Listing and specification of processing and ... - ISC Konstanz

Listing and specification of processing and characterisation
equipment at ISC Konstanz 01.01.2008
apparatus applications properties
- wafer cleaning
- isotexture
- P-glass etch
- edge isolation
- single side isotexture
- single side polishing
- 3 tracks
- format: 80 x 120 mm 2 to 210 x 210 mm 2
- up to 2.5m/s
- temperature control: 3°C-98°C
- 130l fluid storage
- fluid head
inline wet-bench (RENA)
batch wet-bench (RENA)
indus batch wet-bench (RENA)
- wafer cleaning
- isotexture
- KOH + IPA texture
- KOH + KON x texture
- alkaline etching
- industrial cleaning
- piranha cleaning
- drying
- POCl3 diffusion
- BBr3 diffusion
- thermal oxidation
not yet at ISC Konstanz
- format: 50 x 50 mm 2 to 210 x 210 mm 2
- alkaline bath with heating
- HCl bath
- HF bath
- different deionised water cascades for
rinsing
- piranha bath
- oven for drying
- format: 50 x 50 mm 2 to 210 x 210 mm 2
- up to 200 wafers (400 wafers back to back)
diffusion furnace (centrotherm)
- roll-on deposition of different
precursors
- format: 100 x 100 mm 2 to 210 x 210 mm 2
- single or double side deposition
doper with roll-on (RENA)
- diffusion from roll-on / spin-on /
screen-printed precursor
- ceramic rolls
- temperature up to 1000°C
in-line diffusion furnace
(Tecnofimes)

- PECVD SiN, SiC, SiO
- LPCVD SiN
- sintering tube
- format: 50 x 50 mm 2 to 210 x 210 mm 2
- up to 200 wafers
- sintering of contacts under ArH-atmosphere
CVD furnace (centrotherm)
- metallisation of front and rear - semiautomatic screen printer
- format: 50 x 50 mm 2 to 210 x 210 mm 2
- optical adjustment with four cameras
- printing process in less than 10s
- hot melt printing possible
screen printer (Baccini)
screen printer (Ekra) - metallisation of front and rear - fully manual screen printer
- format: 50 x 50 mm 2 to 210 x 210 mm 2
- metallisation of rear side preferred
- front side metallization for small areas
- drying of metallised samples - semi automatic operation
- paternoster drying furnace
- format: 50 x 50 mm 2 to 156 x 156 mm 2
- 4 heating zones
- 250 places
- one drying cycle: ca. 5 minutes
- temperature up to 150°C
dryer (Baccini)
- firing of metallised samples - metal belt furnace
- format: 50 x 50 mm 2 to 210 x 210 mm 2
- 7m long
- 6 heating zones
- up to 1000°C
- approx. 1.5 min per process
belt-furnace (centrotherm)
laser (Baccini)
electroless Ag-plating (RENA)
several fume hoods
spinner
not yet at ISC Konstanz
not yet at ISC Konstanz
with or without gas-washer
thin surface coatings
- 12 process gases - N2, H2, O2 (technical and purer)
- C3H8
- Ar, N20, SF6
- SiH2Cl2, CH4, SiH4, NH3
process gases
chemicals - >10 different chemicals HCl (32%) (hydrochloric acid)
- HF (50%) (hydrofluoric acid)
- H 2 O 2 (30%) (hydrogen peroxide)
- NaOH (pellets) (sodium hydroxide)
- KOH (potassium hydroxide)
- HNO 3 (65%) (nitric acid)
- CH 3 COOH (99.8%) (acetic acid)
- H 2 SO 4 (95-97%) (sulphuric acid)
- Na 2 CO 3 (sodium carbonate)
- H 3 PO 4 (ortho-phosphorus acid)
- 2-propanol (IPA)