Control of Pad Damage Using Prober Operational Parameters

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Significant Factor Estimates Probe Mark Area Primary Responses td[Double] ot[50] 39.9630 -38.75266 Single vs. Double Touchdown Minimum vs. Maximum Overtravel speed[Low] ot[63] speed[Low]*ot[50] speed[Low]*ot[63] speed[Low]*cr[Off] pu[Off] cr[Off] ut[20] ut[10] -9.0581 -7.1279 5.4209 5.0350 -4.8920 2.7873 2.0336 1.6605 -1.5891 Secondary Responses A reduced dataset analysis showed that speed was the third largest factor contributing to the probe mark area response. 0 5 10 15 20 25 30 35 40 45 Scaled Estimates June 3-6, 3 2007 IEEE SW Test Workshop 32
Correlation Between Responses Scatterplot Matrix 80 Mean(Scrub 70 Volume) 60 50 40 30 td Double Single • As expected, the probe mark scrub area and scrub volume showed statistically high correlations to each other 20 300 250 200 150 Mean(Scrub Area) • The correlation between probe mark depth and volume was not statistically significant 100 0.5 0.45 0.4 20 30 40 50 60 70 80 100 150 200 250 300 Mean(Scrub Depth) .4 .45 .5 • Possible reasons for lack <strong>of</strong> correlation to probe depth – Small sample size effects – Operator-induced variability – Probe tip diameter – Probe gram force June 3-6, 3 2007 IEEE SW Test Workshop 33
Page 1 and 2: Control of Pad Damage Using Prober
Page 3 and 4: Introduction • Probe card technol
Page 5 and 6: Area Effects Are Not Enough ! Blank
Page 7 and 8: Background - Height Effects Pad mat
Page 9 and 10: Assessing the Damage Traditional de
Page 11 and 12: Objectives • Develop a multi-vari
Page 13 and 14: Responses (Probe Mark Features) •
Page 15 and 16: Materials and Methods June 3-6, 3 2
Page 17 and 18: Probe Mark Inspection Layout Locati
Page 19 and 20: Scrub Mark Measurement Signal thres
Page 21 and 22: Depth Measurement A cross-section t
Page 23 and 24: Pad Damage Pareto 350 Sorted by Pad
Page 25 and 26: Maximum Scrub Volume One Way Analys
Page 27 and 28: Maximum Scrub Area One way Analysis
Page 29 and 30: Analysis / Discussion June 3-6, 3 2
Page 31: Significant Factor Estimates Probe
Page 35 and 36: Significant Factor Estimates Pile-u
Page 37 and 38: Correlation Between Responses Scatt
Page 39 and 40: Summary / Conclusions • Reasonabl
Page 41: Acknowledgements • Chuck Jensen,

Control of Pad Damage Using Prober Operational Parameters

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