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High power RF-LDMOS transistors for base station applications

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semiconductors<br />

<strong>High</strong> <strong>power</strong> <strong>RF</strong>-<strong>LDMOS</strong> <strong>transistors</strong><br />

<strong>for</strong> <strong>base</strong> <strong>station</strong> <strong>applications</strong><br />

Delivering the <strong>power</strong> <strong>for</strong> upcoming wideband high-capacity <strong>base</strong> <strong>station</strong>s that will<br />

provide the punch <strong>for</strong> high bit-rate in<strong>for</strong>mation systems.<br />

By Christopher P. Dragon,<br />

Wayne R. Burger,<br />

Bob Davidson, Enver Krvavac,<br />

Nagaraj Dixit and Dale Joersz<br />

With trials ongoing in Japan <strong>for</strong><br />

IMT-2000 and similar activity <strong>for</strong><br />

UMTS starting soon in Europe, the<br />

2.11 to 2.17 GHz band <strong>for</strong> wideband<br />

code division-multiple access (W-<br />

CDMA) is getting considerable attention<br />

from infrastructure <strong>base</strong> <strong>station</strong><br />

OEMs and high <strong>power</strong> <strong>RF</strong> transistor<br />

manufacturers. As third generation<br />

(3G) cellular systems such as W-CDMA<br />

are emerging, the demand <strong>for</strong> <strong>transistors</strong><br />

with increased output <strong>power</strong> has<br />

escalated in support of the <strong>RF</strong> <strong>power</strong><br />

amplifier designs required <strong>for</strong> <strong>base</strong> <strong>station</strong><br />

infrastructure.<br />

The technical design and high volume<br />

fabrication of <strong>transistors</strong> that<br />

meet this demand pose a specific set of<br />

challenges. The devices must be efficient<br />

and possess a high degree of linearity.<br />

Reasonably high impedances<br />

must be presented to the input/output<br />

terminals <strong>for</strong> ease of use, thermal management<br />

and reliability. Device consistency<br />

and cost are also important factors<br />

<strong>for</strong> consideration.<br />

For several years, <strong>RF</strong>-<strong>LDMOS</strong> has<br />

been a leading technology used in support<br />

of high <strong>power</strong> <strong>RF</strong> <strong>applications</strong>,<br />

specifically <strong>for</strong> cellular <strong>base</strong> <strong>station</strong><br />

<strong>power</strong> amplifiers [1], [2]. Breakdown<br />

Figure 1. Cross-section of a typical <strong>LDMOS</strong><br />

structure.<br />

voltages in excess of 65 V facilitate the<br />

use of a 28 V <strong>power</strong> supply while maintaining<br />

superior ruggedness characteristics.<br />

The p+ sinker (see Figure 1) provides<br />

a low inductance path to ground,<br />

and the inherent device linearity has<br />

been used to great advantage.<br />

This article discusses the parameters<br />

that are considered critical <strong>for</strong> superior<br />

W-CDMA per<strong>for</strong>mance and presents<br />

the per<strong>for</strong>mance of a leading-edge <strong>RF</strong>-<br />

<strong>LDMOS</strong> device design. The device<br />

described here operates single-ended<br />

(see Figures 2 and 3) and delivers 155<br />

W, or 51.9 dBm of CW output <strong>power</strong> at<br />

3 dB compression (P 3dB ) and 2.12 GHz.<br />

Die technology is <strong>base</strong>d on a fourthgeneration<br />

process that uses a 40 nm<br />

gate oxide, 0.6 µm gate length, die<br />

thickness of 100 µm, and a total gate<br />

periphery of 360 mm.<br />

Linearity<br />

Be<strong>for</strong>e the emergence of spread-spectrum<br />

wireless protocols, a widely<br />

accepted figure of merit <strong>for</strong> linearity in<br />

class AB amplifiers was two-tone intermodulation<br />

distortion (IMD). This measurement<br />

is done with an input signal<br />

consisting of two unmodulated carriers<br />

spaced 100 kHz apart. Wide bandwidth<br />

modulation <strong>for</strong>mats, as well as widely<br />

spaced carriers, have brought about the<br />

need to design the amplifier circuit so<br />

this measurement can be made using<br />

much wider tone separations. Figure 4<br />

shows IMD, using 10 MHz tone spacing<br />

(f 1 = 2.115 GHz, f 2 = 2.125 GHz), plotted<br />

against output <strong>power</strong> <strong>for</strong> several different<br />

quiescent drain bias currents<br />

(IDQ). Figure 5 shows the corresponding<br />

gain <strong>for</strong> the same variations in quiescent<br />

drain bias current. Also note<br />

that output <strong>power</strong> <strong>for</strong> this type of signal<br />

