Dynamic SIMS - CasaXPS

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CasaXPS Manual 2.3.15 Rev 1.0 Copyright © 2010 Casa Software Ltd Contents CasaXPS Processing Software ............................................................................................................ 1 Casa Software Ltd. ........................................................................................................................... 1 NO WARRANTY ............................................................................................................................... 1 Acknowledgements ............................................................................................................................. 1 The Nature of ToF Spectra ................................................................................................................... 5 ToF Mass Calibration ........................................................................................................................... 7 Calibration Based on Nominal Masses ............................................................................................ 9 An Example of Mass Calibration using Nominal Masses ........................................................... 11 Recalibration of Mass Scale for ToF Spectra ..................................................................................... 15 Recalibration Steps ........................................................................................................................ 17 Peak Fitting ToF SIMS Data ................................................................................................................ 18 Line-shapes Suitable for ToF SIMS Spectra ................................................................................... 19 Peak Identification and Reduction .................................................................................................... 21 IonToF Peak Identification ................................................................................................................. 23 Converting IonToF Spectra ................................................................................................... 24 Directory Profiling ......................................................................................................................... 26 Profile Directory Toolbar Option ...................................................................................... 28 Working with ToF Spectra in CasaXPS ............................................................................................... 29 Time to Mass Calibration Procedures ........................................................................................... 29 Mass Calibration using Regions and Propagation of Regions between Spectra ....................... 30 Mass Calibration ........................................................................................................................ 31 Propagation of Calibration Regions ........................................................................................... 31 Mass Calibration using the Exact Mass Calculator Property Page: ........................................... 33 The Element Library from a ToF Perspective ................................................................................ 35 The Element Library and Linking ToF Peaks for Display ............................................................ 36 Profiling Features for ToF data .......................................................................................................... 47 ToF Data File Options .................................................................................................................... 49 Create a Total Ion Spectrum ............................................................................................. 50 Create Images from Spectra using Quantification Regions ....................................................... 52 Spectra Generated from Image Zones ...................................................................................... 54 Creating a Profile from a Total Ion Spectrum ............................................................................ 56 Spectra Generated from Profile Layers ............................................................................. 58 2
CasaXPS Manual 2.3.15 Rev 1.0 Copyright © 2010 Casa Software Ltd Create a Profile from a Directory of Files .......................................................................... 58 Convert and Merge a Directory of XYT File ....................................................................... 61 Image Depth Profile Data Analysis .............................................................................. 63 Quantification Reports and ToF Data ................................................................................................ 66 Quantification via the Report Spec Property Page ....................................................................... 66 Standard Report ........................................................................................................................ 67 Custom Report .......................................................................................................................... 70 An Overview of Working with ToF Data in CasaXPS ......................................................................... 72 SIMS Toolbar Buttons: Display Options ........................................................................................ 72 An Overview .................................................................................................................................. 79 Basics of CasaXPS .......................................................................................................................... 81 Converting Data ........................................................................................................................ 81 Data Viewed Via an Experiment Frame .................................................................................... 82 Displaying Data .......................................................................................................................... 83 Selecting VAMAS Blocks ............................................................................................................ 84 Tile Display Options ................................................................................................................... 85 Display Colours .......................................................................................................................... 86 Calculating SNMS Sensitivity Factors ............................................................................................ 88 Quantification of SNMS Profiles .................................................................................................... 98 Quantification of Stainless Steel using SNMS: an Example ....................................................... 98 Specifying the Sputter-Rate .................................................................................................... 103 Creating a Calibrated SNMS Profile ......................................................................................... 104 Dynamic SIMS .................................................................................................................................. 109 Notes on Dynamic SIMS RSF Calculation .................................................................................... 110 Reference Signal Measured during the Course of Profile ....................................................... 110 Reference Signal Measured at End of Acquisition Cycles ....................................................... 111 Quantification of Dynamic SIMS Profiles .................................................................................... 112 Quantification of Basic Profiles ............................................................................................... 114 Making Adjustments to the Sputter Rate ............................................................................... 125 Display of Calibrated Profiles .................................................................................................. 126 Further Aspects of Dynamic SIMS Quantification ....................................................................... 127 Logical Structure of a SIMS Depth Profile within CasaXPS ...................................................... 127 Methods for Computation of RSF and Sputter Rate Values ................................................... 128 Identification of the Matrix and Interface Cycles.................................................................... 128 3
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Dynamic SIMS - CasaXPS

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