Piezoelectrics in Positioning - PZT & Piezo Actuators: Sub ...
Piezoelectrics in Positioning - PZT & Piezo Actuators: Sub ...
Piezoelectrics in Positioning - PZT & Piezo Actuators: Sub ...
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<strong>Piezo</strong> • Nano • Position<strong>in</strong>g<strong>Piezo</strong> Actuator Electrical Fundamentals ..................................2-195Electrical Requirements for <strong>Piezo</strong> Operation ...............................2-195Static Operation ......................................................2-195Dynamic Operation (L<strong>in</strong>ear) ............................................2-196Dynamic Operat<strong>in</strong>g Current Coefficient (DOCC) ............................2-197Dynamic Operation (Switched) ..........................................2-197Heat Generation <strong>in</strong> a <strong>Piezo</strong> Actuator <strong>in</strong> Dynamic Operation ..................2-198Control of <strong>Piezo</strong> <strong>Actuators</strong> and Stages ...................................2-199Position Servo-Control ................................................2-199Open- and Closed-Loop Resolution ......................................2-200<strong>Piezo</strong> Metrology Protocol ..............................................2-200Methods to Improve <strong>Piezo</strong> Dynamics ....................................2-201InputShap<strong>in</strong>g ® .......................................................2-201Signal Preshap<strong>in</strong>g / Dynamic Digital L<strong>in</strong>earization (DDL) ....................2-202Dynamic Digital L<strong>in</strong>earization (DDL) .....................................2-203Environmental Conditions and Influences ................................2-204Temperature Effects ...................................................2-204L<strong>in</strong>ear Thermal Expansion .............................................2-204Temperature Dependency of the <strong>Piezo</strong> Effect ..............................2-204<strong>Piezo</strong> Operation <strong>in</strong> High Humidity .......................................2-204<strong>Piezo</strong> Operation <strong>in</strong> Inert Gas Atmospheres ................................2-205Vacuum Operation of <strong>Piezo</strong> <strong>Actuators</strong> ....................................2-205Lifetimeof<strong>Piezo</strong><strong>Actuators</strong> .............................................2-206L<strong>in</strong>ear <strong>Actuators</strong> & MotorsNanoposition<strong>in</strong>g / <strong><strong>Piezo</strong>electrics</strong><strong>Piezo</strong> Flexure Stages /High-Speed Scann<strong>in</strong>g SystemsL<strong>in</strong>earVertical & Tip/Tilt2- and 3-Axis6-AxisFast Steer<strong>in</strong>g Mirrors /Active Optics<strong>Piezo</strong> Drivers /Servo ControllersS<strong>in</strong>gle-ChannelMulti-ChannelModularAccessories<strong><strong>Piezo</strong>electrics</strong> <strong>in</strong> Position<strong>in</strong>gNanometrologyMicroposition<strong>in</strong>gIndexBasic Designs of <strong>Piezo</strong>electric Position<strong>in</strong>g Drives/Systems ..................2-207Stack Design (Translators) .............................................2-207Lam<strong>in</strong>ar Design (Contraction-Type <strong>Actuators</strong>) .............................2-207TubeDesign .........................................................2-208Bender Type <strong>Actuators</strong> (Bimorph and Multimorph Design) ..................2-209Shear <strong>Actuators</strong> ......................................................2-209<strong>Piezo</strong> <strong>Actuators</strong> with Integrated Lever Motion Amplifiers ....................2-210<strong>Piezo</strong> Flexure Nanopositioners ..........................................2-211Parallel and Serial K<strong>in</strong>ematics / Metrology ...............................2-212Direct and Indirect Metrology ..........................................2-212Parallel and Serial K<strong>in</strong>ematics ..........................................2-213PMN Compared to <strong>PZT</strong> ................................................2-214Electrostrictive<strong>Actuators</strong>(PMN) ........................................2-214Summary ...........................................................2-215Mount<strong>in</strong>g and Handl<strong>in</strong>g Guidel<strong>in</strong>es for <strong>Piezo</strong> Translators ...................2-216SymbolsandUnits ...................................................2-2172-173
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