is maximized at a bias current of about<br />

1.0 A.<br />

CDMA and W-CDMA signals produce<br />

distortion products that are<br />

spread across a continuous spectrum of<br />

frequencies. This is observed as spectral<br />

regrowth on either side of the single<br />

carrier band. (See Figure 6.) This<br />

dictates that adjacent channel <strong>power</strong><br />

ratio (ACPR), calculated by integrating<br />

the <strong>power</strong> in 3.84 MHz bandwidths offset<br />

5 MHz from the W-CDMA channel<br />

and dividing by the channel <strong>power</strong>, is<br />

used rather than IMD as a measure of<br />

linearity. Figure 7 shows ACPR versus<br />

output <strong>power</strong> <strong>for</strong> the single-ended<br />

device with a drain bias of 1.3 A. The<br />

device achieves an average output<br />

<strong>power</strong> of 44.2 dBm (26.4 W) at –45 dBc<br />

ACPR with an efficiency of 21.9%.<br />

Referring to Figure 4, note this bias<br />

point corresponds to two-tone IMD per<strong>for</strong>mance<br />

less than –45 dBc <strong>for</strong> <strong>power</strong>s<br />

roughly 8 dB or more below P 3dB . This<br />

is important because the peak-to-average<br />

<strong>power</strong> ratio of these spread-spectrum<br />

signals is in the 10 dB region,<br />

making the two-tone linearity per<strong>for</strong>-<br />

Figure 2. The internal configuration of a 155 W<br />

transistor.<br />

Figure 3. Transistor <strong>for</strong>m factor.<br />

20 www.rfdesign.com March 2000


Figure 4. Class-AB two-tone intermodulation<br />

distortion versus output <strong>power</strong> as a function<br />

of drain bias.<br />

mance of the device in the region 8 dB<br />

to 10 dB below P 3dB a good indicator of<br />

CDMA <strong>power</strong> capability. Moreover, the<br />

excellent linearity of <strong>RF</strong>-<strong>LDMOS</strong><br />

devices in this so-called “back off”<br />

region contributes to minimizing the<br />

complexity of the total amplifier system<br />

and maximizing system efficiency.<br />

Additional considerations <strong>for</strong> linearity<br />

per<strong>for</strong>mance using wide modulation<br />

bandwidths or widely separated signals<br />

are gain and phase flatness. These<br />

parameters were measured over the<br />

band of 2.11 GHz to 2.17 GHz and<br />

found to be 0.20 dB and 0.42 degrees<br />

respectively.<br />

Furthermore, many W-CDMA <strong>base</strong><br />

<strong>station</strong>s are designed to operate with<br />

several carriers adjacent to one another.<br />

Intermodulation distortion caused by<br />

two spread-spectrum signals is certain to<br />

occur under these conditions, and there<strong>for</strong>e,<br />

must be quantified if the device linearity<br />

is to be characterized fully.<br />

From a system point of view, two W-<br />

CDMA carriers with a spacing of 10<br />

MHz represent a worst-case situation.<br />

Two W-CDMA carriers at f 1 = 2.1125<br />

GHz and f 2 = 2.1225 GHz were used to<br />

generate the data plotted in Figure 8.<br />

The IMD of the third-order products<br />

(IMD3) is calculated by integrating the<br />

<strong>power</strong> in 3.84 MHz bandwidths at<br />

2.1325 GHz (IMD3+) and 2.1025 GHz<br />

(IMD3–), and is plotted along with efficiency<br />

and ACPR against output <strong>power</strong><br />

Figure 5. Class-AB two-tone <strong>power</strong> gain versus<br />

output <strong>power</strong> as a function of drain bias.<br />

in Figure 9. It is clear that the IMD3,<br />

as measured under these conditions,<br />

tracks ACPR. Note that the drain bias<br />

<strong>for</strong> the two carrier measurement has<br />

been increased to 1.6 A, which is<br />

slightly higher than the 1.3 A used to<br />

achieve the best single carrier W-<br />

CDMA per<strong>for</strong>mance. The ACPR reaches<br />

–40 dBc at 44.6 dBm (29.0 W) at<br />

22.9% efficiency, whereas the IMD3<br />

generated between two adjacent multicarrier<br />

stimuli reaches –40 dBc at 43.7<br />

dBm (23.7 W) and 20.5% efficiency.<br />

Choosing which metric to use and the<br />

appropriate bias point should be application-driven.<br />

Output <strong>power</strong><br />

While the average <strong>power</strong> per sector<br />

and/or carrier in W-CDMA systems is<br />

relatively low, the high peak-to-average<br />

ratio of the signal requires <strong>transistors</strong><br />

with state-of-the-art, peak <strong>power</strong> capabilities.<br />

Multicarrier systems require<br />

designers to continually strive <strong>for</strong><br />

increased <strong>power</strong> capability from their<br />

<strong>power</strong> amplifiers (PA’s). Delivering<br />

transistor solutions that generate larger<br />

and larger amounts of output <strong>power</strong><br />

assists designers in achieving this goal.<br />

Output <strong>power</strong> can be defined under<br />

several different conditions, one of<br />

which is the previously defined P 3dB .<br />

Figure10 shows the constant envelope<br />

or continuous wave (CW) output <strong>power</strong><br />

capability of the single-ended design.<br />

The broadband capability of the device,<br />

along with excellent flatness, is further<br />

shown in Figure 11 under conventional<br />

two-tone conditions. Although GSM<br />

<strong>base</strong> <strong>station</strong>s operate at elevated average<br />

