Thesis Defense Presentation

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43Actuator Beam Profile15.78 µmDRIE Etchdirection13.00 µm12.78 µm285.8 µm15.24 µm4422
•Beam equation:( E I w'')''+ T w''= 0Optimization: Algorithm (1)( EIδ w'')'' + Tδw'' =−δTw'' −( EδIw'')''∫i i i i i i•Fredholm alternative:( δ δ )Tw'' + ( E Iw'')'' wdx=0i i i iiδ Ti=− ∫ ∫w ( EδI w '')'' dxw '' w dx•Cost function variation:iii∫δ T = Eδ⎡ ∞2dC ( w '')⎤δ iC( { Ti}) = ∫ δ I ⎢∑⎥ = I ( T, )2iwii 1 dTi ( wi')∫ δ Λ⎢ =⎥⎣ ∫ ⎦iI ( wi'')2∫ ( wi')2dxdx45•Beam equation:•Transition stateOptimization: Algorithm (2)2( EI( w− w0)'') '' + τ w'' = fδ( x−L/ 2)w ( )t=Γ w0 x + Awn800600400Γ = (1 − ( τ / τ∆*= 1−ΓR*= =*2 −10) )( 1−Γ)∆2−∆ 2 −(1 −Γ)2( τ2 τ0)=2 − ( τ τ )2 02force200∫δ T = Eδ-2000iI ( wi'')2∫ ( wi')2dxdx-4000 0.5 1∆displacement *1.5 24623
Page 1 and 2: Electrostatic Zipping Actuators and
Page 3: F-D Curve of Three Electrostatic Ac
Page 6: Design: Compliant Starting Zone•T
Page 9 and 10: Forces: Actuator vs. Switch Beam•
Page 11 and 12: Contributions• Design: Starting z
Page 13 and 14: Fabrication: Process Flow (2)Starti
Page 15 and 16: Measurement: Pull_in of the Startin
Page 17 and 18: Switching Time• Contact bouncetim
Page 19 and 20: KOH-etched Relay Contacts: Experime
Page 21: Acknowledgements• Advisors: Prof.
Page 25: •Far from x = sy( x) B( x s)Analy

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