Control of Pad Damage Using Prober Operational Parameters

More documents

Recommendations

Info

Pile-up Measurement Signal threshold reference level at the pad surface. Region <strong>of</strong> Interest Threshold parameters set to determine the area falling more than 200nm above average pad level. June 3-6, 3 2007 IEEE SW Test Workshop 20
Depth Measurement A cross-section tool is used to measure the probe depth. June 3-6, 3 2007 IEEE SW Test Workshop 21
Page 1 and 2: Control of Pad Damage Using Prober
Page 3 and 4: Introduction • Probe card technol
Page 5 and 6: Area Effects Are Not Enough ! Blank
Page 7 and 8: Background - Height Effects Pad mat
Page 9 and 10: Assessing the Damage Traditional de
Page 11 and 12: Objectives • Develop a multi-vari
Page 13 and 14: Responses (Probe Mark Features) •
Page 15 and 16: Materials and Methods June 3-6, 3 2
Page 17 and 18: Probe Mark Inspection Layout Locati
Page 19: Scrub Mark Measurement Signal thres
Page 23 and 24: Pad Damage Pareto 350 Sorted by Pad
Page 25 and 26: Maximum Scrub Volume One Way Analys
Page 27 and 28: Maximum Scrub Area One way Analysis
Page 29 and 30: Analysis / Discussion June 3-6, 3 2
Page 31 and 32: Significant Factor Estimates Probe
Page 33 and 34: Correlation Between Responses Scatt
Page 35 and 36: Significant Factor Estimates Pile-u
Page 37 and 38: Correlation Between Responses Scatt
Page 39 and 40: Summary / Conclusions • Reasonabl
Page 41: Acknowledgements • Chuck Jensen,

Control of Pad Damage Using Prober Operational Parameters

Create successful ePaper yourself

Delete template?

Save as template?