<strong>power</strong> levels (because of the constant<br />

envelope nature of the signal),<br />

CDMA and W-CDMA <strong>base</strong> <strong>station</strong>s<br />

maintain low average <strong>power</strong> levels due<br />

to the linearity requirements imposed<br />

by their spread-spectrum nature.<br />

Referring back to Figure 9, an average<br />

<strong>power</strong> of 23.7 W (or 8.2 dB below<br />

P 3dB ) is achieved under W-CDMA conditions<br />

when a linearity constraint of<br />

IMD3 +/- of –40 dBc or better is used.<br />

Note the continuing reduction in IMD3<br />

with decreasing <strong>power</strong> illustrating the<br />

excellent linearity properties of the <strong>RF</strong>-<br />

<strong>LDMOS</strong> technology. The system<br />

designer must carefully consider the<br />

overall system architecture, including<br />

error correction, to determine the optimum<br />

operating point.<br />

For a given supply voltage, increasing<br />

device size is the most straight<strong>for</strong>ward<br />

method used to increase a<br />

device’s <strong>power</strong> capability. However,<br />

when a fixed amount of <strong>power</strong> is<br />

required, caution must be exercised<br />

not to make the device too large or<br />

efficiency will be degraded. An additional<br />

challenge facing the device<br />

designer is ensuring these very high<br />

<strong>power</strong> devices can achieve the specified<br />

levels of per<strong>for</strong>mance when<br />

acceptable levels of circuit impedances<br />

are presented to the I/O terminals. For<br />

the device described in this article, the<br />

layout design of the die incorporates<br />

two large metal bus pads <strong>for</strong> the drain<br />

and gate connections. These bus pads<br />

allow advanced topology impedance<br />

matching to be designed into the<br />

device package. The resulting<br />

input/output impedances achieved<br />

across the W-CDMA band are shown<br />

in Table 1 (Note the typical Q is 1.8 <strong>for</strong><br />

Z in and 1.25 <strong>for</strong> Z out .<br />

Figure 6. Example of spectral regrowth when<br />

driven by a CDMA signal.<br />

Figure 7. ACPR and drain efficiency <strong>for</strong> one W-<br />

CDMA carrier versus output <strong>power</strong>.<br />

Figure 8. Two W-CDMA carriers showing IMD3<br />

and spectral regrowth.<br />

22 www.rfdesign.com March 2000


Drain efficiency<br />

Drain efficiency has always been a<br />

critical parameter <strong>for</strong> PA devices, mainly<br />

due to thermal management issues that<br />

must be addressed at both the device<br />

and the system levels in such high-<strong>power</strong><br />

designs. Referring to Figure 10, the<br />

drain efficiency of the device is plotted<br />

against CW input <strong>power</strong>. At the P 3dB<br />

point, an efficiency of 49% is achieved.<br />

Under W-CDMA conditions however, the<br />

average <strong>power</strong> is much lower and highly<br />

dependent on the linearity constraint.<br />

This reveals a direct trade off between<br />

linearity and efficiency. In the previous<br />

section, a constraint of –40 dBc IMD3<br />

was used (see Figure 9) to define an<br />

average <strong>power</strong> capability of 23.7 W. The<br />

corresponding efficiency is indicated as<br />

20.5%. A higher efficiency operating<br />

point can be achieved by relaxing the linearity<br />

criteria. For example, at –35 dBc<br />

IMD3, output <strong>power</strong> is 45.1 dBm (32.2<br />

watts) and efficiency has increased to<br />

22.9%. Whether this really improves the<br />

overall system level efficiency must be<br />

carefully evaluated in terms of the additional<br />

error correction required to maintain<br />

the system linearity specification.<br />

Conclusion<br />

<strong>RF</strong>-<strong>LDMOS</strong> technology enables the<br />

design of high-<strong>power</strong>, high-linearity <strong>RF</strong><br />

<strong>power</strong> amplifiers without compromising<br />

