02-a Wet etching - Caltech Micromachining Laboratory

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The H2SOc-H2O2-H2O System.
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Flg.9.2 Isoetch curves for gallium arsenide (H2SO.:H2O2:H2O system). From Iida and
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The H3POc-H2O2-H2O System.
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Fig. 9,3 Isoetch curves for gallium arsenide (H]PO.: H2O2: H2O system). From Morl and
Watanabe [17]. Reprinted with permission of the publisher. The Electrochemical Society,
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