Thesis Defense Presentation

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Fabrication: Transparency Mask• Transparency maskfor device wafer:• Much faster andmuch cheaper• Low resolution: 3-4µm• Electrostatic force isvery sensitive to therecess at electrode• Print the mask 10times larger and use10:1 stepper toshrink it downDevice made using Transparency MaskElectrodeCantilever BeamElectrodeCantilever BeamDevice made using transparencymask and 10:1 Stepper27Fabrication Results: Overview4513 3 7128500 µm2 1 11 6109122814
Measurement: Pull_in of the Starting Zone• The starting beam bendsup and closes the gapbetween zipper beam andfixed electrode• Pull-in at 75V• 140 V. Zipper beamcollapse to the fixedelectrode, relay is closed29Force Measurement12108Force (mN)6420-2Flextester-40 20 40 60 80 100 120Displacement δ (µm)Relay FEAActuator Numerical Simulation at 140VRelay FEA (Adjusted model)Relay ExperimentalActuator Experimental at 140V3015
Page 1 and 2: Electrostatic Zipping Actuators and
Page 3: F-D Curve of Three Electrostatic Ac
Page 6: Design: Compliant Starting Zone•T
Page 9 and 10: Forces: Actuator vs. Switch Beam•
Page 11 and 12: Contributions• Design: Starting z
Page 13: Fabrication: Process Flow (2)Starti
Page 17 and 18: Switching Time• Contact bouncetim
Page 19 and 20: KOH-etched Relay Contacts: Experime
Page 21 and 22: Acknowledgements• Advisors: Prof.
Page 23 and 24: •Beam equation:( E I w'')''+ T w'
Page 25: •Far from x = sy( x) B( x s)Analy

Thesis Defense Presentation

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