system level <strong>power</strong> conversion efficiency.<br />

Linear amplifiers of this type, using <strong>RF</strong>-<br />

<strong>LDMOS</strong>, are believed to be as cost effective<br />

as possible. This article has illustrated<br />

the excellent linearity character-<br />

Figure 9. IMD3, ACPR and drain efficiency <strong>for</strong> two<br />

W-CDMA carriers vs. output <strong>power</strong>.<br />

Figure 10. Single-tone output <strong>power</strong>, gain and<br />

efficiency versus input <strong>power</strong>.<br />

Figure 11. Broadband two-tone per<strong>for</strong>mance.<br />

24 March 2000


Frequency Z in (W) Z out (W)<br />

2.11 GHz 3.81 +j6.85 1.56 -j1.58<br />

2.14 GHz 4.33 +j7.90 1.53 -j1.90<br />

2.17 GHz 4.84 +j8.46 1.48 -j2.26<br />

Table 1. Input and output impedances.<br />

istics of <strong>RF</strong>-<strong>LDMOS</strong> at high-<strong>power</strong> levels<br />

and discussed some of the <strong>RF</strong> per<strong>for</strong>mance<br />

measurements and tradeoffs that<br />

face the system designer in selecting the<br />

optimum operating point <strong>for</strong> the transistor.<br />

State-of-the-art <strong>RF</strong>-<strong>LDMOS</strong> results<br />

have been presented <strong>for</strong> a single-ended<br />

transistor capable of delivering P3dB<br />

levels of 155 W along with W-CDMA<br />

<strong>power</strong> levels at –40 dBc IMD3 of 23.7<br />

watts. Further, note that the average W-<br />

CDMA <strong>power</strong> <strong>for</strong> the stated linearity criteria<br />

is 8.2 dB below the P 3dB value,<br />

which is nearly identical to the peak to<br />

average ratio of the W-CDMA test signal<br />

used in these measurements.<br />

References<br />

[1] A. Wood, C. Dragon, and W.<br />

Burger, “<strong>High</strong> Per<strong>for</strong>mance Silicon<br />

<strong>LDMOS</strong> Technology <strong>for</strong> 2GHz <strong>RF</strong><br />

Power Amplifier Applications”, IEDM<br />

Tech. Digest 1996, pp. 87-90.<br />

[2] A. Wood, W. Brakensiek, C.<br />

Dragon, and W. Burger, “120 Watt,<br />

2GHz, Si <strong>LDMOS</strong> <strong>RF</strong> Power Transistor<br />

<strong>for</strong> PCS Base <strong>station</strong> Applications,<br />

1998 IEEE MTT-S Digest, pp. 707-710.<br />

About the authors<br />

Christopher P. Dragon is a <strong>RF</strong><br />

Device Engineer He received his<br />

BSEE (LSU); Masters of Engineering<br />

(ME)in Microelectronic Engineering<br />

(RIT). He can be reached at (480)413-<br />

6887. e-mail Chris.Dragon@<br />

motorola.com.<br />

Bob Davidson is a Member of The<br />

Technical Staf. He received his BSEE<br />

from the University of Illinois atUrbana<br />

in 1975 and MSEE from Illinois<br />

Institute of Technology, Chicago in<br />

1979. He can be reached at (480) 413-<br />

5602. e-mail Bob.Davidson@<br />

motorola.com.<br />

Wayne Burger is a <strong>RF</strong> <strong>LDMOS</strong><br />

Device Engineering Manager. He<br />

received his PhD in Electrical Engineering<br />

from MIT. He can be reached<br />

at (480) 413-6895. e-mail wayne.<br />

burger@motorola.com.<br />

Enver Krvavac is a Technical Staff<br />

Engineer. He can be reached at (480)<br />

413-5644. e-mail r43152@<br />

e-mail sps.mot.com.<br />

Nagaraj Dixit is a <strong>RF</strong> Application<br />

Engineer. He can be reached at (480)<br />

413-5603. e-mail n.dixit@motorola<br />

.com.<br />

Dale Joersz is <strong>RF</strong> <strong>applications</strong>/<br />

Design Technician. He received his<br />

AA in Electronics from Phoenix Institute<br />

of Technology and is currently<br />

persuing a BS in Industrial Engineering<br />

from Arizona State Univeristy. He<br />

can be reached at (480) 413-5638. e-<br />

mail dale.joersz@motorola.com.<br />

All authors are with Motorola’s<br />

Semiconductor Products Sector, Wireless<br />

Infrustructure Systems Division,<br />

Tempe, AZ.<br />

26 March 2000

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