Thesis Defense Presentation

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DRIE-etched Relay Contacts• Relay contacts• Vertical sidewalls• Sputter Au: lowefficiency.• Sidewall/surfacethickness ratio = 1/9• Contact resistance:~1 Ω35KOH-etched Relay Contacts: Design3618
KOH-etched Relay Contacts: Experiments37KOH-etched Relay Contacts: Tests• Sputter Au: high efficiency.• Sidewall/surface thickness = 1/1.4• Very low contact resistance: ~ 50 mΩ3819
Page 1 and 2: Electrostatic Zipping Actuators and
Page 3: F-D Curve of Three Electrostatic Ac
Page 6: Design: Compliant Starting Zone•T
Page 9 and 10: Forces: Actuator vs. Switch Beam•
Page 11 and 12: Contributions• Design: Starting z
Page 13 and 14: Fabrication: Process Flow (2)Starti
Page 15 and 16: Measurement: Pull_in of the Startin
Page 17: Switching Time• Contact bouncetim
Page 21 and 22: Acknowledgements• Advisors: Prof.
Page 23 and 24: •Beam equation:( E I w'')''+ T w'
Page 25: •Far from x = sy( x) B( x s)Analy

Thesis Defense Presentation

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