGMS
Page 25: Design Development - Information Ga
Page 29 and 30: TGMS - Reliability TGMS and Process
Page 31 and 32: TGMS - Reliability TGMS and Buildin
Page 33 and 34: Gas Detection Gas Monitoring Locati
Page 35 and 36: Gas Detection Gas Monitoring Locati
Page 37 and 38: Visualization: TGMS - Design & Inte
Page 39 and 40: Software Design Development “Argu
Page 41 and 42: Security: TGMS - Design & Integrati
Page 43 and 44: Security: TGMS - Design to Validati
Page 45 and 46: TGMS - Remote Visualization and Acc
Page 47 and 48: Safety Requirement Specification Sa
Page 49 and 50: SRS Benefits: Safety Requirement Sp
Page 51 and 52: TGMS Testing • Initial Acceptance
Page 53 and 54: TGMS Testing • Records ▫ ▫
Page 55 and 56: Toxic Gas Monitoring - GLOBALFOUNDR
Page 57 and 58: Toxic Gas Monitoring - Design to Va

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